Sample preparation equipment for single crystal blade crystal orientation EBSD detection

Abstract

The utility model relates to the technical field of EBSD detection sample processing, in particular to single crystal blade crystal orientation EBSD detection sample preparation equipment which comprises a clamp and an electrolysis device, the clamp is used for clamping an EBSD sample, then the EBSD sample is ground on a sample grinding machine, the electrolysis device is used for electrolyzing the ground EBSD sample, and the EBSD sample is subjected to EBSD detection. The electrolysis device comprises an electrolytic bath for storing electrolyte, a sample clamp for placing a ground EBSD sample is movably arranged above the electrolytic bath, and the preparation method comprises the following steps: 1) mechanical polishing: (1) cutting the EBSD sample with the same shape from a blade; (2) clamping the EBSD sample in a clamp, and grinding the EBSD sample on a sample grinding machine; 2) electrolytic polishing: (1) placing the mechanically polished EBSD sample in a sample clamp of an electrolysis device; (2) electrolyzing in an electrolyzing device; and (3) after electrolysis is finished, cleaning the EBSD sample, so that the preparation rate of the EBSD detection sample can be improved, and the crystal orientation detection period of the single crystal blade can be shortened.

Description

TECHNICAL FIELD

[0001] The utility model relates to EBSD detection sample processing technical field, concretely relates to a kind of sample preparation equipment of single crystal blade crystal orientation EBSD detection. BACKGROUND

[0002] Single crystal blade is the casting blade with only one grain, which eliminates the transverse grain boundary sensitive to holes and cracks, thereby improving the service performance of the alloy. At present, when single crystal blade is cast, the crystallographic orientation of the casting is generally kept consistent with the principal stress axis direction of the blade, but the orientation and the principal stress axis direction of the single crystal blade have a certain angle deviation during the directional solidification process. To ensure that the performance of the single crystal blade meets the use requirements, the crystal orientation deviation angle needs to be measured, and the deviation is generally required to be no more than 15°.

[0003] At present, the commonly used detection methods for single crystal blade crystal orientation are X-ray diffraction (XRD) and electron backscatter diffraction (EBSD). The former uses a continuous X-ray beam to irradiate the blade, generates diffraction X-rays, records the Laun diffraction pattern of the backscattered part by a detector, compares the crystal orientation deviation angle with the standard diffraction pattern in the database using a software program, and directly acts on the blade, which has high detection efficiency, but may have false points due to impurities on the surface of the blade or inappropriate measurement parameters, resulting in false judgment of the program. The latter EBSD uses an electron beam to irradiate the EBSD sample at a high angle in a scanning electron microscope (SEM), generates a diffraction pattern which is received by a fluorescent screen, and the fluorescent screen is connected to a camera. After storage, the diffraction pattern is directly displayed on the software program, and then the crystal orientation deviation angle is obtained by calibrating the pattern using a software program. The detection result is accurate, but EBSD has high requirements for the surface quality of the sample, and the preparation rate of the sample restricts its application in the detection of single crystal blade crystal orientation. UTILITY MODEL CONTENTS

[0004] To solve the above technical problems, the utility model provides a kind of sample preparation equipment of single crystal blade crystal orientation EBSD detection, can promote the preparation rate of EBSD detection sample, reach the purpose of shortening the detection period of single crystal blade crystal orientation.

[0005] The utility model realizes the following technical scheme:

[0006] A kind of sample preparation equipment of single crystal blade crystal orientation EBSD detection, including clamp and electrolytic device, clamp is used to clamp EBSD sample, then is ground on sample grinder, electrolytic device is used to electrolyze EBSD sample after grinding, electrolytic device includes electrolytic tank for storing electrolyte, and test sample clamp for placing EBSD sample after grinding is movably arranged above electrolytic tank.

[0007] Further preferably, the clamp adopts the clamp one, the clamp one comprises a base, a longitudinal guide rail, a transverse guide rail and a chuck one, the longitudinal guide rail is connected with the base, the transverse guide rail is in sliding connection with the longitudinal guide rail, the chuck one is in sliding connection with the transverse guide rail, and the chuck one is used for clamping the EBSD sample.

