Side-mounted target assembling mechanism of vacuum coating equipment

Abstract

The utility model discloses a side-mounted target assembling mechanism of vacuum coating equipment. The side-mounted target assembling mechanism comprises a coating bin and a side-mounted buckling frame, the film coating bin is used for supporting the whole mechanism element, the side installation buckling frame is installed on the side of the film coating bin, and a fixing flange, a butt joint flange, a target material, a bolt and a target material auxiliary installation assembly are arranged in the side installation buckling frame. Compared with the prior art, the device has the beneficial effects that when the target material needs to be replaced, a person can replace the target material on the side-mounted buckling frame without entering a bin by opening the side-mounted buckling frame, and then the target material can be efficiently and rapidly assembled, disassembled and replaced through the target material auxiliary mounting assembly.

Description

TECHNICAL FIELD

[0001] The utility model relates to vacuum coating technology field, concretely is a kind of vacuum coating equipment side target assembly mechanism. BACKGROUND

[0002] Sputtering target material is higher than traditional material industry, generally requires, such as size, flatness, purity, impurity content, density, N / O / C / S, grain size and defect control;Higher requirements or special requirements include: surface roughness, resistance, grain size uniformity, composition and organization uniformity, foreign matter (oxide) content and size, magnetic permeability, ultra-high density and ultra-fine grain etc. Magnetron sputtering coating is a new type of physical vapor deposition coating method, that is, electron gun system is used to emit and focus electrons on the material to be plated, so that the atoms sputtered from the material fly to the substrate with high kinetic energy to deposit and form a film according to the principle of momentum conversion. This material to be plated is called sputtering target material. Sputtering target material includes metal, alloy, ceramic compound, etc.;

[0003] In vacuum coating work, in order to ensure the uniformity of coating, the sputtering target material needs to be installed on both sides of the coating chamber, but the sputtering target material is a consumable, which needs to be replaced after a period of coating. When replacing, personnel need to replace inside the coating chamber, which is very inconvenient. CONTENT OF THE UTILITY MODEL

[0004] To achieve the above purpose, the utility model realizes the following technical scheme: a vacuum coating equipment side target assembly mechanism, comprising a coating chamber and a side-mounted buckle rack; the coating chamber is used to support the entire mechanism element, the side-mounted buckle rack is installed on the side of the coating chamber, and the side-mounted buckle rack is provided with a fixed flange, a butt flange, a target material, a bolt and a target material auxiliary installation assembly;

[0005] The fixed flange is installed on the side-mounted buckle rack, the butt flange is installed on the top of the target material, and the fixed flange is connected with the butt flange through the bolt;

[0006] Among them, the target material auxiliary installation assembly comprises a supporting buckle rack, an outer buckle rack, a rotating shaft, a hinge base, a fixing frame, a clamping groove, a clamping ring, a lock hole, a first buckle, a pressing plate, a buckle groove, a second buckle and a spring;

[0007] The supporting buckle rack is installed on the wall surface of the side-mounted buckle rack, the hinge base is installed on the outer buckle rack, the outer buckle rack is installed on the supporting buckle rack through the hinge base and the rotating shaft, the fixing frame is installed on the outer buckle rack, the clamping groove is opened in the inner side of the supporting buckle rack and the outer buckle rack, the clamping ring is installed on the target material, the lock hole is opened in the fixing frame, the first buckle is installed in the lock hole, the buckle groove is opened in the supporting buckle rack, the second buckle is installed in the buckle groove, and the spring is installed in the buckle groove and abuts against the second buckle.

[0008] Preferably, the side-mounted buckle frame is provided with a sealing ring.

[0009] Preferably, the top of the side-mounted buckle frame is provided with a configuration hole.

[0010] Beneficial effects

[0011] The side-mounted target assembly mechanism of the vacuum coating equipment has the following beneficial effects:

[0012] The side-mounted buckle frame can be opened when target material needs to be replaced, so that personnel can replace the target material on the side-mounted buckle frame without entering the chamber, and then the target material can be efficiently and quickly assembled, disassembled and replaced through the target material auxiliary installation assembly. BRIEF DESCRIPTION OF DRAWINGS

[0013] Figures 1-2 The utility model discloses a kind of three-dimensional structure schematic diagram of the side-mounted target assembly mechanism of the vacuum coating equipment.

[0014] Figure 3 The utility model discloses a kind of three-dimensional structure schematic diagram of the target material auxiliary installation assembly of the side-mounted target assembly mechanism of the vacuum coating equipment.

[0015] Figure 4 The utility model discloses a kind of overhead structure schematic diagram of the target material auxiliary installation assembly of the side-mounted target assembly mechanism of the vacuum coating equipment.

[0016] Figures 5-6 The utility model discloses a kind of partial enlarged structure schematic diagram of the target material auxiliary installation assembly of the side-mounted target assembly mechanism of the vacuum coating equipment.

