Analysis cabinet for analyzing special gas

Abstract

The utility model relates to the technical field of special gas analysis, in particular to an analysis cabinet for special gas analysis, which comprises a cabinet body, an electric cabinet, a GC carrier gas helium pipeline, a driver pipeline, a standard gas analysis pipeline, a neon finished gas pipeline, a vacuum discharge pipeline, a control display operation unit, an alarm unit, a cabinet door, an emergency stop button and an electric cabinet door, the control display operation unit comprises a microprocessor and a touch screen. A computer control and touch screen human-computer interface technology is adopted, the flow direction of process gas is controlled through a pneumatic valve, various defects of a manual supply cabinet and a semi-automatic supply cabinet in the prior art can be effectively overcome, the special gas analysis equipment utilizes a computer C control technology, a gas supply process is programmed, and the gas supply efficiency is improved. The pneumatic valve is controlled by a program to complete analysis gas input and pipeline purging, so that equipment damage and personal harm caused by manual misoperation are avoided.

Description

TECHNICAL FIELD

[0001] The utility model relates to special gas analysis technical field especially relates to a kind of analysis cabinet for special gas analysis. BACKGROUND

[0002] Due to the vigorous development of global electronics, photovoltaic industry, and the government vigorously advocates science and technology to rejuvenate the country, domestic semiconductor, photovoltaic manufacturing industry develops rapidly.

[0003] And in the process commonly used in semiconductor, photovoltaic related industry needs to use many special gases, which requires high special gas analysis equipment, so a high-precision equipment is needed, and some toxic, corrosive, flammable gas hazard is quite high, once the valve damage (such as corrosion or human error, etc.) caused by these gas supply system leakage will threaten the safety of personnel life, equipment loss and production interruption, its harmfulness is that we must pay special attention and can not be underestimated, in the early stage of semiconductor industry development has occurred many accidents. UTILITY MODEL CONTENT

[0004] The utility model aims at providing a kind of analysis cabinet for special gas analysis, solve the problem that special gas supply system valve damage (such as corrosion or human error, etc.) caused by leakage will threaten the safety of personnel life, equipment loss and production interruption in prior art.

[0005] To achieve the above object, the utility model provides an analysis cabinet for special gas analysis, including cabinet, electric control box, GC carrier gas helium pipeline, driver pipeline, standard gas analysis pipeline, neon finished gas pipeline, vacuum discharge pipeline, control display operation unit, alarm unit, cabinet door, emergency stop button and electric control box door, the control display operation unit includes microprocessor and touch screen, the touch screen is fixedly connected with the electric control box, and the microprocessor is placed in the electric control box;The electric control box is placed at the right side of the cabinet, the microprocessor is electrically connected with the touch screen, the GC carrier gas helium pipeline is arranged in the inside of the cabinet, the driver pipeline is arranged in the inside of the cabinet, the standard gas analysis pipeline is arranged in the inside of the cabinet, the neon finished gas pipeline is arranged in the inside of the cabinet, the control display operation unit is arranged in the inside of the cabinet, the alarm unit is arranged in the inside of the cabinet, the electric control box door is arranged at the front end of the electric control box, the emergency stop button is arranged on the electric control box door, the cabinet door is arranged at the front end of the cabinet, the cabinet door has observation window, and the emergency stop button is arranged on the electric control box door.

[0006] The GC carrier gas helium pipeline comprises a helium inlet manual valve, a helium pressure regulating valve, a helium pressure gauge and a helium pneumatic valve, the front end of the helium inlet manual valve is fixedly connected with the helium pipeline, the rear end of the helium inlet manual valve is fixedly connected with the helium pressure regulating valve, the rear end of the helium pressure regulating valve is fixedly connected with the helium pressure gauge, and the front end of the helium pneumatic valve is fixedly connected with the helium pressure gauge.

[0007] The driver pipeline comprises a driver inlet manual valve, a driver pressure regulating valve, a driver pressure gauge and a driver pneumatic valve, the front end of the driver inlet manual valve is fixedly connected with the driver pipeline, the rear end of the driver inlet manual valve is fixedly connected with the front end of the driver pressure regulating valve, the rear end of the driver pressure regulating valve is fixedly connected with the driver pressure gauge, and the front end of the driver pneumatic valve is fixedly connected with the driver pressure gauge.

