Wafer box fixing device of silicon wafer centrifugal drier

Abstract

The utility model relates to the field of silicon wafer cleaning equipment, in particular to a wafer box fixing device of a silicon wafer centrifugal drier. The wafer box fixing device of the silicon wafer centrifugal drying machine comprises two fixing bases installed in a drying machine body cavity, an installation groove used for installing a wafer box is formed between the two fixing bases, a hinge shaft is arranged on the side wall of the installation groove, hinge holes are formed in the positions, corresponding to the hinge shaft of the installation groove, of the two fixing bases, and the hinge holes are communicated with the hinge shaft of the installation groove. The fixing seats and the mounting groove are hinged through cooperation of the hinge shafts and the hinge holes, a stop lever is arranged at the position, away from the center of the main body cavity, between the two fixing seats, the two ends of the stop lever are fixedly connected with the fixing seats, and the stop lever is used for limiting the rotating angle of the mounting groove and supporting the mounting groove in the running process of the spin dryer. The utility model aims to solve the problems that the efficiency of assembling and disassembling the wafer box is low, the silicon wafer or the wafer box is easy to collide and damage, and the existing fixing device is easy to crack after long-term use.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of silicon wafer cleaning equipment, and in particular to a wafer box fixing device of a silicon wafer centrifugal spin dryer. BACKGROUND

[0002] In the semiconductor manufacturing process, the silicon wafer needs to go through multiple cleaning procedures to remove particles, metal ions and organic contaminants attached to the surface. The surface of the cleaned silicon wafer often has a lot of water left, and if this water is allowed to evaporate naturally, it will cause water mark pollution and pattern collapse on the silicon wafer. Therefore, a silicon wafer centrifugal spin dryer is often used to implement rapid dewatering treatment on the silicon wafer, thereby effectively avoiding various problems caused by liquid evaporation.

[0003] During the use of the silicon wafer centrifugal spin dryer, the wafer box carrying the silicon wafer needs to be fixed in the main cavity of the spin dryer. In the prior art, the wafer box is usually fixed by a wafer box fixing device installed in the main cavity. The conventional wafer box fixing device includes a bottom plate, a top plate, a back plate, two side plates and two limiting pins. The wafer box is installed in a groove formed by the bottom plate, the top plate, the back plate and the side plates, and the limiting pins are used to fix wafer boxes of different sizes.

[0004] Although the conventional wafer box fixing device described above has certain size adaptability, the bottom plate is fixedly connected to the main cavity, and the opening direction of the groove of the fixing device for installing the wafer box is towards the center of the main cavity, which causes the operator to only be able to perform the loading and unloading of the wafer box from a single direction. This not only limits the operation space for loading and unloading the wafer box and makes it difficult to align, significantly reducing the loading and unloading efficiency, but also easily causes the silicon wafer or the wafer box to be damaged due to improper force during the loading and unloading process. In addition, the back plate and the bottom plate of the conventional wafer box fixing device are prone to cracks under the action of centrifugal force during long-term use, thereby weakening the fixing effect and service life. SUMMARY

[0005] The utility model aims to provide a wafer box fixing device of a silicon wafer centrifugal spin dryer to improve the low efficiency of loading and unloading the wafer box, the easy damage of the silicon wafer or the wafer box due to knocking, and the problem of cracks in the existing fixing device during long-term use.

[0006] In order to solve the above technical problems, the utility model adopts the specific scheme of: including two fixed bases installed in the main body chamber of the spin dryer, the two fixed bases are provided with installation grooves for installing the wafer box between the two fixed bases, the installation groove side wall is provided with a hinged shaft, the two fixed bases are provided with hinged holes corresponding to the hinged shaft of the installation groove at positions, the fixed base and the installation groove are hinged through the cooperation of the hinged shaft and the hinged hole, the position away from the center of the main body chamber between the two fixed bases is provided with a stop rod, the stop rod is fixedly connected with the fixed base at both ends, the stop rod is used for limiting the rotation angle of the installation groove, and the installation groove is supported during the operation of the spin dryer.

