Climbing type auxiliary room cleaning machine easy to center
By designing an easy-to-center climbing auxiliary chamber cleaning machine, which utilizes climbing wheels and a rotary motor to drive the working head to lift and rotate the auxiliary chamber wall of the single crystal furnace, the machine solves the technical problems and challenges that have not been effectively addressed in existing technologies. This achieves a highly efficient cleaning effect on the auxiliary chamber wall, solves the problem of cleaning deposits on the auxiliary chamber wall of the single crystal furnace, and improves cleaning efficiency and equipment lifespan.
Patent Information
- Application Number
- CN202423180558.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-23
- Publication Date
- 2025-12-23
- Estimated Expiration
- 2034-12-23
AI Technical Summary
The evaporation products and impurities adhering to the inner wall of the auxiliary chamber of the single crystal furnace are difficult to clean effectively, and manual cleaning is difficult and inefficient.
An easy-to-center climbing auxiliary chamber cleaning machine was designed, comprising a trolley, a lifting mechanism, and a cleaning mechanism. The working head is driven to rise, fall, and rotate within the auxiliary chamber using climbing wheels and a rotary motor. Precise positioning and stable connection are achieved by combining laser sensors and magnetic components. Cleaning is performed using cleaning sponges and alcohol.
It achieves efficient cleaning of the inner wall of the auxiliary room, avoids the difficulties of manual cleaning, improves the cleaning effect, and protects the integrity of the equipment.
Smart Images

Figure CN223698601U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to a cleaning device technical field, especially easy to center climbing formula vice room cleaning machine. BACKGROUND
[0002] The single crystal furnace is a special equipment for producing single crystal silicon rod. The single crystal furnace is mainly composed of a furnace body, a heating device, a pulling mechanism, a seed crystal rotating mechanism and a control system. The single crystal furnace vice room is an important part of the single crystal growth furnace equipment, which is used to assist in realizing various functions and control requirements in the single crystal growth process. The single crystal furnace vice room usually adopts a telescopic structure design. This design allows the vice room to shrink from bottom to top to increase the distance between the main furnace chamber and the vice room under the condition of a certain factory building height and overall height of the single crystal furnace, thereby meeting the use requirements.
[0003] The vice room is an important structural part of the single crystal furnace. The inner wall is easy to attach the evaporated material and impurities generated during the crystal pulling process. The structure is relatively long, and the height from the ground is relatively large, making it difficult for manual cleaning of the vice room.
[0004] Therefore, it is necessary to provide an easy-to-center climbing vice room cleaning machine to solve the above technical problems. UTILITY MODEL CONTENTS
[0005] In view of the above situation, in order to overcome the defects of the prior art, the utility model provides an easy-to-center climbing vice room cleaning machine which can conveniently complete the cleaning work of the inner wall of the vice room.
[0006] To achieve the above purpose, the utility model adopts the following technical scheme:
[0007] The easy-to-center climbing vice room cleaning machine comprises a trolley, a lifting mechanism and a cleaning mechanism. The cleaning mechanism comprises a cylinder. A rotating platform is installed at the top of the cylinder. A plurality of laser sensors are installed at the top of the rotating platform. A plurality of work heads capable of radially extending and retracting along the rotating platform are installed on the side of the rotating platform. A rotating motor for driving the horizontal rotation of the rotating platform is installed below the rotating platform. Three groups of climbing wheels are installed on the bottom side of the cylinder. The climbing wheels are driven by a motor. A lifting cylinder is installed at the bottom of the cylinder. A connecting seat is installed at the bottom end of the lifting cylinder. A scissor assembly is installed between the cylinder, the connecting seat and the climbing wheels.
[0008] Preferably, the rotating platform is embedded with an electric push rod. The electric push rod is connected with the work head.
[0009] Preferably, the work head comprises a support plate and a cleaning sponge. The cleaning sponge is installed on the outer side of the support plate. The inner side of the support plate is connected with the electric push rod.
[0010] Preferably, the support plate top is installed into the liquid pipe, the shunt pipe is installed inside the cleaning sponge, a plurality of liquid outlets are arranged on the shunt pipe, and the shunt pipe is connected with the liquid pipe.
[0011] Preferably, the rotating platform bottom is installed with a gear ring, and the gear ring is meshed with a gear installed at the end of the rotating motor.
[0012] Preferably, the lifting mechanism top is installed with a magnetic attraction assembly.
[0013] Preferably, the trolley is installed with an operation table.
