Automatic liquid supplementing system

Abstract

The utility model discloses an automatic liquid supplementing system which comprises a liquid level meter, a liquid level displayer, a liquid supplementing barrel and a liquid supplementing pipe. The liquid level meter is used for detecting the liquid level height of the working liquid in the liquid storage barrel and sending out a liquid level signal. The liquid level display is used for receiving the liquid level signal, displaying liquid level information according to the liquid level signal and judging whether the liquid level height is lower than or equal to a first default value or not, and if yes, a liquid supplementing signal is sent out. The liquid supplementing barrel is used for providing working liquid to be supplemented. The inlet end of the liquid supplementing pipe is communicated with the liquid supplementing barrel, the outlet end of the liquid supplementing pipe is communicated with the liquid storage barrel, an electromagnetic valve is arranged between the inlet end and the outlet end, the electromagnetic valve is electrically connected with the liquid level displayer, the electromagnetic valve is opened after receiving a liquid supplementing signal, the inlet end and the outlet end are communicated, and working liquid in the liquid supplementing barrel flows into the liquid storage barrel through the liquid supplementing pipe. Therefore, automatic liquid supplementing is achieved, and manual inspection is reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to a kind of liquid supply technical field, specifically to a kind of automatic liquid supplement system. BACKGROUND

[0002] In semiconductor manufacturing equipment, cooling system is used to maintain the stable operation of equipment and thermal control needs. Even if the system is sealed, it needs to be replenished with cooling water regularly. Because high temperature or trace amount of water during operation can evaporate through joint, valve or exhaust port, long time operation can cause the amount of cooling water to gradually decrease. In addition, there can be very small leakage inside the cooling system, for example, the tightness of joint can age over time, the cooling pipeline can have fine cracks due to vibration or pressure effect, and the cooling system of some high-precision equipment can have more potential leakage risk because it needs more complex structure. Semiconductor equipment usually uses deionized water as cooling water, because its conductivity is extremely low, which can avoid corrosion and conduction problems. However, deionized water has active chemical properties, which can easily dissolve trace amount of substances from pipeline or material, which can cause water loss or need to be replaced more frequently. If cooling water is not added enough, it can reduce the flow or cause local overheating, because the semiconductor process has very high requirements for temperature control, the stability of the cooling system is directly related to the manufacturing yield.

[0003] The replenishment operation of cooling water is a precise and important operation. The operator needs to observe the liquid level mark of the liquid storage barrel of the cooling water tower first, confirm whether it is lower than the standard, then use a clean funnel or liquid supplement device to slowly pour cooling water into the system, add it to the appropriate height according to the liquid level mark, continuously observe the change of liquid level after liquid supplement, and judge whether there is abnormal loss. Therefore, the steps of liquid supplement operation are quite complicated, the operator needs to check and operate manually, which can consume a lot of time, and there is a risk of human error, especially for large or complex cooling systems, which can cause low work efficiency. For multiple devices or multiple cooling circuits, manual liquid supplement cannot be performed simultaneously, which affects the overall operation efficiency.

[0004] Therefore, the industry urgently needs to seek an efficient and reliable automatic liquid supplement system to solve the various difficulties and deficiencies encountered in the above background technology. UTILITY MODEL CONTENT

[0005] In view of the above problems, the purpose of the utility model is to provide an automatic liquid supplement system, which is equipped with a liquid level meter, a liquid level display, a liquid supplement barrel and a liquid supplement pipe. The liquid level display can display the liquid level information of the liquid storage barrel according to the liquid level signal obtained by the liquid level meter, and when the liquid level height is lower than or equal to the default value, a liquid supplement signal is sent to the liquid supplement pipe, the electromagnetic valve of the liquid supplement pipe is opened, the liquid supplement barrel is connected to the liquid storage barrel, and the working liquid in the liquid supplement barrel is input into the liquid storage barrel through the liquid supplement pipe, so as to achieve automatic liquid supplement and reduce the problem of manual inspection.

