Slit coating equipment

Abstract

The utility model discloses slit coating equipment. The slit coating equipment comprises a bearing table, a coating platform, a coating assembly and a measuring module, the multiple coating platforms are at least divided into two sets, and the two sets of coating platforms are arranged in a spaced mode. The coating assembly comprises a movable support and a coating head, and the coating head is used for coating a substrate. The measuring module is used for measuring the surface height of a substrate located on the coating platform, the coating platform comprises an objective table, a base and a first driving device, and the first driving device drives the objective table to ascend and descend according to measured data of the measuring module so as to adjust the distance between the coating head and the substrate. According to the slit coating equipment, the use efficiency of the coating head is improved, the use cost of the slit coating equipment is reduced, so that the production cost of a solar cell is reduced, the production period of the solar cell is shortened, the production efficiency is improved, meanwhile, the substrate can be coated more uniformly, and the quality of the solar cell is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to coating equipment technical field especially relates to a slit coating equipment. BACKGROUND

[0002] Perovskite solar cell is a kind of new solar cell with high efficiency and low cost, and its efficiency is much higher than that of traditional solar cell. Therefore, perovskite solar cell has been widely applied in photovoltaic power generation, optoelectronic device, photoelectric sensor and other fields.

[0003] In the preparation process of perovskite solar cell, coating liquid needs to be coated on substrate by coating equipment. In the prior art, the coating equipment adopts single film coating mode, that is, a single substrate is placed in the coating station, and coating is carried out using a coating head. After coating is completed, the coated substrate is taken out and the process is repeated. In this way, the coating head is in standby state during the substrate feeding and discharging process, which not only reduces the use efficiency of the coating head, thereby reducing the use efficiency of the coating equipment, but also increases the production cost of perovskite solar cell, prolongs the production cycle of perovskite solar cell and reduces the production efficiency, which cannot meet the high-throughput production demand of perovskite solar cell.

[0004] Therefore, how to improve the efficiency of the coating equipment is a difficult problem to be solved. SUMMARY

[0005] The utility model discloses a slit coating equipment, which not only improves the use efficiency of the coating head, reduces the use cost of the slit coating equipment, thereby reducing the generation cost of solar cell, but also shortens the production cycle of solar cell, improves the production efficiency, and makes the substrate coating more uniform, thereby improving the quality of solar cell.

[0006] The utility model discloses a slit coating equipment, which not only improves the use efficiency of the coating head, reduces the use cost of the slit coating equipment, thereby reducing the generation cost of solar cell, but also shortens the production cycle of solar cell, improves the production efficiency, and makes the substrate coating more uniform, thereby improving the quality of solar cell.

[0007] A slit coating equipment, comprising:

[0008] A carrying table;

[0009] A plurality of coating platforms are distributed on the carrying table along the coating direction, and the plurality of coating platforms are divided into at least two groups. The two groups of coating platforms are arranged at intervals, and each group of coating platforms comprises at least one coating platform for placing a substrate.

[0010] A coating assembly, comprising a moving bracket arranged on the carrying table and movable along the coating direction, and a coating head arranged on the moving bracket, the coating head being used for coating the substrate.

[0011] a measurement module for measuring the surface height of the substrate on the coating platform;

[0012] The coating platform comprises a carrier and a base, and a first driving device arranged between the carrier and the base, the first driving device drives the carrier to ascend or descend according to the measurement data of the measurement module, so as to adjust the distance between the coating head and the substrate.

[0013] Preferably, two pre-coating assemblies are arranged between the two groups of coating platforms, and the two pre-coating assemblies are arranged close to the two groups of coating platforms in the coating direction, and the pre-coating assemblies are used for pre-coating by the coating head.

[0014] Preferably, when the number of each group of coating platforms is multiple, the substrates on the multiple coating platforms are arranged in abutment, and the first driving device drives the carrier to ascend or descend according to the measurement data of the measurement module, so that the upper surfaces of the substrates on the coating platforms and the upper surfaces of the pre-coating assemblies are in the same horizontal plane.

[0015] Preferably, a waste tank is arranged between the two pre-coating assemblies, the waste tank is used for receiving the coating liquid sprayed by the coating head, and the length of the waste tank is greater than the length of the coating head.

[0016] Preferably, the coating assembly further comprises a second driving device arranged on the moving bracket, and the second driving device drives the coating head to ascend or descend according to the measurement data of the measurement module; and / or,

[0017] The coating assembly further comprises a balancing device arranged on the moving bracket, and the balancing device is used for applying a force to the coating head in the opposite direction of gravity.

