Step profiler platform deck leveling device and step profiler
By setting up pitch and yaw adjustment structures on the platform of the step meter, and using ball pins and guide ramps to achieve precise adjustment of the platform, the problem of insufficient leveling efficiency and accuracy in the existing technology is solved, and efficient and precise platform leveling is achieved.
Patent Information
- Application Number
- CN202520446660.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-14
- Publication Date
- 2025-12-16
- Estimated Expiration
- 2035-03-14
AI Technical Summary
In existing technologies, the leveling of the platform of the step instrument fails to effectively balance accuracy and efficiency, especially since the pitch and yaw adjustments are not finely adjusted separately.
The step meter platform leveling device includes a pitch adjustment structure and a yaw adjustment structure. The pitch angle of the platform is adjusted by ball pin and guide ramp, and the yaw angle is adjusted by ball pin and waist-shaped conical hole. The reset function is achieved by using elastic element.
It achieves efficient and precise leveling of the platform, taking into account both the accuracy and efficiency of pitch and yaw adjustment, thus improving measurement accuracy and ease of operation.
Smart Images
Figure CN223677455U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor measurement technology, and in particular to a leveling device for a step meter platform and a step meter. Background Technology
[0002] A profilometer is an ultra-precision contact-type microscopic profile measurement instrument that can acquire comprehensive information on the surface profile morphology, roughness, waviness, shape error, and other morphological characteristics of test samples such as wafers. The measurement principle of the profilometer is as follows: a probe acts perpendicularly to the test sample. As the probe gently slides along the surface, the tiny peaks and valleys on the surface cause the probe to move up and down along these peaks and valleys while sliding. This up-and-down movement of the probe reflects the surface profile of the test sample. Therefore, it is essential to ensure that the probe remains perpendicular to the test sample during the measurement process; that is, the probe needs to be perpendicular to the stage on which the test sample is placed. Thus, the stage needs to be leveled before measurement.
[0003] Leveling of the platform is divided into two directions: leveling along the direction of platform movement, which adjusts the platform's pitch; and leveling perpendicular to the direction of platform movement, which adjusts the platform's yaw. Based on the measurement principle of the step meter, it is known that the pitch adjustment of the platform requires higher precision, while the precision requirement for yaw is relatively lower. Current technologies do not differentiate between the two directions of platform leveling; most methods involve simultaneous coarse or fine adjustments in both directions, failing to balance the requirements for both leveling precision and efficiency. Utility Model Content
[0004] The purpose of this utility model is to provide a leveling device for a step meter platform and a step meter. The leveling device can finely adjust the pitch of the platform and coarsely adjust the sway of the platform to ensure the levelness of the platform, taking into account both the accuracy and efficiency of leveling.
[0005] To achieve this objective, the present invention adopts the following technical solution:
[0006] On the one hand, a leveling device for a step meter platform is provided, comprising:
[0007] A movable platform, and an adjustment platform, a pitch adjustment structure, and a yaw adjustment structure mounted on the movable platform;
[0008] The adjustment platform and the carrier platform are provided with a first ball head pin protruding from one of them, and a conical hole is provided on the other. The ball head end of the first ball head pin abuts against the conical hole. The carrier platform is rotatably mounted on the adjustment platform around the first ball head pin.
[0009] The pitch adjusting structure is spaced apart from the first ball head pin along a first horizontal direction, and comprises a sliding block and a second ball head pin. The sliding block is slidably arranged on the adjusting table along the first horizontal direction. A guiding slope is arranged on a side of the sliding block facing the table. The ball head end of the second ball head pin abuts on the guiding slope, and the other end is clamped on the table. The sliding block is pushed to drive the second ball head pin to move along the guiding slope, thereby driving the table to rotate around the first ball head pin, so as to realize the pitch angle adjustment of the table along the first horizontal direction.
