Piezoelectric objective lens positioner with quick response

Abstract

The utility model relates to the technical field of precise driving and positioning, and discloses a quick-response piezoelectric objective lens positioner, which comprises a shell, a rear cover, a piezoelectric actuator, an objective lens connecting frame and a microscope connecting frame. A first cavity is defined by the shell and the rear cover. The piezoelectric actuator is arranged in the first cavity and comprises an amplifying body and piezoelectric ceramics. The amplification body comprises a second cavity, a first fixed end, a second fixed end, a fixed block and a movable block. The shell is provided with a flexible hinge area and a fixing area. The microscope connecting frame is arranged on the fixing area corresponding to the objective lens connecting frame. The piezoelectric actuator drives the objective lens connecting frame to be close to or away from the microscope connecting frame through the flexible hinge area. According to the utility model, the amplification body carries out amplification output in the vertical direction of the displacement generated by the piezoelectric ceramic, and has the advantages of small movement lateral coupling, more accurate positioning and faster response speed. And the whole structure is compact and stable, the load is larger, and the application is wider. And the strain sensor further ensures high accuracy of positioning.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the precise drive and positioning technical field, more particularly, relate to a quick response piezoelectric objective lens positioner. BACKGROUND

[0002] Optical microscope has been a powerful tool for people to explore the microcosm, and people have deepened the cognition of the microcosm by using it. With the continuous progress of science and technology, the application field of optical microscope is expanding and extending, and its imaging quality is also continuously improved. In order to realize high-precision focusing spot of objective lens, the positioning of objective lens positioner is required to be more accurate; at the same time, the working distance of objective lens is very short, and the objective lens positioner itself must be compact and firm.

[0003] The prior art Chinese patent (authorized publication number CN202512289U) discloses a piezoelectric objective lens driving feeding device, which comprises a shell, a parallelogram mechanism, a piezoelectric ceramic, a rear cover, a pre-tightening top wire, a tungsten steel sheet, an objective lens side adapter and a microscope side adapter. It has the following beneficial effects: the piezoelectric driving mechanism is used to drive the ordinary optical lens to make 1 nanometer accurate feeding in Z direction, and the precision can be controlled in nanometer level. Through this feeding adjustment, the detected object can be accurately approached, and higher precision observation or operation can be realized.

[0004] However, the prior art has the following problems: 1. The parallelogram mechanism drives to one side, indirectly generates up-down variable, and at the same time, generates transverse displacement, which inevitably produces lateral coupling, affects the accuracy of positioning to some extent, and the reaction is not fast enough; 2. The parallelogram mechanism is not compact and stable, which makes the load of the piezoelectric objective lens driving feeding device small and the frequency slow.

[0005] Based on the above, the problem to be solved at present is to provide a quick response piezoelectric objective lens positioner which is compact in structure, large in load, small in motion coupling and accurate in positioning. UTILITY MODEL CONTENTS

[0006] The utility model aims at providing a quick response piezoelectric objective lens positioner, which aims at solving the problems of large lateral coupling, insufficient accuracy, slow reaction speed, insufficient compactness and small load of the piezoelectric objective lens positioner in the prior art.

[0007] The utility model is realized in this way, a quick response piezoelectric objective lens positioner, including shell, rear cover, piezoelectric actuator, objective lens connecting frame and microscope connecting frame;

[0008] The shell and the rear cover form a first cavity, and the piezoelectric actuator is arranged in the first cavity; the piezoelectric actuator comprises an amplification body and a piezoelectric ceramic;

[0009] The amplification body comprises a second cavity, a first fixed end, a second fixed end, a fixed block and a moving block, the piezoelectric ceramic is arranged in the second cavity, and two ends of the piezoelectric ceramic are connected with the first fixed end and the second fixed end respectively;

[0010] The shell is provided with a flexible hinge area and a fixed area, the moving block is connected with the flexible hinge area, and the fixed block is connected with the fixed area; the objective lens connecting frame is connected with one side of the flexible hinge area away from the piezoelectric actuator, and the microscope connecting frame is arranged on the fixed area corresponding to the objective lens connecting frame; the piezoelectric actuator drives the objective lens connecting frame to be close to or away from the microscope connecting frame through the flexible hinge area.