[0008] The standard gas analysis pipeline comprises a standard gas manual valve, a standard gas filter, a standard gas pressure regulating valve, a standard gas pressure gauge and a standard gas pneumatic valve, the front end of the standard gas manual valve is fixedly connected with the standard gas analysis pipeline, the rear end of the standard gas manual valve is fixedly connected with the standard gas filter, the rear end of the standard gas filter is fixedly connected with the standard gas pressure regulating valve, the rear end of the standard gas manual valve is fixedly connected with the standard gas pressure regulating valve, the rear end of the standard gas pressure regulating valve is fixedly connected with the standard gas pressure gauge, and the rear end of the standard gas pressure gauge is fixedly connected with the standard gas pneumatic valve.

[0009] The neon product gas pipeline comprises a neon inlet manual valve, a neon filter, a neon manual isolation valve, a neon pressure regulating valve, a neon pressure gauge, a neon pneumatic valve and a neon pneumatic isolation valve, the front end of the neon inlet manual valve is fixedly connected with the neon product gas pipeline, the rear end of the neon inlet manual valve is fixedly connected with the neon filter, the rear end of the neon filter is fixedly connected with the neon pressure regulating valve, the front end of the neon manual isolation valve is fixedly connected with the rear end of the neon filter, the rear end of the neon manual isolation valve is fixedly connected with the neon pressure regulating valve, the rear end of the neon pressure regulating valve is fixedly connected with the neon pneumatic valve, and the rear end of the neon pneumatic valve is fixedly connected with the front end of the neon pneumatic isolation valve.

[0010] The vacuum discharge pipeline comprises a discharge manual valve, a discharge one-way valve, a discharge manual isolation valve, a discharge isolation one-way valve, a discharge pressure gauge, a vacuum generator, a Venturi nitrogen manual valve, a Venturi nitrogen pipeline, a Venturi nitrogen one-way valve and a Venturi nitrogen pneumatic valve, the front end of the discharge manual valve is fixedly connected with the rear end of the neon pneumatic valve, the rear end of the discharge manual valve is fixedly connected with the discharge one-way valve, the front end of the discharge manual isolation valve is fixedly connected with the front end of the neon pneumatic valve, the rear end of the neon pneumatic valve is fixedly connected with the discharge isolation one-way valve, the rear end of the discharge isolation one-way valve is fixedly connected with the vacuum generator, the front end of the Venturi nitrogen manual valve is fixedly connected with the Venturi nitrogen pipeline, the rear end of the Venturi nitrogen pipeline is fixedly connected with the Venturi nitrogen one-way valve, the rear end of the Venturi nitrogen one-way valve is fixedly connected with the Venturi nitrogen pneumatic valve, and the rear end of the Venturi nitrogen pneumatic valve is fixedly connected with the vacuum generator.

[0011] The alarm unit comprises a gas detector and an audible and visual alarm, the gas detector is arranged in the interior of the cabinet body, the audible and visual alarm is arranged in the interior of the cabinet body, and the gas detector is located at the left side of the audible and visual alarm.

[0012] The analysis cabinet for special gas analysis adopts computer control and man-machine interface technology of the touch screen, the flow direction of process gas is controlled through the pneumatic valve, various disadvantages of previous manual and semi-automatic supply cabinets can be effectively solved, the special gas analysis equipment utilizes computer C control technology, realizes that a gas supply process program is compiled, and the pneumatic valve is controlled through the program to complete analysis gas input and pipeline purging, so that equipment damage and personal harm caused by human error operation are avoided. BRIEF DESCRIPTION OF DRAWINGS

[0013] In order to more clearly illustrate the technical scheme in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiment or the prior art description will be briefly introduced.

[0014] Figure 1 It is the overall structure schematic view of the utility model.

[0015] Figure 2 It is the first overall front view of the utility model.

