Novel horizontal electroplating device

Abstract

The utility model discloses a novel horizontal electroplating device. The electroplating device comprises an outer tank, an electroplating tank, a liquid supply pipe, a return pipe, a driving part, a plurality of anode plates and a plurality of cathode rollers, the interior of the outer tank and the lower end of the electroplating tank form a sealed inner liquid storage tank; a plurality of electroplating cavities with upper openings are formed in the electroplating tank, a backflow tank is formed between every two adjacent electroplating cavities, the upper ends of a plurality of liquid supply pipes communicate with the electroplating cavities, and the lower ends of the liquid supply pipes communicate with the inner liquid storage tank; cathode rollers are arranged on the two sides of each electroplating cavity, an anode plate is arranged in each electroplating cavity, and a product is driven by a friction driving module to move forwards to make contact with electroplating liquid of each electroplating cavity in sequence; when the anode plate and the cathode roller are respectively connected with a direct-current power supply, the product contacts with the cathode roller and the lower surface contacts with electroplating liquid to form a loop for electroplating. The electroplating device is provided with a plurality of communicated electroplating cavities, the soaking liquid level is stable, the electroplating efficiency is improved, and the product productivity is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to photovoltaic silicon wafer electroplating field, especially in new type horizontal electroplating device. BACKGROUND

[0002] In photovoltaic products, photovoltaic silicon wafer needs surface electroplating, at present, in the process of silicon wafer electroplating, silicon wafer products need to be processed by multiple electroplating equipment in turn, each electroplating equipment has one soaking tank for single-sided contact electroplating, and the products are transmitted between various electroplating equipment, which has the defects that: first, since the products are always moving, the anode plate is soaked in the independent soaking tank, and when the products pass, the liquid medicine will be taken out with the products, the circulation amount of the single soaking tank is small, the soaking liquid level is unstable, the efficiency of electroplating is affected, and the production capacity of the products is reduced; second, the products are moved and transmitted between various equipment, the probability of product breakage is increased, and the qualified rate of the products is low; third, the production system is complex, the conveying equipment is much, the land occupation is large, and the fixed investment is large. SUMMARY

[0003] In order to solve one or more of the above problems, the utility model provides a new type horizontal electroplating device.

[0004] According to one aspect of the utility model, the new type horizontal electroplating device includes: an outer tank, an electroplating tank, liquid supply pipes, reflux pipes, a driving part and a plurality of anode plates and cathode rollers;

[0005] The electroplating tank is installed in the middle of the inner part of the outer tank, and the inner cavity and the lower end of the electroplating tank form a sealed inner liquid storage tank;

[0006] A plurality of electroplating cavities with open upper ends are arranged in the electroplating tank, and a reflux tank is formed between adjacent electroplating cavities;

[0007] The upper ends of the plurality of liquid supply pipes are connected to the electroplating cavities, and the lower ends are connected to the inner liquid storage tank;

[0008] The upper ends of the plurality of reflux pipes are connected to the reflux tank, and the lower ends are connected to the inner liquid storage tank;

[0009] The driving part includes a plurality of friction driving modules rotatably connected to the two sides of the electroplating tank, in the electroplating cavity, the friction driving module includes upper and lower pressure rollers opposite to each other and rotating in opposite directions, a plurality of support rollers, on the two sides of the electroplating cavity, the friction driving module includes upper and lower pressure rollers opposite to each other and rotating in opposite directions, and one cathode roller, the upper edges of the cathode roller and the support rollers are flush or slightly lower than the liquid level height of the electroplating cavity, the product is driven forward by the friction driving module, and sequentially contacts the electroplating liquid of each electroplating cavity;

[0010] A plurality of anode plates are fixedly arranged in each electroplating cavity, the anode plate is soaked in the electroplating liquid and is lower than the height of the support roller;

[0011] When the anode plate and the cathode roller are connected to the direct current source respectively, the product contacts the cathode roller and the lower surface contacts the electroplating solution to form a loop for electroplating.

