High-voltage ignition starting device of plasma reaction cavity and impedance matcher

Abstract

The utility model belongs to the technical field of impedance matchers, and particularly relates to a high-voltage ignition starter of a plasma reaction cavity and an impedance matcher. The ignition starting device is applied to a plasma reaction cavity and comprises a control module, a driving module, an ignition module and a matching module, the control module is used for controlling the ignition module, and when the ignition module is started, an ignition voltage is provided for the plasma reaction cavity through a power frequency power source; and meanwhile, the control module controls the driving module to drive the matching module to provide impedance matching signals for the plasma cavity, so that the ignition starting device provided by the utility model can realize rapid starting of the plasma reaction cavity, and provides the impedance matching signals after ignition starting.

Description

TECHNICAL FIELD

[0001] The utility model belongs to impedance matcher technical field, concretely relates to a kind of high-pressure ignition glow device and impedance matcher of plasma reaction cavity. BACKGROUND

[0002] The ignition glow of plasma reaction cavity refers to starting plasma in the plasma generation process by specific method and equipment, so as to carry out subsequent application, such as plasma processing, etching, deposition etc.The ignition glow device of plasma reaction cavity affects the generation speed, quality performance of plasma to some extent.

[0003] The direct input of radio frequency signal of existing plasma cavity cannot successfully ignite glow at high vacuum degree and lower cavity pressure, so additional ignition source is needed to ignite glow of plasma cavity first, and then impedance matching work is carried out. UTILITY MODEL CONTENT

[0004] The technical problem to be solved by the utility model is to overcome the technical problem of ignition glow failure of plasma reaction cavity in prior art, so as to provide a kind of high-pressure ignition glow device and impedance matcher of plasma reaction cavity.

[0005] The utility model discloses a kind of ignition glow devices, applied to plasma reaction cavity, including control module, drive module, ignition module and matching module;

[0006] The first control end of the control module is connected with the input end of the drive module, for sending the control signal to the drive module;

[0007] The second control end of the control module is connected with the signal input end of the ignition module, for sending ignition signal to the ignition module;

[0008] The control end of the drive module is connected with the controlled end of the matching module, for controlling the matching module according to the control signal;

[0009] The ignition module is used to provide ignition voltage to plasma reaction cavity, and the output end of the ignition module is connected with the output end of the matching module;The power input end of the ignition module is connected with the power output end of power frequency power supply;

[0010] The input end and the output end of the matching module are connected with radio frequency power supply and plasma reaction cavity respectively, for receiving power signal of radio frequency power supply and transmitting to plasma reaction cavity.

[0011] Further, the sampling module is further included, the detection end of the sampling module is connected with the input end of the matching module, and the state parameter of the input end of the matching module is acquired.

[0012] Further, the sampling module includes an electrical quantity sensor and a sampling controller connected with each other, the input end of the electrical quantity sensor is connected with the radio frequency power supply, and the detection end is connected with the input end of the matching module; the output end of the electrical quantity sensor is connected with the sampling controller, and the input end of the control module is connected with the sampling controller.

[0013] Further, the matching module includes a first adjustable capacitor, a second adjustable capacitor and a first inductor, the drive module drives the controlled end of the first adjustable capacitor and the controlled end of the second adjustable capacitor, the second end of the first adjustable capacitor and the first end of the second adjustable capacitor serve as the input end of the matching module, the first end of the first adjustable capacitor is grounded, the second end of the second adjustable capacitor is connected with the first end of the first inductor, and the second end of the first inductor serves as the output end of the matching module.

[0014] Further, the ignition module includes a relay, a transformer and a half-wave rectification unit, the signal input end of the relay is connected with the second control end of the control module, the power input end and the power output end of the relay are respectively connected with the power output end of the power frequency power supply and the input winding of the transformer; one end of the output winding of the transformer is connected with the input end of the half-wave rectification unit, and the other end of the output winding of the transformer is grounded; the output end of the half-wave rectification unit serves as the output end of the ignition module.

[0015] Further, the ignition module further includes a low-pass filter, the input end of the low-pass filter is connected with the output end of the half-wave rectification unit, and the output end is connected with the radio frequency output end of the matching module.

[0016] Further, the control module includes a rectifier and a control unit, the input end and the output end of the rectifier are respectively connected with the power frequency power supply and the input end of the control unit.

[0017] Further, the transformer is a plasma high-voltage transformer.

[0018] Further, the second control end of the control module is connected with the controlled end of the relay through an RS-232 interface.

[0019] An impedance matching device, the impedance matching device includes the ignition starting device.

[0020] Beneficial effects: the utility model discloses a kind of ignition pilot device, applied to plasma reaction cavity, including control module, drive module, ignition module and matching module, control module is used to control ignition module, ignition module starts and provides ignition voltage for plasma reaction cavity by power frequency power supply, while control module controls the drive module and provides impedance matching signal for plasma reaction cavity to drive matching module, so that the ignition pilot device provided by the utility model can realize the quick pilot of plasma reaction cavity, and provides impedance matching signal after ignition pilot. BRIEF DESCRIPTION OF DRAWINGS

[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.