[0016] Figure 3 It is the internal disc surface schematic view of the utility model.

[0017] Figure 4 It is the Figure 3 Enlarged view of A of the utility model.

[0018] Figure 5 It is theFigure 3 Enlarged view of B of Fig.

[0019] Figure 6 The utility model discloses a Figure 3 Enlarged view of C of Fig.

[0020] Figure 7 The utility model discloses a Figure 3 Enlarged view of D of Fig.

[0021] Figure 8 It is the internal disc surface schematic diagram of the vacuum exhaust pipeline of the utility model.

[0022] Figure 9 The utility model discloses a Figure 8 Enlarged view of E of Fig.

[0023] Figure 10 The utility model discloses a Figure 8 Enlarged view of F of Fig.

[0024] Figure 11 It is the pipeline schematic diagram of the utility model.

[0025] Figure 12 The utility model discloses a Figure 11 Enlarged view of G of Fig.

[0026] Figure 13 The utility model discloses a Figure 11 Enlarged view of H of Fig.

[0027] Figure 14 The utility model discloses a Figure 11 Enlarged view of I of Fig.

[0028] Figure 15 The utility model discloses a Figure 11 Enlarged view of J of Fig.

[0029] Figure 16 It is the control logic schematic diagram of the utility model.

[0030] 1-cabinet body, 2-electric control box, 3-GC carrier gas helium gas pipeline, 4-driver pipeline, 5-standard gas analysis pipeline, 6-neon gas finished gas pipeline, 7-vacuum exhaust pipeline, 8-gas detector, 9-acoustic light alarm, 10-cabinet door, 11-emergency stop button, 12-electric control box door, 13-touch screen, 14-observation window. DETAILED DESCRIPTION

[0031] The embodiments of the utility model are described in detail below, the examples of the embodiments are shown in the drawings, the embodiments described below by referring to the drawings are exemplary, and are intended to explain the utility model, and can not be understood as the limitation of the utility model.

[0032] Please refer to Figures 1 to 16 wherein, Figure 1 is the overall structure schematic diagram of the utility model, Figure 2 is the first overall front view of the utility model, Figure 3 is the internal disc surface schematic diagram of the utility model, Figure 4 is the Figure 3 enlarged view of A of the utility model, Figure 5 is the Figure 3 enlarged view of B of the utility model, Figure 6 is the Figure 3 enlarged view of C of the utility model, Figure 7 is the Figure 3 enlarged view of D of the utility model, Figure 8 is the internal disc surface schematic diagram of the vacuum discharge pipeline 7 of the utility model, Figure 9 is the Figure 8 enlarged view of E of the utility model, Figure 10 is the Figure 8 enlarged view of F of the utility model, Figure 11 is the pipeline schematic diagram of the utility model, Figure 12 is the Figure 11 enlarged view of G of the utility model, Figure 13 is the Figure 11 enlarged view of H of the utility model, Figure 14 is the Figure 11 enlarged view of I of the utility model, Figure 15 is the Figure 11 enlarged view of J of the utility model, Figure 16 is the control logic schematic diagram of the utility model.

[0033] The utility model provides a kind of analysis cabinet for special gas analysis, including cabinet 1, electric cabinet 2, GC carrier gas helium pipeline 3, driver pipeline 4, standard gas analysis pipeline 5, neon finished gas pipeline 6, vacuum discharge pipeline 7, control display operation unit, alarm unit, cabinet door 10, emergency stop button 11 and electric cabinet door 12, the control display operation unit includes microprocessor and touch screen 13, the touch screen 13 with the electric cabinet 2 fixed connection, the microprocessor is placed in the electric cabinet 2;The electric cabinet 2 is placed in the right side of the cabinet 1, the microprocessor with the touch screen 13 electric connection, the GC carrier gas helium pipeline 3 is arranged in the inside of the cabinet 1, the driver pipeline 4 is arranged in the inside of the cabinet 1, the standard gas analysis pipeline 5 is arranged in the inside of the cabinet 1, the neon finished gas pipeline 6 is arranged in the inside of the cabinet 1, the control display operation unit is arranged in the inside of the cabinet 1, the alarm unit is arranged in the inside of the cabinet 1, the electric cabinet door 12 is arranged in the front end of the electric cabinet 2, the emergency stop button 11 is arranged on the electric cabinet door 12, the cabinet door 10 is arranged in the front end of the cabinet 1, the cabinet door 10 has observation window 14 on, the emergency stop button 11 is arranged with the electric cabinet door 12 on.

