Tensile tube joint for semiconductor device

Abstract

The utility model provides a tensile pipe joint for semiconductor equipment, which is characterized in that two ends of a connecting main body are reinforced, for example, one end of the connecting main body is provided with a pipeline and a clamping sleeve clamping groove; an outer joint is arranged at the other end of the connecting main body and is matched with a fastening joint for tightening; a pipeline, a clamping sleeve and a fastening connector are arranged on the outer wall of the connecting body in a layered mode in the pipeline connecting direction, the clamping sleeve is arranged on the pipeline wall and the connecting body which are sequentially arranged in the radial direction in a sleeving mode, an insertion wall is arranged at one end of the inner wall of the clamping sleeve, the other end of the inner wall of the clamping sleeve corresponds to the fastening connector, and the inner wall of the clamping sleeve is matched with the outer connector. The fastening joint is provided with a hollow hole; the second fastening threads on the inner wall of the fastening connector are matched with the first fastening threads on the outer wall of the clamping sleeve. Not only is tensile resistance provided for fixing the pipeline and is convenient to install, but also the extending size of the pipeline joint section is reduced; and the possibility that extra parts are introduced to increase internal fluid pollution is also avoided.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor manufacturing, in particular to a pull-resistant pipe joint for semiconductor equipment. BACKGROUND

[0002] The prior art of pipe connection, the common joint forms have flared joint and into the pearl joint. The traditional flared joint has the problem of insufficient pull resistance and cannot meet the production needs. The process of installing the pearl into the pearl joint needs special clamps to insert the pearl into the pipe, resulting in inconvenient installation.

[0003] And in the field of semiconductor manufacturing, the demand for disassembly of the joint connecting part is low, and the problem of easy disassembly of the joint is not considered in the joint design, only the convenience and durability of the first installation are required. The flared joint and the pearl joint of the prior art cannot realize the convenience and durability of the first installation of the joint of the semiconductor equipment, and also cannot guarantee the sealing property and avoid secondary pollution.

[0004] Therefore, it is necessary to develop a new pull-resistant pipe joint scheme for semiconductor equipment. CONTENT OF THE INVENTION

[0005] Therefore, the present application provides a pull-resistant pipe joint for semiconductor equipment.

[0006] The present application provides the following technical solutions:

[0007] The present application provides a pull-resistant pipe joint for semiconductor equipment, comprising:

[0008] The connecting body, the sleeve and the fastening joint;

[0009] One end of the outer wall of the connecting body is provided with a pipe and a sleeve clamping groove in the pipe connection direction;

[0010] The opening of the pipe and the sleeve clamping groove is arranged in the pipe connection direction;

[0011] The pipe and the sleeve clamping groove are used to position the pipe wall and the sleeve,

[0012] The other end of the connecting body is provided with an external joint, and the outer diameter of the external joint is greater than the inner diameter of the pipe;

[0013] The sleeve is arranged on the connecting body in the pipe connection direction, and the insertion gap of the pipe wall is arranged between the inner wall of the sleeve and the outer wall of the connecting body;

[0014] One end of the inner wall of the sleeve is provided with an insertion wall inserted into the pipe and the sleeve clamping groove, the insertion wall and the pipe and the sleeve clamping groove are used for fixing the sleeve; the pipe wall, the insertion wall and the pipe and the sleeve clamping groove are used for providing part of the connecting tension for fixing the pipe when the pipe is subjected to external force and the sleeve clamps the pipe.