[0010] The yaw adjusting structure is spaced apart from the first ball head pin along a second horizontal direction, and comprises a third ball head pin. The third ball head pin is adjustably arranged on the adjusting table along a vertical direction. A waist-shaped taper hole is arranged on a side of the table facing the adjusting table. The ball head end of the third ball head pin abuts in the waist-shaped taper hole.
[0011] The first horizontal direction is perpendicular to the second horizontal direction.
[0012] As an optional solution of the step instrument table leveling device, the pitch adjusting structure further comprises a pushing piece. The pushing piece abuts on the sliding block and can push the sliding block to move back and forth along the first horizontal direction.
[0013] As an optional solution of the step instrument table leveling device, a connecting hole is arranged on the adjusting table. The pushing piece is screwed in the connecting hole.
[0014] As an optional solution of the step instrument table leveling device, a first mounting groove is arranged on the adjusting table. A guide rail is arranged on one of the sliding blocks and the side wall of the first mounting groove. A sliding groove is arranged on the other one in sliding cooperation with the guide rail.
[0015] As an optional solution of the step instrument table leveling device, the step instrument table leveling device further comprises a pitch reset structure. The pitch reset structure comprises:
[0016] A first elastic member extends along a vertical direction. Two ends of the first elastic member are connected to the adjusting table and the table respectively.
[0017] When the sliding block is pushed and the second ball head pin drives the table to rotate around the first ball head pin, the first elastic member is deformed.
[0018] After the force applied to the sliding block is removed, the table can be reset under the elastic force generated by the deformation of the first elastic member.
[0019] As an optional solution of the step instrument table leveling device, the pitch reset structure further comprises a second elastic member extending along the first horizontal direction. Two ends of the second elastic member are connected to the sliding block and the adjusting table respectively.
[0020] When the slider is pushed and the second ball pin drives the carrier to rotate around the first ball pin, the second elastic member is compressed and deformed;
[0021] After the force on the slider is removed, the slider can be pushed back to the original position under the elastic force generated by the deformation of the second elastic member, thereby driving the carrier to return to the original position.
[0022] As an optional solution of the step instrument carrier leveling device, the step instrument carrier leveling device further comprises a yaw reset structure, the yaw reset structure comprising a third elastic member extending in the vertical direction, both ends of the third elastic member being connected to the adjusting table and the carrier respectively;
[0023] When the third ball pin is moved and the third ball pin drives the carrier to rotate around the first ball pin, the third elastic member is deformed;
[0024] After the force on the third ball pin is removed, the carrier can be driven to return to the original position under the elastic force generated by the deformation of the third elastic member.
[0025] As an optional solution of the step instrument carrier leveling device, the third ball pin is provided with an operating part at the end away from the carrier.
[0026] On the other hand, a step instrument is provided, comprising:
[0027] The step instrument carrier leveling device of any of the above;
[0028] A carrier is rotatably arranged on the adjusting table, and the carrier is configured to place a sample to be detected;
[0029] A probe is arranged above the carrier in a spaced manner and is movably abutted on the surface of the sample in the vertical direction.
