Negative pressure sucker for spin coater

Abstract

The utility model relates to a negative pressure suction cup for a spin coater, and belongs to the technical field. The device mainly comprises a supporting disc and an impeller, a negative-pressure through hole is formed in the middle of the supporting disc, a caulking groove is formed in the top of the supporting disc, the impeller and the negative-pressure through hole are coaxially and fixedly installed at the bottom of the supporting disc, and a rotating shaft of the impeller is in transmission connection with a driving shaft of the spin coater; the impeller is installed on the driving shaft of the spin coater, the supporting disc is installed on the impeller, the caulking groove in the supporting disc is communicated with the impeller through the negative pressure through hole, when the driving shaft of the spin coater rotates, the supporting disc and the impeller are driven to rotate, the impeller exhausts air in the negative pressure through hole to form negative pressure, negative pressure adsorption of a workpiece is achieved, stable rotation of the workpiece is guaranteed, and the coating quality is guaranteed. The impeller is used for replacing a vacuum pump for vacuumizing work, device damage caused by paint suction is avoided, the maintenance cost is reduced, and the device is simple in structure and stable and reliable in operation.

Description

TECHNICAL FIELD

[0001] The utility model belongs to technical field, concretely relates to a negative pressure chuck for spin coater. BACKGROUND

[0002] The spin coating process has the advantages of easy control of coating thickness and saving of coating material, mainly through vacuumizing to fix the workpiece on the chuck, and adopting glue dropping on the working surface of the workpiece to drop the coating material, and then utilizing the centrifugal force generated by high-speed rotation to uniformly coat the coating material on the working surface of the lens to form a uniform coating layer. The existing vacuum chuck fixes the workpiece on the chuck through vacuumizing by a vacuum pump. When the lens is thrown during the working process, the glue is sucked into the vacuum pump, causing pipeline blockage and vacuum pump damage, and inconvenient maintenance and increased cost. SUMMARY

[0003] In order to overcome the problems in the background art that the existing vacuum chuck fixes the workpiece on the chuck through vacuumizing by a vacuum pump, and when the lens is thrown during the working process, the glue is sucked into the vacuum pump, causing pipeline blockage and vacuum pump damage, and inconvenient maintenance and increased cost, the utility model provides a negative pressure chuck for spin coater. A impeller 2 is installed on the drive shaft of the spin coater, a support disc 1 is installed on the impeller 2, the embedded groove 12 on the support disc 1 is communicated with the impeller 2 through the negative pressure through hole 11, and when the drive shaft of the spin coater rotates, the support disc 1 and the impeller 2 are driven to rotate. The impeller 2 discharges the air in the negative pressure through hole 11 to form negative pressure, realizes negative pressure adsorption of the workpiece, ensures stable rotation of the workpiece, ensures coating quality, and avoids damage of the device caused by suction of the coating material by replacing the vacuum pump with the impeller 2 to work under vacuum, thereby reducing maintenance cost. The utility model has the advantages of simple structure, stable and reliable operation.

[0004] To achieve the above object, the utility model is realized through the following technical scheme: a negative pressure chuck for spin coater mainly includes a support disc 1 and an impeller 2. The support disc 1 is provided with a negative pressure through hole 11 in the middle, and the support disc 1 is provided with an embedded groove 12 on the top. The impeller 2 is coaxially fixed and installed on the bottom of the support disc 1 through the negative pressure through hole 11, and the rotating shaft of the impeller 2 is in transmission connection with the drive shaft of the spin coater.

[0005] Further, the impeller 2 includes a rotating shaft 3, a blade 4 and an air duct 5. The rotating shaft 3 is installed on the drive shaft of the spin coater, the blade 4 is uniformly installed on the axial direction of the rotating shaft 3, and the air duct 5 is coaxially fixed and installed on the rotating shaft 3 through the blade 4. The top of the air duct 5 is fixedly connected with the bottom of the support disc 1.

[0006] Further, the embedded groove 12 is provided with radially uniformly distributed air grooves 13.

[0007] The utility model has the advantages of:

[0008] This invention features an impeller mounted on the drive shaft of a spin coater, with a support disc mounted on the impeller. A groove on the support disc connects to the impeller via a negative pressure through-hole. When the drive shaft rotates, it drives the support disc and impeller to rotate, causing the impeller to expel air from the negative pressure through-hole and create negative pressure. This negative pressure adsorption of the workpiece ensures stable workpiece rotation and coating quality. By using the impeller instead of a vacuum pump for vacuuming, the invention avoids damage to the device caused by paint being sucked in, reducing maintenance costs. This invention has a simple structure and is stable and reliable in operation. Attached Figure Description

[0009] Figure 1 This is a schematic diagram of the main sectional view of this utility model.

[0010] Figure 2 This is a three-dimensional schematic diagram of the main axonometric projection of this utility model.

[0011] Figure 3 This is a three-dimensional schematic diagram of the elevation axis measurement of this utility model.