[0015] The other end of the inner wall of the sleeve is matched with the external connector;

[0016] The other end of the inner wall of the sleeve is matched with the external connector;

[0017] The outer wall of the sleeve is provided with a first fastening thread matched with the fastening connector;

[0018] The fastening connector is arranged at the other end of the connecting body, and the fastening connector has a hollow hole,

[0019] The fastening connector is arranged at the other end of the connecting body, and the fastening connector has a hollow hole,

[0020] Compared with the prior art, the above-mentioned at least one technical scheme adopted by the embodiment of the present specification can achieve at least the following beneficial effects:

[0021] The present specification provides a kind of for semiconductor equipment's resistance pipe joint, by reinforcing setting in the both ends of connecting body, such as the pipe and the sleeve clamping groove of the outer wall of connecting body one end is arranged;The other end of the connecting body is provided with external connector, and is screwed with fastening connector;And along the pipe connection direction, pipe, sleeve and fastening connector are arranged in layers in the outer wall of connecting body, sleeve is arranged in sleeve wall and connecting body in radial sequence, one end of the inner wall of sleeve is provided with insertion wall, the other end of the inner wall of sleeve is matched with fastening connector, and is matched with external connector, the structure of the other end of the inner wall of sleeve is locked pipe;Fastening connector has hollow hole;The second fastening thread of the inner wall of fastening connector cooperates with the first fastening thread of the outer wall of sleeve.Not only provide the tensile strength for fixed pipe, facilitate installation, reduce the size of pipe joint segment extension;And good sealing, fastening connector is not easy to loosen, and the face of joint wetted by internal fluid is only composed of pipe and connected piece, does not introduce additional parts to increase the pollution possibility of internal fluid. BRIEF DESCRIPTION OF DRAWINGS

[0022] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed to be used in the embodiments will be briefly introduced as follows. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without any creative effort on the basis of these drawings.

[0023] Figure 1 is a structural schematic diagram of a pull-resistant pipe joint for a semiconductor device according to an embodiment of the present application;

[0024] Figure 2 is a sectional view of a connecting body in a pull-resistant pipe joint for a semiconductor device according to an embodiment of the present application;

[0025] Figure 3 is a perspective view of a connecting body in a pull-resistant pipe joint for a semiconductor device according to an embodiment of the present application;

[0026] Figure 4 is a sectional view of a clamping sleeve in a pull-resistant pipe joint for a semiconductor device according to an embodiment of the present application;

[0027] Figure 5 is a perspective view of a clamping sleeve in a pull-resistant pipe joint for a semiconductor device according to an embodiment of the present application;

[0028] Figure 6 is a sectional view of a fastening joint in a pull-resistant pipe joint for a semiconductor device according to an embodiment of the present application;

[0029] Figure 7 is a connecting schematic diagram of a pull-resistant pipe joint for a semiconductor device according to an embodiment of the present application.

[0030] In the drawings: 1, connecting body; 2, clamping sleeve; 3, fastening joint; 11, part of the body connected by the joint; 12, hollow part; 13, pipe clamping groove; 14, clamping sleeve clamping groove; 15, external joint; 16, enlarged pipe diameter; 17, positioning clamping groove; 21, insertion wall; 22, first sawtooth thread; 23, bending part; 24, positioning block; 31, hollow hole; 32, second sawtooth thread. DETAILED DESCRIPTION

[0031] The embodiments of the present application will be described in detail below with reference to the drawings.

[0032] The present application is illustrated by way of example and not limitation in the figures of the accompanying drawings in which like references indicate similar, but not necessarily identical, elements. Numerous details are described in sufficient detail to provide a comprehensive understanding, however, it will be apparent to one of ordinary skill in the art that the application can be practiced without these details. Well-known structures have not been described in detail so as not to obscure the application. This description incorporates by reference the entire disclosure of the references listed in the referenced section and any pending patent applications designated in the referenced section as being incorporated herein by reference in their entirety.

[0033] It is to be understood that the foregoing description is that of certain examples of the application and that numerous changes in the details of construction and the combination and arrangement of parts can be made by those skilled in the art without departing from the scope of the application.

[0034] It is also to be understood that the following description is only illustrative of the aspects of the application and that numerous modifications can be made by those skilled in the art without departing from the scope of the application.

