Semiconductor chip detection equipment based on machine vision technology

Abstract

The utility model discloses semiconductor chip detection equipment based on a machine vision technology, and belongs to the technical field of chip detection equipment. Comprising a machine frame and a rotating disc, the rotating disc is arranged outside the machine frame, a front face detection device is installed at the top end of the machine frame, a side face detection device is installed on the side, away from the front face detection device, of the machine frame, and a back face detection device is installed on the side, away from the side face detection device, of the machine frame. A rotating shaft is installed at the center of the bottom end of the rotating disc and extends to the top end of the rack to be movably connected with the rack. According to the utility model, convenient multi-position rotation detection of the chip detection equipment is realized, the detection range of the chip detection equipment is increased, the detection efficiency of the chip detection equipment is improved, convenient clamping, taking and placing of the chip by the chip detection equipment are realized, the clamping, taking and placing speed is increased, and the detection efficiency of the chip detection equipment is improved. And the clamping, taking and placing convenience of the chip detection equipment is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to chip detection equipment technical field, concretely is a kind of semiconductor chip detection equipment based on machine vision technology. BACKGROUND

[0002] Machine vision detection as a kind of non-contact detection equipment, measures object by the analysis and processing of object image, without contact with the measured object in the measurement process, so there is no wear and danger to the measured object, realizes nondestructive testing, machine vision detection system can be operated uninterruptedly for a long time, there is no human operation change, can set multiple systems independent operation, compared with human eye, machine not only will not fatigue, also have the consistency and repeatability that human does not have, machine vision detection system can accurately capture and analyze image, compare with preset detection standard, judge whether image is qualified, this is crucial for semiconductor chip, which has extremely high precision requirements, can significantly improve the quality and efficiency of production line.

[0003] As disclosed in the authorized announcement No.CN118268259B, a kind of semiconductor chip detection equipment based on machine vision technology, including working shell, the working shell has bottom mounting plate, the bottom mounting plate one side is installed with feeding component, the bottom mounting plate is installed with discharge component away from feeding component side, the working shell is fixedly installed with feeding box body close to feeding component side, the inside of the feeding box body is slidably clamped with a plurality of chip storage box, the middle part of the bottom mounting plate is rotatably installed with antistatic organic glass plate.

[0004] It greatly reduces labor cost, so that the machine can reduce downtime, mass, continuously carry out chip detection, avoid device movement to cause damage to chip, improve the safety of the device, realize full automation operation, after processing, also need not mobilize video image can intuitively understand which is defective product, automatically stratified storage of defective and finished product, improve the practicability of device, increase the heat dissipation rate of the device, so that the continuous working time of the device is greatly increased, improve detection ability.

[0005] But it does not solve the existing such chip detection equipment when using generally not conducive to chip detection equipment convenient multi-position rotation detection, affect the range of chip detection equipment detection, affect the efficiency of chip detection equipment detection, inconvenient chip detection equipment conveniently clamping pick and place chip, affect the speed of clamping pick and place, affect the convenience of chip detection equipment clamping pick and place. UTILITY MODEL CONTENTS

[0006] The utility model discloses a purpose lies in providing a kind of semiconductor chip detection equipment based on machine vision technology, to solve the chip detection equipment inconvenient chip detection equipment convenient multiple position rotation detection in above-mentioned background art, the range of chip detection equipment detection is affected, the efficiency of chip detection equipment detection is affected, it is inconvenient for chip detection equipment to conveniently clamp chip and take and place, the speed of clamping and taking is affected, the convenience of chip detection equipment clamping and taking is affected.

[0007] To solve the above technical problems, the utility model provides the following technical scheme:

[0008] A kind of semiconductor chip detection equipment based on machine vision technology, including rack and rotating disc, the outside of the rack is provided with rotating disc, the top of the rack is installed with front detection equipment, the side of the rack away from front detection equipment is installed with side detection equipment, the side of the rack away from side detection equipment is installed with reverse detection equipment, rotating shaft is installed at the bottom center position of the rotating disc, and rotating shaft extends to the top of the rack and is movably connected, the surface of the rotating shaft is equipped with worm gear, the side of the top of the rack close to front detection equipment is installed with servo motor, the output of the servo motor is installed with worm, the worm is engaged with worm gear, the top of the rotating disc is installed with four groups of right L-shaped plate of equal interval, the side of the top of the rotating disc close to right L-shaped plate is all installed with left L-shaped plate, the top of the right L-shaped plate is all installed with stepper motor, the side wall of the right L-shaped plate is all movably installed with rotating shaft, and rotating shaft all extends to its outside and penetrates right L-shaped plate, the output of the stepper motor is all connected with rotating shaft.