[0006] To achieve the above-mentioned purposes, the utility model provides a kind of automatic liquid supplementing system, applied to a liquid storage barrel, and the liquid storage barrel is filled with working liquid, and the automatic liquid supplementing system includes liquid level meter, liquid level display, liquid supplementing barrel and liquid supplementing pipe.Wherein, liquid level meter is configured to the liquid storage barrel, to detect the liquid level height of working liquid in the liquid storage barrel, and send liquid level signal.Liquid level display is electrically connected to liquid level meter, to receive the liquid level signal from liquid level meter, and according to the liquid level signal, display liquid level information, and judge whether the liquid level height is lower than or equal to the first default value, if yes, send liquid supplementing signal.Liquid supplementing barrel is configured outside the liquid storage barrel, to provide working liquid to be supplemented.And liquid supplementing pipe includes inlet end and outlet end, inlet end communicates with liquid supplementing barrel, outlet end communicates with liquid storage barrel, and solenoid valve is configured between inlet end and outlet end, solenoid valve is electrically connected to liquid level display, and after receiving liquid supplementing signal, solenoid valve can be opened, to make inlet end and outlet end conductive, so that working liquid in liquid supplementing barrel flows into liquid storage barrel through liquid supplementing pipe.

[0007] Optionally, the aforementioned liquid level display is further configured to judge whether the liquid level height is higher than or equal to the second default value according to the liquid level signal, if yes, send safety signal to solenoid valve, to make solenoid valve close, to block the communication between inlet end and outlet end.

[0008] Optionally, the aforementioned automatic liquid supplementing system further includes monitoring system, and monitoring system is communicatively connected to liquid level display, to receive and store liquid level information.

[0009] Optionally, the communication mode between the aforementioned monitoring system and liquid level display is wired communication.

[0010] Optionally, the aforementioned wired communication mode is 4mA-20mA output signal.

[0011] Optionally, the aforementioned automatic liquid supplementing system further includes resistance meter, and resistance meter is configured to liquid supplementing barrel and communicatively connected to monitoring system, to detect the resistance value of working liquid in liquid supplementing barrel, and send resistance value information to monitoring system.

[0012] Optionally, the aforementioned resistance meter is further configured to judge whether the resistance value is lower than or exceeds the third default value according to resistance value information, if yes, send abnormal signal.

[0013] Optionally, the aforementioned automatic liquid supplementing system further includes liquid leakage detection device, and liquid leakage detection device is configured to liquid supplementing barrel and communicatively connected to monitoring system, and liquid leakage detection device includes liquid level detection line configured to the expected leakage path of liquid supplementing barrel, to detect working liquid leaked from liquid supplementing barrel to leakage path, and send liquid leakage signal to monitoring system.

[0014] Optionally, the aforementioned liquid level gauge comprises a detection link extending into the liquid storage tank to immerse in the working liquid and a magnetic floating ball sleeved on the detection link to move up and down, the detection link sensing the position of the magnetic floating ball to generate a liquid level signal.

[0015] Optionally, the aforementioned liquid supplementing pipe further has a valve between the inlet end and the outlet end, and the valve is controlled by the electromagnetic valve to control the conduction state of the liquid supplementing tank to the liquid storage tank and the flow rate of the working liquid in the liquid supplementing pipe.

[0016] Optionally, the aforementioned liquid supplementing tank comprises a stirring rod extending into the liquid supplementing tank to stir the working liquid so that the liquid does not have a stratification state.

[0017] The purposes, technical contents, characteristics and effects of the present application are more easily understood by the following specific embodiments in combination with the accompanying drawings.

[0018] Compared with the prior art, the technical scheme of the present application has at least the following beneficial effects:

[0019] The automatic liquid supplementing system provided by the present application detects the liquid level height of the working liquid in the liquid storage tank by the liquid level gauge, displays the related liquid level information by the liquid level display, and when the liquid level height decreases to the level that needs to be supplemented, a liquid supplementing signal is sent to trigger the electromagnetic valve of the liquid supplementing pipe to open, so that the working liquid in the liquid supplementing tank can be input into the liquid storage tank through the liquid supplementing pipe, thereby achieving automatic liquid supplementing, reducing manual inspection, and reducing labor cost.