[0018] Preferably, the number of the first driving devices is two or three, when the number of the first driving devices is two, the two first driving devices are arranged at two ends of the carrier respectively, and when the number of the first driving devices is three, the three first driving devices are arranged in a triangular distribution.

[0019] Preferably, two groups of measurement modules are arranged on the moving bracket, and the two groups of measurement modules are arranged on both sides of the moving bracket in the coating direction;

[0020] The number of each group of measurement modules is two or three, when the number of each group of measurement modules is two, the two measurement modules are arranged in a length direction of the coating head, and when the number of each group of measurement modules is three, the three measurement modules are arranged in a triangular distribution.

[0021] Preferably, it further includes a liquid supply device, which is disposed on the movable support and is connected to the coating head to provide coating liquid to the coating head.

[0022] Preferably, the stage has an air intake channel on the side facing the substrate, and a connector communicating with the air intake channel is provided on the side facing away from the substrate. The air intake channel is connected to a vacuum pump through the connector so that the substrate is adsorbed onto the stage.

[0023] Preferably, the system further includes two material handling components disposed near the two sets of coating platforms, the material handling components being used to transfer the substrate to the coating platform or to transfer the substrate from the coating platform.

[0024] Compared with the prior art, the beneficial effects of this utility model include at least the following:

[0025] This utility model discloses a slot coating device. By setting up two sets of coating platforms, while loading and unloading materials are being processed on one set of platforms, the coating head can coat the substrates on the other set of platforms. This reduces the waiting time of the coating head, improving its utilization efficiency and lowering the operating cost of the slot coating device, thereby reducing the production cost of solar cells. Furthermore, it shortens the production cycle of solar cells and increases production efficiency. Simultaneously, a first drive device drives the stage to rise and fall based on measurement data from the measurement module, adjusting the distance between the coating head and the substrate. This ensures that the distance from different positions on each substrate to the coating head is equal, and also ensures that the distance from different substrates to the coating head is equal, resulting in more uniform substrate coating and thus improving the quality of the solar cells. Attached Figure Description

[0026] Figure 1 This is a three-dimensional structural schematic diagram of a slot coating device according to an embodiment of the present invention.

[0027] Figure 2 This is a planar structural schematic diagram of a slot coating device according to an embodiment of the present invention.

[0028] Figure 3 This is a planar structural schematic diagram of a slot coating device according to another embodiment of the present invention.

[0029] Figure 4 This is a schematic diagram of the planar structure of another slot coating device according to an embodiment of the present invention.

[0030] In the diagram: 100, slot coating equipment; 1, support platform; 2, coating platform; 21, loading platform; 22, base; 23, first drive device; 3, coating assembly; 31, moving support; 311, crossbeam; 312, first column; 313, second column; 32, coating head; 33, second drive device; 34, balancing device; 35, third drive device; 4, measuring module; 5, pre-coating assembly; 6, waste liquid tank; 7, liquid supply device; 8, base. Detailed Implementation

[0031] Exemplary embodiments will now be described more fully with reference to the accompanying drawings. However, these exemplary embodiments can be implemented in many forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided to make the present invention more comprehensive and complete, and to fully convey the concept of the exemplary embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar structures, and therefore repeated descriptions of them will be omitted.

[0032] The terms used to describe position and direction in this utility model are illustrated with the accompanying drawings, but changes can be made as needed, and all such changes are included within the scope of protection of this utility model.

[0033] Reference Figures 1 to 4 This utility model provides a slit coating apparatus 100, including: a support platform 1, multiple coating platforms 2, a coating assembly 3, and a measurement module 4. The slit coating apparatus 100 may further include a pre-coating assembly 5, a waste liquid tank 6, a liquid supply device 7, and two material handling assemblies (not shown). The liquid supply device 7 may be disposed on the coating assembly 3, and the coating assembly 3 provides the coating liquid. The two material handling assemblies may be disposed close to the two sets of coating platforms 2, respectively, and are used to transfer a substrate (not shown) to or from the coating platform 2.

[0034] Specifically, refer to Figure 1 , Figure 4 The support platform 1 can be rectangular in shape. It is used to support the coating platform 2, coating assembly 3, and pre-coating assembly 5. The support platform 1 is preferably made of a high-density, high-hardness material, such as marble. This provides the support platform 1 with good stability and wear resistance. Good stability effectively reduces vibration and shaking, promoting stable equipment operation and improving coating stability and uniformity. Good wear resistance allows the support platform 1 to maintain surface flatness for extended periods, further contributing to more uniform substrate coating and improving the quality and yield of solar cells.

