Electrostatic discharge generator for integrated circuit test

Abstract

The utility model discloses an electrostatic discharge generator for testing an integrated circuit. According to the electrostatic discharge generator used for the integrated circuit test provided by the utility model, a low parasitic effect transmission channel of electrostatic discharge pulses is formed by the replaceable resistance-capacitance module, the gun body, the bevel gun head adapter and the micro-size gun head, so that the electrostatic discharge pulses are ensured not to be distorted; the gun body is supported by the gun body adapter plate and the gun body bracket at a certain inclination angle, so that the micro-size gun head is ensured to be accurately and stably positioned on the pin of the tested integrated circuit, the precise identification of the fine pin of the integrated circuit is realized, and the tested integrated circuit is prevented from being damaged by mechanical stress; the electrostatic discharge generator host and the control computer can control the output of high-grade and multi-electrostatic discharge pulses and other integrated circuit electrostatic discharge immunity tests meeting the requirements of the current integrated circuit industry.

Description

TECHNICAL FIELD

[0001] The utility model relates to a static electricity generator for integrated circuit test belongs to electromagnetic compatibility test technical field. BACKGROUND

[0002] The electromagnetic compatibility test of integrated circuit is a relatively new technology, and the electrostatic discharge (ESD) immunity test is an important test project in the electromagnetic compatibility test of integrated circuit. The output level of the current commercial electrostatic discharge generator is up to ±9kV, while the demand level of integrated circuit research and development manufacturers has exceeded ±15kV. In addition, the existing commercial electrostatic discharge generator has a very high damage frequency and high maintenance cost, and this performance defect has become one of the important problems that the relevant detection agencies urgently need to solve. In addition, the output level of the existing electrostatic discharge generator for equipment level test is relatively high, which can exceed ±25kV, but the electrostatic discharge gun is large in size and heavy, and the gun head is also large in size. In the test, the electrostatic discharge gun is usually held by hand to pull the trigger to perform ESD test on the equipment. If the electrostatic discharge generator for equipment level test is applied to the ESD test of integrated circuit pins, it is difficult to accurately identify the fine pins of integrated circuit; the slight movement caused by holding the electrostatic discharge gun will affect the test voltage level, and may cause short circuit between the pins of integrated circuit; the weight of the electrostatic discharge gun will cause mechanical stress on the pins of integrated circuit, thereby damaging the tested integrated circuit. SUMMARY

[0003] The utility model aims at providing a static electricity generator for integrated circuit test, which is applied to the electrostatic discharge immunity test of integrated circuit, realizes high discharge voltage level, small size gun head, accurate and stable test positioning, and can control multiple electrostatic discharge pulse outputs, meets the current demand of integrated circuit industry and ensures the accuracy and reliability of test results.

[0004] In order to achieve the above purpose, the utility model discloses a static electricity generator for integrated circuit test, which is characterized by comprising a small size gun head vertically downward and used for contacting the pin of the tested integrated circuit, the gun head of the small size gun head is a needle-shaped good conductor metal, the small size gun head is connected with the gun head base through the angle gun head adapter, the angle gun head adapter is an angle good conductor metal, the gun head base is a hollow flat head cone-shaped hard structure, the gun head base is also connected with the gun body, the gun body is a hard structure shell outside, and the inside contains a high voltage relay for controlling the electrostatic discharge pulse discharge, a space for containing the electrostatic discharge pulse charge and discharge resistance and capacitance module and a good conductor metal connecting structure, the good conductor metal with low impedance on the electrostatic discharge pulse transmission path in the gun head base contacts the good conductor metal on the electrostatic discharge pulse transmission path in the gun body;

[0005] The gun body is provided with a state indicating lamp for displaying the working state of the electrostatic discharge generator.

[0006] The gun body is provided with a replaceable resistance-capacitance module, which is a capacitance and resistance module for charging and discharging the electrostatic discharge pulse and is connected to the electrostatic discharge pulse transmission path in the gun body.

[0007] The gun body is fixed to the gun body support through the gun body adapter plate, and the gun body adapter plate and the gun body support are both made of hard material and are fixed on the connecting inclined surface at an inclination angle of 90° minus the internal angle of the angle gun head adapter.