[0011] Further, the amplification body further comprises a first flexible hinge, a second flexible hinge, a third flexible hinge and a fourth flexible hinge; the first fixed end, the first flexible hinge, the second flexible hinge, the second fixed end, the third flexible hinge and the fourth flexible hinge sequentially enclose the second cavity;

[0012] The fixed block is arranged on the outer side surface between the first flexible hinge and the second flexible hinge, and the moving block is arranged on the outer side surface between the third flexible hinge and the fourth flexible hinge.

[0013] Further, the first flexible hinge and the fourth flexible hinge, the fixed block and the moving block, the second flexible hinge and the third flexible hinge are symmetrically distributed on two sides of the piezoelectric ceramic respectively.

[0014] Further, the flexible hinge area comprises a plurality of strip-shaped cutouts cut out on the shell, and a region flexibly connected with the periphery formed by the plurality of strip-shaped cutouts.

[0015] Further, one side of the flexible hinge area close to the objective lens connecting frame is provided with a boss, and the objective lens connecting frame is arranged on the boss.

[0016] Further, a front cover is further provided, the front cover is provided with a through hole matched in size with the boss; and the front cover is sleeved around the boss and covers the strip-shaped cutouts.

[0017] Further, the shell is provided with a constraint block protruding towards the fixed block in the first cavity and used for limiting the movement of the fixed block.

[0018] Further, the piezoelectric ceramic is arranged approximately perpendicular to the central axis of the objective lens connecting frame, and the moving block drives the objective lens connecting frame to move along a direction parallel to the central axis of the objective lens connecting frame.

[0019] Further, the outer surfaces of the first flexible hinge, the second flexible hinge, the third flexible hinge and the fourth flexible hinge are provided with strain sensors.

[0020] Further, a plurality of piezoelectric ceramics are arranged in the second cavity.

[0021] The piezoelectric objective lens positioner with fast response has the following advantages:

[0022] The piezoelectric actuator comprises an amplification body and a piezoelectric ceramic, the piezoelectric ceramic generates displacement along the long axis direction, and the amplification body amplifies and outputs the displacement along the short axis direction of the piezoelectric ceramic, that is, the amplification body amplifies and outputs the displacement in the vertical direction of the displacement of the piezoelectric ceramic. Compared with the prior art, the amplification body greatly reduces the lateral coupling of movement, so that the positioning is more accurate and the response speed is faster. The compact and stable structure of the amplification body is more convenient for connection with other optical instruments, and the use range is wider.

[0023] The first flexible hinge, the second flexible hinge, the third flexible hinge and the fourth flexible hinge of the amplification body provide stable restoring force, so that the piezoelectric objective lens positioner has fast frequency and large load. Meanwhile, a plurality of groups of piezoelectric ceramics can be arranged in the second cavity according to requirements, so as to further meet the requirement of large load.

[0024] The outer surfaces of the first flexible hinge, the second flexible hinge, the third flexible hinge and the fourth flexible hinge are provided with strain sensors, voltage and displacement form a closed loop feedback control, adaptive nanometer level driving positioning control is realized, nonlinearity is greatly improved, external influence and interference are reduced, and the positioning accuracy is further improved. BRIEF DESCRIPTION OF DRAWINGS

[0025] Figure 1 The piezoelectric objective lens positioner with fast response provided by the utility model has the advantages of the following aspects:

[0026] Figure 2 The piezoelectric objective lens positioner with fast response provided by the utility model has the advantages of the following aspects: Figure 1 The A-A direction sectional view of the piezoelectric objective lens positioner with fast response;

[0027] Figure 3 The piezoelectric objective lens positioner with fast response provided by the utility model has the advantages of the following aspects: Figure 1 The B-B direction sectional view of the piezoelectric objective lens positioner with fast response;

[0028] Figure 4 The piezoelectric objective lens positioner with fast response provided by the utility model has the advantages of the following aspects:

[0029] Figure 5 The piezoelectric actuator provided by the utility model has the advantages of the following aspects:

[0030] Figure 6The utility model provides a part structure's three -dimensional structure schematic diagram of the bottom of quick response piezoelectric objective lens positioner.