[0009] Optionally, the side of the rotating shaft away from stepper motor is all installed with right clamping plate, the side wall of the left L-shaped plate is all installed with air cylinder.

[0010] Optionally, the output of the air cylinder all extends to its outside and penetrates left L-shaped plate, the output of the air cylinder is all installed with movable sleeve.

[0011] Optionally, the end of the movable sleeve away from air cylinder is all movably installed with left clamping plate, the side wall of the left L-shaped plate below air cylinder is all movably installed with limiting rod.

[0012] Optionally, the limiting rod extends to its outside and penetrates left L-shaped plate, one end of the limiting rod outside left L-shaped plate is installed with limiting block, the limiting block is connected with movable sleeve.

[0013] Optionally, the outside of the rotating disc is provided with finished product storage tray, the outside of the finished product storage tray is provided with raw material storage tray.

[0014] Optionally, the bottom end of the finished product storage tray and the raw material storage tray is provided with a second transverse screw rod moving assembly, the bottom end of the second transverse screw rod moving assembly is provided with a second longitudinal screw rod moving assembly, and the second longitudinal screw rod moving assembly is connected with the rack.

[0015] Optionally, the top end of the rack on one side of the finished product storage tray and the raw material storage tray is provided with a first transverse screw rod moving assembly, and the sidewall of the first transverse screw rod moving assembly is provided with a first longitudinal screw rod moving assembly.

[0016] Optionally, the sidewall of the first longitudinal screw rod moving assembly is provided with an electric clamping jaw, and the top end of the finished product storage tray is provided with a good product storage tray.

[0017] Optionally, the top end of the good product storage tray on one side of the finished product storage tray is provided with a good product storage tray, and the good product storage tray is connected with the good product storage tray.

[0018] Compared with the prior art, the chip detection equipment not only realizes convenient multi-position rotation of the chip detection equipment for detection, increases the detection range of the chip detection equipment, and improves the detection efficiency of the chip detection equipment, but also realizes convenient clamping and taking of the chip by the chip detection equipment, increases the clamping and taking speed, and improves the convenience of clamping and taking of the chip detection equipment.

[0019] The chip is placed between the left clamping plate and the right clamping plate by a group of electric clamping jaws, the movable sleeve is driven to move by the cylinder, the movable sleeve drives the left clamping plate to push the chip to the surface of the rotating shaft for clamping, the worm is driven to rotate by the servo motor, the worm drives the worm gear to rotate, the worm gear drives the rotating shaft, the rotating disc, the left L-shaped plate, the right L-shaped plate, the left clamping plate, the rotating shaft and the chip to rotate, so that the chip rotates to the lower side of the front detection equipment, so that the front detection equipment detects the chip from the front, after detection, the chip is continuously rotated, so that the side detection equipment detects the chip from the side, the rotating shaft is driven to rotate by the stepping motor, under the active support of the movable sleeve to the left clamping plate, the rotating shaft drives the right clamping plate, the chip, the left clamping plate and the movable sleeve to rotate, so that the chip is turned over by a certain angle, and the back detection equipment is used for back detection, which facilitates multi-position detection, realizes convenient multi-position rotation of the chip detection equipment for detection, increases the detection range of the chip detection equipment, and improves the detection efficiency of the chip detection equipment.