[0034] In the embodiment, the computer control and the man-machine interface technology of the touch screen 13 are used, the flow direction of process gas is controlled by the pneumatic valve, the various disadvantages of previous manual and semi-automatic supply cabinet can be effectively solved, the special gas analysis equipment uses computer C control technology, realizes that gas supply flow is programmed, the pneumatic valve is completed by program control gas input, pipeline purging to avoid equipment damage and personal injury caused by human error, and the operator does not need to directly operate the valve of each unit, the valve action can be controlled by the touch screen, so that the harm of toxic and harmful gas to personnel is minimized.The observation mirror can observe the running state of the equipment, and the special gas analysis equipment is equipped with corresponding gas leakage detector, flame detector and other safety protection facilities according to the type of gas, when the equipment has unpredictable leakage and fire, the computer can be linked to close the pneumatic valve and cut off the gas source, so as to reduce the harm.

[0035] Further, the GC carrier gas helium pipeline 3 includes helium inlet manual valve, helium pressure regulating valve, helium pressure gauge and helium pneumatic valve, the front end of the helium inlet manual valve is fixedly connected with the helium pipeline, the rear end of the helium inlet manual valve is fixedly connected with the helium pressure regulating valve, the rear end of the helium pressure regulating valve is fixedly connected with the helium pressure gauge, and the front end of the helium pneumatic valve is fixedly connected with the helium pressure gauge.

[0036] In the embodiment, the helium inlet manual valves BV13, BV28 and BV29 are respectively connected to the helium pipelines at the front ends and connected to the helium pressure regulating valves PR15, PR31 and PR32 at the rear ends, the helium pressure regulating valves PR15, PR31 and PR32 are connected to the helium pressure gauges PG15, PG31 and PG32 at the rear ends, and the helium pneumatic valves XV23 and XV24 are connected to the helium pressure gauges PG31 and PG32 at the front ends.

[0037] Further, the driver pipeline 4 comprises a driver inlet manual valve, a driver pressure regulating valve, a driver pressure gauge and a driver pneumatic valve, the front end of the driver inlet manual valve is fixedly connected to the driver pipeline 4, the rear end of the driver inlet manual valve is fixedly connected to the front end of the driver pressure regulating valve, the rear end of the driver pressure regulating valve is fixedly connected to the driver pressure gauge, and the front end of the driver pneumatic valve is fixedly connected to the driver pressure gauge.

[0038] In the embodiment, the driver gas inlet manual valves BV14 and BV27 are respectively connected to the driver gas pipelines at the front ends and connected to the front ends of the driver gas pressure regulating valves PR16 and PR30 at the rear ends, the rear ends of the driver gas pressure regulating valves PR16 and PR30 are respectively connected to the driver gas pressure gauges PG16 and PG30, and the front end of the driver gas pneumatic valve XV22 is connected to the driver gas pressure gauge PG30.

[0039] Further, the standard gas analysis pipeline 5 comprises a standard gas manual valve, a standard gas filter, a standard gas pressure regulating valve, a standard gas pressure gauge and a standard gas pneumatic valve, the front end of the standard gas manual valve is fixedly connected to the standard gas analysis pipeline 5, the rear end of the standard gas manual valve is fixedly connected to the standard gas filter, the rear end of the standard gas filter is fixedly connected to the standard gas pressure regulating valve, the rear end of the standard gas manual valve is fixedly connected to the standard gas pressure regulating valve, the rear end of the standard gas pressure regulating valve is fixedly connected to the standard gas pressure gauge, and the rear end of the standard gas pressure gauge is fixedly connected to the standard gas pneumatic valve.

