Mask dismounting platform

Abstract

The utility model belongs to the technical field of photoetching development of electronic products, and particularly relates to a mask disassembling platform which comprises a base, an installation adjusting structure is installed at the top of the base, a mask disassembling structure is installed at the bottom of the installation adjusting structure, and a pressing structure is installed at one end of the back face of the top of the base. The installation adjusting structure comprises a lifting connecting unit and an installation supporting unit, the lifting connecting unit comprises a lifting rod, a rotary knob is installed at the top end of the lifting rod, a rotating block is installed at the bottom end of the lifting rod, and a limiting sleeve is connected to the outer surface of the rotating block. According to the mask disassembling platform, through the arrangement of the installation adjusting structure and the mask disassembling structure, the lifting rod is rotated to drive the rotating block and the limiting sleeve to ascend, so that the lifting plate is driven to ascend and descend, the sliding block, the mask disassembling rod and the ejector pin are driven to ascend, a mask is disassembled, and the mask disassembling structure is placed on the left side and the right side of the top face of the base and cannot affect the mask.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of electronic product photoetching development, concretely to a mask film removing platform. BACKGROUND

[0002] The mask is a mold required in the semiconductor industry and integrated circuit manufacturing, which can copy the pattern on the mask on the wafer through the exposure process. The mask protective film is a transparent film attached to the aluminum alloy frame to prevent particles, dust and other contaminants from falling on the pattern. During the actual film attaching process, particles may fall due to environmental and personnel factors, and rework may be required when the detection is not qualified. In addition, when the customer uses the mask multiple times or stores it for a long time, the protective film may be dirty or damaged, and the mask needs to be returned to the mask factory for rework. In this case, the protective film needs to be removed and cleaned before being attached again.

[0003] During manual film removal, the mask is directly placed in a single piece box and then pressed by hand to remove the protective film. Since the mask is not fixed, it is easy to scratch the mask, which is inefficient and has a high scrap rate.

[0004] As disclosed in Chinese patent CN216485977U, a mask semi-automatic film removing platform device is provided. The mask with protective film to be removed is placed in the corresponding feeding tray, and then the feeding tray is placed in the base. After being placed in position, the spring buckle is pressed and tightened. The length of the film removing rod is adjusted according to the size of the protective film on the mask, and the two needles of the film removing rod are aligned with the two holes on the side of the protective film of the mask and inserted. The protective film of the mask is limited, and finally the tension formed by rotating the fastener clockwise removes the film on both sides.

[0005] However, the mask film removing platform used in the above-mentioned comparative document has the problem that during the placement of the mask, the film removing rod may affect the placement of the mask.

[0006] Therefore, there is an urgent need to provide a mask film removing platform. UTILITY MODEL CONTENT

[0007] The utility model aims to provide a mask film removing platform to solve the problem that the mask film removing platform used in the above-mentioned comparative document may affect the placement of the mask during the placement of the mask.

[0008] To achieve the above-mentioned purpose, the utility model provides the following technical scheme: a mask film removing platform, comprising a base, the top of the base is provided with an installation adjusting structure, the bottom of the installation adjusting structure is provided with a film removing structure, and the back of the top of the base is provided with a pressing structure.

[0009] The installation adjusting structure comprises a lifting connecting unit and an installation supporting unit.

[0010] The lifting connecting unit comprises a lifting rod, a knob is installed at the top end of the lifting rod, a rotating block is installed at the bottom end of the lifting rod, and a limiting sleeve is connected to the outer surface of the rotating block.

[0011] Preferably, the installation supporting unit comprises a base, a mask plate is installed at the top surface of the base, and support frames are arranged on the left and right sides of the base.

[0012] Preferably, the support frames are fixedly installed on the left and right sides of the top surface of the base, the outer surface of the lifting rod is threadedly connected with the threaded holes in the middle of the top surface of the support frame, the outer surface of the rotating block is rotationally connected with the inner wall of the limiting sleeve, and the outer surface of the base is clamped with the clamping grooves in the middle of the top surface of the base.