[0017] In the figure: 1, coating chamber;2, side-mounted buckle frame;3, support buckle frame;4, outer buckle frame;5, rotating shaft;6, hinge base;7, fixed frame;8, clamping groove;9, clamping ring;10, lock hole;11, first buckle;12, pressing plate;13, buckle slot;14, second buckle;15, spring;16, fixed flange;17, butt flange;18, target material;19, bolt; DETAILED DESCRIPTION

[0018] Based on the embodiments in the utility model, all other embodiments obtained by the person skilled in the art without making creative labor belong to the range of protection of the utility model.

[0019] Please refer to Figures 1-6 The utility model provides a technical scheme.

[0020] A kind of vacuum coating equipment side target assembly mechanism, including coating cabin 1 and side buckle rack 2;The coating cabin 1 is used to support the entire mechanism element, the side buckle rack 2 is installed in coating cabin 1 side, the side buckle rack 2 is equipped with: fixed flange 16, butt flange 17, target material 18, bolt 19 and target material auxiliary installation component;

[0021] The fixed flange 16 is installed on the side buckle rack 2, the butt flange 17 is installed on the top of target material 18, and the fixed flange 16 is connected with the butt flange 17 by bolt 19;

[0022] Wherein, target material auxiliary installation component includes: support buckle 3, outer buckle 4, pivot 5, hinge base 6, fixed frame 7, clamping groove 8, clamping ring 9, lock hole 10, first buckle 11, pressing plate 12, buckle slot 13, second buckle 14 and spring 15;

[0023] The support buckle 3 is installed on the wall of side buckle rack 2, the hinge base 6 is installed on the outer buckle 4, the outer buckle 4 is installed on the support buckle 3 through the hinge base 6 and the pivot 5, the fixed frame 7 is installed on the outer buckle 4, the clamping groove 8 is opened in the inner side of support buckle 3 and outer buckle 4, the clamping ring 9 is installed on the target material 18, the lock hole 10 is opened on the fixed frame 7, the first buckle 11 is installed in the lock hole 10, the buckle slot 13 is opened on the support buckle 3, the second buckle 14 is installed in the buckle slot 13, and the spring 15 is installed in the buckle slot 13 and abuts against the second buckle 14.

[0024] It should be noted that when installing the target material 18, the clamping ring 9 at the bottom of the target material 18 is clamped into the clamping groove 8 to complete positioning, then the other half of the clamping ring 9 is buckled through the pivot 5 and the hinge base 6, and after the outer buckle 4 is buckled tightly with the support buckle 3, the second buckle 14 is clamped into the lock hole 10 to be clamped, so that the outer buckle 4 can be fixed, then the fixed flange 16 and the butt flange 17 can be connected through the bolt 19, so that the installation of the target material 18 can be completed, when the target material 18 needs to be disassembled, the bolt 19 is removed, the first buckle 11 is pushed into the second buckle 14 by pressing the pressing plate 12, so that the second buckle 14 moves out of the lock hole 10, so that the outer buckle 4 can be opened, and then the target material 18 can be disassembled.

[0025] As preferred, further, the side buckle rack 2 is provided with a sealing ring.

[0026] It should be noted that the sealing ring is used to ensure the sealing of the coating cabin 1 after the side buckle rack 2 is installed.

[0027] As preferred, further, the top of the side buckle rack 2 is provided with a configuration hole.

[0028] It should be noted that the configuration hole is used for facilitating the line connection of the target material 18.

[0029] Although the embodiments of the present application have been shown and described, it is to be understood that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present application, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A side-mounted target assembly mechanism of a vacuum coating equipment, comprising a coating chamber and a side-mounted buckle rack; the coating chamber is used for supporting the whole mechanism element, characterized in that, The side-mounted buckle frame is mounted on the side of the coated warehouse, and the side-mounted buckle frame is internally provided with a fixed flange, a butt flange, a target material, bolts and a target material auxiliary mounting assembly; The fixed flange is mounted on the side-mounted buckle frame, the butt flange is mounted on the top of the target material, and the fixed flange is connected with the butt flange through the bolts; The target material auxiliary mounting assembly comprises a supporting buckle frame, an outer buckle frame, a rotating shaft, a hinge base, a fixing frame, a clamping groove, a clamping ring, a lock hole, a first clamping buckle, a pressing plate, a clamping buckle groove, a second clamping buckle and a spring. The supporting buckle frame is mounted on the wall surface of the side-mounted buckle frame, the hinge base is mounted on the outer buckle frame, the outer buckle frame is mounted on the supporting buckle frame through the hinge base and the rotating shaft, the fixing frame is mounted on the outer buckle frame, the clamping groove is formed in the inner side of the supporting buckle frame and the outer buckle frame, the clamping ring is mounted on the target material, the lock hole is formed in the fixing frame, the first clamping buckle is mounted in the lock hole, the clamping buckle groove is formed in the supporting buckle frame, the second clamping buckle is mounted in the clamping buckle groove, and the spring is mounted in the clamping buckle groove and abuts against the second clamping buckle.

2. The side target assembly mechanism of a vacuum coating apparatus according to claim 1, wherein The side-mounted buckle frame is provided with a sealing ring.

3. The apparatus according to claim 1, wherein the apparatus is characterized by: The top of the side-mounted buckle frame is provided with a configuration hole.

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