[0008] Further preferably, a longitudinal sliding buckle is arranged on the longitudinal guide rail in sliding mode, the transverse guide rail is connected with the longitudinal sliding buckle, a screw rod one is arranged on one side of the longitudinal sliding buckle and penetrates into the longitudinal sliding buckle to abut against the longitudinal guide rail; a transverse sliding buckle is arranged on the transverse guide rail in sliding mode, the chuck one is connected with the transverse sliding buckle, and a screw rod two is arranged on one side of the transverse sliding buckle and penetrates into the transverse sliding buckle to abut against the transverse guide rail.

[0009] Further preferably, an end of the chuck one is provided with a clamping groove one, one side of the clamping groove one is provided with a screw rod three penetrating into the clamping groove one to abut against the sample.

[0010] Further preferably, the clamp adopts the clamp two, the clamp two comprises a rotating shaft, one end of the rotating shaft is connected with an upper chassis, one side of the upper chassis away from the rotating shaft is detachably connected with a lower chassis, one side of the lower chassis away from the upper chassis is provided with a plurality of embedding grooves, a chuck two is embedded in the embedding grooves, and an end of the chuck two is provided with a clamping groove two used for clamping the EBSD sample.

[0011] Further preferably, the embedding grooves are evenly distributed in the circumferential direction of the edge of the lower chassis, a screw rod four is arranged on one side of the lower chassis corresponding to the embedding grooves, and the screw rod four penetrates into the clamping groove two to abut against the EBSD sample.

[0012] Further preferably, the bottom of the electrolytic cell is provided with a stirrer and a cooling pipeline, the bottom end of the electrolytic cell is provided with an electric telescopic pipe, the output end of the electric telescopic pipe is connected with a cathode plate in the electrolytic cell, a sample clamp is arranged above the cathode plate, the sample clamp is provided with a plurality of sample grooves used for placing the EBSD samples, and the sample grooves are arranged in a split row.

[0013] Further preferably, the electrolytic device further comprises a main support frame, one end of the main support frame is arranged above the electrolytic cell and is provided with a lifting structure, and an end of the lifting structure is provided with a rack, and the rack is connected with the sample clamp.

[0014] A preparation method of a sample preparation device for EBSD detection of a single crystal blade crystal orientation, comprising the following steps:

[0015] 1) mechanical polishing:

[0016] ① cutting the EBSD sample with consistent shape on the blade;

[0017] ② clamping the EBSD sample in the clamp and grinding on the grinder;

[0018] 2) electrolytic polishing:

[0019] ① Put the EBSD sample after mechanical polishing in the sample clamp of the electrolysis device;

[0020] ② Electrolysis in the electrolysis device;

[0021] ③ After the electrolysis, clean the EBSD sample.

[0022] Further preferably, the method comprises the following steps:

[0023] 1) Mechanical polishing:

[0024] Use the wire cut electrical discharge machine to cut the EBSD sample in the non-body area of the blade, install the sample detection surface on clamp one downwards, clamp, place clamp one on the platform of the semi-automatic sample grinder, adjust the height and distance, and then grind; or install the sample detection surface on clamp two downwards, clamp, and then install clamp two on the rotating shaft of the automatic sample grinder, and start the automatic sample grinding;

[0025] 2) Electrolytic polishing:

[0026] Place the sample after grinding on the sample clamp of the electrolysis device, complete locking, add electrolyte, start the computer program, set the stirring rate and electrolyte temperature; after the temperature is reached, set the electrolysis voltage, cathode distance, and electrolysis time, start electrolysis, after the electrolysis is completed, close the program, take out the sample clamp, clean the sample using cleaning medium, and after drying, the preparation of the EBSD sample is completed.

[0027] The utility model discloses the beneficial effects:

[0028] The utility model discloses the clamping EBSD sample after clamp in the sample grinder, electrolytic polishing is carried out to the EBSD sample after mechanical grinding in the electrolysis device, the utility model discloses the method simple operation, equipment simple production, and the suitability is strong, and the operator can use rapidly, can promote the preparation rate of EBSD detection sample, thereby shortens single crystal blade crystal orientation detection period.

[0029] The specific implementation of the utility model will be further explained in detail in combination with the drawings. DRAWINGS

[0030] The drawings are used to provide further understanding of the utility model, and constitute a part of the specification, and are used to explain the utility model together with the following specific implementation, but do not constitute the limitation to the utility model.In the drawings:

[0031] Figure 1 It is a structure schematic view of clamp one in the sample preparation equipment of the utility model.

[0032] Figure 2is a partial structure schematic view of the chuck one in the sample preparation equipment of the utility model.