[0013] Preferably, the film removing structure comprises a lifting plate, limiting blocks are fixedly installed at the middle of the front surface and the back surface of the lifting plate, guide rails are connected to the outer surface of the limiting blocks, sliding blocks are installed in the rectangular holes in the middle of the top surface of the lifting plate close to the front surface and the back surface, film removing rods are connected in the sliding blocks, and thimbles are installed at the bottom end of the film removing rods.

[0014] Preferably, the middle of the top surface of the lifting plate is fixedly connected with the bottom end of the limiting sleeve, the guide rails are fixedly installed on the inner front surface and the inner back surface of the support frame, the outer surface of the limiting block is slidingly connected with the inner wall of the convex sliding groove in the middle of the guide rail, and the outer surface of the sliding block is slidingly connected with the inner wall of the rectangular hole in the middle of the top surface of the lifting plate. The outer surface of the film removing rod is slidingly connected with the inner wall of the sliding hole in the middle of the sliding block.

[0015] Preferably, the pressing structure comprises a fixing frame, a threaded rod is installed at the middle of the top surface of the fixing frame, a rotating block is installed at the top end of the threaded rod, a pressing plate is connected to the outer surface of the threaded rod close to the bottom end, and a backing plate is installed at the bottom end of the front surface of the pressing plate.

[0016] Preferably, the bottom surface of the fixing frame is fixedly connected with the middle of the top surface of the base close to one end of the back surface, the outer surface of the threaded rod is rotationally connected with the inner wall of the circular hole in the middle of the top surface of the fixing frame close to the top end, and the outer surface of the pressing plate is slidingly connected with the inner wall of the fixing frame. A rubber anti-skid layer is installed on the bottom surface of the backing plate, and the backing plate is abutted with one end of the back surface of the top surface of the mask plate, so that the mask plate is positioned.

[0017] Compared with the prior art, the present application has the following beneficial effects:

[0018] 1. The mask film stripping platform, by installing the adjusting structure and the setting of the film stripping structure, the rotating lifting rod drives the rotating block and the limiting sleeve to rise, thereby driving the lifting plate to rise, thereby driving the sliding block and the film stripping rod, the thimble to rise, the mask plate is stripped, and the film stripping structure is placed on the top surface of the base left and right sides, and does not affect the mask plate.

[0019] 2. The mask film stripping platform, by the setting of the pressing structure, the rotating block and the threaded rod are rotated to drive the pressing plate to rise, thereby driving the backing plate to rise by the pressing plate, thereby pressing and fixing the mask plate by the backing plate, positioning the mask plate, and maintaining the stability during the film stripping process. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 It is the overall structure schematic view of the utility model;

[0021] Figure 2 It is the internal structure enlarged view of the film stripping structure and the lifting structure of the utility model;

[0022] Figure 3 It is the enlarged view of the clamping stability structure of the utility model;

[0023] Figure 4 It is the internal structure enlarged view of the lifting structure and the adjusting structure of the utility model;

[0024] Figure 5 It is the enlarged view of the clamping stability structure of the utility model.

[0025] In the drawing: 1, base; 101, base; 102, mask plate; 103, support frame; 104, lifting rod; 105, knob; 106, rotating block; 107, limiting sleeve; 201, lifting plate; 202, limiting block; 203, guide rail; 204, sliding block; 205, film stripping rod; 206, thimble; 301, fixed frame; 302, threaded rod; 303, rotating block; 304, pressing plate; 305, backing plate. DETAILED DESCRIPTION

[0026] The technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor belong to the scope of protection of the utility model.

[0027] Please refer to Figures 1-5 The utility model provides a technical scheme:

[0028] Embodiment one:

[0029] The application discloses a mask film removing platform which comprises a base 1, a mounting and adjusting structure is arranged on the top of the base 1, a film removing structure is arranged on the bottom of the mounting and adjusting structure, a pressing structure is arranged on the top of the base 1 and at one end of the back surface.