[0030] The step instrument carrier leveling device has the following advantages:
[0031] The step instrument carrier leveling device provided by the utility model can drive the carrier to rotate around the first ball pin by moving the third ball pin in the vertical direction, so that the yaw angle adjustment of the carrier in the second horizontal direction is realized, the yaw precision requirement is low, the yaw adjustment requirement can be realized only by the third ball pin, and the efficiency is higher. The slider is pushed in the first horizontal direction, the second ball pin is slid along the guide slope of the slider, the carrier is driven to rotate around the first ball pin, the carrier realizes the pitch angle adjustment in the first horizontal direction, the distance of the slider movement is P, the slope of the guide slope is N, and the distance of the carrier movement in the vertical direction is N*P, so that the pitch angle of the carrier is accurately adjusted, and the precision and efficiency of the leveling are considered by the two different adjustment structures. BRIEF DESCRIPTION OF DRAWINGS
[0032] Figure 1 is the overall structure schematic view of the step instrument carrier platform leveling device provided by the embodiment of the utility model specific implementation mode;
[0033] Figure 2 is the top view of the step instrument carrier platform leveling device provided by the embodiment of the utility model specific implementation mode;
[0034] Figure 3 is the section view of A-A position in Figure 2
[0035] Figure 4 is the section view of B-B position in Figure 2
[0036] Figure 5 is the top view of the step instrument carrier platform leveling device provided by the embodiment of the utility model specific implementation mode;
[0037] Figure 6 is the section view of C-C position in Figure 5
[0038] Figure 7 is the section view of D-D position in Figure 5
[0039] in the figure:
[0040] 100, carrier platform;101, conical hole;102, waist type conical hole;200, sample;300, probe;
[0041] 1, mobile station;
[0042] 2, adjusting platform;20, first ball head pin;21, connecting hole;22, first installation slot;221, sliding groove;23, fixed slot;24, second installation slot;
[0043] 3, pitch adjusting structure;31, sliding block;310, guide inclined surface;311, guide rail;32, second ball head pin;33, pusher;
[0044] 4, yaw adjusting structure;41, third ball head pin;42, operation part;
[0045] 5, pitch reset structure;51, first elastic member;52, second elastic member;53, first fixed pin;
[0046] 6, yaw reset structure;61, third elastic member;62, second fixed pin. Specific implementation
[0047] The utility model will be described in further detail below in combination with the drawings and embodiments. It can be understood that the specific embodiments described herein are merely intended to explain the utility model and not to limit the utility model. In addition, it should be noted that only the parts related to the utility model are shown in the drawings for ease of description, not all the structures.
[0048] In the description of the utility model, unless explicitly defined and limited, the terms "connected", "connected", "fixed" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication between two elements or the interaction relationship between two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.
[0049] In the utility model, unless explicitly defined and limited, the first feature "on" or "below" the second feature can include that the first and second features are in direct contact, or the first and second features are not in direct contact but are in contact through another feature between them. Moreover, the first feature "on", "above" and "above" the second feature includes that the first feature is directly above and obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "below" and "below" the second feature includes that the first feature is directly below and obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.
[0050] In the description of the embodiment, the terms "up", "down", "right" and other orientation or position relationship are based on the orientation or position relationship shown in the drawings, only for the convenience of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, therefore cannot be understood as a limitation on the utility model. In addition, the terms "first", "second" are only used to distinguish in description and have no special meaning.
[0051] The technical scheme of the utility model will be further illustrated below in combination with the drawings and through specific embodiments.
[0052] As shown in Figure 1 The utility model provides a step appearance carrier platform leveling device, including moving table 1, adjusting table 2, pitch adjusting structure 3 and deflection adjusting structure 4. Wherein, moving table 1 is movably arranged on the work platform, adjusting table 2 is arranged on moving table 1, carrier platform 100 is rotatably installed on adjusting table 2, the sample 200 to be detected is placed on carrier platform 100, and the level gauge (not shown in the drawing) is arranged on carrier platform 100 to judge whether carrier platform 100 is horizontal.
[0053] Specifically, the embodiment provides a mounting mode of the rotatable carrier, please refer to Figure 3 , the first ball pin 20 is protruded on one of the adjustment table 2 and the carrier 100, and the tapered hole 101 is formed on the other, the ball head end of the first ball pin 20 is abutted in the tapered hole 101, and the carrier 100 is rotatably arranged on the adjustment table 2 around the first ball pin 20.