[0035] In addition, in the following description, numerous specific details are provided for a thorough understanding of examples. One skilled in the relevant art will recognize, however, that the application can be practiced without one or more of these specific details, in some instances, well-known structures have not been described in detail in order to avoid unnecessarily obscuring this description.

[0036] In semiconductor devices, the joint is a connecting part which is less required to be disassembled, and the joint design does not need to consider the problem of easy disassembly for multiple times, only needs to ensure the convenience of the first installation and the durability, etc.

[0037] However, in the prior art such as pipe connection, the common joint forms are flared joint and entry bead joint. The traditional flared joint has the problem of insufficient tensile resistance, which cannot meet the production needs; the entry bead joint needs a special clamp to insert the entry bead into the pipe, which causes inconvenience in installation.

[0038] Based on this, the embodiment of the present specification proposes a new scheme of a pull-resistant pipe joint for semiconductor equipment. The two ends of the connecting body are reinforced, such as the pipe and the sleeve slot on one end of the outer wall of the connecting body. The other end of the connecting body is provided with an external connector, which is tightened with the fastening connector. The pipe, sleeve and fastening connector are arranged in layers along the pipe connection direction on the outer wall of the connecting body. The sleeve is sleeved on the pipe wall and the connecting body arranged in the radial direction. The one end of the inner wall of the sleeve is provided with an insertion wall. The other end of the inner wall of the sleeve corresponds to the fastening connector, and the inner wall of the sleeve is matched with the external connector. The other end of the inner wall of the sleeve is provided with a structure for locking the pipe. The fastening connector has a hollow hole. The second fastening thread on the inner wall of the fastening connector is matched with the first fastening thread on the outer wall of the sleeve. To fix the pipe and provide resistance to tension, it is not only convenient to install, but also reduces the size of the pipe joint segment. Because the surface of the joint wetted by the internal fluid is only composed of the pipe and the connected part, the possibility of pollution of the internal fluid by additional parts is avoided.

[0039] The technical solutions provided by the embodiments of the present application are described below with reference to the drawings.

[0040] As shown in Figures 1-7 The embodiment of the present specification provides a pull-resistant pipe joint for semiconductor equipment, which comprises a connecting body 1, a sleeve 2 and a fastening connector 3. The connecting body 1 is a connecting part connected to the pipe on the connected part. 11 represents the part of the body connected to the joint. The sleeve 2 provides part of the force to fix the pipe and provides part of the resistance to tension for the joint, and assists the pipe to enter during installation. The fastening connector 3 is matched with the sleeve 2 to fasten the other end of the connecting body 1.

[0041] Specifically, one end of the connecting body 1 is provided with a fastening structure, such as a pipe and a sleeve slot, which is not only used for positioning, but also provides part of the connection tension for pipe fixation when the pipe is subjected to external force.

[0042] That is, the pipe wall positioned in the pipe and the sleeve slot, the insertion wall 21 and the pipe and the sleeve slot are used to provide part of the connection tension for pipe fixation when the pipe is subjected to external force and the sleeve 2 clamps the pipe.

[0043] In particular, the pipe outer wall and the inner wall of the sleeve 2 are used to provide another part of the connection tension for pipe fixation when the pipe is subjected to external force and the sleeve 2 clamps the pipe.

[0044] The other end of the connecting body 1 is provided with an external connector 15, which is protrudingly arranged compared to the outer wall of the connecting body 1, and the outer diameter of the external connector 15 is greater than the inner diameter of the pipe;

[0045] The other end of the inner wall of the sleeve 2 is matched with the external connector 15, such as the bending part 23;

[0046] The outer wall of the sleeve 2 is provided with a matched fastening joint 3, and one end of the fastening joint 3 is close to an outer joint 15, and the outer wall of the other end of the outer joint 15 corresponds to the other end of the inner wall of the sleeve 2, and the other end of the inner wall of the sleeve 2 is provided as a bending part 23, and the bending part 23 is used to accommodate the pipe wall between the bending part 23 and the outer joint 15, so that the pipe wall is locked by the shape of the bending part 23 and the sleeve 2 during pipe insertion.