[0020] The automatic liquid supplementing system provided by the present application can further track the composition of the working liquid by the resistance meter, ensure that the proportion remains stable, and detect liquid leakage by the liquid leakage detection device, which can avoid the problem of liquid leakage, ensure the safety of the cooling system, and realize remote management through the monitoring system, which helps to improve the operation convenience, improve the efficiency and effectiveness of liquid level management, and ensure the normal operation of the cooling system.

[0021] The automatic liquid supplementing system of the present application can be used without damaging the original device, and is convenient and simple to assemble, disassemble and maintain, which can improve the reliability and service life of the cooling system. The present application can be applied to liquid level management of cooling water in cooling systems of various industries including semiconductors and precision machinery, and the cooling water can include but is not limited to DI / EG (ultra-pure alcohol) or ultra-pure water. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 The schematic diagram of the liquid supplementing operation site of the automatic liquid supplementing system provided by the embodiments of the present application.

[0023] Figure 2The sectional view of the installation situation of the liquid level meter and the liquid supplement pipe of the automatic liquid supplement system is provided for the embodiment of the utility model.

[0024] Figure 3 The three-dimensional view of the installation situation of the liquid level meter and the liquid supplement pipe of the automatic liquid supplement system is provided for the embodiment of the utility model.

[0025] Figure 4 The circuit structure block diagram of the automatic liquid supplement system is provided for the embodiment of the utility model.

[0026] Figure 5 The curve diagram of the liquid level signal strength change with time in the water discharge test process of the automatic liquid supplement system is provided for the embodiment of the utility model.

[0027] Figure 6 The curve diagram of the liquid level signal strength change with time in the water discharge test process of the automatic liquid supplement system is provided for the embodiment of the utility model.

[0028] Figure 7 The automatic liquid supplement system simulation self-setting liquid level position after the water discharge time test diagram is provided for the embodiment of the utility model.

[0029] Figure 8 The automatic liquid supplement system simulation liquid level trigger low liquid level position after the water supplement time test diagram is provided for the embodiment of the utility model.

[0030] In the figure:

[0031] 1: cooling machine table;

[0032] 10: liquid storage barrel;

[0033] 20: liquid level meter;

[0034] 21: detection connecting rod;

[0035] 22: magnetic floating ball;

[0036] 30: liquid level display;

[0037] 40: liquid supplement barrel;

[0038] 41: stirring rod;

[0039] 42: pipeline;

[0040] 50: liquid supplement pipe;

[0041] 51: inlet end;

[0042] 52: outlet end;

[0043] 53: electromagnetic valve;

[0044] 54: valve;

[0045] 55: valve;

[0046] 60: resistance meter;

[0047] 61: detection probe;

[0048] 70: monitoring system;

[0049] 80: liquid leakage detection device;

[0050] 81: liquid level detection line;

[0051] A: self-set liquid level;

[0052] L: low water level;

[0053] H: high water level. DETAILED DESCRIPTION

[0054] Embodiments of the present application will be further described below with reference to the accompanying drawings. In the drawings and specification, identical reference numerals have been used to designate identical elements that undertake the same function. In the drawings, the shapes and thicknesses can be exaggerated for the sake of clearness and convenience in the illustration. It is to be understood that the components not specifically shown or described in the drawings or specification are of a design conventional with those having ordinary skill in the art, and are not to be considered as limiting the scope of the present application. Those having ordinary skill in the art can make various changes and modifications to the present application in light of the contents of the present application without departing from the scope of the present application.