[0031] In the drawing: 1 - shell; 11 - flexible hinge area; 111 - bar cutout; 112 - boss; 12 - fixed area; 13 - constraint block; 2 - front cover; 21 - through -hole; 3 - back cover; 4 - piezoelectric actuator; 41 - amplification body; 411 - first fixed end; 412 - first flexible hinge; 413 - second flexible hinge; 414 - second fixed end; 415 - third flexible hinge; 416 - fourth flexible hinge; 417 - fixed block; 418 - moving block; 42 - piezoelectric ceramic; 5 - objective lens connecting frame; 51 - objective lens adapter; 6 - microscope connecting frame; 61 - microscope adapter; 7 - first cavity; 8 - second cavity; 9 - strain sensor; Z - central axis. DETAILED DESCRIPTION

[0032] In order to make the utility model purposes, technical scheme and advantages more clearly, following combining with the drawing and example, the utility model is further detailedly explained.It should be understood that the specific example described here is only used to explain the utility model, and is not used to limit the utility model.

[0033] The implementation of the utility model is described in detail in the following combining with specific examples.

[0034] The same or similar reference numerals in the drawings of the embodiment correspond to the same or similar parts;In the description of the utility model, it should be understood that if the orientation or position relationship indicated by the terms "upper", "lower", "left", "right" and the like is based on the orientation or position relationship shown in the drawing, only for the convenience of describing the utility model and simplifying the description, and not indicating or implying that the indicated device or element must have a particular orientation, a particular orientation and operation, therefore the position relationship description term in the drawing is only used for example, and can not be understood as the limitation of the utility model, for the ordinary skilled person in the art, can understand the specific meaning of the above terms according to the specific situation.

[0035] Refer to Figures 1-6 As preferred embodiments provided by the utility model.

[0036] Quick response piezoelectric objective lens positioner includes shell 1, front cover 2, back cover 3, piezoelectric actuator 4, objective lens connecting frame 5 and microscope connecting frame 6, refer to Figures 1-3The microscope connecting frame 6 and the objective lens connecting frame 5 are correspondingly arranged on the shell 1, and the microscope connecting frame 6 and the objective lens connecting frame 5 are coaxially arranged, that is, the central axes Z are the same. The microscope connecting frame 6 is connected with a microscope adapter 61, the objective lens connecting frame 5 is connected with an objective lens adapter 51, and the microscope adapter 61 and the objective lens adapter 51 are coaxially arranged. The shell 1 and the rear cover 3 form a first cavity 7. The piezoelectric actuator 4 is arranged in the first cavity 7 and is used to drive the objective lens connecting frame 5 to move close to or away from the microscope connecting frame 6 (that is, to drive the objective lens adapter 51 to move close to or away from the microscope adapter 61).

[0037] The piezoelectric actuator 4 includes an amplification body 41 and a piezoelectric ceramic 42, which will be described below. Figure 4 The amplification body 41 includes a first fixed end 411, a first flexible hinge 412, a second flexible hinge 413, a second fixed end 414, a third flexible hinge 415, a fourth flexible hinge 416, a fixed block 417, and a moving block 418. The first fixed end 411, the first flexible hinge 412, the second flexible hinge 413, the second fixed end 414, the third flexible hinge 415, and the fourth flexible hinge 416 successively form a second cavity 8. The piezoelectric ceramic 42 is arranged in the second cavity 8, and the two ends of the piezoelectric ceramic 42 are respectively connected with the first fixed end 411 and the second fixed end 414. According to needs, a plurality of piezoelectric ceramics 42 can be arranged in the second cavity 8, which will be described below. Figure 5 , which can improve the load capacity. The fixed block 417 is arranged on the outer side between the first flexible hinge 412 and the second flexible hinge 413. The moving block 418 is arranged on the outer side between the third flexible hinge 415 and the fourth flexible hinge 416. Preferably, the first flexible hinge 412 and the fourth flexible hinge 416, the fixed block 417 and the moving block 418, the second flexible hinge 413 and the third flexible hinge 415 are respectively symmetrically distributed on both sides of the piezoelectric ceramic 42.