[0020] When the chip needs to be clamped and taken, a group of second transverse screw rod moving assemblies and second longitudinal screw rod moving assemblies are opened, so that the raw material storage tray moves to the working area, a group of first transverse screw rod moving assemblies and first longitudinal screw rod moving assemblies are opened, so that a group of electric clamping jaws clamp and convey the chip on the surface of the raw material storage tray to the detection area; when the finished product needs to be collected, another group of second transverse screw rod moving assemblies and second longitudinal screw rod moving assemblies are opened, so that the finished product storage tray moves to the working area, and the finished product storage tray drives the good product storage tray and the good product storage tray to move to the working area, another group of first transverse screw rod moving assemblies and first longitudinal screw rod moving assemblies are opened, so that another group of electric clamping jaws clamp and move the detected chip to the surface of the good product storage tray and the good product storage tray for distinguishing and placing, which facilitates convenient clamping and taking of the chip, realizes convenient clamping and taking of the chip by the chip detection equipment, increases the clamping and taking speed, and improves the convenience of clamping and taking of the chip detection equipment. BRIEF DESCRIPTION OF DRAWINGS

[0021] The accompanying drawings, which are incorporated herein and constitute part of the specification, illustrate embodiments of the application and, together with the description, further serve to explain the principles of the application and to enable a person skilled in the relevant art to implement and use the application.

[0022] Figure 1 is a three-dimensional structure schematic view of the utility model;

[0023] Figure 2 is a front view structure schematic view of the utility model;

[0024] Figure 3 is a three-dimensional structure schematic view of the good product storage tray of the utility model;

[0025] Figure 4 is a three-dimensional structure schematic view of the raw material storage tray of the utility model;

[0026] Figure 5 is a three-dimensional structure schematic view of the rack of the utility model;

[0027] Figure 6 is a three-dimensional structure schematic view of the rotating disc of the utility model;

[0028] Figure 7 is a three-dimensional structure schematic view of the right L-shaped plate of the utility model.

[0029] Reference signs:

[0030] 1, rack; 2, rotating disc; 3, back face detection device; 4, side face detection device; 5, front face detection device; 6, servo motor; 7, worm; 8, worm wheel; 9, rotating shaft; 10, right L-shaped plate; 11, left L-shaped plate; 12, air cylinder; 13, movable sleeve; 14, left clamping plate; 15, right clamping plate; 16, rotating shaft; 17, stepping motor; 18, limiting block; 19, limiting rod; 20, raw material storage tray; 21, good product storage tray; 22, qualified product storage tray; 23, first horizontal screw rod moving assembly; 24, first vertical screw rod moving assembly; 25, electric clamping jaw; 26, finished product storage tray; 27, second horizontal screw rod moving assembly; 28, second vertical screw rod moving assembly.

[0031] As shown in the drawings, in order to clearly realize the structure of the embodiments of the present application, specific structures and devices are marked in the drawings, but this is only for the need of illustration, and is not intended to limit the present application in the specific structure, device and environment, and those skilled in the art can adjust or modify these devices and environment according to specific needs. DETAILED DESCRIPTION

[0032] A semiconductor chip detection device based on machine vision technology provided by the present application is described in detail below in combination with the drawings and specific embodiments. It is pointed out here that in order to make the embodiments more detailed, the following embodiments are the best, preferred embodiments, and other alternative ways can also be used by those skilled in the art to implement some known technologies; and the drawings are only used to describe the embodiments more specifically, and are not intended to specifically limit the present application.

[0033] It should be noted that in the specification, "one embodiment", "embodiment", "exemplary embodiment", "some embodiments" and the like indicate that the described embodiments can include specific features, structures or characteristics, but not necessarily every embodiment includes the specific features, structures or characteristics. In addition, when a specific feature, structure or characteristic is described in combination with an embodiment, it should be within the knowledge of those skilled in the related art to realize such feature, structure or characteristic in combination with other embodiments (whether or not explicitly described).

[0034] Generally, the terms can be understood at least in part from the context in which they are used. For example, depending on the context, the term "one or more" used herein can be used to describe any feature, structure or characteristic in the singular or can be used to describe combinations of features, structures or characteristics, whether or not explicitly described. In addition, the term "based on" can be understood as not necessarily conveying a set of exclusive factors, but can instead, depending at least in part on the context, allow the existence of other factors not necessarily explicitly described.

[0035] It is understood that the meanings of “on”, “above”, and “above” in this utility model should be interpreted in the broadest manner, such that “on” not only means “directly on” something, but also includes the meaning of being “on” something with an intervening feature or layer, and that “above” or “above” not only means “on” something, but also includes the meaning of being “on” something without an intervening feature or layer.

[0036] Furthermore, spatially related terms such as “below,” “under,” “lower,” “above,” and “upper” are used herein for convenience to describe the relationship of one element or feature to one or more other elements or features, as illustrated in the accompanying drawings. Spatially related terms are intended to cover different orientations in the use or operation of the device other than those depicted in the accompanying drawings. The device may be oriented in other ways, and the spatially related descriptive terms used herein can be interpreted similarly.