[0007] As a further optimization of the wafer box fixing device of the silicon wafer centrifugal spin dryer: a plurality of through holes are arranged on the installation groove.

[0008] As a further optimization of the wafer box fixing device of the silicon wafer centrifugal spin dryer: a pull handle is arranged at the top of the installation groove.

[0009] As a further optimization of the wafer box fixing device of the silicon wafer centrifugal spin dryer: a hollow groove for reducing the counterweight is arranged on the installation groove.

[0010] As a further optimization of the wafer box fixing device of the silicon wafer centrifugal spin dryer: at least two parallel stop rods are arranged between the two fixed bases.

[0011] As a further optimization of the wafer box fixing device of the silicon wafer centrifugal spin dryer: a sliding groove communicating with the hinged hole is arranged at the hinged hole of the fixed base, and the sliding groove is used for providing a loading and unloading path for the installation groove.

[0012] As a further optimization of the wafer box fixing device of the silicon wafer centrifugal spin dryer: a limiting washer is sleeved on both ends of the hinged shaft.

[0013] As a further optimization of the wafer box fixing device of the silicon wafer centrifugal spin dryer: an elastic damping layer is arranged at the contact area of the installation groove and the stop rod.

[0014] Beneficial effects: the utility model discloses a fixing base is installed in the main body chamber of the spin dryer, and the installation groove and the fixed base are hinged, when the wafer box needs to be installed or disassembled, the installation groove is rotated to the appropriate angle for the wafer box loading and unloading, which can improve the problem that the traditional fixing device is low in wafer box loading and unloading efficiency and the wafer or the wafer box is prone to damage due to the unadjustable direction, when the spin dryer works, the fixing device loaded with the wafer box makes the circumferential motion around the center of the main body chamber of the spin dryer, at this time, the wafer box can exert the centrifugal force on the installation groove, but the stop rod is arranged between the two fixed bases, and the stop rod supports the installation groove, so that the problem that the back plate and the bottom plate of the installation groove and the back plate and the top plate of the installation groove are prone to cracks under the action of the centrifugal force is improved. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1The utility model discloses a fixed device for wafer box shows a schematic diagram;

[0016] Figure 2 The utility model discloses a fixed device for wafer box shows a front view;

[0017] Figure 3 The utility model discloses a fixed device for wafer box shows a plan view;

[0018] Marked in the drawing: 1, fixed seat, 2, installation slot, 3, pull handle, 4, sliding slot, 5, hinged axle, 6, hinged hole, 7, through -hole, 8, stop lever, 9, hollow slot, 10, limit washer, 11, shock attenuation layer. Specific implementation

[0019] As Figure 1 Shown, a kind of wafer centrifugal spin-dryer's wafer box fixed device, including two fixed seats 1 installed in the main body chamber of spin-dryer, fixed seat 1 is used to be tightly installed in main body chamber, so that wafer box fixed device does not occur in the working process of silicon wafer centrifugal spin-dryer fall off, in the embodiment, fixed seat 1 is welded in main body chamber. Installation slot 2 is equipped between two fixed seats 1, installation slot 2 provides installation place for wafer box, hinged axle 5 is equipped on the side wall of installation slot 2, two fixed seats 1 are equipped with hinged hole 6 with the corresponding position of hinged axle 5 of installation slot 2, fixed seat 1 is hinged with installation slot 2 by hinged axle 5 and hinged hole 6 cooperation, the design of hinged makes staff when loading and unloading wafer box, can be self-adapting adjust the angle of loading and unloading according to operation habit, improve the practicability of device.

[0020] As Figure 2 Shown, hinged hole 6 is equipped with sliding slot 4 that is communicated with hinged hole 6 on fixed seat 1, sliding slot 4 is used to load and unload installation slot 2, when installation slot 2 needs to be replaced and maintained, installation slot 2 can be unloaded from fixed seat 1 by sliding slot 4. The both ends of the hinged axle 5 of installation slot 2 are sleeved with limit washer 10, and the limit washer 10 is used to prevent the relative sliding of the installation slot 2 on the fixed seat 1.

