Film expanding frame state detection device
By using the film expansion frame status detection device, the deformation problem caused by misalignment of the film expansion frame was solved, and stable placement of the film expansion frame and good film expansion effect were achieved.
Patent Information
- Application Number
- CN202423211629.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-25
- Publication Date
- 2025-12-16
- Estimated Expiration
- 2034-12-25
AI Technical Summary
In the prior art, the expansion frame cannot be stably aligned before the expansion process, which can easily lead to deformation of the expansion frame and affect the uniformity and stability of the expansion process.
A film expansion frame status detection device was designed, including a base plate, a detection bracket and a sensor, which is used to detect whether the film expansion frame is accurately introduced. The side guide slide and the driving component ensure that the film expansion frame is vertically introduced into the placement position, and the guide groove and the pull-in part stably lock the film expansion frame.
This method ensures stable placement of the film expansion frame, prevents deformation of the frame, and improves the efficiency and effectiveness of the film expansion process.
Smart Images
Figure CN223678472U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of electronic device manufacturing technology, and in particular to a device for detecting the state of a film expansion frame. Background Technology
[0002] Semiconductor chip manufacturing typically involves attaching a wafer to a blue film, then laser-cutting or dicing the wafer into individual chips. These chips are then packaged to form a functional IC chip. Because the spacing between these chips is only the width of the dicing or scribe lines, it's difficult to remove the chips from their carrier. Therefore, to ensure stable chip handling before removal, a film expansion process is usually required. The current expansion method involves mounting the wafer in an expansion frame, which is then mounted on an expansion machine to expand the wafer and increase the distance between the chips.
[0003] In the existing technology, the film expansion frame needs to be placed on the film expansion machine from top to bottom before the film expansion process. However, it is impossible to guarantee stable alignment. When the film expansion frame is not vertically introduced into the slot of the film expansion machine, it is easy to cause deformation of the film expansion frame, thereby affecting the uniformity and stability of the film expansion process.
[0004] Therefore, there is an urgent need for a film expansion frame status detection device that can properly place the film expansion frame and detect and confirm whether the film expansion frame is accurately introduced. Utility Model Content
[0005] The purpose of this invention is to provide a film expansion frame status detection device that can stably place the film expansion frame and detect whether the film expansion frame is inserted into the correct position, avoid abnormal insertion, and achieve good film expansion effect.
[0006] To achieve this objective, the present invention adopts the following technical solution:
[0007] A film expansion frame status detection device, used to place the film expansion frame and detect whether the film expansion frame is in place, the film expansion frame status detection device comprising:
[0008] A base plate is vertically fixed on the film expanding machine. A placement station is provided on the base plate. A detection bracket is fixedly installed on both sides of the placement station. A sensor is fixedly installed on each detection bracket at a preset position. The two sensors are used to detect the relative positions of the left and right ends of the film expanding frame with respect to the base plate. A fixed end of the driving component is fixedly installed on the side of the detection bracket closest to the base plate.
[0009] The side guide slide is provided in one-to-one correspondence with the detection support, and the two side guide slides are respectively provided with opposite guide grooves extending in the vertical direction for guiding the membrane expansion frame. The left and right sides of the membrane expansion frame can be respectively inserted into the two opposite guide grooves (201). The outer side wall of the guide groove is provided as a pull connection part. The telescopic end of the driving member is fixedly connected with the side guide slide. When the telescopic end of the driving member is retracted, the pull connection part can abut against the membrane expansion frame and move the membrane expansion frame inward, so that the membrane expansion frame contacts the detection support.
[0010] As an optional technical solution of the membrane expansion frame state detection device, the detection support is provided with a receiving plate away from one side of the bottom plate. When the telescopic end of the driving member is retracted, the pull connection part can drive the membrane expansion frame until the receiving plate and the membrane expansion frame jointly clamp the membrane expansion frame.
[0011] As an optional technical solution of the membrane expansion frame state detection device, the membrane expansion frame state detection device is configured to place multiple membrane expansion frames. The bottom plate is provided with multiple placement stations. The placement stations are provided in one-to-one correspondence with the membrane expansion frames. One detection support is shared by one side between two adjacent placement stations. The fixed ends of the two driving members are fixedly connected with the detection support. The telescopic ends of the two driving members are fixedly connected with two opposite side guide slides.