[0035] The support platform 1 can be set on the base 8. The bottom of the base 8 can be provided with support legs (not shown). There are multiple support legs and they are evenly distributed on the bottom of the base 8. The height of each support leg can be adjusted, that is, the support leg can adjust the height of the base 8. The support leg can ensure that the base 8 remains horizontal, thereby ensuring that the slot coating equipment 100 can meet different usage environments.

[0036] Reference Figure 1 , Figure 4 Multiple coating platforms 2 can be arranged in a straight line, distributed along the coating direction on the support platform 1, that is, multiple coating platforms 2 can be distributed along the length direction of the support platform 1. The multiple coating platforms 2 can be divided into at least two groups, with each group of coating platforms 2 spaced apart from each other. In this embodiment, the multiple coating platforms 2 are divided into two groups, with the two groups of coating platforms 2 spaced apart from each other. When loading and unloading materials from one group of coating platforms 2, the coating head 32 can coat the substrate on the other group of coating platforms 2. This reduces the waiting time of the coating head 32, not only improving the utilization efficiency of the coating head 32 and reducing the operating cost of the slot coating equipment 100, thereby reducing the production cost of solar cells, but also shortening the production cycle of solar cells and improving production efficiency.

[0037] Each group of coating platforms 2 may include at least one coating platform 2. (Refer to...) Figure 1 , Figure 2 Each group of coating platforms 2 may include one coating platform 2. (Refer to...) Figure 4 The coating platform 2 may also include multiple coating platforms 2. The number of coating platforms 2 in two groups can be the same or different. In this embodiment, the number of coating platforms 2 in two groups can be the same. The coating platform 2 is used to place the substrate. Each coating platform 2 can place one or more substrates. In this embodiment, each coating platform 2 places one substrate.

[0038] Reference Figure 1 , Figure 3 The coating assembly 3 may include a movable support 31 disposed on the support platform 1 and capable of reciprocating along the coating direction, and a coating head 32 disposed on the movable support 31. The coating head 32 is used to coat the substrate. A discharge slit (not shown) is provided on the side of the coating head 32 facing the substrate, through which the coating liquid can be applied to the substrate. The movable support 31 may be a gantry support. The coating head 32 is disposed on the side of the movable support 31 facing the substrate. The movable support 31 can drive the coating head 32 to move back and forth along the coating direction, allowing the coating head 32 to coat the substrate during its movement. The support may include a crossbeam 311 and a first column 312 and a second column 313 respectively disposed at both ends of the crossbeam 311. The coating head 32 may be disposed on the crossbeam 311.

[0039] Reference Figure 1 A liquid supply device 7 can be provided on the movable support 31. That is, the liquid supply device 7 is provided on the movable support 31 and can move together with the movable support 31. The liquid supply device 7 can be connected to the coating head 32 and provide coating liquid to the coating head 32. The coating liquid is, for example, a perovskite solution.

[0040] As a preferred method, refer to Figure 2 , Figure 3 The coating assembly 3 may further include a third drive device 35, which is used to move the support 31 and drive the coating head 32 to move back and forth along the coating direction. The first drive device 23 may be a linear motor, under the drive of the first drive device 23, the moving support 31 can move back and forth along the coating direction.

[0041] Reference Figure 1 The measurement module 4 is used to measure the surface height of the substrate located on the coating platform 2. The measurement module 4 is, for example, a laser sensor. The measurement module 4 can be mounted on the crossbeam 311, or it can be mounted independently. In this embodiment, two sets of measurement modules 4 can be mounted on the movable support 31, and these two sets of measurement modules 4 can be respectively mounted on both sides of the movable support 31 in the coating direction, that is, the two sets of measurement modules 4 can be respectively mounted on both sides of the crossbeam 311 in the coating direction. The two sets of measurement modules 4 can be used to measure the surface height of the substrates on the two coating platforms 2, respectively.

[0042] Reference Figure 1 The coating platform 2 may include a stage 21 and a base 22, as well as a first driving device 23 disposed between the stage 21 and the base 22. The first driving device 23 can drive the stage 21 to rise and fall according to the measurement data of the measurement module 4, thereby driving the substrate to rise and fall to adjust the distance between the coating head 32 and the substrate. The first driving device 23 may be a piezoelectric ceramic actuator, so that the first driving device 23 can not only drive the stage 21 to rise and fall, but also support the stage 21.