[0037] like Figures 1 to 7 As shown, an embodiment of this utility model provides a semiconductor chip inspection device based on machine vision technology, including a frame 1 and a rotating disk 2. The rotating disk 2 is disposed on the outside of the frame 1. A front inspection device 5 is installed at the top of the frame 1. A side inspection device 4 is installed on the side of the frame 1 away from the front inspection device 5. A back inspection device 3 is installed on the side of the frame 1 away from the side inspection device 4. A rotating shaft 9 is installed at the center of the bottom end of the rotating disk 2, and the rotating shaft 9 extends to the top of the frame 1 and is movably connected thereto. A worm gear 8 is fitted on the surface of the rotating shaft 9. A servo motor 6 is installed on the top of the frame 1 near the front inspection device 5. A worm gear 7 is installed at the output end of the servo motor 6. Meshing with the worm gear 8, the top of the rotating disk 2 is equipped with four sets of equally spaced right L-shaped plates 10. The top of the rotating disk 2 near the right L-shaped plates 10 is equipped with a left L-shaped plate 11. The top of the right L-shaped plates 10 is equipped with a stepper motor 17. The side wall of the right L-shaped plates 10 is movably equipped with a rotating shaft 16, which extends through the right L-shaped plates 10 to the outside. The output end of the stepper motor 17 is connected to the rotating shaft 16. The side of the rotating shaft 16 away from the stepper motor 17 is equipped with a right clamping plate 15. The side wall of the left L-shaped plates 11 is equipped with a cylinder 12. The output end of the cylinder 12 extends through the left L-shaped plates 11 to the outside. The output end of the cylinder 12 is equipped with a movable sleeve 13.

[0038] The left clamping plate 14 is movably installed on the end of the movable sleeve 13 away from the cylinder 12, and the limit rod 19 is movably installed on the side wall of the left L-shaped plate 11 below the cylinder 12.

[0039] The limiting rod 19 extends through the left L-shaped plate 11 to the outside, one end of the limiting rod 19 outside the left L-shaped plate 11 is provided with a limiting block 18, and the limiting block 18 is connected with the movable sleeve 13.

[0040] When the semiconductor chip detection equipment based on machine vision technology is used, the chip is placed between the left clamp plate 14 and the right clamp plate 15 by a set of electric clamping jaws 25, the air cylinder 12 is opened, the air cylinder 12 drives the movable sleeve 13 to move under the support of the left L-shaped plate 11, the movable sleeve 13 drives the left clamp plate 14 to push the chip to the surface of the rotating shaft 16 for clamping under the limiting support of the limiting rod 19 and the limiting block 18, the servo motor 6 is opened, the servo motor 6 drives the worm 7 to rotate under the support of the rack 1, the worm 7 drives the worm wheel 8 to rotate under the meshing of the worm 7 and the worm wheel 8, the worm wheel 8 drives the rotating shaft 9, the rotating disc 2, the left L-shaped plate 11, the right L-shaped plate 10, the left clamp plate 14, the rotating shaft 16 and the chip to rotate, so that the chip is rotated to the lower side of the front detection equipment 5, so that the front detection equipment 5 detects the chip from the front, after the detection is completed, the chip is continuously rotated, the side detection equipment 4 detects the chip from the side, after the detection is completed, the step motor 17 is opened, the step motor 17 drives the rotating shaft 16 to rotate under the support of the right L-shaped plate 10, the rotating shaft 16 drives the right clamp plate 15, the chip, the left clamp plate 14 and the movable sleeve 13 to rotate under the movable support of the movable sleeve 13 to the left clamp plate 14, so that the chip is turned over by a certain angle, and the back detection equipment 3 is used for back detection, which facilitates multi-position detection, realizes convenient multi-position rotation detection of the chip detection equipment, increases the detection range of the chip detection equipment, and improves the detection efficiency of the chip detection equipment.

[0041] The outside of the rotating disc 2 is provided with a finished product storage disc 26, and the outside of the finished product storage disc 26 is provided with a raw material storage disc 20.