[0012] As an optional technical solution of the membrane expansion frame state detection device, the detection support is fixedly provided with an extension guide block. The extension guide block is arranged above the side guide slide. The extension guide block (180) is provided with a guide horn groove upward. The guide horn groove is connected with the guide groove.
[0013] As an optional technical solution of the membrane expansion frame state detection device, the detection support is fixedly provided with a guide sleeve close to one side of the bottom plate. The guide sleeve is arranged along the movement direction of the telescopic end of the driving member. The side guide slide is fixedly provided with a guide column. The guide column can pass through the detection support and be slidingly nested in the guide sleeve.
[0014] As an optional technical solution of the membrane expansion frame state detection device, the guide column is provided with an elastic member. One end of the elastic member abuts against the side guide slide. The other end of the elastic member abuts against the guide sleeve.
[0015] As an optional technical solution of the membrane expansion frame state detection device, the detection support is provided with two guide sleeves. The two guide sleeves are symmetrically arranged about the driving member. The guide sleeves are provided in one-to-one correspondence with the guide columns.
[0016] As an optional technical scheme of the film expanding frame state detection device, the bottom support frame is provided with a bottom detector, the bottom detector is used for detecting the relative position of the film expanding frame and the bottom support frame, and the bottom detector is in communication connection with the driving member.
[0017] As an optional technical scheme of the film expanding frame state detection device, the bottom support frame is provided with a bottom detector, the bottom detector is used for detecting the relative position of the film expanding frame and the bottom support frame, and the bottom detector is in communication connection with the driving member.
[0018] As an optional technical scheme of the film expanding frame state detection device, the detection support frame is provided with a sensor support frame, the sensor support frame is fixedly connected with the sensor, a waist-shaped hole is formed in the sensor support frame, and the sensor support frame further comprises a screw connecting piece, part of the screw connecting piece can pass through the waist-shaped hole and be fixedly connected with the detection support frame, so that the sensor is fixed at the preset position.
[0019] The film expanding frame state detection device has the following beneficial effects:
[0020] The film expanding frame state detection device is used for placing a film expanding frame and detecting whether the film expanding frame is in place, and comprises a bottom plate fixed vertically on a film expanding machine and a side guide sliding strip, the bottom plate is provided with a placing station, one film expanding frame can be placed on the placing station, a detection support frame is fixedly arranged on each side of the placing station, a sensor is fixedly arranged at a preset position of each detection support frame, two sensors are respectively used for detecting the relative position of the left and right sides of the film expanding frame and the bottom plate, whether the film expanding frame is vertically introduced into the correct position of the placing station can be detected, and deformation of the film expanding frame caused by abnormal insertion is avoided. The fixed end of a driving member is fixedly arranged on the side of the detection support frame close to the bottom plate, and the telescopic end of the driving member is fixedly connected with the side guide sliding strip; the side guide sliding strip is arranged in one-to-one correspondence with the detection support frame, and the two side guide sliding strips are respectively provided with opposite guide grooves in the vertical direction, and the two guide grooves are respectively used for guiding and inserting the left and right sides of the film expanding frame; the outer side wall of the guide groove is provided as a pull connection part, when the telescopic end of the driving member is retracted, the pull connection part can abut against the film expanding frame and drive the film expanding frame to move inward, so that the film expanding frame is in contact with the detection support frame, the film expanding frame is locked in the placing station through sliding and then pulling, the film expanding frame can be stably placed, and good film expanding effect is achieved. BRIEF DESCRIPTION OF DRAWINGS
[0021] Figure 1 is a front view of the film expanding frame state detection device in a working state provided by the specific embodiment of the utility model;
[0022] Figure 2 is a structural schematic view of the film expanding frame state detection device in a sliding process provided by the specific embodiment of the utility model;
[0023] Figure 3 is Figure 2 is a partial enlarged view of part E in figure
[0024] Figure 4 is a structural schematic view of the film expanding frame state detection device sliding into position provided in the specific embodiment of the present application;
[0025] Figure 5 is a structural schematic view of the film expanding frame state detection device in the process of being pulled into position provided in the specific embodiment of the present application;
[0026] Figure 6 is Figure 5 is a partial enlarged view of part A in figure
[0027] Figure 7 is a structural schematic view of the film expanding frame state detection device pulled into position provided in the specific embodiment of the present application;
[0028] Figure 8 is Figure 7 is a partial enlarged view of part B in figure
[0029] Figure 9 is a bottom view of the film expanding frame state detection device in the process of being pulled into position provided in the specific embodiment of the present application;
[0030] Figure 10 is Figure 9 is a partial enlarged view of part C in figure
[0031] Figure 11 is a bottom view of the film expanding frame state detection device pulled into position provided in the specific embodiment of the present application;
[0032] Figure 12 is Figure 11 is a partial enlarged view of part D in figure
[0033] in the figure:
[0034] 100, bottom plate; 110, detection support; 120, sensor; 130, sensor support; 131, waist-shaped hole; 140, driving piece; 150, guide sleeve; 160, receiving plate; 170, bottom support frame; 180, extension guide block;
[0035] 200, side guide slide; 201, guide groove; 210, pulling part; 220, guide column; 230, elastic piece; 900, film expanding frame. DETAILED DESCRIPTION
[0036] The utility model will be described further in detail below in combination with the drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the utility model, and not to limit the utility model. In addition, it should be noted that, in order to facilitate the description, only the part related to the utility model is shown in the drawings, not all structures.