[0055] The technical solutions adopted by the embodiments of the present application are used to more clearly illustrate the technical solutions of the present application, and thus are only used as examples and do not limit the protection scope of the present application unless specifically stated. In the description of the specification, in order to enable the reader to have a more complete understanding of the present application, many specific details are provided; however, the present application can be implemented on the premise of omitting part or all of the specific details. In addition, well-known steps or components are not described in detail to avoid unnecessary limitations on the present application. The embodiments of the present application and the features in the embodiments can be combined with each other arbitrarily without conflict. Unless specifically stated, all technical and scientific terms used in the present application have the same meaning as understood by those having ordinary knowledge in the field to which the present application belongs.

[0056] Please refer to Figures 1 to 4 . Figure 1 is a schematic view of a liquid supplementing operation site of an automatic liquid supplementing system provided by an embodiment of the present application; Figure 2 is a sectional view of an installation situation of a liquid level meter and a liquid supplementing pipe of an automatic liquid supplementing system provided by an embodiment of the present application; Figure 3This is a perspective view of the installation of the level gauge and replenishment pipe of the automatic replenishment system provided in an embodiment of this utility model; Figure 4 This is a circuit block diagram of the automatic fluid replenishment system provided in an embodiment of the present invention. The automatic fluid replenishment system is applied to the fluid replenishment operation of a cooling system. For example, in this embodiment, it is for a storage tank 10 containing working fluid in multiple cooling units 1 (see...). Figure 2 The automatic liquid replenishment system in this embodiment mainly consists of a level gauge 20, a level display 30, a replenishment tank 40, a replenishment pipe 50, and a resistance meter 60, a leakage detection device 80, and a monitoring system 70, which can be configured together.

[0057] The level gauge 20 is disposed in the storage tank 10 to detect the actual liquid level of the working liquid in the storage tank 10 and to issue a level signal. In this embodiment, the level gauge 20 includes a detection rod 21 extending into the storage tank 10 and immersed in the working liquid, and a magnetic float 22. The magnetic float 22 is sleeved on the outside of the detection rod 21 and can move up and down. The detection rod 21 senses the position of the magnetic float 22 and generates a level signal. Specifically, the detection rod 21 of this embodiment is provided with a magnetic induction component, and the magnetic float 22 is provided with a magnetic body. When the magnetic float 22 rises or falls with the liquid level, the magnetic induction component in the detection rod 21 can sense the movement of the magnetic body in the magnetic float 22 and generate a level signal output.

[0058] The liquid level display 30 is electrically connected to the liquid level gauge 20 to receive liquid level signals from the liquid level gauge 20, display liquid level information based on the liquid level signals, and determine whether the liquid level is lower than or equal to a first default value. If so, it indicates that the water level in the storage tank 10 has dropped to the low water level L that requires replenishment, and a replenishment signal is issued. Furthermore, the liquid level display 30 can also determine whether the liquid level is higher than or equal to a second default value based on the liquid level signals. If the second default value is greater than the first default value, it indicates that the water level in the storage tank 10 has risen to a sufficiently high water level H, and a safety signal is issued. In embodiments of this invention, the liquid level display 30 can further issue audible and visual alarms, that is, use sound and light to remind users of the occurrence of replenishment and safety signals.

[0059] A replenishment tank 40 is disposed outside the storage tank 10 and is used to provide the working liquid to be replenished. In an embodiment of this utility model, a stirring rod 41 is provided inside the replenishment tank 40. The stirring rod 41 extends into the replenishment tank 40 to stir the working liquid, so that the working liquid does not gradually separate into layers and can achieve uniform concentration.