[0042] The bottom ends of the finished product storage disc 26 and the raw material storage disc 20 are both provided with a second transverse lead screw moving assembly 27, the bottom ends of the second transverse lead screw moving assemblies 27 are both provided with a second longitudinal lead screw moving assembly 28, and the second longitudinal lead screw moving assemblies 28 are both connected with the rack 1.

[0043] The top ends of the rack 1 on one side of the finished product storage disc 26 and the raw material storage disc 20 are both provided with a first transverse lead screw moving assembly 23, and the side walls of the first transverse lead screw moving assemblies 23 are both provided with a first longitudinal lead screw moving assembly 24.

[0044] The side walls of the first longitudinal lead screw moving assemblies 24 are both provided with an electric clamping jaw 25, and the top end of the finished product storage disc 26 is provided with a good product storage disc 21.

[0045] The top end of the good product storage tray 21 on one side of the finished product storage tray 26 is provided with a good product storage tray 22, and the good product storage tray 22 is connected with the good product storage tray 21.

[0046] When it is necessary to clamp and take the chip, a group of second transverse screw moving assemblies 27 and second longitudinal screw moving assemblies 28 are opened, so that the raw material storage tray 20 is moved to the working area, a group of first transverse screw moving assemblies 23 and first longitudinal screw moving assemblies 24 are opened, so that a group of electric clamping jaws 25 clamp and convey the chip on the surface of the raw material storage tray 20 to the detection area. When it is necessary to collect the finished product, another group of second transverse screw moving assemblies 27 and second longitudinal screw moving assemblies 28 are opened, so that the finished product storage tray 26 is moved to the working area, and the finished product storage tray 26 drives the good product storage tray 21 and the good product storage tray 22 to move to the working area. Another group of first transverse screw moving assemblies 23 and first longitudinal screw moving assemblies 24 are opened, so that another group of electric clamping jaws 25 clamp and move the chip after detection to the surface of the good product storage tray 21 and the good product storage tray 22 for classification and placement, which facilitates the clamping and taking of the chip, realizes the clamping and taking of the chip by the chip detection equipment, increases the speed of clamping and taking, and improves the convenience of clamping and taking of the chip detection equipment.

[0047] The technical scheme of the utility model provides the working principle as follows: when using the semiconductor chip detection equipment based on machine vision technology, the chip is placed between the left clamping plate 14 and the right clamping plate 15 through a group of electric clamping jaws 25, the movable sleeve 13 is driven to move by the air cylinder 12, the movable sleeve 13 drives the left clamping plate 14 to push the chip to the surface of the rotating shaft 16 to clamp, the servo motor 6 drives the worm 7 to rotate, the worm 7 drives the worm wheel 8 to rotate, the worm wheel 8 drives the rotating shaft 9, the rotating disc 2, the left L-shaped plate 11, the right L-shaped plate 10, the left clamping plate 14, the rotating shaft 16 and the chip to rotate, so that the chip rotates to the lower side of the front detection equipment 5, so that the front detection equipment 5 detects the chip from the front, after detection, continues to rotate, so that the side detection equipment 4 detects the chip from the side, after detection, the stepping motor 17 drives the rotating shaft 16 to rotate, the rotating shaft 16 drives the right clamping plate 15, the chip, the left clamping plate 14 and the movable sleeve 13 to rotate, so that the chip is turned over by a certain angle, and the back detection equipment 3 is used for back detection, so that detection in multiple positions is facilitated, when it is needed to clamp and take the chip, a group of second horizontal lead screw moving assemblies 27 and second longitudinal lead screw moving assemblies 28 are opened, so that the raw material storage disc 20 moves to the working area, a group of first horizontal lead screw moving assemblies 23 and first longitudinal lead screw moving assemblies 24 are opened, so that a group of electric clamping jaws 25 clamp and convey the chip on the surface of the raw material storage disc 20 to the detection area, when it is needed to collect the finished product, another group of second horizontal lead screw moving assemblies 27 and second longitudinal lead screw moving assemblies 28 are opened, so that the finished product storage disc 26 moves to the working area, the finished product storage disc 26 drives the good product storage disc 21 and the good product storage disc 22 to move to the working area, another group of first horizontal lead screw moving assemblies 23 and first longitudinal lead screw moving assemblies 24 are opened, so that another group of electric clamping jaws 25 clamp and move the detected chip to the surface of the good product storage disc 21 and the good product storage disc 22 to be placed, so that the chip is conveniently clamped and taken, and the use of the chip detection equipment is completed.