[0047] Or, as shown in Figure 2 and Figure 4 , the outer joint 15 is provided protrudingly compared to the outer wall of the connecting body 1, and the outer wall of the other end of the outer joint 15 corresponds to the other end of the inner wall of the sleeve 2, and the other end of the inner wall of the sleeve 2 is provided as a bending part 23, and the bending part 23 is used to accommodate the pipe wall between the bending part 23 and the outer joint 15, so that the pipe wall is locked by the shape of the bending part 23 and the sleeve 2 during pipe insertion.

[0048] The bending part 23 is arranged at an angle relative to the pipe, and the angle is greater than 0° and less than or equal to 80°, so as to cooperate with the protruding arrangement of the outer joint 15, so that the pipe wall is locked by the shape of the bending part 23 and the sleeve 2 during pipe insertion.

[0049] Optionally, if the arc shape arranged at one end of the outer joint is connected to the continuous convex curved arc shape or the continuous convex trapezoidal shape arranged at the other end of the outer joint, correspondingly, the shape of the bending part can be adaptively arranged as a continuous concave curved arc shape or a continuous concave trapezoidal shape, etc.

[0050] The fastening joint 3 is arranged at the other end of the connecting body 1, and has a hollow hole 31,

[0051] The fastening joint 3 is arranged on the sleeve 2 in the pipe connection direction, and the sleeve 2 is arranged on the connecting body 1, and is arranged in layers in the pipe connection direction, and the fastening joint 3 is used to realize sealed connection of the pipe wrapping the outer joint 15 during tightening, and the sleeve 2 cooperates with the outer joint 15 to provide connection tension for pipe fixation by the structure of the sleeve 2 clamping the pipe or the other end of the sleeve 2 locking the pipe when the pipe is subjected to external force.

[0052] It should be noted that in some embodiments, the pipe and the sleeve clamping groove can be separately arranged as a pipe clamping groove and a sleeve clamping groove. The embodiments of the present application are exemplified by separately arranging the pipe clamping groove and the sleeve clamping groove.

[0053] As shown in Figure 1 and Figure 2 , in the pipe connection direction, the hollow part 12 of the connecting body 1 is matched with the corresponding pipe of the connected part. The hollow part 12 is used to reduce the influence of the joint on the flow, and the diameter is consistent with the inner diameter of the connected pipe.

[0054] The left end of the outer wall of the connecting body 1 is provided with a pipe clamping groove 13 and a clamping sleeve clamping groove 14.

[0055] Some embodiments such as Figure 1 As shown, the pipe clamping groove 13 and the clamping sleeve clamping groove 14 on the outer wall of the connecting body 1 are arranged in sequence along the direction of the outer diameter of the pipe. The respective openings of the pipe clamping groove 13 and the clamping sleeve clamping groove 14 are arranged along the pipe connection direction.

[0056] The pipe clamping groove 13 is used to fix the pipe wall, and the clamping sleeve clamping groove 14 is used to fix the clamping sleeve 2 to realize the connection with the clamping sleeve 2.

[0057] The right end of the connecting body 1 is provided with an external connector 15, as Figure 2 As shown, the external connector 15 is protrudingly arranged compared to the outer wall of the connecting body 1. As Figure 7 As shown, the outer diameter of the external connector 15 is greater than the inner diameter of the pipe.

[0058] The clamping sleeve 2 is sleeved on the connecting body 1 along the pipe connection direction, and an insertion gap for the pipe wall is arranged between the inner wall of the clamping sleeve 2 and the outer wall of the connecting body 1.

[0059] The pipe clamping groove 13 is arranged between the connecting body 1 and the clamping sleeve 2, and the gap between the connecting body 1 and the clamping sleeve 2 is the insertion gap for the pipe wall, and the width thereof is at least set as the thickness of the pipe, so as to guide the pipe to wrap the external connector 15 when inserted.