[0022] Figure 1 It is a schematic block diagram of the overall structure of the utility model;

[0023] Figure 2 It is a schematic block diagram of the specific structure of the utility model.

[0024] Reference signs:

[0025] 1, control module; 2, drive module; 3, ignition module; 4, matching module; 5, sampling module; 6, power frequency power supply;

[0026] 11, control unit; 12, rectifier; 31, relay; 32, transformer; 41, first adjustable capacitor; 42, second adjustable capacitor; 43, first inductor; 51, sampling controller; 52, electrical quantity sensor. DETAILED DESCRIPTION

[0027] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific embodiments of the present application will be described in detail below. In the following description, a lot of specific details are set forth in order to fully understand the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without departing from the spirit of the present application, therefore the present application is not limited by the specific embodiments disclosed below.

[0028] In the description of the application, it should be understood that the terms "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first", "second" can be explicitly or implicitly included at least one of the features. In the description of the application, the meaning of "a plurality of" is at least two, for example, two, three, etc., unless otherwise explicitly specified.

[0029] In this application, unless otherwise expressly specified and limited, the terms "mounting", "connecting", "connecting", "fixing" and other terms should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements, unless otherwise expressly limited. For those skilled in the art, the specific meaning of the above terms in this application can be understood according to the specific circumstances.

[0030] Embodiment one:

[0031] Referring to Figure 1 and Figure 2 The utility model discloses a kind of ignition pilot device, wherein dotted arrow indicates control signal, applied to plasma reaction cavity, including control module 1, drive module 2, ignition module 3 and matching module 4;

[0032] The first control end of control module 1 is connected to the input end of drive module 2, for sending control signal to drive module 2;

[0033] The second control end of control module 1 is connected to the signal input end of ignition module 3, for sending ignition signal to ignition module 3;

[0034] The control end of drive module 2 is connected with the controlled end of matching module 4, for controlling matching module 4 according to control signal;

[0035] Ignition module 3 is used to provide ignition voltage to plasma reaction cavity, and the output end of ignition module 3 is connected with the output end of matching module 4;The power input end of ignition module 3 is connected with the power output end of power frequency power supply 6;

[0036] The input end and the output end of matching module 4 are connected with radio frequency power supply and plasma reaction cavity respectively, for receiving power signal of radio frequency power supply and transmitting to plasma reaction cavity.

[0037] As a further improvement to this embodiment, a sampling module 5 is also included. The detection end of the sampling module 5 is connected to the input end of the matching module 4 to acquire the state parameters of the input end of the matching module 4. The output end of the sampling module 5 is connected to the control module 1 to provide a corresponding detection signal to the control module 1. In this embodiment, the sampling module 5 includes an electrical quantity sensor 52 and a sampling controller 51 connected to each other. The input end of the electrical quantity sensor 52 is connected to the radio frequency power supply, and the detection end is connected to the input end of the matching module 4. The output end of the electrical quantity sensor 52 is connected to the sampling controller 51, and the sampling controller 51 is connected to the input end of the control module 1.

[0038] In this embodiment, the electrical quantity sensor 52 can be a current sensor, a voltage sensor, or a voltage-current sensor. Preferably, the electrical quantity sensor 52 is a voltage-current sensor, used to acquire the voltage and current parameters at the input terminal of the matching module 4. In this embodiment, the sampling controller 51 can be a CPU, MCU, microcontroller, or FPGA. Preferably, the sampling controller 51 is an FPGA, which controls the sampling operation of the voltage and current sensor, acquires the sampling parameters, and outputs them to the control module 1.

[0039] Specifically, the matching module 4 includes a first adjustable capacitor 41, a second adjustable capacitor 42, and a first inductor 43. The driving module 2 drives the controlled terminals of the first adjustable capacitor 41 and the second adjustable capacitor 42. The second terminal of the first adjustable capacitor 41 and the first terminal of the second adjustable capacitor 42 serve as the input terminals of the matching module 4. The first terminal of the first adjustable capacitor 41 is grounded. Figure 2 The terminal of the second adjustable capacitor 42, labeled GND, is connected to the first terminal of the first inductor 43. The second terminal of the first inductor 43 serves as the output terminal of the matching module 4. In this embodiment, the casing of the matching module 4 is grounded. In this embodiment, the drive module 2 includes a motor, which can adjust the capacitance values ​​of the first adjustable capacitor 41 and the second adjustable capacitor 42 respectively.

[0040] In this embodiment, the ignition module 3 includes a relay 31, a transformer 32, and a half-wave rectifier unit. The signal input terminal of the relay 31 is connected to the second control terminal of the control module 1. The power input terminal and power output terminal of the relay 31 are respectively connected to the power output terminal of the power frequency power supply 6 and the input winding of the transformer 32. One end of the output winding of the transformer 32 is connected to the input terminal of the half-wave rectifier unit, and the other end of the output winding of the transformer 32 is grounded. The output terminal of the half-wave rectifier unit serves as the output terminal of the ignition module 3.