[0040] In the embodiment, the standard gas manual valves BV15 and BV26 are respectively connected to the standard gas pipelines at the front ends, the rear end of the standard gas manual valve BV15 is connected to the standard gas filter F12, the rear end of the standard gas filter F12 is connected to the standard gas pressure regulating valve PR17, the rear end of the standard gas manual valve BV26 is connected to the standard gas pressure regulating valve PR29, the rear ends of the standard gas pressure regulating valves PR17 and PR29 are respectively connected to the standard gas pressure gauges PG17 and PG29, and the rear end of the standard gas pressure gauge PG29 is connected to the standard gas pneumatic valve XV21.

[0041] Further, the neon product gas pipeline 6 comprises a neon inlet manual valve, a neon filter, a neon manual isolation valve, a neon pressure regulating valve, a neon pressure gauge, a neon pneumatic valve and a neon pneumatic isolation valve, the front end of the neon inlet manual valve is fixedly connected with the neon product gas pipeline 6, the rear end of the neon inlet manual valve is fixedly connected with the neon filter, the rear end of the neon filter is fixedly connected with the neon pressure regulating valve, the front end of the neon manual isolation valve is fixedly connected with the rear end of the neon filter, the rear end of the neon manual isolation valve is fixedly connected with the neon pressure regulating valve, the rear end of the neon pressure regulating valve is fixedly connected with the neon pneumatic valve, the rear end of the neon pneumatic valve is fixedly connected with the front end of the neon pneumatic isolation valve.

[0042] In the embodiment, the front ends of the neon inlet manual valves BV16, BV17, BV18, BV19, BV20 and BV50 are neon pipelines, the rear ends thereof are connected to the neon filters F13, F14, F15, F16, F17 and F18 respectively, the rear ends of the filters F13, F14, F15, F16, F17 and F18 are connected to the neon pressure regulating valves PR18, PR19, PR20, PR21, PR22 and PR23 respectively, the front ends of the neon manual isolation valves BV21, BV22, BV23, BV24 and BV25 are connected to the rear end pipelines of the neon filters F13, F14, F15, F16 and F17 respectively, the rear ends thereof are connected to the neon pressure regulating valves PR24, PR25, PR26, PR27 and PR28 respectively, the rear ends of the neon pressure regulating valves PR18, PR19, PR20, PR21, PR22, PR23, PR24, PR25, PR26, PR27 and PR28 are connected to the neon pneumatic valves XV10, XV11, XV12, XV13, XV14, XV15, XV16, XV17, XV18, XV19 and XV20 respectively, the neon pressure gauges PG18, PG19, PG20, PG21, PG22, PG23, PG24, PG25, PG26, PG27 and PG28 are arranged in the pipelines respectively, the rear ends of the neon pneumatic valves XV10, XV11, XV12, XV13, XV14, XV15, XV16, XV17, XV18, XV19 and XV20 are connected to the front ends of the neon pneumatic isolation valves H5V1-1, H5V1-2, H5V1-3, HDV3-1, HDV3-2, H5V2-1, H5V2-2 and H5V2-3 respectively or are merged, and the pipelines connected to the rear ends of the neon pneumatic isolation valves H5V1-1, H5V1-2, H5V1-3, HDV3-1, HDV3-2, H5V2-1, H5V2-2 and H5V2-3 are merged respectively.

[0043] Further, the vacuum discharge pipeline 7 comprises a discharge manual valve, a discharge one-way valve, a discharge manual isolation valve, a discharge isolation one-way valve, a discharge pressure gauge, a vacuum generator, a Venturi nitrogen manual valve, a Venturi nitrogen pipeline, a Venturi nitrogen one-way valve and a Venturi nitrogen pneumatic valve, the front end of the discharge manual valve is fixedly connected with the rear end of the neon pneumatic valve, the rear end of the discharge manual valve is fixedly connected with the discharge one-way valve, the front end of the discharge manual isolation valve is fixedly connected with the front end of the neon pneumatic valve, the rear end of the neon pneumatic valve is fixedly connected with the discharge isolation one-way valve, the rear end of the discharge isolation one-way valve is fixedly connected with the vacuum generator, the front end of the Venturi nitrogen manual valve is fixedly connected with the Venturi nitrogen pipeline, the rear end of the Venturi nitrogen pipeline is fixedly connected with the Venturi nitrogen one-way valve, the rear end of the Venturi nitrogen one-way valve is fixedly connected with the Venturi nitrogen pneumatic valve, and the rear end of the Venturi nitrogen pneumatic valve is fixedly connected with the vacuum generator.