[0060] The liquid supplement pipe 50 comprises an inlet end 51 and an outlet end 52, the inlet end 51 is communicated with the liquid supplement barrel 40, the outlet end 52 is communicated with the liquid storage barrel 10, an electromagnetic valve 53 is arranged between the inlet end 51 and the outlet end 52, the electromagnetic valve 53 is electrically connected with the liquid level display 30, when the electromagnetic valve 53 receives the liquid supplement signal, the electromagnetic valve 53 can be opened to make the inlet end 51 and the outlet end 52 conductive, so that the working liquid in the liquid supplement barrel 40 can flow into the liquid storage barrel 10 through the liquid supplement pipe 50; when the electromagnetic valve 53 receives the safety signal, the electromagnetic valve 53 will be closed to block the communication between the inlet end 51 and the outlet end 52, so that the working liquid in the liquid supplement barrel 40 stops flowing into the liquid storage barrel 10 through the liquid supplement pipe 50. In addition, in the embodiment of the utility model, the liquid supplement pipe 50 is further provided with two valves 54 and 55 between the inlet end 51 and the outlet end 52, the opening and closing of the valves 54 and 55 are controlled by the electromagnetic valve 53, so that the conductive state of the liquid supplement barrel 40 to the liquid storage barrel 10 and the flow rate of the working liquid in the liquid supplement pipe 50 can be controlled.

[0061] In the embodiment of the utility model, the power for transporting the working liquid from the liquid supplement barrel 40 to the liquid storage barrel 10 can be achieved by the height difference between the liquid supplement barrel 40 and the liquid storage barrel 10, or by using a pump to provide thrust.

[0062] The resistance meter 60 is arranged outside the liquid supplement barrel 40. In the embodiment, the detection probe 61 of the resistance meter 60 is connected with the pipeline on the side of the liquid supplement barrel 40, which is used for detecting the resistance value of the working liquid in the liquid supplement barrel 40 and generating resistance information for display and output. The resistance meter 60 can further judge whether the resistance value is lower than or higher than the third default value according to the resistance information. If yes, it indicates that the resistance value of the working liquid changes and is not within the preset range. The resistance meter 60 converts the change of the resistance into current voltage value, thereby sending an abnormal signal. In the embodiment of the utility model, the resistance meter 60 can further send an audible and visual alarm, that is, the sound and light are used to remind the occurrence of the abnormal signal. As for the alarm of the utility model, the 4mA-20mA transmission mode is used to remind the monitoring system of the occurrence of the abnormal signal.

[0063] The liquid leakage detection device 80 is arranged at the bottom of the liquid supplement barrel 40. The liquid level detection line 81 of the liquid leakage detection device 80 in the embodiment is arranged on the expected leakage path of the liquid supplement barrel 40, which is used for detecting the working liquid leaked from the liquid supplement barrel 40 to the leakage path and sending a liquid leakage signal. In the embodiment of the utility model, the liquid leakage detection device 80 can further send an audible and visual alarm, that is, the sound and light are used to remind the occurrence of the liquid leakage signal.

[0064] The monitoring system 70 is in communication with the liquid level display 30, the resistance meter 60 and the liquid leakage detection device 80 to receive and store the liquid level information and the resistance value information, further receive and store the liquid supplement signal, the safety signal, the abnormal signal and the liquid leakage signal, and remind the liquid level of the liquid storage tank 10 to drop to the low water level L and need to be supplemented according to the liquid supplement signal, remind the liquid level of the liquid storage tank 10 to reach the high water level H and do not need to be supplemented according to the safety signal, warn that the resistance value change of the working liquid of the liquid supplement tank 40 indicates that the composition ratio of the working liquid may exceed the expected range and needs to be adjusted according to the abnormal signal, and warn that the working liquid of the liquid supplement tank 40 leaks and needs to be checked according to the liquid leakage signal. The communication mode of the monitoring system 70 with the liquid level display 30, the resistance meter 60 and the liquid leakage detection device 80 can be wired communication, and the wired communication can use signal output lines for signal transmission, for example, 4mA-20mA output signal.