[0012] In some embodiments, the lower end of the anode plate is vertically connected to the upper ends of multiple columns of multiple rows of vertical columns, the lower end of the support seat is fixedly connected to the lower groove wall of the electroplating cavity through the adjusting blocks.

[0013] In some embodiments, two groups of friction drive modules are symmetrically arranged in each electroplating cavity, the left and right ends of the anode plate are provided with a plurality of avoiding openings, and the upper end of the support roller is located in the avoiding opening.

[0014] In some embodiments, the front and rear ends of the vertical partition plates of the electroplating tank are vertically connected to the wall plates to seal a plurality of electroplating cavities, the partition plates between adjacent electroplating cavities are sealed to form a reflux tank, and the center of the reflux tank is provided with a friction drive module with a cathode roller.

[0015] In some embodiments, a liquid delivery pump is arranged in the liquid supply pipe, and a liquid level meter is arranged in the inner liquid storage tank.

[0016] The inner end of the liquid supply pipeline extends into the center of the upper end of the inner liquid storage tank and the outer end communicates with the electroplating solution delivery loop, and the outer side of the liquid supply pipeline is provided with a manual ball valve for adjusting the flow.

[0017] In some embodiments, the two ends of the rotating shaft of the friction drive module and the two ends of the pressure roller are rotatably connected to the wall plates on both sides of the electroplating tank; a plurality of support rollers or a cathode roller are fixedly connected to the middle of the rotating shaft; when the rotating shaft is fixedly connected to the cathode roller, one end of the rotating shaft is connected to the negative electrode of the direct current source through a rotating current connector.

[0018] In some embodiments, the rotating current connector is a mercury rotating joint.

[0019] The rotating current connector includes a conductive ring at one end of the rotating shaft, a plurality of spring sheets in a plurality of annular grooves of the conductive ring, and a spring electrode seat connected to the negative electrode of the power supply.

[0020] In some embodiments, a plurality of U-shaped mounting holes are symmetrically arranged on the two wall plates of the electroplating tank, the two ends of the rotating shaft are rotatably connected to the lower ends of the U-shaped mounting holes through bearings, and the two ends of the pressure roller are rotatably connected to the upper ends of the U-shaped mounting holes through bearings.

[0021] In some embodiments, the outer tank is a rectangular box, and the left and right sides of the outer tank are provided with inlet ports flush with the support rollers at the lower ends.

[0022] The electroplating tank is a rectangular box with an open upper end, the rear wall plate is fixedly connected to the rear end wall of the outer tank, the front wall plate is fixedly connected to the inner flat frame of the front end wall of the outer tank, and the driving cavity is formed above the inner flat frame.

[0023] In some embodiments, several driving wheels are fixedly sleeved on the longitudinal main shaft connected to the drive motor inside the drive cavity. Each driving wheel meshes with a driven wheel at its upper end. A driven wheel and an intermediate rotating wheel are sleeved from the outside to the inside at the outer end of each rotating shaft. A driven wheel is sleeved at the outer end of each pressure roller, and the driven wheel meshes with and connects to the intermediate rotating wheel.

[0024] The beneficial effects of this novel horizontal electroplating device are as follows: First, because the electroplating chambers are interconnected, the circulation volume of the chemical solution is increased, achieving uniform and stable liquid levels, thus improving electroplating efficiency and increasing product capacity. Second, when a product enters an electroplating chamber, the front cathode roller and the internal anode plate form an electroplating circuit. When the product detaches from the front cathode roller, it contacts the rear cathode roller, which, along with the internal anode plate, forms another electroplating circuit. When the rear end of the product detaches from the previous electroplating chamber, the front end enters the next electroplating chamber. Compared to the previous individual transport, this structure allows for a longer electroplating time, higher efficiency, and higher capacity. Third, the cathode rollers are located independently outside the electroplating chamber, effectively preventing cathode isolation short circuits. Fourth, it significantly reduces exposed moving and transport processes, effectively lowering the probability of product breakage and increasing product qualification rates. Fifth, the device is simple, occupies little space, and effectively reduces fixed investment. Attached Figure Description

[0025] Figure 1 This is a front view schematic diagram of a novel horizontal electroplating apparatus according to one embodiment of the present invention;

[0026] Figure 2 for Figure 1 A schematic cross-sectional view (AA) of the novel horizontal electroplating apparatus shown.