[0008] The gun body is connected to the electrostatic discharge generator host through the electrostatic discharge gun connecting line, which includes a high-voltage power supply line and a high-voltage relay control line, and can increase an electrostatic discharge return line according to the application scenario, wherein: when the electrostatic discharge loop of the gun body is near-end, the electrostatic discharge gun connecting line does not need to increase the electrostatic discharge return line; when the electrostatic discharge loop of the gun body is far-end, the electrostatic discharge gun connecting line increases the electrostatic discharge return line.

[0009] The electrostatic discharge generator host for generating high voltage required by the gun body to generate electrostatic discharge pulse and controlling related parameters is communicated to the control computer.

[0010] Preferably, the tip diameter of the micro-size gun head is less than 1mm; the length of the micro-size gun head can be adjusted according to the processing technology and the mechanical strength coordination with the gun body.

[0011] Preferably, the angle gun head adapter and the micro-size gun head are fixedly connected through metal screws with low impedance.

[0012] Preferably, the small-diameter end of the gun head base is fixedly connected with the angle gun head adapter, and the large-diameter end is reliably connected with the gun body through a threaded interface or a buckle interface.

[0013] Preferably, the gun head base and the gun body are plastic structures.

[0014] Preferably, the hollow inner wall of the gun head base is sprayed with a metal shielding coating process to reduce the external radiation effect on the electrostatic discharge pulse transmission path, and the metal shielding coating of the hollow inner wall of the gun head base does not contact the conductor of the angle gun head adapter.

[0015] Preferably, the front end of the gun body is a threaded interface or a buckle interface matched with the threaded interface or the buckle interface of the gun head base, and the rear end is a threaded interface or a buckle interface for reliably connecting the replaceable resistance-capacitance module.

[0016] Preferably, the inner wall of the gun body shell is sprayed with a metal shielding coating process, and the metal shielding coating of the inner wall of the gun body shell is not in contact with the conductor on the direct transmission channel of the electrostatic discharge pulse.

[0017] Preferably, the hard material of the gun body adapter plate and the gun body support is the same, and can be selected from a good conductor metal or plastic according to different application scenarios, wherein: when the electrostatic discharge loop of the gun body is proximal, the gun body adapter plate and the gun body support are selected to be a good conductor metal, and are connected with the electrostatic discharge loop inside the gun body in a low impedance manner to form the electrostatic discharge loop of the gun body together; when the electrostatic discharge loop of the gun body is distal, the gun body adapter plate and the gun body support are selected to be a hard plastic.

[0018] Preferably, the replaceable resistance-capacitance module is reliably fixed on the gun body through the cover at the end.

[0019] Compared with the prior art, the electrostatic discharge generator for integrated circuit test has the following beneficial technical effects: the electrostatic discharge generator for integrated circuit test comprises a replaceable resistance-capacitance module, a gun body, an angle gun head adapter and a micro-size gun head, and forms a low parasitic effect transmission channel of an electrostatic discharge pulse, so that the electrostatic discharge pulse is not distorted; the gun body is supported by a gun body adapter plate and a gun body support at a certain inclination angle, so that the micro-size gun head is accurately and stably positioned on the pin of the measured integrated circuit, the fine pin of the integrated circuit is accurately identified, and the measured integrated circuit is prevented from being damaged by mechanical stress; the electrostatic discharge generator host and the control computer can control the output of high-level, multiple electrostatic discharge pulses and other integrated circuit electrostatic discharge immunity tests that meet the current needs of the integrated circuit industry. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 is a structural schematic diagram of an embodiment of the electrostatic discharge generator for integrated circuit test of the utility model;

[0021] Figure 2 is an application example of the electrostatic discharge single pulse of the utility model;

[0022] Figure 3 is an application example of the control software interface of the electrostatic discharge generator for integrated circuit test of the utility model. DETAILED DESCRIPTION

[0023] The utility model will be further described below in combination with specific embodiments. It should be understood that these embodiments are only used to illustrate the utility model and are not used to limit the scope of the utility model. In addition, it should be understood that after reading the content taught by the utility model, those skilled in the art can make various changes or modifications to the utility model, and these equivalent forms also fall within the scope defined by the claims attached to the present application.