[0060] The left end of the inner wall of the clamping sleeve 2 is provided with an insertion wall 21 matched with the outer wall of the connecting body 1, i.e. inserted into the clamping sleeve clamping groove 14 at the left end of the outer wall of the connecting body 1.

[0061] That is, as Figure 4 As shown, the left end of the inner wall of the clamping sleeve 2 is provided with an insertion wall 21 matched with the clamping sleeve clamping groove 14.

[0062] As Figure 1 and Figure 4 As shown, the insertion wall 21 is used to insert the clamping sleeve clamping groove 14, so as to realize the center positioning of the clamping sleeve 2 and the connecting body 1.

[0063] As Figure 1 and Figure 7 As shown, the positioned pipe wall, the insertion wall 21 and the pipe and the clamping sleeve clamping groove 14 are further used to provide partial connection tension for pipe fixation when the pipe is subjected to external force and the clamping sleeve 2 is clamped. In particular, the outer wall of the pipe and the inner wall of the clamping sleeve 2 are used to provide partial connection tension for pipe fixation when the pipe is subjected to external force and the clamping sleeve is clamped.

[0064] The right end of the inner wall of the clamping sleeve 2 is matched with the external connector 15, as Figure 4The bending part 23 is shown. The bending part 23 and the outer joint 15 are used to accommodate the pipe wall, so that the pipe wall is locked with the sleeve 2 by increasing the contact area with the shape of the bending part 23 during the pipe insertion process.

[0065] The outer wall of the sleeve is provided with a first fastening thread matched with the fastening joint, such as the first sawtooth thread 22, which conforms to the national standard GB / T 13576.1. The sawtooth thread is selected to make the fastening joint difficult to loosen when subjected to tension.

[0066] The fastening joint 3 is arranged at the right end of the connecting body 1, and the fastening joint 3 has a hollow hole 31.

[0067] The fastening joint 3 is sleeved on the sleeve 2, and the fastening joint 3 is internally provided with a second fastening thread matched with the first fastening thread 22, such as the second sawtooth thread 32.

[0068] That is, the inner wall of the fastening joint 3 is provided with the second sawtooth thread 32 matched with the first fastening thread such as the first sawtooth thread 22, and the second sawtooth thread 32 conforms to the national standard GB / T 13576.1.

[0069] As shown in Figure 6 and Figure 7 The diameter of the hollow hole 31 matches the outer diameter of the pipe.

[0070] The fastening joint 3 is used to wrap the pipe around the outer joint 15 to achieve sealed connection during the tightening process.

[0071] That is, when the fastening joint 3 is tightened, the fastening joint 3 and the outer joint 15 press the pipe to achieve the sealing of the joint.

[0072] After the pipe is inserted, the sleeve 2 is subjected to the outward force, and the sleeve clamping groove 14 is subjected to the inward force, so as to achieve fixation.

[0073] The pipe is subjected to the action of the sleeve 2 and the outer joint 15, and has good tensile resistance.

[0074] In other words, the pipe passes through the hollow hole 31 of the fastening joint 3, and extends to the connecting body 1 through the sleeve 2. After the insertion end of the pipe is inserted into the pipe clamping groove 13 and the insertion wall 21 of the sleeve 2 is inserted into the sleeve clamping groove 14, the pipe in the insertion gap is wrapped around the protruding outer joint 15 to achieve a sealed connection during the tightening of the fastening joint 3 and the sleeve 2. At the same time, the insertion end of the pipe is positioned to provide the first part of the connection tension for fixing the pipe. The outer wall of the pipe and the inner wall of the sleeve 2 provide the second part of the connection tension for fixing the pipe when the pipe is subjected to external force. Corresponding to the outer joint 15, the other end of the inner wall of the sleeve 2 is provided with a bent portion 23 for locking the pipe. The bent portion 23 cooperates with the outer joint 15 to provide the third part of the connection tension for fixing the pipe when the pipe is subjected to external force. That is, the bent portion 23 and the outer joint 15 are used to accommodate the pipe wall to increase the contact area between the pipe and the sleeve during the insertion of the pipe. The second fastening thread of the fastening joint cooperates with the first fastening thread of the sleeve to make it difficult to loosen.