[0065] According to the automatic liquid supplement system provided by the embodiment of the utility model, the resistance meter 60 can detect the resistivity of the working liquid in the liquid storage tank 10 in real time to monitor the composition of the working liquid, and the liquid leakage detection device 80 can detect the leakage phenomenon of the working liquid in the liquid storage tank 10 in real time to detect the liquid leakage, when the liquid level of the working liquid in the liquid storage tank 10 of one of the cooling machine tables 1 is at the low water level L, first, the magnetic float ball 22 of the liquid level meter 20 will drop with the liquid level, the liquid level display 30 sends a liquid supplement signal, and triggers the electromagnetic valve 53 of the liquid supplement pipe 50 to receive the liquid supplement signal to open the valves 54 and 55, to connect the liquid supplement tank 40 and the liquid storage tank 10, the liquid supplement tank 40 can provide the working liquid and transport the working liquid to the liquid storage tank 10 through the liquid supplement pipe 50 until the liquid level of the working liquid in the liquid storage tank 10 reaches the high water level H, then the liquid level display 30 sends a safety signal, and triggers the electromagnetic valve 53 of the liquid supplement pipe 50 to receive the safety signal to close the valves 54 and 55 to block the connection between the liquid supplement tank 40 and the liquid storage tank 10, and the liquid supplement tank 40 stops supplying the working liquid to the liquid storage tank 10.

[0066] In the embodiment of the utility model, the automatic liquid supplement system can selectively set the liquid level detection height according to the client demand to provide real-time water supplement protection, so that the liquid level of the working liquid can be maintained at the self-defined liquid level capacity position at all times.

[0067] As shown in Figure 5 The liquid level signal strength changes with time during the water leakage test process of the automatic liquid supplement system provided by the embodiment of the utility model. During the water leakage test process, the liquid level of the liquid storage tank drops from the self-set liquid level A to the low water level L (see Figure 2 ), and the liquid level drop height is converted into current output with unit of milliamperes, and it can be found that the current value changes from 5.79mA to 5.12mA. As shown inFigure 6 As shown in the figure, it is a liquid level signal strength-time curve diagram measured by the automatic liquid supplement system provided by the embodiment of the utility model in the water supplement test process. In the water supplement test process, the liquid level of the liquid storage barrel rises from the low water level L to the self-set liquid level A, the supplement time is 39 seconds, the liquid level rising height is converted into current output with unit of milliamperes, and it can be found that the monitored current value changes from 5.12 mA to 5.79 mA.

[0068] In addition, as shown in Figure 7 and Figure 8 shown, the automatic liquid supplement system provided by the embodiment of the utility model can set the liquid level position in the liquid level display, the current value corresponding to the self-set liquid level A is 5.79 mA, the current value corresponding to the low water level L is 5.12 mA, and the current value corresponding to the high water level H is 5.80 mA, and Figure 7 The water leakage time from the self-set liquid level A to the low water level L can be estimated, and when the liquid level is low L, the liquid level display will send a liquid supplement signal to trigger the electromagnetic valve of the liquid supplement pipe to open to supplement water. Figure 8 The water supplement time from the low water level L to the high water level H can be estimated, and when the high water level H is reached, the liquid level display will send a safety signal to make the electromagnetic valve close and stop water supplement.

[0069] In summary, according to the automatic liquid supplement system provided by the utility model, the liquid level height of the working liquid in the liquid storage barrel is detected by the liquid level meter, and the related liquid level information is displayed by the liquid level display, and when the liquid level height drops to the point where it needs to be supplemented, a liquid supplement signal is sent to trigger the electromagnetic valve of the liquid supplement pipe to open, allowing the working liquid in the liquid supplement barrel to be input into the liquid storage barrel through the liquid supplement pipe, thereby achieving automatic liquid supplement, reducing manual inspection, and reducing labor costs. In addition, according to the automatic liquid supplement system provided by the utility model, the composition of the working liquid can be tracked by using the resistance meter, the proportion can be kept stable, and the liquid leakage can be detected by using the liquid leakage detection device, which can avoid the problem of liquid leakage, can ensure the safety of the cooling system, and can realize remote management through the monitoring system, which can improve the operation convenience, can improve the efficiency and efficiency of liquid level management, and can ensure the normal operation of the cooling system.