[0038] The shell 1 is provided with a flexible hinge area 11 and a fixed area 12. The fixed block 417 is fixedly connected with the fixed area 12, and the fixed block 417 is used to fix the piezoelectric actuator 4. In order to limit the movement of the fixed block 417, the shell 1 is provided with a restraint block 13 in the first cavity 7, which protrudes towards the fixed block 417 and is used to limit the movement of the fixed block 417, which will be described below. Figure 6 The moving block 418 is fixedly connected with the flexible hinge area 11, and the flexible hinge area 11 is connected with the objective lens connecting frame 5 away from the piezoelectric actuator 4.

[0039] Working principle: piezoelectric ceramic 42 generates displacement when voltage is applied, so that the first flexible hinge 412, the second flexible hinge 413, the third flexible hinge 415 and the fourth flexible hinge 416 move away from the piezoelectric ceramic 42, the fixed block 417 does not move due to limitation, and the moving block 418 moves away from the microscope connecting frame 6, thereby pushing the flexible hinge area 11 to move, and the flexible hinge area 11 drives the objective lens connecting frame 5 away from the microscope connecting frame 6.

[0040] When the voltage is removed, the piezoelectric ceramic 42 restores the length, so that the first flexible hinge 412, the second flexible hinge 413, the third flexible hinge 415 and the fourth flexible hinge 416 move towards the piezoelectric ceramic 42, thereby pushing the flexible hinge area 11 to move, and the flexible hinge area 11 drives the objective lens connecting frame 5 to move towards the microscope connecting frame 6, so as to realize precise positioning of the objective lens.

[0041] Preferably, the piezoelectric ceramic 42 is arranged approximately perpendicular to the central axis Z of the objective lens connecting frame 5 and the objective lens adapter 51, and the moving block 418 drives the objective lens connecting frame 5 to move along the central axis Z.

[0042] The flexible hinge area 11 includes a plurality of strip-shaped cutouts 111 cut on the shell 1, and a region flexibly connected with the periphery formed by the plurality of strip-shaped cutouts 111. The plurality of strip-shaped cutouts 111 keep the flexible hinge area 11 flexibly connected with the shell 1 around. The side close to the objective lens connecting frame 5 of the flexible hinge area 11 is provided with a boss 112. The objective lens connecting frame 5 is installed on the boss 112. The front cover 2 is sleeved around the boss 112 and covers the strip-shaped cutouts 111, and protects the flexible hinge area 11 and the internal structure of the first cavity 7. Preferably, the flexible hinge area 11 is arranged in a convex shape, and the bottom long side of the convex shape has a rectangular recess. The fixed area 12 is provided with a rectangular protrusion extending to the rectangular recess area of the flexible hinge area 11. The piezoelectric actuator 4 drives the objective lens connecting frame 5 to move close to and away from the microscope connecting frame 6 through the flexible hinge 11, and the structure of the flexible hinge 11 is simple and reasonable.

[0043] Preferably, the outer surfaces of the first flexible hinge 412, the second flexible hinge 413, the third flexible hinge 415 and the fourth flexible hinge 416 are provided with strain sensors 9, so as to realize adaptive nanoscale driving positioning control through closed loop feedback control of voltage and displacement, greatly improve nonlinearity, reduce external influence and interference, and further improve the positioning accuracy.