[0024] The utility model discloses an electrostatic discharge generator for integrated circuit test, as shown in Figure 1 The utility model discloses an electrostatic discharge generator for integrated circuit test, as shown in

[0025] The gun head of micro size 1 is needle-like good conductor metal, is used for contacting the integrated circuit pin of measured, and its tip diameter is less than 1mm. The length of the gun head of micro size 1 is adjustable according to the processing technology and the mechanical strength coordination with the gun body. In the utility model embodiment, to ensure the low parasitic effect of electrostatic discharge pulse transmission path, its length is usually 2cm~4cm.

[0026] The corner gun head adapter 2 is a corner good conductor metal, is used for connecting the gun head of micro size 1 and the gun head base 3, and ensures that the gun head of micro size 1 is vertically downward. The connection of the corner gun head adapter 2 and the gun head of micro size 1 is fixed by metal screw low impedance.

[0027] The gun head base 3 is a hollow flat head conical hard structure, is used for connecting the corner gun head adapter 2 and the gun body 4, wherein the small diameter end of the gun head base 3 is fixedly connected with the corner gun head adapter 2, and the large diameter end is a threaded interface or a buckle interface, facilitating reliable connection with the gun body 4. The gun head base 3 is a plastic structure, facilitating weight reduction and reducing the low parasitic effect of electrostatic discharge pulse transmission path. The hollow inner wall of the gun head base 3 is sprayed by metal shielding coating process to reduce the external radiation effect on the electrostatic discharge pulse transmission path, and the hollow inner wall metal shielding coating should not be in contact with the conductor of the corner gun head adapter 2, avoiding that the electrostatic discharge pulse is directly transmitted to the hollow inner wall metal shielding coating of the gun head base 3.

[0028] The gun body 4 is a hard structure shell outside, and contains a high voltage relay for controlling electrostatic discharge pulse discharge, a space for accommodating electrostatic discharge pulse charge and discharge resistance and capacitance module, and necessary good conductor metal connection structure inside. The gun body 4 is a plastic structure, facilitating weight reduction and reducing the low parasitic effect of electrostatic discharge pulse transmission path. The front end of the gun body 4 is an outer (or inner) threaded interface or buckle interface matched with the inner (or outer) threaded interface or buckle interface of the gun head base 3, ensuring reliable connection of the gun body 4 and the gun head base 3, and ensuring that the good conductor metal on the electrostatic discharge pulse transmission path inside the gun head base 3 is in low impedance contact with the good conductor metal on the electrostatic discharge pulse transmission path inside the gun body 4.

[0029] The rear end of the gun body 4 is an external (or internal) threaded interface or a buckle interface to facilitate reliable connection of the replaceable resistance-capacitance module. The inner wall of the shell of the gun body 4 is sprayed with a metal shielding coating process to reduce the external radiation effect on the static discharge pulse transmission path, and the metal shielding coating of the inner wall of the shell of the gun body 4 cannot be in contact with the conductor on the direct transmission path of the static discharge pulse.

[0030] The state indicating lamp 5 is an LED indicating lamp for displaying the working state of the static discharge generator, and the state indicating lamp 5 displays different colors in the discharge working state and standby state of the static discharge generator.

[0031] The replaceable resistance-capacitance module 6 is a capacitance and resistance module for charging and discharging the static discharge pulse. The replaceable resistance-capacitance module 6 can be stably placed in the gun body 4 and matched to be connected to the static discharge pulse transmission path in the gun body 4. The end of the replaceable resistance-capacitance module 6 has a cover body for reliable fixation on the gun body 4. In the embodiment of the utility model, the end cover body of the replaceable resistance-capacitance module 6 is an internal (or external) threaded interface or a buckle interface matched with the external (or internal) threaded interface or the buckle interface of the rear end of the gun body 4. The capacitance and resistance value of the replaceable resistance-capacitance module 6 can be replaced according to test requirements, and is usually 75 pF / 100 Ω, 150 pF / 330 Ω, 330 pF / 330 Ω, 150 pF / 2000 Ω, 330 pF / 2000 Ω, etc.

[0032] The gun body adapter plate 7 is a hard material for reinforcing the gun body 4 and fixing it on the gun body support 8.