[0070] At the same time, the automatic liquid supplement system of the utility model can be used without damaging the original device, and the installation, removal and maintenance are convenient and simple, which can improve the reliability and service life of the cooling system. The utility model can be applied to the liquid level management of cooling water in the cooling system of various industries including semiconductors and precision machinery, and the cooling water can include but is not limited to DI / EG (ultra-pure alcohol) or ultra-pure water.

[0071] Although the content of the utility model has been introduced in detail through the above preferred embodiments, it should be recognized that the above description should not be considered as a limitation of the utility model. After reading the above content, various modifications and substitutions of the utility model will be obvious to those skilled in the art. Therefore, the protection scope of the utility model should be limited by the attached application patent range.

Claims

1. An automatic liquid replenishing system applied to a liquid storage tank containing a working liquid, characterized in that, The automatic liquid supplementing system comprises: a liquid level meter arranged in the liquid storage tank to detect a liquid level of the working liquid in the liquid storage tank and to send a liquid level signal; a liquid level display electrically connected to the liquid level meter to receive the liquid level signal from the liquid level meter, to display a liquid level information according to the liquid level signal, and to determine whether the liquid level is lower than or equal to a first default value, and if so, to send a liquid supplementing signal; a liquid supplementing tank arranged outside the liquid storage tank to provide the working liquid to be supplemented; and a liquid supplementing pipe comprising an inlet end and an outlet end, the inlet end being communicated with the liquid supplementing tank, the outlet end being communicated with the liquid storage tank, and an electromagnetic valve being arranged between the inlet end and the outlet end, the electromagnetic valve being electrically connected to the liquid level display, and the electromagnetic valve being capable of being opened to allow the inlet end and the outlet end to be communicated and to make the working liquid in the liquid supplementing tank flow into the liquid storage tank through the liquid supplementing pipe after receiving the liquid supplementing signal.

2. The automated liquid replenishment system of claim 1, wherein, The liquid level display is further configured to determine whether the liquid level is higher than or equal to a second default value according to the liquid level signal, and if so, to send a safety signal to the electromagnetic valve to make the electromagnetic valve close to block the communication between the inlet end and the outlet end.

3. The automated fluid supplementation system of claim 1, wherein, The system further comprises a monitoring system in communication with the liquid level display to receive and store the liquid level information.

4. The automated liquid replenishment system of claim 3, wherein, The communication between the monitoring system and the liquid level display is wired communication.

5. The automated liquid replenishment system of claim 4, wherein, The wired communication is 4mA-20mA output signal.

6. The automated liquid replenishment system of claim 3, wherein, The system further comprises a resistance meter arranged in the liquid supplementing tank and in communication with the monitoring system to detect a resistance value of the working liquid in the liquid supplementing tank and to send a resistance value information to the monitoring system.

7. The automated liquid replenishment system of claim 6, wherein, The resistance meter is further configured to determine whether the resistance value is lower than or higher than a third default value according to the resistance value information, and if so, to send an abnormal signal.

8. The automated liquid replenishment system of claim 3, wherein, The system further comprises a liquid leakage detection device arranged in the liquid supplementing tank and in communication with the monitoring system, and the liquid leakage detection device comprises a liquid level detection wire arranged on an expected leakage path of the liquid supplementing tank to detect the working liquid leaked from the liquid supplementing tank to the leakage path and to send a liquid leakage signal to the monitoring system.

9. The automated fluid supplementation system of claim 1, wherein, The liquid level meter comprises a detection link extending into the liquid storage tank to immerse in the working liquid and a magnetic floating ball sleeved on the detection link to move up and down, and the detection link generates the liquid level signal according to the position of the magnetic floating ball.

10. The automated fluid supplementation system of claim 1, wherein, The liquid supplementing pipe further has a valve between the inlet end and the outlet end and controlled by the electromagnetic valve to control the communication state between the liquid supplementing tank and the liquid storage tank and the flow rate of the working liquid in the liquid supplementing pipe.

11. The automated fluid supplementation system of claim 1, wherein, The liquid supplementing tank comprises a stirring rod extending into the liquid supplementing tank to stir the working liquid.

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