[0033] Figure 3 is a structure schematic view of the chuck two in the sample preparation equipment of the utility model.

[0034] Figure 4 is a three-dimensional structure schematic view of the chuck two in the sample preparation equipment of the utility model.

[0035] Figure 5 is a three-dimensional structure schematic view of the electrolytic device in the sample preparation equipment of the utility model.

[0036] 110-base, 111-longitudinal guide rail, 112-lateral guide rail, 113-chuck one, 114-slotted one, 115-longitudinal slide buckle, 116-screw one, 117-slotted two, 118-lateral slide buckle, 119-screw two, 120-clamping groove one, 121-screw three, 210-rotating shaft, 211-upper bottom plate, 212-lower bottom plate, 213-embedded groove, 214-chuck two, 215-clamping groove two, 216-screw four, 310-electrolytic cell, 311-equipment groove, 312-equipment box, 313-telecommunication signal transmitter, 314-stirrer, 315-cooling pipeline, 316-cathode plate, 317-sample clamp, 318-sample groove, 319-main support frame, 320-lifting structure, 321-material rack. DETAILED DESCRIPTION

[0037] The embodiments of the utility model are described in detail below, the examples of the embodiments are shown in the drawings, wherein the same or similar reference signs represent the same or similar elements or elements with the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary, only for explaining the utility model, and cannot be understood as the limitation of the utility model.

[0038] In the description of the utility model, it is necessary to understand that the orientation or positional relation indicated by the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise" and the like is the orientation or positional relation based on the orientation or positional relation shown in the drawings, and is only for the convenience of describing the utility model and simplifying the description, and therefore cannot be understood as indicating or implying that the device or element indicated must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the utility model. In addition, the terms "first" and "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features limited by "first" and "second" can explicitly or implicitly include one or more of the features. In the description of the utility model, the meaning of "multiple" is two or more than two, unless otherwise explicitly specified and limited.

[0039] In the description of the utility model, it should be explained that, unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connection" should be understood broadly, for example, it can be fixed connection, or detachable connection, or integrally connected, it can be mechanical connection, or electrical connection or can communicate with each other, it can be directly connected, or indirectly connected through intermediate medium, it can be the communication or interaction relationship between two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0040] In the utility model, unless otherwise explicitly specified and limited, the "upper" or "lower" of the first feature to the second feature can include that the first and second features are in direct contact, or the first and second features are not in direct contact but are in contact through another feature between them. Moreover, the "upper", "upper" and "upper" of the first feature to the second feature include that the first feature is directly above and obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The "below", "below" and "below" of the first feature to the second feature include that the first feature is directly below and obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0041] The disclosure below provides many different embodiments or examples for implementing different structures of the present application. For the sake of simplicity, the description below of the specific examples will not be exhaustive of the disclosure. Indeed, the present application can be practiced in a variety of ways. Accordingly, other embodiments and examples of the present application will be suggested to those skilled in the art by this disclosure. For example, even though the examples provided by the disclosure are not to scale and are not necessarily drawn to scale with the other illustrations, if any, in the disclosure, the specific dimensions and / or other physical characteristics related to the examples disclosed herein are not to be considered as limiting. The disclosure is presented merely to simplify and clarify the present application and the conception behind it. In particular, the description below of the specific examples is not intended to limit the scope of the present application. Indeed, the present application can be practiced in a variety of ways. Accordingly, other embodiments and examples of the present application will be suggested to those skilled in the art by this disclosure.

[0042] Embodiment 1

[0043] A sample preparation device for single crystal blade crystal orientation EBSD detection, comprising a clamp one and an electrolytic device, the clamp one is used for clamping the EBSD sample, and then grinding on a semi-automatic sample grinder, and the electrolytic device is used for electrolyzing the EBSD sample after mechanical grinding and polishing.