[0075] In some embodiments, the sleeve is also used to wrap the pipe around the connecting body during the installation of the pipe into the insertion gap. The sleeve is used to assist the insertion of the insertion end of the pipe into the pipe and sleeve clamping grooves, or into the pipe clamping groove. That is, the sleeve assists the insertion of the insertion end of the pipe into the pipe and sleeve clamping grooves during the installation of the tensile-resistant pipe joint for semiconductor equipment, thereby facilitating the installation.

[0076] Or, as shown in Figure 1 and Figure 2 , the outer joint 15 is provided with a smooth arc surface near the outer wall of one end of the fastening joint 3. The inner diameter of one end of the outer joint 15 is provided with an enlarged pipe diameter 16, which is slightly larger than the inner diameter of the connecting body 1, and is used to offset the pressure during the tightening of the fastening joint 3 to avoid inward deformation.

[0077] In some embodiments, the first fastening thread or the second fastening thread is a sawtooth thread.

[0078] In combination with the foregoing embodiments, the first sawtooth thread 22 and the matching second sawtooth thread 32 both comply with the national standard GB / T 13576.1. The sawtooth thread is selected to make it difficult to loosen when the fastening joint is subjected to tension.

[0079] In combination with the foregoing embodiments, the pipe and sleeve clamping grooves are provided as two pipe clamping grooves 13 and sleeve clamping grooves 14 arranged in sequence in the outward direction of the outer wall of the connecting body 1. The pipe clamping groove 13 is used to position the pipe wall and to provide part of the connection tension for fixing the pipe when the pipe is subjected to external force. The sleeve clamping groove 14 is used to position the sleeve 2. The width of the pipe clamping groove 13 is 1-1.1 times the thickness of the pipe.

[0080] Correspondingly, if the pipe and the sleeve slot are provided as one slot, the width of the slot is set to be equal to the width of the sleeve insertion wall and 1-1.1 times the thickness of the pipe.

[0081] In some embodiments, the inner diameter of the hollow portion of the connecting body is consistent with the inner diameter of the pipe, and the diameter of the hollow hole of the fastening joint is equal to the diameter of the outer wall of the pipe.

[0082] As shown in Figure 1 , Figure 6 , Figure 7 , the inner diameter of the hollow portion 12 of the connecting body 1 is consistent with the inner diameter of the pipe, and the diameter of the hollow hole 31 of the fastening joint 3 is equal to the diameter of the outer wall of the pipe.

[0083] In some embodiments, a positioning block is provided on the outer wall of the sleeve along the extension direction of the pipe, and one end of the outer wall of the connecting body is further provided with a positioning slot, and the positioning block and the positioning slot are matched to form positioning during the tightening of the fastening joint.

[0084] In some embodiments such as Figure 3 and Figure 5 , a positioning block 24 is provided on the outer wall of the sleeve 2 along the extension direction of the pipe, and one end of the outer wall of the connecting body 1 is further provided with a positioning slot 17, and the positioning block 24 and the positioning slot 17 are matched to form positioning during the tightening of the fastening joint 3.

[0085] The positioning slot 17 is a positioning slot for preventing the sleeve 2 from rotating when the fastening joint 3 is screwed in. The positioning block 24 and the positioning slot 17 are matched to form positioning.

[0086] In some embodiments such as Figure 2 and 4 , the inner diameter of the bending portion 2h and the outer diameter of the outer joint 2H are combined Figure 1 and Figure 7 , the inner diameter of the bending portion is equal to two pipe thicknesses plus the outer diameter of the outer joint. That is, 2h=2H+2 pipe thicknesses.