[0027] Figure 3 for Figure 1 A top view schematic diagram of the novel horizontal electroplating apparatus shown.

[0028] Figure 4 for Figure 3 A schematic cross-sectional view of the novel horizontal electroplating apparatus shown in Figure BB.

[0029] Outer tank 1, inner liquid storage tank 10, inner flat frame 11, drive cavity 12;

[0030] Electroplating tank 2, electroplating chamber 20, wall panel 21, return channel 22, partition 23, U-shaped mounting hole 24;

[0031] 3 supply pipes, 30 infusion pumps;

[0032] Reflux pipe 4;

[0033] Drive unit 5, friction drive module 50, pressure roller 51, support roller 52, rotating shaft 53, driven wheel 54, longitudinal main shaft 55, intermediate rotating wheel 56, driving wheel 57, driven wheel 58;

[0034] Anode plate 6, Avoidance mouth 60, Vertical column 61, Support seat 62, Adjustment block 63;

[0035] Cathode roller 7;

[0036] Liquid supply pipeline 8, Manual ball valve 81. DETAILED DESCRIPTION

[0037] The utility model will be described in further detail below in connection with the drawings. It should be noted that the words "front", "back", "left", "right", "up" and "down" used in the following description refer to the directions in the drawings, and the words "inner" and "outer" refer to the directions towards or away from the geometric center of a particular component.

[0038] Figures 1 to 4 A novel horizontal electroplating device according to an embodiment of the utility model is schematically shown. As shown in the figure, the novel horizontal electroplating device comprises: an outer tank 1, an electroplating tank 2, liquid supply pipes 3, reflux pipes 4, a driving part 5, and a plurality of anode plates 6 and cathode rollers 7.

[0039] The electroplating tank 2 is installed in the middle of the inner part of the outer tank 1, and the inner cavity and the lower end of the electroplating tank 2 form a sealed inner liquid storage tank 10.

[0040] A plurality of electroplating cavities 20 with open tops are arranged in the electroplating tank 2, and a reflux tank 22 is formed between adjacent electroplating cavities 20.

[0041] The upper ends of the plurality of liquid supply pipes 3 are connected to the electroplating cavities 20, and the lower ends are connected to the inner liquid storage tank 10.

[0042] The upper ends of the plurality of reflux pipes 4 are connected to the reflux tank 22, and the lower ends are connected to the inner liquid storage tank 10.

[0043] The driving part 5 comprises a plurality of friction drive modules 50 rotatably connected to the sides of the electroplating tank 2. In the electroplating cavities 20, the friction drive modules 50 comprise upper and lower pressure rollers 51 with opposite rotation directions, and a plurality of support rollers 52. On both sides of the electroplating cavities 20, the friction drive modules 50 comprise upper and lower pressure rollers 51 with opposite rotation directions, and one cathode roller 7. The upper edges of the cathode roller 7 and the support rollers 52 are flush with or slightly lower than the liquid level of the electroplating cavities 20. The product is driven forward by the friction drive modules 50 and sequentially contacts the electroplating liquid of each electroplating cavity 20.

[0044] A plurality of anode plates 6 are fixedly arranged in each electroplating cavity 20. The anode plates 6 are immersed in the electroplating liquid and are lower than the height of the support rollers 52.

[0045] When the anode plates 6 and the cathode rollers 7 are connected to the direct current power supply, respectively, the product contacts the cathode roller 7 and the lower surface contacts the electroplating liquid to form a loop for electroplating.