[0043] The number of first driving devices 23 on each coating platform 2 can be two or three. The first driving devices 23 are independent of each other and can drive the stage 21 simultaneously or drive the stage 21 individually. The position of the stage 21 can be adjusted according to actual needs to eliminate the thickness difference of different parts of the substrate itself, thereby ensuring that the distance from different parts of different substrates to the coating head 32 is the same, improving the uniformity and consistency of coating on different substrates by the coating head 32.

[0044] When there are two first driving devices 23, the two first driving devices 23 can be respectively disposed at both ends of the stage 21. For example, the two first driving devices 23 can be respectively disposed at both ends of the stage 21 along the length direction of the coating head 32, that is, the two first driving devices 23 can be respectively disposed at both ends of the stage 21 perpendicular to the coating direction. When there are three first driving devices 23, the three first driving devices 23 are triangularly distributed, so that the first driving devices 23 can make the substrate surface more horizontal, further improving the uniformity and consistency of coating on different substrates by the coating head 32.

[0045] As a preferred embodiment, each group of measuring modules 4 can have two or three modules. The positions of the measuring modules 4 correspond to the positions of the first driving device 23, which improves the adjustment accuracy of the first driving device 23 and ensures the levelness of the substrate surface. When there are two measuring modules 4 in each group, the two measuring modules 4 can be distributed along the length of the coating head 32. When there are three measuring modules 4 in each group, the three measuring modules 4 can be arranged in a triangular pattern.

[0046] A suction channel (not shown) may be provided on the side of the stage 21 facing the substrate, and a connector (not shown) communicating with the suction channel is provided on the side of the stage 21 facing away from the substrate. The suction channel is connected to a vacuum pump (not shown) through the connector so that the substrate is adsorbed onto the stage 21. When the substrate is placed on the stage 21, the adsorption device can fix the substrate, prevent the substrate from shifting, and prevent the substrate from warping, making the substrate surface smoother and thus improving the uniformity of coating.

[0047] In this application, by setting up two sets of coating platforms 2, when loading and unloading materials onto one set of coating platforms 2, the coating head 32 can coat the substrates on the other set of coating platforms 2. This reduces the waiting time of the coating head 32, not only improving the utilization efficiency of the coating head 32 and reducing the operating cost of the slot coating equipment 100, thereby reducing the production cost of solar cells, but also shortening the production cycle of solar cells and improving production efficiency. At the same time, the first driving device 23 drives the stage 21 to rise and fall according to the measurement data of the measurement module 4 to adjust the distance between the coating head 32 and the substrate. This not only ensures that the distance from different positions of each substrate to the coating head 32 is equal, but also ensures that the distance from different substrates to the coating head 32 is equal. This eliminates the differences between each coating platform 2, as well as the differences in thickness between different substrates in the same batch or between different batches of substrates, making the distance from each substrate to the coating head 32 the same. This makes the substrate coating more uniform and improves the coating consistency of the coating head 32 on different substrates, thereby improving the quality of solar cells.

[0048] In one specific implementation, refer toFigure 1 , Figure 2 , Figure 4 The slot coating apparatus 100 may further include two pre-coating components 5 disposed between two sets of coating platforms 2. The two pre-coating components 5 may be disposed close to the two sets of coating platforms 2 along the coating direction, and the pre-coating components 5 are used for pre-coating by the coating head 32. Before coating the substrate, the coating head 32 may pre-coat on the coating components 32. The coating head 32 applies uneven coating liquid to the pre-coating components 5 to ensure the uniformity of the coating liquid on the substrate, thereby improving the quality and yield of the solar cell.

[0049] As a preferred embodiment, when there are multiple coating platforms 2 in each group, the substrates on the multiple coating platforms 2 are arranged close together, that is, there is no gap or almost no gap between adjacent substrates. In this way, the coating head 32 can continuously coat multiple substrates simultaneously, further shortening the production cycle of solar cells and improving production efficiency. Furthermore, the first driving device 23 can drive the stage 21 to rise and fall according to the measurement data from the measurement module 4, so that the upper surfaces of the multiple substrates on the coating platforms 2 are on the same horizontal plane as the upper surface of the pre-coated assembly 5. That is, the upper surfaces of the substrates on the same group of coating platforms 2 are on the same horizontal plane, and the upper surfaces of the multiple substrates on the coating platforms 2 are coplanar. This allows for more uniform coating on each substrate, ensuring that the thickness of the coating liquid on each substrate is the same or substantially the same, ensuring the consistency of solar cell performance, improving the quality and yield of solar cells, and thus reducing the production cost of solar cells.