[0044] In the embodiment, the front ends of the discharge manual valves MV6, MV7, MV8, MV9, MV10, MV11, MV12, MV13, MV14, MV15 and MV16 are connected to the rear end pipelines of the neon pneumatic valves XV10, XV11, XV12, XV13, XV14, XV15, XV16, XV17, XV18, XV19 and XV20 through pipelines respectively, and the rear ends are connected to the discharge one-way valves V6, V7, V8, V9, V10, V11, V12, V13, V14, V15 and V16 respectively; the front end of the discharge manual isolation valve BV47 is connected to the front end pipeline of the neon pneumatic valve XV16 through a pipeline; the rear end is connected to the discharge isolation one-way valve V30, the rear end of the discharge isolation one-way valve V30 is connected to the vacuum generator VG1 through a pipeline, and a discharge pressure gauge PG1 is arranged in the pipeline; the front end of the Venturi nitrogen manual valve BV30 is connected to the Venturi nitrogen pipeline, the rear end is connected to the Venturi nitrogen one-way valve V29, the rear end of the Venturi nitrogen one-way valve V29 is connected to the Venturi nitrogen pneumatic valve XV25, and the rear end of the Venturi nitrogen pneumatic valve XV25 is connected to the vacuum generator VG1 through a pipeline.

[0045] Further, the alarm unit comprises a gas detector 8 and an audible and visual alarm 9, the gas detector 8 is arranged in the interior of the cabinet 1, the audible and visual alarm 9 is arranged in the interior of the cabinet 1, and the gas detector 8 is located on the left side of the audible and visual alarm 9.

[0046] In the embodiment, the gas detector 8 and the audible and visual alarm 9 are used to detect each device, when a dangerous accident occurs, an alarm is given, so as to prompt the staff.

[0047] The above disclosure only shows one or more preferred embodiments of the present application, and cannot limit the scope of the present application. Those skilled in the art can understand that the implementation of all or part of the above processes, and the equivalent changes made according to the claims of the present application, still belong to the scope covered by the present application.

Claims

1. An analysis cabinet for special gas analysis, characterized in that, It comprises a cabinet body, an electric control box, a GC carrier gas helium pipeline, a driver pipeline, a standard gas analysis pipeline, a neon product gas pipeline, a vacuum discharge pipeline, a control display operation unit, an alarm unit, a cabinet door, an emergency stop button and an electric control box door, the control display operation unit comprises a microprocessor and a touch screen; The touch screen is fixedly connected with the electric control box, and the microprocessor is placed in the electric control box; the electric control box is placed on the right side of the cabinet body, the microprocessor is electrically connected with the touch screen, the GC carrier gas helium pipeline is arranged in the interior of the cabinet body, the driver pipeline is arranged in the interior of the cabinet body, the standard gas analysis pipeline is arranged in the interior of the cabinet body, the neon product gas pipeline is arranged in the interior of the cabinet body, the control display operation unit is arranged in the interior of the cabinet body, the alarm unit is arranged in the interior of the cabinet body, the electric control box door is arranged at the front end of the electric control box, the emergency stop button is arranged on the electric control box door, the cabinet door is arranged at the front end of the cabinet body, the cabinet door is provided with an observation window, and the emergency stop button is arranged on the electric control box door.

2. The analysis cabinet for special gas analysis according to claim 1, characterized in that, The GC carrier gas helium pipeline comprises a helium inlet manual valve, a helium pressure regulating valve, a helium pressure gauge and a helium pneumatic valve, the front end of the helium inlet manual valve is fixedly connected with the helium pipeline, the rear end of the helium inlet manual valve is fixedly connected with the helium pressure regulating valve, the rear end of the helium pressure regulating valve is fixedly connected with the helium pressure gauge, and the front end of the helium pneumatic valve is fixedly connected with the helium pressure gauge.