[0046] The new horizontal electroplating device has a plurality of series connected electroplating cavities 20 in one work station, the lower ends of the plurality of electroplating cavities 20 share an inner storage tank 10, and adjacent electroplating cavities 20 share a reflux tank 22. Cathode rollers 7 are arranged on both sides of the electroplating cavities 20, and anode plates 6 are arranged in the middle of the electroplating cavities 20. When the product slowly moves between the electroplating cavities 20, continuous electroplating can be maintained. The beneficial effects are: first, because the electroplating cavities 20 are connected, the circulation of the liquid medicine is increased, the liquid level of the medicine is unified, the immersion liquid level is stable, the electroplating efficiency is improved, and the product capacity is improved; second, when the product enters an electroplating cavity 20, the front end cathode roller 7 and the internal anode plate 6 form an electroplating circuit. When the product is separated from the front end cathode roller 7, the product will contact the rear end cathode roller 7, and the rear end cathode roller 7 and the internal anode plate 6 form an electroplating circuit. When the rear end of the product is separated from the previous electroplating cavity 20, the front end of the product will enter the next electroplating cavity 20. Compared with the original separate transmission, the electroplating time is longer, the electroplating efficiency is higher, and the capacity is high; third, the cathode rollers 7 are independent of the electroplating cavities 20, effectively preventing the short circuit phenomenon of cathode isolation; fourth, the exposed moving transmission process is greatly reduced, the probability of product breakage is effectively reduced, and the product pass rate is high; and fifth, the device is simple, occupies a small space, and effectively reduces the fixed investment.

[0047] Preferably, the lower end of the anode plate 6 is vertically connected to the upper end of a plurality of vertical columns 61, the lower end of the vertical column 61 is fixedly connected to a support seat 62, and the lower end surface of the support seat 62 is fixedly connected to the lower groove wall of the electroplating cavity 20 through a plurality of adjusting blocks 63. The beneficial effects are: the horizontal degree of the anode plate 6 is high, the height position can be adjusted to the best, and the best electroplating effect can be achieved.

[0048] Preferably, two groups of friction drive modules 50 are symmetrically arranged in each electroplating cavity 20, a plurality of avoidance openings 60 are arranged at the left and right ends of the anode plate 6, and the upper end of the support roller 52 is located in the avoidance opening 60. The beneficial effects are: this structure can further reduce the width of the product, and the equipment is compact and small in size.

[0049] Preferably, a plurality of vertical partitions 23 of the electroplating tank 2 are vertically connected to the wall plates 21 at the front and rear ends to seal a plurality of electroplating cavities 20, the partitions 23 between adjacent electroplating cavities 20 are sealed to form a reflux tank 22, and the reflux tank 22 is provided with a friction drive module 50 with a cathode roller 7. The beneficial effects are: this structure is simple, and realizes the mutual independence and continuous alternation of the reflux tank 22 and the electroplating cavities 20.

[0050] Further, the liquid supply pipe 3 is provided with a liquid pump 30, and the inner storage tank 10 is provided with a liquid level meter. The inner end of the liquid supply pipeline 8 extends into the center of the upper end of the inner storage tank 10 and is connected to the electroplating liquid conveying circuit at the outer end, and the outer side of the liquid supply pipeline 8 is provided with a manual ball valve 81 for adjusting the flow. The beneficial effects are: this setting ensures the stable supply of liquid medicine.

[0051] Further, the two ends of the rotating shaft 53 of the friction drive module 50 and the two ends of the compression roller 51 are rotatably connected to the wall plates 21 on the two sides of the electroplating tank 2.

[0052] The rotating shaft 53 is fixedly connected to a plurality of supporting rollers 52 or a cathode roller 7 in the middle. When the rotating shaft 53 is fixedly connected to the cathode roller 7, one end of the rotating shaft 53 is connected to the negative pole of the direct current power source through a rotating current connector. Preferably, the rotating current connector is a mercury rotating joint.