[0048] The utility model covers any alternative, modification, equivalent method and scheme which are made on the essence and range of the utility model. In order to make the public have the thorough understanding of the utility model, the specific details are explained in the following preferred embodiments of the utility model, and the utility model can be completely understood without the description of these details for the person skilled in the art. In addition, in order to avoid unnecessary confusion to the essence of the utility model, the well-known method, process, flow, element and circuit etc. are not explained in detail.

[0049] The above merely is preferred implementation manner of the present application, it should be pointed out, for ordinary skilled person in the technical field, on the premise of not departing from the principle of the present application, can also make several improvements and refinements, these improvements and refinements also should be regarded as the protection scope of the present application.

Claims

1. A semiconductor chip inspection apparatus based on machine vision technology, characterized by: The utility model provides a kind of product quality detection device, including rack and rotary disc, the outside of the rack is provided with rotary disc, the top of the rack is equipped with front detection equipment, the side of the rack away from front detection equipment is equipped with side detection equipment, the side of the rack away from side detection equipment is equipped with back detection equipment, the bottom center position of the rotary disc is equipped with rotating shaft, and rotating shaft extends to the top of rack and is movably connected, the surface of the rotating shaft is equipped with worm gear, the side of the top of the rack close to front detection equipment is equipped with servo motor, the output of the servo motor is equipped with worm, and worm engages with worm gear, the top of the rotary disc is equipped with four groups of right L-shaped plate of equal interval, the side of the top of the rotary disc close to right L-shaped plate is equipped with left L-shaped plate, the top of the right L-shaped plate is equipped with stepper motor, and the side wall of the right L-shaped plate is movably equipped with rotating shaft, and rotating shaft extends to its outside and is penetrated through right L-shaped plate, and the output of the stepper motor is connected with rotating shaft. 2.The machine vision technology based semiconductor chip inspection apparatus according to claim 1, wherein: The side of the rotating shaft away from stepper motor is equipped with right clamping plate, and the side wall of the left L-shaped plate is equipped with air cylinder. 3.The machine vision technology based semiconductor chip inspection apparatus according to claim 2, wherein: The output of the air cylinder is extended to its outside and is penetrated through left L-shaped plate, and the output of the air cylinder is equipped with movable sleeve.

4. The machine vision technology based semiconductor chip inspection apparatus according to claim 3, wherein: The end of the movable sleeve away from air cylinder is movably equipped with left clamping plate, and the side wall of the left L-shaped plate below air cylinder is movably equipped with limiting rod.

5. The machine vision technology based semiconductor chip inspection apparatus according to claim 4, wherein: The limiting rod is extended to its outside and is penetrated through left L-shaped plate, and one end of the limiting rod outside left L-shaped plate is equipped with limiting block, and limiting block is connected with movable sleeve.

6. The machine vision technology based semiconductor chip inspection apparatus according to claim 1, wherein: The outside of the rotary disc is provided with finished product storage tray, and the outside of the finished product storage tray is provided with raw material storage tray.

7. The machine vision technology based semiconductor chip inspection apparatus according to claim 6, wherein: The bottom of the finished product storage tray and the raw material storage tray is equipped with second transverse screw rod moving assembly, the bottom of the second transverse screw rod moving assembly is equipped with second longitudinal screw rod moving assembly, and the second longitudinal screw rod moving assembly is connected with rack. 8.The machine vision technology based semiconductor chip inspection apparatus according to claim 6, wherein: The top of the rack on one side of the finished product storage tray and the raw material storage tray is equipped with first transverse screw rod moving assembly, and the side wall of the first transverse screw rod moving assembly is equipped with first longitudinal screw rod moving assembly. 9.The machine vision technology based semiconductor chip inspection apparatus according to claim 8, wherein: The side wall of the first longitudinal screw rod moving assembly is equipped with electric clamping jaw, and the top of the finished product storage tray is equipped with good product storage tray. 10.The machine vision technology based semiconductor chip inspection apparatus according to claim 9, wherein: The top of the good product storage tray on one side of the finished product storage tray is equipped with good product storage tray, and the good product storage tray is connected with good product storage tray.

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