[0054] The pitch adjustment structure 3 is used for adjusting the levelness of the carrier 100 along the first horizontal direction, and the specific structure and mounting mode in the embodiment are that the pitch adjustment structure 3 is arranged along the first horizontal direction and spaced apart from the first ball pin 20, and the pitch adjustment structure 3 comprises the sliding block 31 and the second ball pin 32, the sliding block 31 is slidably arranged on the adjustment table 2 along the first horizontal direction, the side of the sliding block 31 facing the carrier 100 is provided with the guide inclined surface 310, the ball head end of the second ball pin 32 is abutted on the guide inclined surface 310, and the other end is clamped on the carrier 100. The sliding block 31 is pushed along the first horizontal direction, so that the second ball pin 32 drives the carrier 100 to rotate around the first ball pin 20, so that the carrier 100 realizes the pitch angle adjustment along the first horizontal direction. The slope of the guide inclined surface 310 is N, the distance P that the sliding block 31 is movable along the first horizontal direction, and then the moving distance of the second ball pin 32 along the vertical direction is N×P. For example, if the slope of the guide inclined surface is 1:100, the tapered block is moved 1mm along the first horizontal direction, so that the second ball pin 32 drives the carrier 100 to move 0.01mm along the vertical direction. Therefore, the above setting can realize the accurate adjustment of the pitch angle of the carrier 100.
[0055] Preferably, as shown in Figure 3 , the pitch adjustment structure 3 can further comprise the pushing piece 33, the pushing piece 33 is adjustably arranged on the adjustment table 2 along the first horizontal direction and abuts on the sliding block 31. The setting of the pushing piece 33 can facilitate the pushing of the sliding block 31 and improve the convenience of the pitch angle adjustment.
[0056] Further, continuing to refer to Figure 3 , the embodiment provides a possible mounting mode of the pushing piece 33, the connection hole 21 is formed on the adjustment table 2, and the pushing piece 33 is screwed in the connection hole 21. When the pushing piece 33 is screwed, the sliding block 31 can be pushed to slide, the operation is more convenient and convenient, the stability of the pushing piece 33 can be improved, and the pushing piece 33 can be prevented from slipping off from the adjustment table 2 under external disturbance. Specifically, the connection hole 21 is a threaded hole, the pushing piece 33 is provided with threads on the outer peripheral wall, or the pushing piece 33 is a bolt commonly used in the field. More preferably, the pushing piece 33 can be provided with an operating member such as a handle, so as to facilitate the operation of the operator. In the embodiment, a possible operating member is provided.
[0057] The first installation groove 22 is provided on the adjusting table 2 and faces the table 100, and the sliding block 31 is slidingly arranged in the first installation groove 22; the installation block is protruded from one side of the adjusting table 2 along the first horizontal direction, the connecting hole 21 is arranged on the installation block, and the connecting hole 21 is communicated with the first installation groove 22. The first installation groove 22 can be T-shaped in the cross section along the first horizontal direction, and the sliding block 31 is slidingly arranged in the first installation groove 22 and also has a T-shaped cross section along the first horizontal direction. The above arrangement can improve the stability of the sliding block 31 during sliding and ensure the accuracy of the moving direction of the sliding block 31.
[0058] Further, with reference to Figure 4 , one of the side walls of the first installation groove 22 and the sliding block 31 is provided with a guide rail 311, and the other is provided with a sliding groove 221 slidingly matched with the guide rail 311, and the guide rail 311 extends along the first horizontal direction. The sliding smoothness of the sliding block 31 can be improved under the sliding cooperation of the guide rail 311 and the sliding groove 221. In the embodiment, the guide rail 311 is arranged on the sliding block 31, the sliding groove 221 is arranged on the side wall of the first installation groove 22, and one guide rail 311 is arranged on each of the two sides of the sliding block 31 along the second horizontal direction, and correspondingly, one sliding groove 221 is arranged on each of the two side walls along the second horizontal direction, so as to ensure the stability of the sliding of the sliding block 31; in other embodiments, the guide rail 311 can also be arranged on the side wall of the first installation groove 22, and the sliding groove 221 can be arranged on the sliding block 31.
