Wafer box damping table for transfer robot

Abstract

The utility model provides a wafer cassette damping table for transfer robot, which comprises an inner objective table plate, an outer square frame, a power motor and a regulation and control disc, the side part of the outer square frame is connected with an upper connecting seat, and the upper connecting seat is movably connected with a lower connecting seat through a first connecting rod and a second connecting rod respectively; a shock absorber is further arranged between the upper connecting base and the lower connecting base, the inner objective table plate is installed in the outer square frame, the power motor is connected with the inner objective table plate through a fixing piece, the middle of the regulation and control disc is connected with an output shaft of the power motor, the regulation and control disc is located under the inner objective table plate, and four arc-shaped grooves are formed in the regulation and control disc. Four linear guide grooves distributed in an annular array are formed in the inner objective table plate, sliding blocks are slidably connected into the linear guide grooves, guide pins matched with the arc-shaped grooves are installed at the lower ends of the sliding blocks, auxiliary vertical plates are connected to the upper ends of the sliding blocks through adjusting assemblies, and elastic air bags are further arranged on the auxiliary vertical plates.

Description

TECHNICAL FIELD

[0001] The utility model belongs to mechanical technical field relates to a wafer box damping platform for handling robot. BACKGROUND

[0002] The handling robot is a kind of automation equipment specially designed for handling goods, it plays an important role in modern industrial production.Especially for those occasions that need to carry out accurate, efficient handling operation on production line, handling robot is particularly key.For example, in the semiconductor manufacturing process, handling robot can be used for the handling of wafer box, ensures the safe, fast transfer between different production links of wafer.

[0003] Through the retrieval, such as Chinese patent document discloses a kind of mobile robot for handling wafer box

application number: 2017207151139;Publication number: CN 206840097U

[0004] The utility model aims at the above-mentioned problems existing in prior art, proposes a kind of wafer box damping platform for handling robot.

[0005] The utility model discloses a kind of wafer box damping platform for handling robot, including inner load platform, it is characterized in that, still include outer square frame, power motor and control disc, the outer square frame side and upper connecting seat are connected, the upper connecting seat is respectively connected with lower connecting seat by first connecting rod, second connecting rod, and upper connecting seat, first connecting rod, second connecting and lower connecting seat form parallelogram structure between, upper connecting seat and lower connecting seat still have shock absorber between, the inner load platform is installed in outer square frame, the power motor is connected by fixed part and inner load platform, the output shaft of control disc middle part and power motor is connected, and control disc is located in inner load platform directly below, four arc grooves are set in control disc, four straight line guide grooves that are annular array distribution are set in the inner load platform, slidingly connected with slider in straight line guide groove, the lower end of slider is installed with the guide pin matched with arc groove, the upper end of slider is connected with auxiliary vertical plate by adjusting assembly, auxiliary vertical plate still has elastic air bag on it.

[0006] The adjusting assembly includes guide seat, adjusting arm and locking screw, the guide seat is connected on slider by fixed rod, the adjusting arm is slidingly connected on guide seat, the locking screw is threadedly connected on guide seat, the locking screw is threadedly connected on guide seat.

[0007] The locking screw is hand screw.

[0008] The shock absorber is arranged obliquely.

[0009] The elastic air bags are communicated through linkage air ducts.

[0010] Compared with the prior art, the wafer box shock-absorbing table for carrying robots has the following advantages:

[0011] The utility model discloses a shock-absorbing table for carrying robots, which comprises an outer frame, an inner load table plate and a shock absorber. BRIEF DESCRIPTION OF DRAWINGS

[0012] Fig. 1 is the structural schematic diagram of the utility model;

[0013] Fig. 2 is the structural schematic diagram of the inner load table plate in the utility model;

[0014] Fig. 3 is the structural schematic diagram of the control disc in the utility model;

[0015] In the figure, 1 is an outer frame, 2 is an inner load table plate, 2a is a linear guide groove, 2b is a hole, 3 is a linkage air duct, 4 is an elastic air bag, 5 is an auxiliary vertical plate, 6 is an adjusting arm, 7 is a locking screw, 8 is a guide base, 9 is a sliding block, 10 is a guide pin, 11 is a fixing piece, 12 is a power motor, 13 is a control disc, 13a is an arc-shaped groove, 14 is a second connecting rod, 15 is a lower connecting base, 16 is a shock absorber, 17 is a first connecting rod and 18 is an upper connecting base. DETAILED DESCRIPTION

[0016] The following is a specific embodiment of the utility model and further describes the technical scheme of the utility model in combination with the drawings, but the utility model is not limited to these embodiments.