[0030] The mounting and adjusting structure comprises a lifting connecting unit and a mounting supporting unit, the lifting connecting unit comprises a lifting rod 104, a knob 105 is arranged on the top end of the lifting rod 104, a rotating block 106 is arranged on the bottom end of the lifting rod 104, and a limiting sleeve 107 is connected to the outer surface of the rotating block 106.

[0031] The mounting supporting unit comprises a base 101, a mask plate 102 is arranged on the top surface of the base 101, and supporting frames 103 are arranged on the left and right sides of the base 101.

[0032] The supporting frames 103 are fixedly arranged on the top surface of the base 1, the outer surface of the lifting rod 104 is screw-connected with the threaded holes arranged in the middle of the top surface of the supporting frames 103, the outer surface of the rotating block 106 is rotationally connected with the inner wall of the limiting sleeve 107, and the outer surface of the base 101 is clamped with the clamping grooves arranged in the middle of the top surface of the base 1.

[0033] The film removing structure comprises a lifting plate 201, limiting blocks 202 are fixedly arranged on the front surface and the back surface of the lifting plate 201, guide rails 203 are connected to the outer surfaces of the limiting blocks 202, sliding blocks 204 are arranged in the rectangular holes arranged in the middle of the top surface of the lifting plate 201 and close to the front surface and the back surface, film removing rods 205 are connected in the sliding blocks 204, and thimbles 206 are arranged on the bottom ends of the film removing rods 205. The bottom end of the lifting plate 201 is fixedly connected with the limiting sleeve 107, the guide rails 203 are fixedly arranged on the inner front surface and the inner back surface of the supporting frames 103, the outer surfaces of the limiting blocks 202 are slidingly connected with the inner walls of the convex sliding grooves arranged in the middle of the guide rails 203, and the outer surfaces of the sliding blocks 204 are slidingly connected with the inner walls of the rectangular holes arranged in the middle of the top surface of the lifting plate 201.

[0034] Through the arrangement of the mounting and adjusting structure and the film removing structure, the rotating lifting rod 104 drives the rotating block 106 and the limiting sleeve 107 to ascend, thereby driving the lifting plate 201 to ascend, and driving the sliding blocks 204, the film removing rods 205 and the thimbles 206 to ascend, so that the mask plate 102 is removed, and the film removing structure is arranged on the left and right sides of the top surface of the base 1 and does not affect the mask plate 102.By placing the mask 102 in the middle of the base 101 top surface, then the base 101 is placed in the rectangular groove in the middle of the top surface of the base 1, then the sliding block 204 is used in the rectangular hole in the top surface of the lifting plate 201, the position and spacing of the film removing rod 205 are adjusted, which is convenient for the film removing of different size mask 102, the knob 105 is rotated to drive the lifting rod 104 to rotate, thereby adjusting the size of the lifting rod 104 on the top surface of the support frame 103, driving the rotating block 106 and the limiting sleeve 107 to lift, thereby driving the lifting plate 201 to lift, driving the sliding block 204 and the film removing rod 205 to lift, and the thimble 206 is inserted into the film hole of the mask 102 by the sliding connection of the top end of the film removing rod 205 and the sliding hole of the sliding block 204, and the film removing of the mask 102 is completed.

[0035] Example two:

[0036] On the basis of example one, the pressing structure includes a fixed frame 301, a threaded rod 302 is installed in the middle of the top surface of the fixed frame 301, a rotating block 303 is installed at the top end of the threaded rod 302, a pressing plate 304 is connected to the outer surface of the threaded rod 302 near the bottom end, and a pad 305 is installed on the front bottom end of the pressing plate 304. The bottom surface of the fixed frame 301 is fixedly connected to the middle of the top surface of the base 1 near the back end, the outer surface of the threaded rod 302 near the top end is rotationally connected to the inner wall of the circular hole in the middle of the top surface of the fixed frame 301, and the outer surface of the pressing plate 304 is slidingly connected to the inner wall of the fixed frame 301.

[0037] By rotating the rotating block 303 and the threaded rod 302, the pressing plate 304 is lifted, thereby the pad 305 is lifted by the pressing plate 304, the mask 102 is pressed and fixed by the pad 305, the mask 102 is positioned, and the stability during the film removing process is maintained.