[0044] As shown in Figure 1 and 2 , the clamp one comprises a base 110, a longitudinal guide rail 111, a transverse guide rail 112 and a chuck one 113, the longitudinal guide rail 111 is connected with the base 110, the transverse guide rail 112 is slidingly connected with the longitudinal guide rail 111, and the chuck one 113 is slidingly connected with the transverse guide rail 112, the base 110 is used as a bearing structure of the clamp one tool, the longitudinal guide rail 111 is fixed with the base 110 by bolts, the longitudinal guide rail 111 is provided with a sliding groove one 114, the transverse guide rail 112 slides up and down along the longitudinal guide rail 111 through the sliding groove one 114, thereby controlling the longitudinal movement of the use part of the clamp tool, that is, the longitudinal movement of the chuck one 113, so as to adjust the use height. Preferably, the longitudinal guide rail 111 is provided with a longitudinal sliding buckle 115 along the sliding groove one 114, the transverse guide rail 112 is connected with the longitudinal sliding buckle 115, so that the transverse guide rail 112 is slidingly connected with the longitudinal guide rail 111, a screw rod one 116 penetrating into the longitudinal sliding buckle 115 and abutting against the longitudinal guide rail 111 is arranged on one side of the longitudinal sliding buckle 115, and the longitudinal guide rail 111 and the transverse guide rail 112 are locked by the screw rod one 116, so as to control the locking of the chuck on the longitudinal guide rail 111.

[0045] The transverse guide rail 112 is provided with a sliding groove two 117, and the transverse sliding buckle 118 is arranged on the transverse guide rail 112 and slides along the sliding groove two 117; the chuck one 113 is connected with the transverse sliding buckle 118 and is used for transverse movement of the chuck one 113, so as to adjust the use distance. The transverse sliding buckle 118 is provided with a screw rod two 119 penetrating into the transverse sliding buckle 118 and abutting against the transverse guide rail 112; and the chuck one 113 is locked with the transverse guide rail 112 by using the screw rod two 119. The chuck one 113 is preferably provided in a columnar structure, and the end of the chuck one 113 is provided with a clamping groove one 120; one side of the clamping groove one 120 is provided with a screw rod three 121 penetrating into the clamping groove one 120 and abutting against the sample; and the screw rod three 121 is used for clamping and fixing the EBSD sample.

[0046] As shown in Figure 5 The electrolytic device includes an electrolytic tank 310, which is used for storing electrolyte and performing electrolysis operation. The electrolytic tank 310 is provided with a scale for recording the height of the electrolyte. The electrolytic tank 310 is also provided with a heating belt for heating the electrolyte. One end of the electrolytic tank 310 is provided with a device groove 311, and three device boxes 312 are arranged in the device groove 311. The device groove 311 is provided with a telecommunication signal transmitter 313 outside the device groove 311. The telecommunication signal transmitter 313 is connected with the three device boxes 312. The telecommunication signal transmitter 313 receives signals received by the sensor and converts the signals into signals that can be processed by a computer.

[0047] A stirrer 314 is arranged at the bottom of the electrolytic tank 310. The stirrer 314 is in a blade wheel structure and is used for stirring the electrolyte to control the concentration of the electrolyte. A cooling pipeline 315 is also arranged at the bottom of the electrolytic tank 310. The cooling pipeline 315 is in a meandering structure and is connected with a cooling medium. The cooling pipeline 315 is used for cooling the electrolyte to control the temperature of the electrolyte. A cathode plate 316 is arranged in the electrolytic tank 310. The bottom surface of the cathode plate 316 is connected with the electrolytic tank 310 through an electric telescopic pipe. The electric telescopic pipe is used for controlling the lifting of the cathode plate 316 to adjust the distance between the cathode and the anode.

[0048] A sample clamp 317 is arranged above the cathode plate 316. The sample clamp 317 is provided with a plurality of sample grooves 318 matched with EBSD samples. The sample grooves 318 are preferably arranged in rows. Each of the sample grooves 318 in each row is connected in parallel with a circuit and is connected with a transformer to form a closed loop, so as to ensure that the electrolysis voltage of each EBSD sample is consistent. Alternatively, the sample clamp 317 includes a bottom plate and a sample plate. The sample grooves 318 are arranged on the sample plate. The sample plate is detachably connected with the bottom plate. For example, the sample plate and the bottom plate are tightly buckled together by using buckles, so as to lock the samples. The bottom plate and the sample plate can also be fixedly arranged in one body.

[0049] The electrolysis device further comprises a main support frame 319, the bottom end of the main support frame 319 is connectable with the equipment box 312, the other end of the main support frame 319 is above the electrolytic cell 310, and a lifting structure 320 is arranged at the end of the main support frame 319, the lifting structure 320 has a lifting function, and an end of the lifting structure 320 is provided with a rack 321, the rack 321 is connected with the sample clamp 317, the sample clamp 317 is driven to lift by the lifting structure 320 on the main support frame 319, so that the control on the sample invasion depth of the electrolyte is completed.