[0059] Preferably, the table leveling device further comprises a pitch reset structure 5, and the pitch reset structure 5 comprises a first elastic member 51, with reference to Figure 4 , the first elastic member 51 extends along the vertical direction and is connected between the adjusting table 2 and the table 100; during the process that the moving sliding block 31 drives the table 100 to rotate around the first ball pin 20, the first elastic member 51 is deformed; after the sample 200 is detected, the elastic force generated by the deformation of the first elastic member 51 can drive the table 100 to reset the pitch angle along the first horizontal direction, so as to facilitate the next leveling operation.
[0060] Further, the pitch reset structure 5 further comprises a second elastic member 52 extending along the first horizontal direction. With reference to Figure 3 , the two ends of the second elastic member 52 are respectively connected to the sliding block 31 and the adjusting table 2. During the leveling process of moving the sliding block 31, the second elastic member 52 is deformed; after the sample 200 is detected, the top pushing member 33 is unscrewed in the reverse direction, and under the elastic force of the second elastic member 52, the sliding block 31 can be reset, and under the elastic force of the first elastic member 51, the table 100 can be driven to reset the pitch angle along the first horizontal direction, so as to facilitate the next leveling.
[0061] Further, referring to Figure 3 , the adjusting table 2 is provided with a fixing groove 23, one end of the second elastic member 52 extends into the fixing groove 23 and is connected to the groove bottom of the fixing groove 23. The provision of the fixing groove 23 can ensure the stability of the direction of the second elastic member 52 during deformation, and avoid the skewing of the second elastic member 52. Specifically, in the embodiment, the fixing groove 23 is arranged on the side wall of the first mounting groove 22.
[0062] Specifically, as shown in Figure 4 , the carrier table 100 and the adjusting table 2 are both provided with first mounting holes, the first mounting holes extend in the vertical direction, and each first mounting hole is fixedly provided with a first fixing pin 53, the first elastic member 51 is arranged in the two first mounting holes, and the two ends are respectively and correspondingly hooked on the two first fixing pins 53, so as to ensure the stability of the first elastic member 51 in the vertical direction during deformation.
[0063] Exemplarily, in the embodiment, the first elastic member 51 and the second elastic member 52 are both springs, which have good elasticity and are easy to obtain.
[0064] Referring to Figure 6 , the yaw adjusting structure 4 is arranged in the second horizontal direction away from the first ball head pin 20, and the first horizontal direction is perpendicular to the second horizontal direction. The yaw adjusting structure 4 comprises a third ball head pin 41, which is arranged on the adjusting table 2 in a position-adjustable manner in the vertical direction, and the side of the carrier table 100 facing the adjusting table 2 is provided with a waist-shaped taper hole 102, and the ball head end of the third ball head pin 41 abuts in the waist-shaped taper hole 102. Moving the third ball head pin 41 in the vertical direction can drive the carrier table 100 to rotate around the first ball head pin 20, so that the carrier table 100 realizes the yaw angle adjustment in the second horizontal direction. Combined with the level on the carrier table 100, the carrier table 100 can be leveled, and the precision and efficiency of leveling are taken into account.
[0065] Specifically, the outer wall of the third ball head pin 41 is provided with threads, and the third ball head pin 41 is screwed on the adjusting table 2. By screwing the third ball head pin 41, the position of the third ball head pin 41 in the vertical direction can be adjusted, which is simple and convenient to operate.
[0066] Further, the end of the third ball head pin 41 away from the carrier table 100 is provided with an operating part 42. By rotating the operating part 42, the third ball head pin 41 can be screwed, and the vertical movement of the third ball head pin 41 can be realized. The operation is simple and convenient, which is conducive to improving the leveling efficiency.
[0067] Specifically, continuing to refer to Figure 6 , in the embodiment, the side of the adjusting table 2 facing the moving table 1 is provided with a second mounting groove 24, the third ball head pin 41 penetrates through the groove bottom of the second mounting groove 24, and the operating part 42 is arranged in the second mounting groove 24.
[0068] Exemplarily, in the embodiment, the tapered hole 101 is arranged on the carrier 100, and the first ball head pin 20 is arranged on the adjusting table 2; in other embodiments, the tapered hole 101 can also be arranged on the adjusting table 2, and the first ball head pin 20 is arranged on the carrier 100.