[0033] The gun body support 8 is a hard material for supporting the gun body 4 with the gun body adapter plate 7, for fixing the gun body 4 on the connecting inclined surface at an inclination angle of the inner angle of the folding angle gun head adapter 2 minus 90° to ensure that the micro-size gun head 1 is vertically downward. The inclination angle of the connecting inclined surface of the gun body support 8 is greater than 0° to make the gun body 4 as far as possible from the test table ground plane where the integrated circuit under test is located, thereby reducing the parasitic effect. At the same time, the inclination angle of the connecting inclined surface of the gun body support 8 is less than 90° to better support the gun body 4 and avoid the weight stress of the gun body 4 from being applied to the pin of the integrated circuit under test, thereby reducing the risk of mechanical damage to the integrated circuit under test.

[0034] The hard materials of the gun body adapter plate 7 and the gun body support 8 are the same and can be selected from good conductor metals or plastics according to different application scenarios. When the static discharge loop of the gun body 4 is proximal, the gun body adapter plate 7 and the gun body support 8 are selected from good conductor metals and are connected with low impedance in the static discharge loop inside the gun body 4 to jointly form the static discharge loop of the gun body 4. When the static discharge loop of the gun body 4 is distal, the gun body adapter plate 7 and the gun body support 8 are selected from hard plastics.

[0035] The electrostatic discharge gun connecting line 9 includes a high-voltage power supply line, a high-voltage relay control line, and an electrostatic discharge return line which can be added according to the application scenario. When the electrostatic discharge loop of the gun body 4 is proximal, the electrostatic discharge gun connecting line 9 does not need to add an electrostatic discharge return line; when the electrostatic discharge loop of the gun body 4 is distal, the electrostatic discharge gun connecting line 9 adds an electrostatic discharge return line.

[0036] The high-voltage power supply line of the electrostatic discharge gun connecting line 9 is wrapped with a reliable insulating layer for high-voltage insulation isolation. The high-voltage power supply line and the high-voltage relay control line of the electrostatic discharge gun connecting line 9 are commonly wired, and the additional electrostatic discharge return line can be separately wired according to the application scenario.

[0037] The electrostatic discharge generator host 10 is used to generate high voltage required by the gun body 4 to generate electrostatic discharge pulses, and control parameters such as voltage level, discharge interval time, polarity and number of discharge pulses of the electrostatic discharge pulses.

[0038] The control computer 11 is communicatively connected to the electrostatic discharge generator host 10, which is used as an upper computer to control the electrostatic discharge generator host 10, and is used to edit electrostatic discharge pulses with specific parameter requirements, such as electrostatic discharge pulse groups.

[0039] The control method of the electrostatic discharge generator for integrated circuit testing includes the following steps:

[0040] Step 1: The electrostatic discharge generator for integrated circuit testing is in an open state and is communicatively connected to a control upper computer. The control upper computer is usually a computer. An alternative solution is that the control functions realized by the control upper computer can also be built into the host interface of the electrostatic discharge generator for integrated circuit testing.

[0041] Step 2: Set the voltage, polarity, interval time of the electrostatic discharge single pulse, and the number of electrostatic discharge single pulses on the upper computer interface to realize the test control of the electrostatic discharge single pulse. The voltage of the electrostatic discharge single pulse is usually 100V to 30kV, the polarity is usually positive (+) or negative (-), the interval time is usually 50ms to 10s, and the number of electrostatic discharge single pulses can be set according to the test requirements, such as 1 to 100 times.

[0042] Step 3: Multiple electrostatic discharge single pulses set in step 2 constitute a string of electrostatic discharge pulses, i.e. electrostatic discharge pulse string or electrostatic discharge pulse group, for example, 10 times, i.e. 1 electrostatic discharge pulse string or electrostatic discharge pulse group containing 10 electrostatic discharge single pulses.

[0043] The number and interval time of the electrostatic discharge pulse series or electrostatic discharge pulse group can be set on the host computer interface, so as to realize test control of the electrostatic discharge pulse series or electrostatic discharge pulse group, wherein the interval time of the electrostatic discharge pulse series or electrostatic discharge pulse group is generally greater than the interval time of the electrostatic discharge single pulse contained in the electrostatic discharge pulse series or electrostatic discharge pulse group.