[0087] It should be noted that each part of the bending portion is provided to be consistent with the inner diameter of the bending portion being equal to two pipe thicknesses plus the outer diameter of the outer joint.

[0088] In some embodiments, the width of the insertion gap is equal to the thickness of the pipe.

[0089] In some embodiments, the connecting body, the sleeve, and the fastening joint are made of fusible polytetrafluoroethylene (i.e., PFA plastic, Polyfluoroalkoxy).

[0090] In combination with the above embodiments, the present specification also provides a method for installing a pull-resistant pipe joint for a semiconductor device, comprising: inserting a pipe through a sleeve and into a hollow hole of a fastening joint;

[0091] inserting the insertion wall of the sleeve into the pipe and the sleeve slot of the connecting body along the insertion end of the pipe by extending the pipe a preset distance;

[0092] softening the end of the insertion end of the pipe and expanding the inner diameter of the pipe at the flared end to a preset value using a flaring tool, wherein the preset value is the sum of the thickness of the outer joint and the inner diameter of the pipe;

[0093] inserting the softened pipe wrapped around the outer joint into the pipe and the sleeve slot of the connecting body that cooperate with the sleeve;

[0094] tightening the fastening joint and waiting for it to cool to complete the connection of the pipe.

[0095] It should be noted that in some embodiments, the pipe and the sleeve slot can be separately provided as a pipe slot and a sleeve slot. The embodiments of the present application are exemplified by separately providing a pipe slot and a sleeve slot.

[0096] Specifically, Figures 1-7 For example, the installation process of the joint is as follows:

[0097] S1, the pipe is inserted through the sleeve 2 and into the hollow hole 31 of the fastening joint 3.

[0098] S2, the insertion wall 21 is inserted into the sleeve slot 14.

[0099] S3, the end of the pipe is heated to soften it, and the inner diameter of the pipe at the flared end is expanded to H using a flaring tool, i.e., the pipe diameter 16 is enlarged.

[0100] S4, the softened pipe is inserted into the pipe slot formed by the sleeve 2 and the connecting body 1 (i.e., the insertion gap between the connecting body 1 and the sleeve 2, with a gap of the thickness of the pipe).

[0101] S5, the fastening joint 3 is tightened and allowed to cool.

[0102] In this way, not only is the insertion end of the pipe inserted into the insertion gap between the connecting body 1 and the sleeve 2, but also the bent portion 23 at the other end of the inner wall of the sleeve 2 cooperates with the outer joint 15 of the connecting body 1 to increase the contact surface between the pipe wall and the sleeve 2 during the pipe insertion process, thereby achieving locking and reinforcing the two ends of the pipe connection.

[0103] In some embodiments, the positioning block 24 is inserted into the positioning slot 17, which not only achieves the positioning of the sleeve and the connecting body, but also improves the tensile strength of the joint.

[0104] The embodiment of the present specification is used for the pull-resistant pipe joint of the semiconductor equipment, the pipe is clamped by setting the sleeve matched with the connecting body, the fastening joint and the sawtooth thread, which not only provides the pull-resistant force for fixing the pipe and reduces the size of the pipe joint segment, but also has good sealing performance and the fastening joint is not easy to be loosened; in addition, the surface of the joint wetted by the internal fluid is only composed of the pipe and the connected part, which does not introduce the additional parts to increase the pollution possibility of the internal fluid.

[0105] The same and similar parts among the various embodiments in the present specification can be referred to each other, and each embodiment focuses on the difference from other embodiments. Especially, for the product embodiment described later, since it is corresponding to the method, the description is simple, and the related parts can be referred to the part of the system embodiment.