[0037] In the description of the utility model, unless otherwise explicitly specified and limited, the terms "connected", "connected", "fixed" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated, it can be mechanically connected, or it can be electrically connected, it can be directly connected, or it can be indirectly connected through an intermediate medium, it can be the internal communication of two elements or the interaction relationship of two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.
[0038] In the utility model, unless otherwise explicitly specified and limited, the first feature is "on" or "below" the second feature, which can include direct contact between the first and second features, or indirect contact between the first and second features through another feature between them. Moreover, the first feature "on", "above" and "above" the second feature includes that the first feature is directly above and obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "below" and "below" the second feature includes that the first feature is directly below and obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.
[0039] In the description of the embodiment, the terms "up", "down", "right", "left" and other orientation or position relationship are based on the orientation or position relationship shown in the drawings, only for the convenience of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, therefore, it cannot be understood as a limitation of the utility model. In addition, the terms "first", "second" are only used to distinguish in the description, and have no special meaning.
[0040] As Figures 1 to 12The utility model discloses a kind of film expanding frame state detection devices, for placing film expanding frame 900 and detecting whether film expanding frame 900 is in place, including vertical fixed on film expanding machine bottom plate 100 and side guide slide 200, bottom plate 100 is provided with placement station, one film expanding frame 900 can be placed in correspondence, both sides of placement station are fixedly provided with one detection support 110, one sensor 120 is fixedly provided in each detection support 110 at preset position, two sensors 120 are used for detecting the relative position of the left and right two sides end of film expanding frame 900 and bottom plate 100 respectively, whether the both end introduction state of film expanding frame 900 is consistent can be detected simultaneously, and whether film expanding frame 900 is vertically introduced to the correct position of placement station can be detected, avoid inserting abnormality to cause the deformation of film expanding frame 900. The side of detection support 110 close to bottom plate 100 is fixedly provided with the fixed end of driving part 140, the telescopic end of driving part 140 is fixedly connected with side guide slide 200;Side guide slide 200 is set one by one with detection support 110, two side guide slides 200 are respectively provided with opposite guide grooves 201 along vertical direction, two opposite guide grooves 201 are used for guiding film expanding frame 900 and being inserted by the left and right two sides end of film expanding frame 900 respectively, film expanding frame 900 is slid into placement from above along guide groove 201;The outer side wall of guide groove 201 is set as pull connection part 210, when the telescopic end of driving part 140 is retracted, pull connection part 210 can abut with film expanding frame 900 and drive film expanding frame 900 to move to inside, to make film expanding frame 900 contact with detection support 110, film expanding frame 900 is locked in placement station by first sliding and then pulling, can stably place film expanding frame 900, improve the introduction efficiency of film expanding frame 900, reach good film expanding effect.
[0041] In the embodiment, the film expanding frame state detection device is configured to be able to place multiple film expanding frames 900, the bottom plate 100 is provided with multiple placement stations, the placement stations are set one by one with the film expanding frames 900, one detection support 110 is shared by one side between two adjacent placement stations, the fixed ends of the two driving parts 140 are fixedly connected with the detection support 110, and the telescopic ends of the two driving parts 140 are fixedly connected with two opposite side guide slides 200 respectively, the design of multiple stations can save space and improve the efficiency of film expanding processing.