Claims

1. An electrostatic discharge generator for integrated circuit testing, characterized by, The micro-size gun head includes a vertical downward and a micro-size gun head for contacting the pin of the integrated circuit to be tested, the gun head of the micro-size gun head is a needle-shaped good conductor metal, the micro-size gun head is connected with the gun head base through the angle gun head adapter, the angle gun head adapter is an angle good conductor metal, the gun head base is a hollow flat cone-shaped hard structure, the gun head base is also connected with the gun body, the gun body is a hard structure shell outside, and the inside includes a high-voltage relay for controlling the electrostatic discharge pulse discharge, a space for accommodating the electrostatic discharge pulse charging and discharging resistance and capacitance module and a good conductor metal connecting structure, the good conductor metal with low impedance on the electrostatic discharge pulse transmission path in the gun head base is in contact with the good conductor metal on the electrostatic discharge pulse transmission path in the gun body; The gun body is provided with a state indicating lamp for displaying the working state of the electrostatic discharge generator; The gun body is provided with a replaceable resistance and capacitance module, the replaceable resistance and capacitance module is a capacitance and resistance module for electrostatic discharge pulse charging and discharging, and is matched and connected to the electrostatic discharge pulse transmission path in the gun body; The gun body is fixed on the gun body support through the gun body adapter plate, the gun body adapter plate and the gun body support are both made of hard material, and the gun body is fixed on the connecting slope at an inclination angle of 90° minus the inner angle of the angle gun head adapter through the gun body support; The gun body is connected with the electrostatic discharge generator host through the electrostatic discharge gun connecting line, the electrostatic discharge gun connecting line includes a high-voltage power supply line and a high-voltage relay control line, and according to the application scene, an electrostatic discharge return line can be added, wherein: when the electrostatic discharge loop of the gun body is near-end, the electrostatic discharge gun connecting line does not need to add the electrostatic discharge return line; when the electrostatic discharge loop of the gun body is far-end, the electrostatic discharge gun connecting line adds the electrostatic discharge return line; The electrostatic discharge generator host for generating high voltage required by the gun body to generate electrostatic discharge pulse and controlling related parameters is communicated to the control computer.

2. An electrostatic discharge generator for integrated circuit testing as defined in claim 1, wherein, The tip diameter of the micro-size gun head is less than 1mm; the length of the micro-size gun head can be adjusted according to the processing process and the mechanical strength coordination with the gun body.

3. An electrostatic discharge generator for integrated circuit testing as recited in claim 1, wherein, The angle gun head adapter and the micro-size gun head are fixedly connected through metal screws with low impedance.

4. An electrostatic discharge generator for integrated circuit testing as recited in claim 1, wherein, The small-diameter end of the gun head base is fixedly connected with the angle gun head adapter, and the large-diameter end is reliably connected with the gun body through a threaded interface or a buckle interface.

5. An electrostatic discharge generator for integrated circuit testing as recited in claim 1, wherein, The gun head base and the gun body are plastic structures.

6. An electrostatic discharge generator for integrated circuit testing as recited in claim 1, wherein, The hollow inner wall of the gun head base is sprayed with a metal shielding coating process to reduce the external radiation effect on the electrostatic discharge pulse transmission path, and the metal shielding coating of the hollow inner wall of the gun head base does not contact the conductor of the angle gun head adapter.

7. An electrostatic discharge generator for integrated circuit testing as recited in claim 1, wherein, The front end of the gun body is a threaded interface or a buckle interface matched with the threaded interface or the buckle interface of the gun head base, and the rear end is a threaded interface or a buckle interface facilitating reliable connection of the replaceable resistance and capacitance module.

8. An electrostatic discharge generator for integrated circuit testing as recited in claim 1, wherein, The inner wall of the gun body shell is sprayed with a metal shielding coating process, and the metal shielding coating of the inner wall of the gun body shell does not contact the conductor on the direct electrostatic discharge pulse transmission path.

9. An electrostatic discharge generator for integrated circuit testing as recited in claim 1, wherein, The hard material of the gun body adapter plate and the gun body support is the same, and can be selected from a good conductor metal or plastic according to different application scenarios, wherein: when the electrostatic discharge circuit of the gun body is proximal, the gun body adapter plate and the gun body support are selected to be a good conductor metal, and are connected to the electrostatic discharge circuit inside the gun body with low impedance, thereby jointly forming the electrostatic discharge circuit of the gun body; when the electrostatic discharge circuit of the gun body is distal, the gun body adapter plate and the gun body support are selected to be hard plastic.

10. An electrostatic discharge generator for integrated circuit testing as recited in claim 1, wherein, The replaceable resistance-capacitance module is reliably fixed on the gun body through the end cover.

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