[0053] Or the rotating current connector comprises a conductive ring on one end of the shaft sleeve 53, a plurality of spring sheets in a plurality of annular sliding grooves of the conductive ring, and a plurality of elastic electrode bases connected to the negative pole of the power source. The beneficial effect is that the cathode roller 7 has good conductivity and long service life.

[0054] Further, a plurality of U-shaped mounting holes 24 are symmetrically arranged on the two wall plates 21 of the electroplating tank 2, and a plurality of groups of friction drive modules 50 are connected to the U-shaped mounting holes 24 in a transverse and equidistant manner, i.e., the two ends of the rotating shaft 53 are rotatably connected to the lower ends of the U-shaped mounting holes 24 through bearings, and the two ends of the compression roller 51 are rotatably connected to the upper ends of the U-shaped mounting holes 24 through bearings.

[0055] Further, the outer tank 1 is a rectangular box, and the left and right sides thereof are provided with feed ports flush with the lower ends of the supporting rollers 52.

[0056] The electroplating tank 2 is a rectangular box with an open upper end, the rear wall plate 21 of which is fixedly connected to the rear end wall of the outer tank 1, and the front wall plate 21 of which is fixedly connected to the inner flat frame 11 of the front end wall of the outer tank 1, and a driving cavity 12 is formed above the inner flat frame 11. Preferably, a plurality of driving wheels 57 are fixedly arranged on the longitudinal main shaft 55 connected to the driving motor in the driving cavity 12, and each driving wheel 57 is engaged with a driven wheel 54 above it.

[0057] Each rotating shaft 53 is outwardly and inwardly sleeved with a driven wheel 54 and an intermediate rotating wheel 56.

[0058] Each compression roller 51 is outwardly sleeved with a driven wheel 58 engaged with the intermediate rotating wheel 56. The beneficial effect is that one driving shaft realizes the synchronous rotation of each friction drive module 50, and the operation is stable.

[0059] The above only describes some embodiments of the present application. Those skilled in the art can make some modifications and improvements without departing from the inventive concept, and these all belong to the protection scope of the present application.

Claims

1. A novel horizontal electroplating apparatus characterized in that, It comprises an outer tank (1), an electroplating tank (2), liquid supply pipes (3), reflux pipes (4), a driving part (5), and a plurality of anode plates (6) and cathode rollers (7). The electroplating tank (2) is installed in the middle of the inner part of the outer tank (1), and the inner cavity of the electroplating tank (2) and the lower end of the electroplating tank (2) form a sealed inner liquid storage tank (10). A plurality of open-top electroplating cavities (20) are arranged in the electroplating tank (2), and adjacent electroplating cavities (20) form reflux tanks (22). A plurality of the liquid supply pipes (3) are connected to the upper ends of the electroplating cavities (20) and the lower ends of the inner liquid storage tank (10). A plurality of the reflux pipes (4) are connected to the upper ends of the reflux tanks (22) and the lower ends of the inner liquid storage tank (10). The driving part (5) comprises a plurality of friction driving modules (50) rotatably connected to the two sides of the electroplating tank (2). In the electroplating cavities (20), the friction driving modules (50) comprise upper and lower pressure rollers (51) with opposite rotation directions and a plurality of support rollers (52). On the two sides of the electroplating cavities (20), the friction driving modules (50) comprise upper and lower pressure rollers (51) with opposite rotation directions and cathode rollers (7). The upper edges of the cathode rollers (7) and the support rollers (52) are flush with or slightly lower than the liquid level of the electroplating cavities (20). The product is driven forward by the friction driving modules (50) and sequentially contacts the electroplating liquid in each electroplating cavity (20). A plurality of the anode plates (6) are fixedly arranged in each electroplating cavity (20), and the anode plates (6) are immersed in the electroplating liquid and below the height of the support rollers (52). When the anode plates (6) and the cathode rollers (7) are connected to the direct current power supply, respectively, the product contacts the cathode rollers (7) and the lower surface contacts the electroplating liquid to form a circuit for electroplating.