3. The analysis cabinet for special gas analysis according to claim 2, characterized in that, The driver pipeline comprises a driver inlet manual valve, a driver pressure regulating valve, a driver pressure gauge and a driver pneumatic valve, the front end of the driver inlet manual valve is fixedly connected with the driver pipeline, the rear end of the driver inlet manual valve is fixedly connected with the front end of the driver pressure regulating valve, the rear end of the driver pressure regulating valve is fixedly connected with the driver pressure gauge, and the front end of the driver pneumatic valve is fixedly connected with the driver pressure gauge.

4. The analysis cabinet for special gas analysis according to claim 3, characterized in that, The standard gas analysis pipeline comprises a standard gas manual valve, a standard gas filter, a standard gas pressure regulating valve, a standard gas pressure gauge and a standard gas pneumatic valve, the front end of the standard gas manual valve is fixedly connected with the standard gas analysis pipeline, the rear end of the standard gas manual valve is fixedly connected with the standard gas filter, the rear end of the standard gas filter is fixedly connected with the standard gas pressure regulating valve, the rear end of the standard gas manual valve is fixedly connected with the standard gas pressure regulating valve, the rear end of the standard gas pressure regulating valve is fixedly connected with the standard gas pressure gauge, and the rear end of the standard gas pressure gauge is fixedly connected with the standard gas pneumatic valve.

5. The analysis cabinet for special gas analysis according to claim 4, characterized in that, The neon product gas pipeline comprises a neon inlet manual valve, a neon filter, a neon manual isolation valve, a neon pressure regulating valve, a neon pressure gauge, a neon pneumatic valve and a neon pneumatic isolation valve, the front end of the neon inlet manual valve is fixedly connected with the neon product gas pipeline, the rear end of the neon inlet manual valve is fixedly connected with the neon filter, the rear end of the neon filter is fixedly connected with the neon pressure regulating valve, the front end of the neon manual isolation valve is fixedly connected with the rear end of the neon filter, the rear end of the neon manual isolation valve is fixedly connected with the neon pressure regulating valve, the rear end of the neon pressure regulating valve is fixedly connected with the neon pneumatic valve, the rear end of the neon pneumatic valve is fixedly connected with the front end of the neon pneumatic isolation valve.

6. The analysis cabinet for special gas analysis according to claim 5, wherein, The vacuum discharge pipeline comprises a discharge manual valve, a discharge check valve, a discharge manual isolation valve, a discharge isolation check valve, a discharge pressure gauge, a vacuum generator, a Venturi nitrogen manual valve, a Venturi nitrogen pipeline, a Venturi nitrogen check valve and a Venturi nitrogen pneumatic valve, the front end of the discharge manual valve is fixedly connected with the rear end of the neon pneumatic valve, the rear end of the discharge manual valve is fixedly connected with the discharge check valve, the front end of the discharge manual isolation valve is fixedly connected with the front end of the neon pneumatic valve, the rear end of the neon pneumatic valve is fixedly connected with the discharge isolation check valve, the rear end of the discharge isolation check valve is fixedly connected with the vacuum generator, the front end of the Venturi nitrogen manual valve is fixedly connected with the Venturi nitrogen pipeline, the rear end of the Venturi nitrogen pipeline is fixedly connected with the Venturi nitrogen check valve, the rear end of the Venturi nitrogen check valve is fixedly connected with the Venturi nitrogen pneumatic valve, and the rear end of the Venturi nitrogen pneumatic valve is fixedly connected with the vacuum generator.

7. The analysis cabinet for special gas analysis according to claim 6, wherein, The alarm unit comprises a gas detector and an audible and visual alarm, the gas detector is arranged in the interior of the cabinet body, the audible and visual alarm is arranged in the interior of the cabinet body, and the gas detector is located on the left side of the audible and visual alarm.

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