[0017] As Figs. 1-3As shown, the wafer box damping table for carrying robot includes an inner loading table plate 2, further includes an outer square frame 1, a power motor 12 and a control disc 13, the outer square frame 1 is connected with an upper connecting seat 18, the upper connecting seat 18 is movably connected with a lower connecting seat 15 through a first connecting rod 17 and a second connecting rod 14 respectively, a parallelogram structure is formed between the upper connecting seat 18, the first connecting rod 17, the second connecting rod 14 and the lower connecting seat 15, a shock absorber 16 is further arranged between the upper connecting seat 18 and the lower connecting seat 15, and the shock absorber 16 is arranged in an inclined manner; the inner loading table plate 2 is installed in the outer square frame 1, the power motor 12 is connected with the inner loading table plate 2 through a fixing piece 11, the control disc 13 is connected with an output shaft of the power motor 12, and the control disc 13 is located directly below the inner loading table plate 2, four arc-shaped grooves 13a are formed in the control disc 13, four linear guide grooves 2a are arranged in a ring array on the inner loading table plate 2, a sliding block 9 is slidably connected in the linear guide groove 2a, a guide pin 10 matched with the arc-shaped groove 13a is arranged on the lower end of the sliding block 9, an auxiliary vertical plate 5 is connected with the upper end of the sliding block 9 through an adjusting assembly, and an elastic air bag 4 is further arranged on the auxiliary vertical plate 5; by rotating the power motor 12, the power motor 12 drives the control disc 13 to rotate, the guide pin 10 moves in the arc-shaped groove 13a, and the sliding block 9 moves in the linear guide groove 2a, so that the four auxiliary vertical plates 5 are close to each other, and the elastic air bag 4 can limit the wafer box on the inner loading table plate 2.

[0018] The adjusting assembly comprises a guide seat 8, an adjusting arm 6 and a locking screw 7, the guide seat 8 is connected with the sliding block 9 through a fixing rod, the adjusting arm 6 is connected with the guide seat 8, and the locking screw 7 is threadedly connected with the guide seat 8; the locking screw 7 is a hand-tightening piece; by cooperation of the adjusting arm 6 and the guide seat 8, the position of the auxiliary vertical plate 5 can be adjusted.

[0019] The two elastic air bags 4 are connected through a linkage air pipe 3; in the embodiment, the number of the linkage air pipes 3 is two, one linkage air pipe 3 is connected between the two elastic air bags 4 arranged on opposite sides, and the inner loading table plate 2 is further provided with four holes 2b for the linkage air pipe 3 to pass through.

[0020] The utility model discloses a shock absorber 16 is connected on the outer square frame 1, and the movable elastic air bag 4 is additionally arranged on the inner loading table plate 2, which significantly improves the damping performance of the whole inner loading table plate 2.

[0021] The above components are all general standard components or components known by those skilled in the art, and the structure and principle thereof can be known by the technical personnel through a technical manual or through a conventional experimental method.

[0022] The specific embodiments described herein are merely illustrative of the spirit of the present application. Those skilled in the art of the present application can make various modifications or supplements to the described specific embodiments or replace them with similar ways, but will not deviate from the spirit of the present application or exceed the scope defined by the appended claims.

Claims

1. A wafer cassette damping table for a handling robot, comprising an inner load table plate (2), characterized in that, It also includes outer square frame (1), power motor (12) and control disc (13), the outer square frame (1) side and upper connecting seat (18) are connected, the upper connecting seat (18) is respectively connected with lower connecting seat (15) through first connecting rod (17), second connecting rod (14), and the upper connecting seat (18), first connecting rod (17), second connecting and lower connecting seat (15) form parallelogram structure between, the upper connecting seat (18) and lower connecting seat (15) still have shock absorber (16) between, the inner load platform (2) is installed in outer square frame (1), the power motor (12) is connected with inner load platform (2) through fixing part (11), the control disc (13) middle part is connected with the output shaft of power motor (12), and control disc (13) is located just below inner load platform (2), four arc grooves (13a) are set up in control disc (13), four linear guide slots (2a) that are annular array distribution are set up in inner load platform (2), the linear guide slot (2a) is slidably connected with slider (9), the slider (9) lower end is installed with the guide pin (10) matched with arc groove (13a), the slider (9) upper end is connected with auxiliary vertical plate (5) through adjustment assembly, the auxiliary vertical plate (5) still has elastic air bag (4) on.

2. The FOUP shock absorbing stage for a transfer robot according to claim 1, wherein The adjustment assembly includes guide seat (8), adjustment arm (6) and locking screw (7), the guide seat (8) is connected on the slider (9) through fixed rod, the adjustment arm (6) is connected on the guide seat (8) on the slider (9), the locking screw (7) is threadedly connected on the guide seat (8).

3. The FOUP shock absorbing table for a transfer robot according to claim 2, wherein The locking screw (7) is hand screw.

4. The FOUP shock absorbing table for a transfer robot according to claim 1, wherein The shock absorber (16) is arranged obliquely.

5. The FOUP shock absorbing table for a transfer robot according to claim 1, wherein The elastic air bag (4) is connected through linkage air guide pipe (3) in both.

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