[0038] When the mask 102 is pressed and fixed, the rotating block 303 drives the threaded rod 302 to rotate, thereby the threaded connection of the threaded rod 302 and the pressing plate 304 makes the pressing plate 304 lift in the fixed frame 301, thereby the mask 102 is pressed and fixed by the pad 305 driven by the pressing plate 304, which is convenient for the film removing of the mask 102, ensures the stability of the mask 102 during the film removing process, and avoids the shaking of the mask 102 during the film removing, which causes the scratch.

[0039] It is to be noted that, as used in this specification and the appended claims, the singular forms "a," "an," and "the" include plural referents unless the context clearly dictates otherwise. Thus, for example, reference to "a component" can include a combination of two or more components. Additionally, the terms "comprise," "comprises," and "comprising," or any variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements is not necessarily limited to those elements, but can include other elements not expressly listed or inherent to such process, method, article, or apparatus. Furthermore, unless otherwise indicated herein, the terms "first," "second," "third," etc., are used herein merely as labels, and are not intended to impose ordinal import.

Claims

1. A mask depaneling platform comprising a base (1), characterized in that: The base (1) top is provided with an installation adjusting structure, the bottom of the installation adjusting structure is provided with a film removing structure, and the top of the base (1) is provided with a pressing structure. The installation adjusting structure comprises a lifting connecting unit and an installation supporting unit. The lifting connecting unit comprises a lifting rod (104), the top end of the lifting rod (104) is provided with a knob (105), the bottom end of the lifting rod (104) is provided with a rotating block (106), and the outer surface of the rotating block (106) is connected with a limiting sleeve (107).

2. The mask film stripping platform of claim 1, wherein: The installation supporting unit comprises a base (101), the top surface of the base (101) is provided with a mask plate (102), and the left and right sides of the base (101) are provided with supporting frames (103).

3. The mask film-stripping platform of claim 2, wherein: The supporting frames (103) are fixedly installed on the top surface of the base (1), the outer surface of the lifting rod (104) is threadedly connected with the threaded holes in the middle of the top surface of the supporting frames (103), the outer surface of the rotating block (106) is rotationally connected with the inner wall of the limiting sleeve (107), and the outer surface of the base (101) is clamped in the clamping grooves in the middle of the top surface of the base (1).

4. The mask film stripping platform of claim 1, wherein: The film removing structure comprises a lifting plate (201), the front surface and the back surface of the lifting plate (201) are fixedly provided with limiting blocks (202), the outer surface of the limiting blocks (202) is connected with guide rails (203), the middle of the top surface of the lifting plate (201) is provided with rectangular holes near the front surface and the back surface, and the lifting plate (201) is provided with sliding blocks (204) in the rectangular holes.

5. The mask film-stripping platform of claim 4, wherein: The middle of the top surface of the lifting plate (201) is fixedly connected with the bottom end of the limiting sleeve (107), the guide rails (203) are fixedly installed on the front surface and the back surface of the supporting frames (103), the outer surface of the limiting blocks (202) is slidably connected with the inner wall of the convex sliding grooves in the middle of the guide rails (203), and the outer surface of the sliding blocks (204) is slidably connected with the inner wall of the rectangular holes in the middle of the top surface of the lifting plate (201).

6. The mask film stripping platform of claim 1, wherein: The pressing structure comprises a fixing frame (301), the middle of the top surface of the fixing frame (301) is provided with a threaded rod (302), the top end of the threaded rod (302) is provided with a rotating block (303), the outer surface of the threaded rod (302) is connected with a pressing plate (304) near the bottom end, and the front surface of the pressing plate (304) is provided with a pad (305) at the bottom end.

7. The mask film-stripping platform of claim 6, wherein: The bottom surface of the fixing frame (301) is fixedly connected with the middle of the top surface of the base (1) near the back end, the outer surface of the threaded rod (302) is rotationally connected with the inner wall of the circular hole in the middle of the top surface of the fixing frame (301) near the top end, and the outer surface of the pressing plate (304) is slidably connected with the inner wall of the fixing frame (301).

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