[0050] Embodiment 2

[0051] A sample preparation device for single crystal blade crystal orientation EBSD detection, comprising a clamp two and an electrolysis device, as shown in Figure 3 and 4 The clamp two comprises a rotating shaft 210, the rotating shaft 210 is used for connecting the clamp two with the full-automatic sample grinder, one end of the rotating shaft 210 is connected with an upper chassis 211, the side of the upper chassis 211 away from the rotating shaft 210 is detachably connected with a lower chassis 212, for example, the upper chassis 211 is connected with the lower chassis 212 by bolts, the side of the lower chassis 212 away from the upper chassis 211 is provided with a plurality of embedded grooves 213, a clamp head two 214 is embedded in each embedded groove 213, the clamp head two 214 is preferably a cylindrical structure, the end of the clamp head two 214 is provided with a clamping groove two 215, which is used for clamping the EBSD sample, preferably, the embedded grooves 213 are uniformly distributed in the circumferential direction of the edge of the lower chassis 212, and a screw four 216 is arranged on the side of the lower chassis 212 corresponding to the embedded grooves 213, the screw four 216 penetrates into the clamping groove two 215 and abuts against the sample, and the screw four 216 is used for clamping and fixing the EBSD sample.

[0052] In the embodiment, the electrolysis device is the same as the electrolysis device in embodiment 1.

[0053] Embodiment 3

[0054] A sample preparation method for single crystal blade crystal orientation EBSD detection, which uses the device in embodiment 1 to prepare the sample, and comprises the following steps:

[0055] 1) Mechanical polishing:

[0056] ①Cut the EBSD sample with the same shape on the blade.

[0057] ②Clamp the EBSD sample in the clamp one in embodiment 1, and grind the sample on the semi-automatic sample grinder.

[0058] 2) Electrolytic polishing:

[0059] ①Place the EBSD sample after mechanical polishing in a special plastic tool and fix it.

[0060] ② Place the plastic fixture containing the EBSD sample into the sample holder 317 of the electrolysis apparatus in Example 1.

[0061] ③ Set the electrolysis parameters and start automatic electrolysis.

[0062] ④ EBSD sample cleaning.

[0063] Example 4

[0064] A sample preparation method for EBSD detection of crystal orientation in single-crystal blades, using the equipment of Example 2, includes the following steps:

[0065] 1) Mechanical polishing:

[0066] ① Cut out EBSD samples of uniform shape from the blade.

[0067] ② The EBSD sample is clamped in fixture two of Example 2 and ground on a fully automatic grinding machine.

[0068] 2) Electropolishing:

[0069] ① Place the mechanically polished EBSD sample in a special plastic fixture and fix it in place.

[0070] ② Place the plastic fixture containing the EBSD sample into the sample holder 317 of the electrolysis apparatus in Example 2.

[0071] ③ Set the electrolysis parameters and start automatic electrolysis.

[0072] ④ EBSD sample cleaning.

[0073] This invention uses an electrical discharge wire cutting machine to cut EBSD samples that meet the requirements from the non-body area of ​​the blade. The sample is mounted face down on clamp one and clamped. Clamp one is placed on the platform of a semi-automatic grinding machine, adjusted to a suitable height and distance, and then ground. Alternatively, the sample is mounted face down on clamp two, clamped, and then clamped onto the rotating shaft of an automatic grinding machine. Automatic grinding is then started. The ground sample is placed on the sample clamp 317 of the electrolysis device, locked, and then locked and clamped to the material rack 321. Electrolyte of suitable concentration is added to the specified height, the computer program is started, and the stirring rate and electrolyte temperature are set. After reaching the set temperature, the electrolysis voltage, cathode distance, and electrolysis time are set, and electrolysis begins. After electrolysis, the program is closed, sample clamp 317 is removed, the sample is cleaned with cleaning medium, and dried, thus completing the preparation of the EBSD sample.

[0074] The utility model discloses method operation is simple, equipment manufacturing is simple, and suitability is strong, and operating personnel can use rapidly on hand. If there is new component's EBSD sample subsequently, can complete the quick preparation of EBSD sample through the adjustment of electrolyte component, electrolyte temperature, electrolytic voltage, cathode distance, electrolysis time.