2. The novel horizontal electroplating apparatus according to claim 1, wherein The lower end of the anode plate (6) is perpendicularly connected to the upper end of a plurality of vertical columns (61), the lower end of the vertical column (61) is fixedly connected to a support seat (62), and the lower end surface of the support seat (62) is fixedly connected to the lower groove wall of the electroplating cavity (20) through a plurality of adjusting blocks (63).

3. The novel horizontal electroplating apparatus according to claim 2, wherein Two groups of friction driving modules (50) are symmetrically arranged in each electroplating cavity (20), and a plurality of avoiding openings (60) are arranged at the left and right ends of the anode plate (6). The upper end of the support roller (52) is located in the avoiding opening (60).

4. The novel horizontal electroplating apparatus according to claim 1, wherein A plurality of vertical partitions (23) of the electroplating tank (2) are perpendicularly connected to the wall plates (21) at the front and rear ends to seal a plurality of electroplating cavities (20). The partitions (23) between adjacent electroplating cavities (20) seal the reflux tanks (22), and the center of the reflux tank (22) is provided with a friction driving module (50) with a cathode roller (7).

5. The novel horizontal electroplating apparatus according to claim 1, wherein A liquid delivery pump (30) is arranged in the liquid supply pipe (3), and a liquid level meter is arranged in the inner liquid storage tank (10). The inner end of the liquid supply pipeline (8) extends into the center of the upper end of the inner liquid storage tank (10) and the outer end is connected to the electroplating liquid delivery circuit. A manual ball valve (81) for adjusting the flow rate is arranged on the outer side of the liquid supply pipeline (8).

6. The novel horizontal electroplating apparatus according to claim 1, wherein The shafts (53) of the friction driving modules (50) and the pressure rollers (51) are rotatably connected to the wall plates (21) on the two sides of the electroplating tank (2). The rotating shaft (53) is fixedly connected with a plurality of supporting rollers (52) or a cathode roller (7) in the middle; when the rotating shaft (53) is fixedly connected with the cathode roller (7), one end of the rotating shaft (53) is connected with the negative pole of a direct current power source through a rotating current connector.

7. The novel horizontal electroplating apparatus according to claim 6, wherein The rotating current connector is a mercury rotating joint. Or the rotating current connector comprises a conductive ring at one end of the shaft sleeve rotating shaft (53), a plurality of elastic electrode holders in a plurality of annular grooves of the conductive ring, and a plurality of elastic sheets in the elastic electrode holders, the elastic electrode holders being connected with the negative pole of a power source.

8. The novel horizontal electroplating apparatus according to claim 6, wherein A plurality of U-shaped mounting holes (24) are symmetrically arranged on two wall plates (21) of the electroplating tank (2), both ends of the rotating shaft (53) are rotatably connected with lower ends of the U-shaped mounting holes (24) through bearings, and both ends of the compression roller (51) are rotatably connected with upper ends of the U-shaped mounting holes (24) through bearings.

9. The novel horizontal electroplating apparatus according to claim 8, wherein The outer tank (1) is a rectangular box, and left and right sides of the outer tank (1) are provided with feed ports flush with the supporting rollers (52) at lower ends. The electroplating tank (2) is a rectangular box with an open upper end, an inner flat frame (11) of a front end wall of the outer tank (1) is fixedly connected with the front wall plate (21), and a driving cavity (12) is formed above the inner flat frame (11).

10. The novel horizontal electroplating apparatus according to claim 9, wherein In the driving cavity (12), a plurality of driving wheels (57) are fixedly arranged on a longitudinal main shaft (55) connected with a driving motor, an idle wheel (54) is engaged with an upper end of each driving wheel (57), an outer end of each rotating shaft (53) is sleeved with the idle wheel (54) and an intermediate rotating wheel (56) from outside to inside; an outer end of each compression roller (51) is sleeved with a driven wheel (58), and the driven wheel (58) is engaged with the intermediate rotating wheel (56).

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