[0106] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited to this. Any skilled person in the art can easily think of changes or replacements within the technical range disclosed in the present application, which should be covered in the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A pull resistant tube joint for a semiconductor apparatus, characterized by, The utility model relates to a pipe joint for semiconductor equipment, including: Connecting body, sleeve and fastening joint; One end of the connecting body is provided with a pipe and a sleeve clamping groove in the pipe connecting direction; The opening of the pipe and the sleeve clamping groove is arranged in the pipe connecting direction; the pipe and the sleeve clamping groove are used for positioning the pipe wall and the sleeve; The other end of the connecting body is provided with an external joint, and the outer diameter of the external joint is greater than the inner diameter of the pipe; The sleeve is sleeved on the connecting body in the pipe connecting direction, and an insertion gap of the pipe wall is arranged between the inner wall of the sleeve and the outer wall of the connecting body; One end of the inner wall of the sleeve is provided with an insertion wall inserted into the pipe and the sleeve clamping groove, and the insertion wall and the pipe and the sleeve clamping groove are used for fixing the sleeve; the pipe wall, the insertion wall and the pipe and the sleeve clamping groove are used for providing part of the connecting tension for pipe fixation when the pipe is subjected to external force and the sleeve clamps the pipe; The other end of the inner wall of the sleeve is matched with the external joint; The outer wall of the other end of the external joint corresponds to the other end of the inner wall of the sleeve; the other end of the inner wall of the sleeve is provided as a bending part, and the bending part and the external joint are used for accommodating the pipe wall to increase the contact area between the pipe wall and the sleeve during pipe insertion to lock; The outer wall of the sleeve is provided with a first fastening thread matched with the fastening joint; The fastening joint is arranged at the other end of the connecting body, and the fastening joint has a hollow hole; the fastening joint is sleeved on the sleeve, and the inner wall of the fastening joint is provided with a second fastening thread matched with the first fastening thread.

2. The pipe joint for semiconductor equipment according to claim 1, wherein The sleeve is also used for sleeving the pipe on the connecting body, and the pipe wall is inserted into the pipe and the sleeve clamping groove during the installation into the insertion gap to assist the insertion of the insertion end of the pipe; Or, the outer wall of the one end of the external joint close to the fastening joint is provided as a smooth arc surface, and the inner wall of the one end of the external joint is provided as an enlarged pipe diameter to offset the pressure during the tightening of the fastening joint and avoid inward deformation.

3. The pull resistant tube joint for semiconductor equipment according to claim 1, wherein The first fastening thread or the second fastening thread is a zigzag thread.

4. The pull resistant tube joint for semiconductor equipment according to claim 1, wherein The pipe and the sleeve clamping groove are provided as two pipe clamping grooves and sleeve clamping grooves arranged in sequence in the outward direction of the outer wall of the connecting body; the pipe clamping groove is used for positioning the pipe wall and also used for providing part of the connecting tension for pipe fixation when the pipe is subjected to external force; The sleeve clamping groove is used for positioning the sleeve.

5. The pipe joint for semiconductor equipment according to claim 4, wherein The width of the pipe clamping groove is 1-1.1 times the thickness of the pipe.

6. The pull resistant tube joint for semiconductor equipment according to claim 1, wherein The inner diameter of the hollow part of the connecting body is consistent with the inner diameter of the pipe; and the inner diameter of the hollow hole of the fastening joint matches the outer diameter of the pipe.

7. The pull resistant tube joint for semiconductor equipment according to claim 1, wherein The outer wall of the sleeve is provided with a positioning block in the pipe extending direction, and one end of the outer wall of the connecting body is also provided with a positioning clamping groove; the positioning block and the positioning clamping groove are matched to form positioning during the tightening of the fastening joint.

8. The pull resistant tube joint for semiconductor equipment according to claim 1, wherein The inner diameter of the bending part is consistent with the sum of the outer diameter of the external joint and the thickness of the two pipe walls. The width of the insertion slit is the thickness of the pipe wall.

9. The pull resistant tube joint for semiconductor equipment according to claim 1, wherein, The connecting body, the sleeve and the fastening joint are made of fusible polytetrafluoroethylene.

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