[0014] Compared with the prior art, the utility model has the following beneficial effects:
[0015] (1) The utility model discloses a trolley, a lifting mechanism and a cleaning mechanism are arranged, the lifting mechanism and the cleaning mechanism are sent to the entrance of the auxiliary chamber, the climbing wheel drives the cleaning mechanism to lift in the auxiliary chamber, the operation head driven by the rotating motor rotates to clean the inner wall of the auxiliary chamber, and the cleaning operation of the inner wall of the auxiliary chamber can be conveniently completed.
[0016] (2) The utility model discloses that the electric push rod is embedded and installed in the rotating platform, and the operation head can be conveniently driven to move in and out.
[0017] (3) The utility model discloses a support plate and a cleaning sponge are arranged, so that the operation head and the inner wall of the auxiliary chamber are in elastic contact, and rigid contact is avoided to cause damage to the inner wall of the auxiliary chamber.
[0018] (4) The utility model discloses a liquid inlet pipe and a shunt pipe, so that the cleaning sponge can be wetted by alcohol, and the cleaning effect is improved.
[0019] (5) The utility model discloses that the gear and the gear ring are meshed, so that the rotating motor can conveniently drive the rotating platform to horizontally rotate.
[0020] (6) The utility model discloses that the magnetic attraction assembly is installed at the top of the lifting mechanism, so that the connection stability of the support mechanism and the cleaning mechanism is improved, and the separation between the two is facilitated. BRIEF DESCRIPTION OF DRAWINGS
[0021] Figure 1 The structure schematic view of the easy-to-center climbing type auxiliary chamber cleaning machine is provided.
[0022] Figure 2 The structure schematic view of the cleaning mechanism in the easy-to-center climbing type auxiliary chamber cleaning machine is provided. Figure 1
[0023] The front view structure schematic view of the cleaning in the easy-to-center climbing type auxiliary chamber cleaning machine is provided. Figure 3 Figure 1
[0024] Figure 4 For Figure 1 The structure diagram of the working head in the easy-to-center climbing type sub-chamber cleaning machine is shown.
[0025] Wherein, the corresponding name of the reference sign is: 1- trolley, 2- lifting mechanism, 3- cleaning mechanism, 4- cylinder, 5- rotating platform, 6- laser sensor, 7- rotating motor, 8- working head, 9- climbing wheel, 10- lifting cylinder, 11- connecting seat, 12- scissor assembly, 13- electric push rod, 14- liquid inlet pipe, 15- gear ring, 16- gear, 17- support plate, 18- cleaning sponge, 19- shunt pipe, 20- operation table. DETAILED DESCRIPTION
[0026] The utility model will be further explained in combination with the drawings and examples, and the mode of the utility model includes but is not limited to the following examples.
[0027] Example 1:
[0028] As Figures 1-4The utility model provides an easy to center climbing formula auxiliary chamber cleaning machine, including: trolley 1, lifting mechanism 2 and cleaning mechanism 3, lifting mechanism 2 fixed mounting at trolley 1 top, its main role is to cleaning mechanism is lifted, will send cleaning mechanism 3 to the entrance of single crystal furnace auxiliary chamber, its structure can adopt scissor -type lift or other type's lift structure, do not repeat here, cleaning mechanism 3 includes cylinder 4, the top of cylinder 4 is installed rotating platform 5, the top of rotating platform 5 is installed multiple laser sensors 6, the side of rotating platform 5 is installed multiple operation head 8 that can along the radial telescoping of rotating platform 5, the below of rotating platform 5 is installed for drive rotating platform 5 horizontal rotation's rotating motor 7, installs three groups of climbing wheel 9 at the bottom side of cylinder 4, and climbing wheel 9 is driven by motor, installs lifting cylinder 10 at the bottom of cylinder 4, the bottom end of lifting cylinder 10 installs connecting seat 11, installs scissor assembly 12 between cylinder 4, connecting seat 11 and climbing wheel, scissor assembly 12 adopts the similar structure of scissor -type lift, when using, equipment is transported to reach the designated position by the AGV of field, AGV drops and makes equipment ground, then laser sensor 6 detects the entrance position of single crystal furnace auxiliary chamber, then through artificial or automatic centering system, control trolley 1 moves, makes cleaning mechanism 3 directly opposite the below of auxiliary chamber, lifting mechanism 2 lifts cleaning mechanism 3 to auxiliary chamber entrance, then lifting cylinder 10 starts, connecting seat 11 is close to cylinder 4, makes scissor assembly 12 action, along auxiliary chamber radial expansion of climbing wheel 9, until the caterpillar band of climbing wheel 9 is tightly pressed in the inner wall of auxiliary chamber, and climbing wheel 9 rotates, can drive cleaning mechanism 3 to rise in auxiliary chamber, make lifting mechanism 2 and connecting seat 11 separate, at the same time, operation head 8 along auxiliary chamber radial expansion, make operation head 8 and the inner wall of auxiliary chamber contact (and keep certain pressure), and rotating motor 7 rotates and drives rotating platform 5 to rotate, cooperates the action of climbing wheel 9, and then makes operation head 8 be able to rotate and clean the inner wall of auxiliary chamber, when laser sensor 6 detects cleaning mechanism 3 (operation head 8) reaches the top of auxiliary chamber, it is worth mentioning that, also can install position sensor on rotating platform 5 additionally, detects the distance between operation head 8 and the top of auxiliary chamber, then climbing wheel 9 retreats, until reaches the entrance of auxiliary chamber, lifting mechanism 2 receives cleaning mechanism 3, and operation head 3 on cleaning mechanism 3 and climbing wheel 9 shrink inwards, return to the initial state, lifting mechanism 2 drops and resets. Thus, complete the whole auxiliary chamber dust removal operation.