[0012] Figure 4 This is a three-dimensional schematic diagram of the impeller spindle of this utility model.

[0013] Figure 5 This is a three-dimensional schematic diagram of the support plate of this utility model, taken from an overhead perspective. Detailed Implementation

[0014] To make the objectives, technical solutions, and beneficial effects of this utility model clearer, the preferred embodiments of this utility model will be described in detail below with reference to the accompanying drawings, so as to facilitate the understanding of those skilled in the art.

[0015] This utility model discloses a negative pressure suction cup for a spin coater. The negative pressure suction cup mainly includes a support plate 1 and an impeller 2. The support plate 1 has a negative pressure through hole 11 in the middle and a groove 12 at its top. The impeller 2 is coaxially and fixedly installed at the bottom of the support plate 1 with the negative pressure through hole 11. The rotating shaft of the impeller 2 is connected to the drive shaft of the spin coater. By installing the impeller 2 on the drive shaft of the spin coater and the support plate 1 on the impeller 2, with the groove 12 on the support plate 1 communicating with the impeller 2 through the negative pressure through hole 11, when the drive shaft of the spin coater rotates, it drives the support plate 1 and the impeller 2 to rotate. The impeller 2 discharges air from the negative pressure through hole 11 to form a negative pressure, achieving negative pressure adsorption of the workpiece, ensuring stable rotation of the workpiece, and guaranteeing coating quality. The impeller 2 replaces the vacuum pump for vacuuming, avoiding damage to the device caused by paint suction, and reducing maintenance costs. This utility model has a simple structure and stable and reliable operation.

[0016] The impeller 2 comprises a rotating shaft 3, blades 4 and a wind guide 5, the rotating shaft 3 is installed on the driving shaft of the spin coater, the blades 4 are uniformly installed on the rotating shaft 3 in the axial direction, the wind guide 5 is coaxially fixedly installed on the rotating shaft 3 through the blades 4, the top of the wind guide 5 is fixedly connected with the bottom of the supporting disc 1, the impeller 2 is installed on the bottom of the supporting disc 1 through the wind guide 5, and the installation is stable and the operation is stable, the wind guide 5 is connected with the negative pressure through hole 11, the cavity volume of the negative pressure through hole 11 is increased, and the negative pressure is stable.

[0017] The embedded groove 12 is internally provided with air grooves 13 which are uniformly distributed in the radial direction, air enters the air grooves 13 during rotation, the adsorption force is increased, and the adsorption of the workpiece is stable.

[0018] Working process:

[0019] The impeller 2 is installed on the driving shaft of the spin coater, the supporting disc 1 is installed on the impeller 2, the embedded groove 12 on the supporting disc 1 is communicated with the impeller 2 through the negative pressure through hole 11, when the driving shaft of the spin coater rotates, the supporting disc 1 and the impeller 2 are driven to rotate, the impeller 2 discharges air in the negative pressure through hole 11 to form negative pressure, the workpiece is adsorbed by negative pressure, the workpiece rotates stably, the coating quality is ensured, the vacuum pump is replaced by the impeller 2 to perform vacuum pumping work, damage of the device caused by suction of coating material is avoided, and the maintenance cost is reduced, the utility model has the advantages of simple structure, stable and reliable operation.

[0020] The impeller 2 is installed on the bottom of the supporting disc 1 through the wind guide 5, the installation is stable, the operation is stable, the wind guide 5 is connected with the negative pressure through hole 11, the cavity volume of the negative pressure through hole 11 is increased, and the negative pressure is stable.

[0021] Finally, it should be pointed out that the above preferred embodiments are only used to illustrate the technical scheme of the utility model and not to limit, although the utility model has been described in detail through the above preferred embodiments, those skilled in the art should understand that various changes can be made in the form and details without departing from the range defined by the utility model claims.

Claims

1. A negative pressure chuck for a spin coater, characterized by: The negative pressure chuck for the spin coater comprises a supporting disc (1) and an impeller (2), the middle part of the supporting disc (1) is provided with a negative pressure through hole (11), the top of the supporting disc (1) is provided with an embedding groove (12), the impeller (2) is coaxially fixedly installed on the bottom of the supporting disc (1) and the rotating shaft of the impeller (2) is in transmission connection with the driving shaft of the spin coater.

2. The vacuum chuck for a spin coater as recited in claim 1, wherein: The impeller (2) comprises a rotating shaft (3), blades (4) and a wind guide cylinder (5), the rotating shaft (3) is installed on the driving shaft of the spin coater, the blades (4) are uniformly installed on the axial direction of the rotating shaft (3), the wind guide cylinder (5) is coaxially fixedly installed on the rotating shaft (3) through the blades (4), and the top of the wind guide cylinder (5) is fixedly connected with the bottom of the supporting disc (1).

3. A vacuum chuck for a spin coater as claimed in claim 1 or 2, characterized in that: The embedding groove (12) is internally provided with radially uniformly distributed air grooves (13).

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