[0042] Optionally, extension guide block 180 is fixed on detection support 110, extension guide block 180 is arranged above side guide slide 200, extension guide block 180 is provided with guide horn groove and is docked with guide groove 201, which can reduce the difficulty of inserting film expanding frame 900 into the film expanding frame state detection device, and further improve the efficiency of film expanding processing.
[0043] Specifically Figures 8 to 11As shown, the detection support 110 is provided with a receiving plate 160 away from the bottom plate 100, when the telescopic end of the driving member 140 is retracted, the pulling part 210 can drive the film expanding frame 900 until the film expanding frame 900 is clamped by the receiving plate 160 together, which can stably lock the film expanding frame 900 and provide a certain bearing capacity, avoid the structure of the film expanding frame 900 around being suspended, and limit the film expanding frame 900 at the same time, and meet the stability of the film expanding frame 900 being placed vertically to the correct position.
[0044] Specifically as Figures 4 to 7 As shown, the detection support 110 is fixedly provided with a guide sleeve 150 close to the bottom plate 100, the guide sleeve 150 is arranged along the movement direction parallel to the telescopic end of the driving member 140, the side guide slide 200 is fixedly provided with a guide column 220, the guide column 220 can pass through the detection support 110 and is slidingly nested in the guide sleeve 150, and the side guide slide 200 is assisted to move stably by the relative movement of the driving member 140, and the stability of the film expanding frame 900 being pulled is improved.
[0045] Further, the detection support 110 is provided with two guide sleeves 150, the two guide sleeves 150 are symmetrically arranged about the driving member 140, and the guide sleeve 150 and the guide column 220 are one-to-one correspondingly arranged, and the action stability and parallelism of the side guide slide 200 are further improved.
[0046] Exemplarily, the guide column 220 is externally provided with an elastic member 230, one end of the elastic member 230 abuts against the side guide slide 200, and the other end of the elastic member 230 abuts against the guide sleeve 150, when the telescopic end of the driving member 140 is retracted, the pulling part 210 can abut against the film expanding frame 900 and move the film expanding frame 900 inwards, and the elastic member 230 is compressed to generate elastic potential energy; when the telescopic end of the driving member 140 is extended, the elastic member 230 releases the elastic potential energy, and the relative sliding of the guide sleeve 150 and the guide column 220 is assisted, and the side guide slide 200 can be lifted to restore to the original position.
[0047] In the embodiment, the bottom plate 100 is provided with a bottom support frame 170 below the detection support 110, the bottom support frame 170 is provided with a bottom detector, the bottom detector is used for detecting the relative position of the film expanding frame 900 and the bottom support frame 170, and the bottom detector is in communication connection with the driving member 140, when the film expanding frame 900 abuts against the bottom support frame 170, the driving member 140 can receive the signal of the bottom detector, and the telescopic end of the driving member 140 starts to retract, and the film expanding frame 900 is further ensured to be introduced to the correct position along the vertical direction.
[0048] Specifically as Figure 12As shown in the middle, the preset positions of the sensors 120 corresponding to the film expanding frames 900 of different specifications are different, so the installation positions of the sensors 120 need to be adjusted in time, for this purpose, the detection support 110 is provided with a sensor support 130, the sensor support 130 is fixedly connected with the sensor 120, the waist-shaped hole 131 is formed in the sensor support 130, and the sensor support 130 further comprises a screw connecting piece, part of the screw connecting piece can pass through the waist-shaped hole 131 and be fixedly connected with the detection support 110, so that the sensor 120 is fixed at the preset position, the cooperation position of the screw connecting piece and the waist-shaped hole 131 can be adjusted, so that the actual installation position of the sensor 120 is conveniently and quickly adjusted, and the application range of the film expanding frame state detection device is enlarged.
[0049] Obviously, the above embodiments of the present application are merely examples for clearly illustrating the present application, and are not intended to limit the implementation modes of the present application. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the protection scope of the present application. Here, it is unnecessary and impossible to enumerate all the implementation modes. Any modification, equivalent substitution and improvement made within the spirit and principle of the present application shall be included in the protection scope of the present application.