[0050] Furthermore, it can be on the same horizontal plane as the upper surface of the pre-coating component 5, that is, the distance from the coating head 32 to the upper surface of the pre-coating component 5 is the same as or approximately the same as the distance from the coating head 32 to the substrate surface. The coating process of the coating head 32 on the pre-coating component 5 is the same as the coating process on the substrate, which is equivalent to the coating head 32 coating on the substrate in advance. This can further improve the uniformity of coating by the coating head 32 and improve the coating quality.

[0051] Reference Figure 1 The slot coating apparatus 100 may also include a waste liquid tank 6 located between two pre-coating components 5. The waste liquid tank 6 is used to receive the coating liquid sprayed from the coating head 32. The length of the waste liquid tank 6 is greater than the length of the coating head 32, which can prevent the waste liquid from being sprayed to other parts of the slot coating apparatus 100, ensuring the cleanliness of the slot coating apparatus 100 and preventing the waste liquid from contaminating the substrate.

[0052] As a preferred method, refer to Figure 1 , Figure 3 , Figure 4The coating assembly 3 may further include a second driving device 33, which drives the coating head 32 to move up and down along the height direction of the coating assembly 3, that is, the coating head 32 is movably mounted on the movable support 31. The second driving device 33 may be located at the top, bottom or side of the movable support 31. In this embodiment, the second driving device 33 is located at the top of the movable support 31.

[0053] The second driving device 33 can be a servo module, or other types of driving components. For example, the second driving device 33 includes a motor and a guide rail. The driving end of the motor moves up and down or extends and retracts along the guide rail, and the coating head 32 is connected to the driving end of the motor. The second driving device 33 can drive the coating head 32 to move up and down along the height direction of the coating assembly 3, so that the coating head 32 reaches a predetermined position. By adjusting the position of the coating head 32, the distance between the coating head 32 and the substrate can be controlled, thereby controlling the thickness of the coating liquid applied to the substrate.

[0054] The number of second driving devices 33 can be one or more. In this embodiment, the number of second driving devices 33 is preferably two. The two second driving devices 33 are respectively disposed at both ends of the movable bracket 31 and respectively connected to both ends of the coating head 32. On the one hand, this can ensure that the coating head 32 remains balanced, so that the lifting and lowering of the coating head 32 is more stable. On the other hand, it can ensure that the two second driving devices 33 are subjected to uniform force, that is, the load borne by the two second driving devices 33 is uniform, so that the two second driving devices 33 operate more stably and smoothly. It can also prevent the second driving devices 33 from being affected by excessive load, affecting the positioning accuracy or causing damage to the second driving devices 33.

[0055] The two second drive devices 33 are independent of each other and can drive the coating head 32 simultaneously or independently. When the coating head 32 needs to rise or fall as a whole, both second drive devices 33 can drive the coating head 32 to rise or fall simultaneously, maintaining the relative horizontality of both ends of the coating head 32. When one end of the coating head 32 needs to rise and the other end needs to fall, one second drive device 33 can drive one end of the coating head 32 to rise, and the other second drive device 33 can drive the other end of the coating head 32 to fall. When only one end of the coating head 32 needs to rise or fall, only one second drive device 33 needs to drive the end of the coating head 32 that needs to rise or fall. In this embodiment, the two second driving devices 33 are independently arranged, and the position of the coating head 32 can be adjusted according to actual needs. This can eliminate problems such as uneven heights at both ends of the coating head 32 or uneven heights at both ends of the substrate caused by part processing errors or assembly errors, ensuring that the two ends of the coating head 32 remain balanced, and thus ensuring that the coating head 32 remains parallel to the substrate. That is, it ensures that the two ends of the coating head 32 facing the substrate are at the same distance from the substrate. This not only adjusts the thickness of the coating liquid on the substrate, but also makes the coating liquid uniformly coated on the substrate, thereby improving the photoelectric conversion efficiency of the solar cell.