[0029] Through setting up trolley 1, lifting mechanism 2 and cleaning mechanism 3, utilize lifting mechanism 2 piece cleaning mechanism 3 to send to auxiliary chamber entrance, use climbing wheel 9 to drive cleaning mechanism 3 to rise in auxiliary chamber, use the operation head 8 driven by rotating motor 7 to rotate and clean the inner wall of auxiliary chamber, can conveniently complete the cleaning operation of the inner wall of auxiliary chamber.
[0030] Embodiment 2:
[0031] AsFigure 2 As shown, an electric push rod 13 is embedded in the rotating platform 5. The electric push rod 13 is connected to the working head 8. The electric push rod 13 can also be replaced by other equipment. When in use, the electric push rod 13 extends and pushes the working head 8 to move radially along the auxiliary chamber, so that the working head 8 continuously approaches the inner wall of the auxiliary chamber until it makes contact.
[0032] By embedding and installing an electric push rod 13 inside the rotating platform 5, the working head 8 can be easily driven to extend and retract.
[0033] Example 3:
[0034] like Figure 2 and Figure 4 As shown, the working head 8 includes a support plate 17 and a cleaning sponge 18. The cleaning sponge 18 is installed on the outside of the support plate 17, and the inside of the support plate 17 is connected to the electric push rod 13. When in use, the cleaning sponge 18 contacts the inner wall of the secondary chamber and deforms, so that the cleaning sponge 18 and the inner wall of the secondary chamber maintain a certain pressure. The cleaning sponge 18 rotates to clean the inner wall of the secondary chamber and remove dirt. Some of the dirt enters the interior of the cleaning sponge.
[0035] By incorporating a support plate 17 and a cleaning sponge 18, the working head 8 makes elastic contact with the inner wall of the secondary chamber, thus avoiding damage to the inner wall of the secondary chamber caused by rigid contact.
[0036] Example 4:
[0037] like Figure 2 and Figure 4 As shown, an inlet pipe 14 is installed on the top of the support plate 17, and a diversion pipe 19 is installed inside the cleaning sponge 18. The diversion pipe 19 is connected to the inlet pipe 14, and multiple outlets are opened on the diversion pipe 19. A liquid supply device is installed inside the rotating platform 5 or in other locations. The liquid supply device is connected to the inlet pipe 14 through a telescopic hose. When in use, the liquid supply device delivers alcohol from the inlet pipe 14 to the diversion pipe 19, and the diversion pipe 19 delivers the alcohol to the cleaning sponge 18. The alcohol wets the cleaning sponge 18, so that the dust when the cleaning sponge 18 cleans the inner wall is wetted, thereby playing a role in dust reduction. Moreover, the alcohol is volatile and does not easily remain in the sub-chamber.
[0038] By setting up the inlet pipe 14 and the diversion pipe 19, alcohol can be used to wet the cleaning sponge 18, thereby improving the cleaning effect.
[0039] Example 5:
[0040] like Figure 3 As shown, a gear ring 15 is installed at the bottom of the rotating platform 5, and a gear 16 is installed at the end of the rotating motor 7. The gear 16 meshes with the gear ring 15. When in use, the rotating motor 7 is started, causing the gear 16 to rotate, which in turn causes the gear ring 15 to rotate, thereby driving the rotating platform 5 to rotate horizontally.
[0041] By setting the gear 16 and the gear ring 15 engagement, can be convenient rotating motor 7 drive rotating platform 5 horizontal rotation.
[0042] Embodiment 6:
[0043] In the top of the lifting mechanism 2 installed magnetic assembly, magnetic assembly is mainly electromagnet, use, connecting seat 11 and the top of the lifting mechanism 2 magnetic assembly contact, electromagnet work produces magnetic, can be tightly adsorbed in the top of the lifting mechanism 2 connecting seat 11, similarly, when the electromagnet power off, no longer produce magnetic, then connecting seat 11 can be easily separated from the lifting mechanism 2.