Claims
1. An expanded film frame condition detection device, characterized by, The expansion frame (900) is placed and whether the expansion frame (900) is in place is detected, and the expansion frame state detection device comprises: A bottom plate (100) is vertically fixed on an expansion machine, a placing station is arranged on the bottom plate (100), a detection support (110) is fixedly arranged on both sides of the placing station, a sensor (120) is fixedly arranged on each detection support (110) at a preset position, and two sensors (120) are respectively used to detect the relative positions of the left and right sides of the expansion frame (900) and the bottom plate (100); and a fixed end of a driving member (140) is fixedly arranged on one side of the detection support (110) close to the bottom plate (100); A side guide slide (200) is arranged in one-to-one correspondence with the detection support (110), two side guide slides (200) are respectively provided with opposite guide grooves (201), the guide grooves (201) are all vertically extended for guiding the expansion frame (900), and the left and right sides of the expansion frame (900) can be respectively slidably inserted into the two opposite guide grooves (201); an outer side wall of the guide groove (201) is arranged as a pull connection part (210), a telescopic end of the driving member (140) is fixedly connected with the side guide slide (200), when the telescopic end of the driving member (140) is retracted, the pull connection part (210) can abut against the expansion frame (900) and drive the expansion frame (900) to move inward, so that the expansion frame (900) is in contact with the detection support (110).
2. The film expanding frame state detecting apparatus according to claim 1, wherein A receiving plate (160) is arranged on one side of the detection support (110) away from the bottom plate (100), when the telescopic end of the driving member (140) is retracted, the pull connection part (210) can drive the expansion frame (900) until the expansion frame (900) is clamped by the receiving plate (160) together.
3. The film expanding frame state detecting apparatus according to claim 1, wherein The expansion frame state detection device is configured to place a plurality of expansion frames (900), a plurality of placing stations are arranged on the bottom plate (100), the placing stations are arranged in one-to-one correspondence with the expansion frames (900), one detection support (110) is shared by one side between two adjacent placing stations, the fixed ends of two driving members (140) are fixedly connected with the detection support (110), and the telescopic ends of the two driving members (140) are fixedly connected with two opposite side guide slides (200).
4. The film expanding frame state detecting apparatus according to claim 3, wherein A connecting guide block (180) is fixedly arranged on the detection support (110), the connecting guide block (180) is arranged above the side guide slide (200), an upwardly arranged guide horn groove is arranged on the connecting guide block (180), and the guide horn groove is in butt joint with the guide groove (201).
5. The film expanding frame state detecting apparatus according to claim 1, wherein The detection support (110) is fixedly provided with a guide sleeve (150) near one side of the bottom plate (100), the guide sleeve (150) is arranged along the movement direction of the telescopic end of the driving element (140), the side guide slide bar (200) is fixedly provided with a guide column (220), the guide column (220) can pass through the detection support (110) and is slidingly nested in the guide sleeve (150).
6. The film expanding frame state detecting apparatus according to claim 5, wherein The guide column (220) is externally provided with an elastic element (230), one end of the elastic element (230) abuts against the side guide slide bar (200), and the other end of the elastic element (230) abuts against the guide sleeve (150).
7. The film expanding frame state detecting apparatus according to claim 5, wherein The detection support (110) is provided with two guide sleeves (150), the two guide sleeves (150) are symmetrically arranged about the driving element (140), and the guide sleeves (150) are one-to-one correspondingly arranged with the guide columns (220).
8. The film expanding frame state detecting apparatus according to claim 1, wherein The bottom plate (100) is provided with a bottom support frame (170) below the detection support (110), when the film expanding frame (900) abuts against the bottom support frame (170), the telescopic end of the driving element (140) starts to retract.
9. The film expanding frame state detecting apparatus according to claim 8, wherein The bottom support frame (170) is provided with a bottom detector, the bottom detector is used for detecting the relative position of the film expanding frame (900) and the bottom support frame (170), and the bottom detector is in communication connection with the driving element (140).
10. The device according to any one of claims 1 to 9, wherein The detection support (110) is provided with a sensor support (130), the sensor support (130) is fixedly connected with the sensor (120), the sensor support (130) is provided with a waist-shaped hole (131), and the sensor support (130) further comprises a screw connecting element, part of the screw connecting element can pass through the waist-shaped hole (131) and is fixedly connected with the detection support (110), so that the sensor (120) is fixed at the preset position.