[0069] Specifically, the carrier 100 is provided with a vacuum adsorption station for placing the sample 200 to be detected. The sample 200 is stably adsorbed on the carrier 100 by the vacuum adsorption force, so as to ensure the stability in the subsequent detection process. The specific vacuum adsorption structure and adsorption principle refer to the prior art, which will not be described here.
[0070] In addition, the level is also a device disclosed in the prior art, and the specific structure and principle refer to the prior art, which will not be described here.
[0071] Optionally, the step instrument carrier leveling device further comprises a deflection reset structure 6, and the deflection reset structure 6 comprises a third elastic member 61, such as Figure 6 As shown, the third elastic member 61 extends in the vertical direction and is connected between the adjusting table 2 and the carrier 100. When the third ball head pin 41 is moved and drives the carrier 100 to rotate around the first ball head pin 20, the third elastic member 61 is deformed; after the detection of the sample 200 is completed, the force applied to the third ball head pin 41 is removed, and under the action of the elastic force generated by the deformation of the third elastic member 61, the carrier 100 can be reset to the deflection angle in the second horizontal direction, so as to facilitate the leveling next time.
[0072] Specifically, continuing to refer to Figure 6 , the carrier 100 and the adjusting table 2 are provided with a pair of second mounting holes in the vertical direction, and each second mounting hole is fixedly provided with a second fixed pin 62, and the two ends of the third elastic member 61 are correspondingly hooked on the two second fixed pins 62, so as to ensure the stability of the deformation of the second elastic member 52 in the vertical direction.
[0073] Exemplarily, in the embodiment, the third elastic member 61 is also a spring.
[0074] In addition, the embodiment also provides a step instrument, which comprises the above-mentioned step instrument carrier leveling device, a carrier 100 and a probe 300. The carrier 100 is arranged on the adjusting table 2, and the carrier 100 is configured to place the sample 200 to be detected. The probe 300 is arranged above the carrier 100 in a spaced manner and is movably abutted on the surface of the sample 200 in the vertical direction. During the movement of the moving table 1 in the first horizontal direction, the probe 300 can move up and down along the profile of the surface of the sample 200, thereby reflecting the surface profile of the measured sample 200. In addition, the step instrument has all the beneficial effects of the above-mentioned step instrument carrier leveling device, which will not be described here.
[0075] Obviously, the above embodiments of the present application are merely examples for clearly illustrating the present application, and are not intended to limit the embodiments of the present application. For those skilled in the art, various obvious changes, re-adjustments and substitutions can be made without departing from the protection scope of the present application. Here, it is not necessary and impossible to exhaust all the embodiments. Any modification, equivalent substitution and improvement made within the spirit and principle of the present application shall be included in the protection scope of the present application claims.