[0041] As a further improvement of the embodiment, the ignition module 3 further comprises a low-pass filter, an input end of the low-pass filter is connected to an output end of the half-wave rectifying unit, and an output end is connected to a radio frequency output end of the matching module 4. As a preferred embodiment, the low-pass filter is an LC filter, comprising a second inductor and a third capacitor, which can effectively filter out high-frequency signals and interfere with the normal operation of the plasma reaction chamber.

[0042] In the embodiment, the control module 1 comprises a rectifier 12 and a control unit 11, an input end and an output end of the rectifier 12 are connected to the power frequency power supply 6 and an input end of the control unit 11, respectively. In the embodiment, the power frequency power supply 6 is a high-voltage alternating current power supply, and the rectifier 12 converts the high-voltage alternating current power supply into a low-voltage direct current power supply to provide a working voltage for the control module 1.

[0043] Specifically, the transformer 32 is a plasma high-voltage transformer 32.

[0044] In the embodiment, a second control end of the control module 1 is connected to a controlled end of the relay 31 through an RS-232 interface, and the communication interface can be an RS232, RS485, RS422, UART, SPI, I2C interface. As a preferred embodiment, the communication interface is an RS232 interface.

[0045] Embodiment two:

[0046] The embodiment provides an impedance matching device, which comprises the ignition and starting device of the embodiment one.

[0047] The technical features of the above embodiments can be combined arbitrarily. In order to make the description simple, all possible combinations of the technical features in the above embodiments are not described, but as long as the combinations of the technical features do not exist, they should be considered as the scope of the description.

[0048] The above embodiments only express several implementation manners of the application, and the description is more specific and detailed, but it should not be understood as a limitation on the patent application scope. It should be pointed out that for ordinary skilled in the art, without departing from the concept of the application, a number of modifications and improvements can be made, which are all within the protection scope of the application. Therefore, the patent protection scope of the application should be subject to the appended claims.

Claims

1. An ignition pilot device applied to a plasma reaction chamber, characterized in that, The ignition starter includes a control module, a driving module, an ignition module and a matching module. The first control end of the control module is connected with the input end of the driving module, for sending a control signal to the driving module. The second control end of the control module is connected with the signal input end of the ignition module, for sending an ignition signal to the ignition module. The control end of the driving module is connected with the controlled end of the matching module, for controlling the matching module according to the control signal. The ignition module is used for providing an ignition voltage to a plasma reaction cavity, and the output end of the ignition module is connected with the output end of the matching module. The power input end of the ignition module is connected with the power output end of a power frequency power supply.

2. An ignition pilot device according to claim 1, characterised in that The input end and the output end of the matching module are connected with a radio frequency power supply and the plasma reaction cavity respectively, for receiving a power signal of the radio frequency power supply and transmitting to the plasma reaction cavity.

3. An ignition pilot device according to claim 2, wherein The sampling module is further included, the detection end of the sampling module is connected with the input end of the matching module, for acquiring a state parameter of the input end of the matching module, and the output end of the sampling module is connected with the control module, for providing a corresponding detection signal to the control module.

4. An ignition pilot device according to claim 1, wherein The sampling module includes an electrical quantity sensor and a sampling controller connected with each other, the input end of the electrical quantity sensor is connected with the radio frequency power supply, and the detection end is connected with the input end of the matching module; the output end of the electrical quantity sensor is connected with the sampling controller, and the sampling controller is connected with the input end of the control module.

5. An ignition pilot device according to claim 1, wherein The matching module includes a first adjustable capacitor, a second adjustable capacitor and a first inductor, the driving module drives the controlled end of the first adjustable capacitor and the controlled end of the second adjustable capacitor, the second end of the first adjustable capacitor and the first end of the second adjustable capacitor serve as the input end of the matching module, the first end of the first adjustable capacitor is grounded, the second end of the second adjustable capacitor is connected with the first end of the first inductor, and the second end of the first inductor serves as the output end of the matching module.

6. An ignition pilot device according to claim 5, wherein The ignition module includes a relay, a transformer and a half-wave rectification unit, the signal input end of the relay is connected with the second control end of the control module, the power input end and the power output end of the relay are connected with the power output end of the power frequency power supply and the input winding of the transformer respectively, one end of the output winding of the transformer is connected with the input end of the half-wave rectification unit, the other end of the output winding of the transformer is grounded, and the output end of the half-wave rectification unit serves as the output end of the ignition module.

7. An ignition pilot device according to claim 1, wherein The ignition module further includes a low-pass filter, the input end of the low-pass filter is connected with the output end of the half-wave rectification unit, and the output end is connected with the radio frequency output end of the matching module.

8. An ignition pilot device according to claim 5, wherein The control module includes a rectifier and a control unit, the input end and the output end of the rectifier are connected with the power frequency power supply and the input end of the control unit respectively.

9. An ignition pilot device according to claim 5, wherein The transformer is a plasma high-voltage transformer.

10. An impedance matcher, characterized by The second control end of the control module is connected with the controlled end of the relay through a communication interface. The impedance matching device includes the ignition starter according to any one of claims 1 to 9.

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