[0044] Without limiting the present application, any modification, equivalent replacement and improvement made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A fast response piezoelectric objective positioner, characterized by, The shell (1), the back cover (3), the piezoelectric actuator (4), the objective lens connecting frame (5) and the microscope connecting frame (6); The shell (1) and the back cover (3) form a first cavity (7), and the piezoelectric actuator (4) is arranged in the first cavity (7); the piezoelectric actuator (4) comprises an amplification body (41) and a piezoelectric ceramic (42); The amplification body (41) comprises a second cavity (8), a first fixed end (411), a second fixed end (414), a fixed block (417) and a moving block (418), the piezoelectric ceramic (42) is arranged in the second cavity (8), and the two ends of the piezoelectric ceramic (42) are connected with the first fixed end (411) and the second fixed end (414) respectively; The shell (1) is provided with a flexible hinge area (11) and a fixed area (12), the moving block (418) is connected with the flexible hinge area (11), and the fixed block (417) is connected with the fixed area (12); the objective lens connecting frame (5) is connected with one side of the flexible hinge area (11) away from the piezoelectric actuator (4), and the microscope connecting frame (6) is arranged on the fixed area (12) corresponding to the objective lens connecting frame (5); the piezoelectric actuator (4) drives the objective lens connecting frame (5) to be close to or away from the microscope connecting frame (6) through the flexible hinge area (11).

2. The fast response piezoelectric objective positioner of claim 1, wherein, The amplification body (41) further comprises a first flexible hinge (412), a second flexible hinge (413), a third flexible hinge (415) and a fourth flexible hinge (416); the first fixed end (411), the first flexible hinge (412), the second flexible hinge (413), the second fixed end (414), the third flexible hinge (415) and the fourth flexible hinge (416) sequentially form the second cavity (8); The fixed block (417) is arranged on the outer side between the first flexible hinge (412) and the second flexible hinge (413), and the moving block (418) is arranged on the outer side between the third flexible hinge (415) and the fourth flexible hinge (416).

3. The fast response piezoelectric objective positioner of claim 2, wherein, The first flexible hinge (412) and the fourth flexible hinge (416), the fixed block (417) and the moving block (418), and the second flexible hinge (413) and the third flexible hinge (415) are symmetrically distributed on the two sides of the piezoelectric ceramic (42) respectively.

4. The fast response piezoelectric objective positioner of claim 1, wherein, The flexible hinge area (11) comprises a plurality of strip-shaped cutouts (111) cut on the shell (1), and a region flexibly connected with the periphery formed by the plurality of strip-shaped cutouts (111).

5. The fast response piezoelectric objective positioner of claim 4, wherein, The side of the flexible hinge area (11) close to the objective lens connecting frame (5) is provided with a boss (112), and the objective lens connecting frame (5) is arranged on the boss (112).

6. The fast response piezoelectric objective positioner of claim 5, wherein, A front cover (2) is further arranged, the front cover (2) is provided with a through hole (21) matching the size of the boss (112); and the front cover (2) is sleeved around the boss (112) and covers the strip-shaped cutouts (111).

7. The fast response piezoelectric objective positioner of claim 1, wherein, The shell (1) is provided with a constraint block (13) protruding towards the fixed block (417) in the first cavity (7) for limiting the movement of the fixed block (417).

8. The fast response piezoelectric objective positioner of claim 1, wherein, The piezoelectric ceramic (42) is arranged approximately perpendicular to the central axis (Z) of the objective lens connecting frame (5), and the moving block (418) drives the objective lens connecting frame (5) to move along a direction parallel to the central axis (Z) of the objective lens connecting frame (5).

9. The fast response piezoelectric objective positioner of claim 2, wherein, The outer surfaces of the first flexible hinge (412), the second flexible hinge (413), the third flexible hinge (415) and the fourth flexible hinge (416) are provided with strain sensors (9).

10. The fast response piezoelectric objective positioner of claim 1, wherein, A plurality of piezoelectric ceramics (42) are arranged in the second cavity (8).

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