[0075] In the description of the present specification, the description referring to the terms "one embodiment", "certain embodiments", "exemplary embodiment", "example", "specific example", or "some examples" and the like means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present specification, the exemplary description of the above terms does not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0076] In conclusion, although the utility model has disclosed above with preferred embodiment, the above preferred embodiment is not used to limit the utility model, the ordinary skilled person in the art can make various changes and decorations without departing from the spirit and scope of the utility model, therefore the protection scope of the utility model is the range defined by the claims.

Claims

1. A sample preparation apparatus for single crystal blade crystal orientation EBSD detection, characterized by: The device comprises a clamp and an electrolytic device, the clamp is used for clamping the EBSD sample and then grinding on a sample grinder, the electrolytic device is used for electrolyzing the ground EBSD sample, the electrolytic device comprises an electrolytic tank (310) for storing electrolyte, and a sample clamp (317) for placing the ground EBSD sample is movably arranged above the electrolytic tank (310).

2. A sample preparation apparatus for single crystal blade crystal orientation EBSD detection according to claim 1, characterized in that: The clamp adopts clamp one, which comprises a base (110), a longitudinal guide rail (111), a transverse guide rail (112) and a chuck one (113), the longitudinal guide rail (111) is connected with the base (110), the transverse guide rail (112) is slidably connected with the longitudinal guide rail (111), and the chuck one (113) is slidably connected with the transverse guide rail (112), and the chuck one (113) is used for clamping the EBSD sample.

3. A sample preparation apparatus for single crystal blade crystal orientation EBSD detection according to claim 2, characterized in that: A longitudinal sliding buckle (115) is slidably arranged on the longitudinal guide rail (111), the transverse guide rail (112) is connected with the longitudinal sliding buckle (115), a screw one (116) penetrating into the longitudinal sliding buckle (115) and abutting against the longitudinal guide rail (111) is arranged on one side of the longitudinal sliding buckle (115); a transverse sliding buckle (118) is slidably arranged on the transverse guide rail (112), the chuck one (113) is connected with the transverse sliding buckle (118), and a screw two (119) penetrating into the transverse sliding buckle (118) and abutting against the transverse guide rail (112) is arranged on one side of the transverse sliding buckle (118).

4. A sample preparation apparatus for single crystal blade crystal orientation EBSD detection according to claim 2, characterized in that: An end of the chuck one (113) is provided with a clamping groove one (120), and one side of the clamping groove one (120) is provided with a screw three (121) penetrating into the clamping groove one (120) and abutting against the sample.

5. The sample preparation apparatus for single crystal blade crystal orientation EBSD detection according to claim 1, characterized in that: The clamp adopts clamp two, which comprises a rotating shaft (210), one end of the rotating shaft (210) is connected with an upper chassis (211), one side of the upper chassis (211) away from the rotating shaft (210) is detachably connected with a lower chassis (212), a plurality of embedding grooves (213) are arranged on one side of the lower chassis (212) away from the upper chassis (211), and a chuck two (214) is embedded in each embedding groove (213); and an end of the chuck two (214) is provided with a clamping groove two (215) for clamping the EBSD sample.

6. A sample preparation apparatus for single crystal blade crystal orientation EBSD detection according to claim 5, characterized in that: The embedding grooves (213) are evenly distributed in the circumferential direction of the edge of the lower chassis (212), and a screw four (216) is arranged on one side of the lower chassis (212) corresponding to the embedding grooves (213), and the screw four (216) penetrates into the clamping groove two (215) and abuts against the EBSD sample.

7. The sample preparation apparatus for single crystal blade crystal orientation EBSD detection according to claim 1, characterized in that: A stirrer (314) and a cooling pipeline (315) are arranged on the inner bottom of the electrolytic tank (310), an electric telescopic pipe is arranged at the bottom end of the electrolytic tank (310), a cathode plate (316) is connected to the output end of the electric telescopic pipe in the electrolytic tank (310), the sample clamp (317) is arranged above the cathode plate (316), the sample clamp (317) is provided with a plurality of sample grooves (318) for placing the EBSD sample, and the sample grooves (318) are arranged in rows.

8. A sample preparation apparatus for single crystal blade crystal orientation EBSD detection according to claim 7, characterized in that: The electrolysis device further comprises a main support frame (319) which is arranged above the electrolytic cell (310) at one end and is provided with a lifting structure (320), and the lifting structure (320) is provided with a rack (321) at the end, and the rack (321) is connected with the sample clamp (317).

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