[0056] Reference Figure 1 , Figure 3 , Figure 4 The coating assembly 3 may further include a balancing device 34. After the coating head 32 is mounted on the movable support 31, the balancing device 34 applies a force against gravity to the coating head 32 to reduce the load on the second drive device 33. The balancing device 34 may be located at the top, bottom, or side of the movable support 31; in this embodiment, it is located at the top of the movable support 31. The balancing device 34 may be a cylinder module or other types of balancing components. The balancing device 34 can at least share part of the load on the second drive device 33, thus reducing the load on the second drive device 33.

[0057] The number of balancing devices 34 can be one or more. In this embodiment, the number of balancing devices 34 is preferably two. The two balancing devices 34 are respectively disposed at both ends of the movable support 31 and respectively connected to both ends of the coating head 32. The two balancing devices 34 can simultaneously apply force to both ends of the coating head 32, which can share the load borne by each second drive device 33, so that the loads of the two second drive devices 33 are the same or approximately the same. This can keep the adjustment accuracy of the two second drive devices 33 consistent and avoid the decrease in adjustment accuracy due to the different loads borne by the second drive devices 33.

[0058] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions and alterations to the above embodiments within the scope of the present invention without departing from the principles and spirit of the present invention, and all such changes should fall within the protection scope of the claims of the present invention.

Claims

1. A slot coating device, characterized in that, include: Support platform; Multiple coating platforms are distributed along the coating direction on the support platform. The multiple coating platforms are divided into at least two groups, and the two groups of coating platforms are spaced apart from each other. Each group of coating platforms includes at least one coating platform, and the coating platform is used to place the substrate. A coating assembly, comprising a movable support disposed on the support platform and capable of reciprocating along the coating direction, and a coating head disposed on the movable support, the coating head being used to coat the substrate; A measurement module for measuring the surface height of the substrate located on the coating platform; The coating platform includes a stage and a base, and a first driving device disposed between the stage and the base. The first driving device drives the stage to move up and down according to the measurement data of the measurement module to adjust the distance between the coating head and the substrate.

2. The slot coating equipment according to claim 1, characterized in that, It also includes two pre-coating components disposed between the two sets of coating platforms. The two pre-coating components are respectively disposed close to the two sets of coating platforms along the coating direction. The pre-coating components are used for pre-coating by the coating head.

3. The slot coating equipment according to claim 2, characterized in that, When there are multiple coating platforms in each group, the substrates located on the multiple coating platforms are attached to each other. The first driving device drives the stage to move up and down according to the measurement data of the measurement module, so that the upper surface of the multiple substrates located on the coating platform is on the same horizontal plane as the upper surface of the pre-coating assembly.

4. The slot coating equipment according to claim 2, characterized in that, It also includes a waste liquid tank located between the two pre-coating assemblies, the waste liquid tank being used to receive the coating liquid sprayed from the coating head, the length of the waste liquid tank being greater than the length of the coating head.

5. The slot coating equipment according to claim 1, characterized in that, The coating assembly further includes a second driving device, which is disposed on the movable support. The second driving device drives the coating head to move up and down according to the measurement data from the measurement module; and / or, The coating assembly also includes a balancing device disposed on the movable support, the balancing device being used to apply a force against gravity to the coating head.

6. The slot coating apparatus according to claim 1, characterized in that, The number of the first driving devices is two or three. When there are two first driving devices, the two first driving devices are respectively located at both ends of the stage. When there are three first driving devices, the three first driving devices are arranged in a triangular distribution.

7. The slot coating apparatus according to claim 1, characterized in that, The movable support is provided with two sets of the measuring modules, which are respectively located on both sides of the movable support in the coating direction; The number of measurement modules in each group is two or three. When the number of measurement modules in each group is two, the two measurement modules are distributed along the length of the coating head. When the number of measurement modules in each group is three, the three measurement modules are distributed in a triangular pattern.

8. The slot coating apparatus according to claim 1, characterized in that, It also includes a liquid supply device, which is disposed on the movable support and is connected to the coating head to provide coating liquid to the coating head.

9. The slot coating apparatus according to claim 1, characterized in that, An air intake channel is provided on the side of the stage facing the substrate, and a connector communicating with the air intake channel is provided on the side of the stage facing away from the substrate. The air intake channel is connected to a vacuum pump through the connector so that the substrate is adsorbed onto the stage.

10. The slot coating apparatus according to claim 1, characterized in that, It also includes two material handling components respectively located near the two sets of coating platforms, the material handling components being used to transfer the substrate to the coating platform or to transfer the substrate from the coating platform.

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