[0044] By installing the magnetic assembly on the top of the lifting mechanism 2, the connection stability of the support mechanism 2 and the cleaning mechanism 3 can be improved, and the separation between them can be facilitated.
[0045] Embodiment 7:
[0046] As shown in Figure 1 , the operation table 20 is installed on the trolley 1, and the lifting mechanism 2 and the cleaning mechanism 3 can be manually or automatically controlled through the operation table 20, which will not be described here.
[0047] By installing the operation table 20 on the trolley 1, the lifting mechanism 2 and the cleaning mechanism 3 can be conveniently controlled.
[0048] Working principle: when in use, the device is transported to the designated position by the AGV on site, the AGV is lowered to make the device land, then the laser sensor 6 detects the entrance position of the single crystal furnace auxiliary chamber and displays the deviation data on the display end, then the manual or automatic centering system is used to control the trolley 1 to move, so that the cleaning mechanism 3 is opposite to the bottom of the auxiliary chamber, the lifting mechanism 2 lifts the cleaning mechanism 3 to the entrance of the auxiliary chamber, then the lifting cylinder 10 starts, the connecting seat 11 approaches the cylinder 4, the scissor assembly 12 acts, the climbing wheel 9 expands along the radial direction of the auxiliary chamber, until the track of the climbing wheel 9 is tightly pressed on the inner wall of the auxiliary chamber, the climbing wheel 9 rotates to drive the cleaning mechanism 3 to rise in the auxiliary chamber, so that the lifting mechanism 2 and the connecting seat 11 are separated, at the same time, the working head 8 expands along the radial direction of the auxiliary chamber, so that the working head 8 contacts with the inner wall of the auxiliary chamber, the rotating motor 7 rotates to drive the rotating platform 5 to rotate, which cooperates with the action of the climbing wheel 9, so that the working head 8 can rotate to clean the inner wall of the auxiliary chamber, when the working head 8 reaches the top of the auxiliary chamber, the climbing wheel 9 retreats to the entrance of the auxiliary chamber, the lifting mechanism 2 holds the cleaning mechanism 3, the working head 3 and the climbing wheel 9 on the cleaning mechanism 3 shrink inwardly to return to the initial state, and the lifting mechanism 2 descends and resets. Thus, the whole auxiliary chamber dust removal operation is completed.
Claims
1. An easy-to-center climbing auxiliary chamber cleaning machine, characterized in that, include: The trolley (1), the lifting mechanism (2), and the cleaning mechanism (3) are all components of the trolley. The cleaning mechanism (3) includes a cylinder (4), a rotating platform (5) is installed on the top of the cylinder (4), a plurality of laser sensors (6) are installed on the top of the rotating platform (5), a plurality of working heads (8) that can extend and retract radially along the rotating platform (5) are installed on the side of the rotating platform (5), a rotating motor (7) is installed below the rotating platform (5), three sets of climbing wheels (9) are installed on the bottom side of the cylinder (4), a lifting cylinder (10) is installed at the bottom of the cylinder (4), a connecting seat (11) is installed at the bottom end of the lifting cylinder (10), and a scissor assembly (12) is installed between the cylinder (4), the connecting seat (11) and the climbing wheels (9).
2. The easy-to-center climbing auxiliary chamber cleaning machine according to claim 1, characterized in that, An electric push rod (13) is installed inside the rotating platform (5), and the electric push rod (13) is connected to the working head (8).
3. The easy-to-center climbing auxiliary chamber cleaning machine according to claim 2, characterized in that, The working head (8) includes a support plate (17) and a cleaning sponge (18), and the inner side of the support plate (17) is connected to the electric push rod (13).
4. The easy-to-center climbing auxiliary chamber cleaning machine according to claim 3, characterized in that, The support plate (17) has an inlet pipe (14) installed on its top, and a diversion pipe (19) is installed on the inside of the cleaning sponge (18). The diversion pipe (19) is connected to the inlet pipe (14).
5. The easy-to-center climbing auxiliary chamber cleaning machine according to claim 1, characterized in that, A gear ring (15) is installed at the bottom of the rotating platform (5), and a gear (16) is installed at the end of the rotating motor (7). The gear (16) meshes with the gear ring (15).
6. The easy-to-center climbing auxiliary chamber cleaning machine according to claim 1, characterized in that, A magnetic suction component is installed on the top of the lifting mechanism (2).
7. The easy-to-center climbing auxiliary chamber cleaning machine according to claim 1, characterized in that, An operating platform (20) is installed on the trolley (1).