Claims
1. A step gauge stage leveling device, characterized by, The step instrument carrier platform leveling device comprises a mobile platform (1) and an adjusting platform (2), a pitch adjusting structure (3) and a yaw adjusting structure (4) installed on the mobile platform (1); wherein the adjusting platform (2) is provided with a first ball pin (20) on one of the adjusting platform (2) and the carrier platform (100), and a tapered hole (101) is formed on the other one, the ball head end of the first ball pin (20) abuts against the tapered hole (101), and the carrier platform (100) is rotatably arranged on the adjusting platform (2) around the first ball pin (20); the pitch adjusting structure (3) is arranged along a first horizontal direction and spaced apart from the first ball pin (20), and comprises a sliding block (31) and a second ball pin (32), the sliding block (31) is slidably arranged on the adjusting platform (2) along the first horizontal direction, the side of the sliding block (31) facing the carrier platform (100) is provided with a guide inclined surface (310), the ball head end of the second ball pin (32) abuts against the guide inclined surface (310), and the other end is clamped on the carrier platform (100); the sliding block (31) is pushed to drive the second ball pin (32) to move along the guide inclined surface (310), thereby driving the carrier platform (100) to rotate around the first ball pin (20), so as to realize the pitch angle adjustment of the carrier platform (100) along the first horizontal direction; the yaw adjusting structure (4) is arranged along a second horizontal direction and spaced apart from the first ball pin (20), and comprises a third ball pin (41), the third ball pin (41) is adjustably arranged on the adjusting platform (2) along a vertical direction, and the side of the carrier platform (100) facing the adjusting platform (2) is provided with a waist-shaped tapered hole (102), the ball head end of the third ball pin (41) abuts against the waist-shaped tapered hole (102); the first horizontal direction is perpendicular to the second horizontal direction. The pitch adjusting structure (3) further comprises a pushing piece (33), the pushing piece (33) abuts against the sliding block (31) and can push the sliding block (31) to move back and forth along the first horizontal direction. The adjusting platform (2) is provided with a connecting hole (21), and the pushing piece (33) is screwed in the connecting hole (21). The adjusting platform (2) is provided with a first mounting groove (22), and the side wall of the first mounting groove (22) is provided with a guide rail (311) on one of the sliding block (31) and the other is provided with a sliding groove (221) slidably matched with the guide rail (311). The step instrument carrier platform leveling device further comprises a pitch reset structure (5), the pitch reset structure (5) comprises: a first elastic member (51) extending along a vertical direction, and the two ends of the first elastic member (51) are connected with the adjusting platform (2) and the carrier platform (100) respectively; when the sliding block (31) is pushed and the second ball pin (32) drives the carrier platform (100) to rotate around the first ball pin (20), the first elastic member (51) is deformed. 2. The step gauge stage leveling device of claim 1, wherein, 3. The step gauge stage leveling device of claim 2, wherein, 4. The step gauge stage leveling device of claim 1, wherein, 5. The step meter stage leveling device of claim 1, wherein, When the force applied to the slider (31) is removed, the elastic force generated by the deformation of the first elastic member (51) can drive the carrier (100) to reset.
6. The step-motor stage leveling device of claim 5, wherein, The pitch reset structure (5) further comprises a second elastic member (52) extending along a first horizontal direction, two ends of the second elastic member (52) being connected to the slider (31) and the adjusting table (2) respectively. When the slider (31) is pushed and the second ball pin (32) drives the carrier (100) to rotate around the first ball pin (20), the second elastic member (52) is compressed and deformed. When the force applied to the slider (31) is removed, the elastic force generated by the deformation of the second elastic member (52) can drive the slider (31) to reset, and then drive the carrier (100) to reset.
7. The step-motor stage leveling device according to any one of claims 1-6, wherein, The pitch reset structure (5) further comprises a second elastic member (52) extending along a first horizontal direction, two ends of the second elastic member (52) being connected to the slider (31) and the adjusting table (2) respectively. When the slider (31) is pushed and the second ball pin (32) drives the carrier (100) to rotate around the first ball pin (20), the second elastic member (52) is compressed and deformed. When the force applied to the slider (31) is removed, the elastic force generated by the deformation of the second elastic member (52) can drive the slider (31) to reset, and then drive the carrier (100) to reset.
8. The step-motor stage leveling device according to any one of claims 1-6, wherein, The third ball pin (41) is provided with an operating part (42) at one end away from the carrier (100).
9. A step meter, characterized in that The pitch reset structure (5) further comprises a second elastic member (52) extending along a first horizontal direction, two ends of the second elastic member (52) being connected to the slider (31) and the adjusting table (2) respectively. The pitch reset structure (5) further comprises a second elastic member (52) extending along a first horizontal direction, two ends of the second elastic member (52) being connected to the slider (31) and the adjusting table (2) respectively. The pitch reset structure (5) further comprises a second elastic member (52) extending along a first horizontal direction, two ends of the second elastic member (52) being connected to the slider (31) and the adjusting table (2) respectively.