[0021] Two fixed seats 1 are equipped with stop lever 8 between them, and the two ends of the stop lever 8 are fixedly connected with the fixed seats 1. The stop lever 8 is used to limit the rotation angle of the installation slot 2 and to support the installation slot 2 during the operation of the spin-dryer. When the spin-dryer is running, the wafer box fixed device loaded with the wafer box moves in a circular motion around the center of the main body chamber of the spin-dryer. At this time, the wafer box will generate a centrifugal force towards the stop lever 8. The stop lever 8 prevents the installation slot 2 from being damaged under the action of the centrifugal force. At least two parallel stop levers 8 are installed between the two fixed seats 1. The multiple stop levers 8 can more stably support the installation slot 2, making the force on the installation slot 2 more uniform. In the embodiment, the number of stop levers 8 is two.

[0022] The installation groove 2 is provided with a plurality of through holes 7 for discharging water on the silicon wafer spun out by the spin dryer; the top of the installation groove 2 is provided with a pull handle 3, which facilitates the staff to exert force to rotate the installation groove 2.

[0023] As shown in Figure 3 The installation groove 2 is provided with a hollow groove 9, which meets the working requirement of fixing the wafer box while reducing the weight of the installation groove 2, thereby reducing the manufacturing cost of the device. The contact area between the installation groove 2 and the stop rod 8 is provided with an elastic damping layer 11, which prevents the installation groove 2 from colliding with the stop rod 8 and generating a large vibration when being rotated and reset, thereby causing damage to the installation groove 2, even the wafer box or the silicon wafer in the installation groove 2.

[0024] The use method of the wafer box fixing device of the silicon wafer centrifugal spin dryer is as follows: first, the hinged shaft 5 of the installation groove 2 is installed into the hinged hole 6 in the fixing seat 1 through the sliding groove 4, so that the installation groove 2 is hinged with the fixing seat 1; when the wafer box is installed, the installation groove 2 is rotated to a suitable angle through the pull handle 3, the wafer box is put into the installation groove 2, then the installation groove 2 is reset for spin-drying operation; after the spin-drying operation is completed, the installation groove 2 is rotated to a suitable angle again, the wafer box is taken out from the installation groove 2, and the use of the fixing device is completed.

Claims

1. A wafer cassette fixing device for a silicon wafer centrifugal spin-dryer, characterized by: The utility model relates to a kind of fixed seat (1) for installing in spin-dryer main body chamber, two fixed seat (1) between being equipped with the installation slot (2) for installing sheet box, hinged shaft (5) is equipped on the side wall of installation slot (2), the hinged hole (6) is equipped in the corresponding position of two fixed seat (1) with the hinged shaft (5) of installation slot (2), fixed seat (1) is articulated with installation slot (2) by hinged shaft (5) and hinged hole (6) cooperation realizes articulation, the position of two fixed seat (1) between away from the center of main body chamber is equipped with baffle rod (8), baffle rod (8) both ends are fixedly connected with fixed seat (1), baffle rod (8) is used to limit the rotation angle of installation slot (2), and form support to installation slot (2) in the process of spin-dryer operation.

2. The wafer cassette fixing device of a silicon wafer centrifugal spin-dryer according to claim 1, wherein: A plurality of through holes (7) are provided on the installation slot (2).

3. The wafer cassette fixing device of a silicon wafer centrifugal spin-dryer according to claim 1, wherein: A pull handle (3) is provided on the top of the installation slot (2).

4. The wafer boat fixture of claim 1 wherein: A hollow groove (9) for reducing counterweight is provided on the installation slot (2).

5. The wafer boat fixture of claim 1, wherein: At least two parallel baffle rods (8) are installed between the two fixed seats (1).

6. The wafer boat fixture of claim 1 wherein: A sliding groove (4) is provided on the fixed seat (1) at the hinged hole (6) to provide a loading and unloading path for the installation slot (2).

7. The wafer boat fixture of claim 1, wherein: Limiting washers (10) are provided on both ends of the hinged shaft (5).

8. The wafer boat fixture of claim 1, wherein: An elastic damping layer (11) is provided on the contact area between the installation slot (2) and the baffle rod (8).

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