Stacked boat carrier and tubular PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment

Abstract

The utility model discloses a stacked boat carrier and tubular PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment. The stacked boat carrier comprises an insulating connecting seat, a first boat carrier and a second boat carrier, the insulating connecting seats are arranged at the two ends of the first boat carrier and the two ends of the second boat carrier respectively so that the first boat carrier and the second boat carrier can be connected in a stacked mode in the vertical direction. The first boat carrier and the second boat carrier are both prepared from carbon fiber materials. The graphite boat has the advantages of being compact in structure, light in weight, beneficial to improving coating uniformity and the like, and overcomes the defects that an existing stacked graphite boat is large in weight, large in heat absorption amount, low in airflow field uniformity and the like.

Description

TECHNICAL FIELD

[0001] The utility model relates to a silicon wafer carrier technical field, concretely relates to a stacked boat carrier and tubular PECVD equipment. BACKGROUND

[0002] The existing stacked boat carrier adopts graphite structure, so its weight is large and absorbs more heat when heated, and because the solid structure is adopted for the middle spacer block between the upper and lower boats, the airflow in the reaction cavity is blocked at the spacer block, which is not conducive to the uniformity of the overall airflow field, the positioning of the boat adopts the mode of the hole in the spacer block, and the positioning reliability is not high, and in addition, because the electrode hole position of the boat is at the middle position of the boat, the reaction chamber exhaust port is at the center of the reaction chamber, when the moving electrode structure is adopted, the single electrode moving assembly will be inserted on the upper and lower boats at the same time, and the problem of the single boat will affect the upper and lower boats. SUMMARY

[0003] The utility model relates to a silicon wafer carrier technical field, concretely relates to a stacked boat carrier and tubular PECVD equipment.

[0004] In order to solve the above technical problems, the utility model adopts the technical scheme that:

[0005] A stacked boat carrier, comprising: an insulating connecting seat, a first boat carrier and a second boat carrier, the insulating connecting seat is arranged at the two ends of the first boat carrier and the second boat carrier respectively, so as to realize the vertical stacking connection of the first boat carrier and the second boat carrier, and the first boat carrier and the second boat carrier are both prepared by using carbon fiber material.

[0006] As a further improvement of the utility model, the first boat foot is arranged on the bottom of the first boat carrier, the first boat foot is lapped on the upper part of the insulating connecting seat, the lower part of the insulating connecting seat is connected with the top of the second boat carrier, so as to realize the stacking of the first boat carrier on the second boat carrier, and the gap between the lower part of the insulating connecting seat and the bottom of the first boat carrier can realize the airflow through the insulating connecting seat and enter the middle position of the first boat carrier and the second boat carrier from the two ends of the first boat carrier and the second boat carrier.

[0007] As a further improvement of the utility model, the first boat foot is arranged on the bottom of the first boat carrier.

[0008] As a further improvement of the utility model, the insulating connecting seat comprises a supporting plate and a supporting boss, the supporting plate is connected with the top of the second boat carrier, the supporting boss is symmetrically arranged at the two ends of the supporting plate, the first boat foot is lapped on the supporting boss, and the gap between the supporting plate and the bottom of the first boat carrier exists.

[0009] As a further improvement of the utility model, the support boss is internally hollowed out to realize airflow passing through the support boss to enter the middle position of the first boat carrier and the second boat carrier.

[0010] As a further improvement of the utility model, the support boss is internally hollowed out to realize airflow passing through the support boss to enter the middle position of the first boat carrier and the second boat carrier.

[0011] As a further improvement of the utility model, the support boss is internally hollowed out to realize airflow passing through the support boss to enter the middle position of the first boat carrier and the second boat carrier.

[0012] As a further improvement of the utility model, the support boss is internally hollowed out to realize airflow passing through the support boss to enter the middle position of the first boat carrier and the second boat carrier.

[0013] As a further improvement of the utility model, the support boss is internally hollowed out to realize airflow passing through the support boss to enter the middle position of the first boat carrier and the second boat carrier.

[0014] Compared with the prior art, the utility model has the advantages that:

[0015] 1、 the utility model discloses a stacked boat carrier, by setting up insulating connecting seat at both ends of the first boat carrier and the second boat carrier, realize two boat carriers to be stacked in the vertical direction, improve the overall productivity of the equipment, and maximize the use of the space of the reaction chamber, at the same time, by using carbon fiber material to prepare the first boat carrier and the second boat carrier, under the same volume, the boat carrier of carbon fiber material is less heat-absorbing than the boat carrier of graphite material, and the quality is lighter.

[0016] 2、 the utility model discloses a stacked boat carrier, by the boat foot of the first boat carrier being overlapped on the upper portion of the insulating connecting seat, the lower portion of the insulating connecting seat being connected with the top of the second boat carrier, and a gap existing between the lower portion of the insulating connecting seat and the bottom of the first boat carrier, which is beneficial to reducing the overall weight of the stacked boat carrier, realizes airflow passing through the insulating connecting seat, and entering the middle position of the first boat carrier and the second boat carrier from both ends of the first boat carrier and the second boat carrier, optimizes the airflow field in the reaction cavity of the tubular PECVD equipment, and improves the uniformity of film coating.

[0017] 3、 the utility model discloses a stacked boat carrier, by setting up the electrode hole of the first boat carrier and the electrode hole of the second boat carrier at both sides of the end portion of the stacked boat carrier respectively, can better match the movable electrode structure, and improve the convenience and precision of electrode introduction.

[0018] 4、 the utility model discloses a tubular PECVD equipment, containing the stacked boat carrier, thus also having the advantages of the above. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 It is the overall structure principle schematic view of the stacked boat carrier in the embodiment of the utility model;

[0020] Figure 2 It is the overall structure principle schematic view of the insulation connecting seat in the embodiment of the utility model;

[0021] Legend: 1, stacked boat carrier; 11, first boat carrier; 111, first boat foot; 112, first electrode hole; 12, second boat carrier; 121, second boat foot; 112, second electrode hole; 2, insulation connecting seat; 21, support plate; 22, support boss; 23, positioning slope; 24, connecting hole. DETAILED DESCRIPTION

[0022] The utility model will be further described below in combination with the drawings and specific preferred embodiments, but it is not limited to the protection scope of the utility model.

[0023] In the description of the utility model, it is understood that the orientation or positional relationship indicated by the terms "side", "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the utility model and simplifying the description, and therefore cannot be understood as indicating or implying that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the utility model.

[0024] In addition, the terms "first" and "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features, so that the features with "first" and "second" can explicitly or implicitly include one or more features, and in the description of the utility model, the meaning of "multiple" is two or more, unless otherwise specifically limited.

[0025] EMBODIMENT

[0026] As Figure 1The utility model discloses a stacked boat carrier, including: insulating connecting seat 2, first boat carrier 11 and second boat carrier 12, insulating connecting seat 2 is arranged at the both ends of first boat carrier 11 and second boat carrier 12 respectively, is used for realizing the vertical direction of first boat carrier 11 and second boat carrier 12 stacked connection. 3 While the density of graphite material is 2.25g / cm 3 Meanwhile, the specific heat capacity of carbon fiber material and graphite material is equivalent, under the same volume, the boat carrier of carbon fiber material absorbs less heat, and the quality is lighter, reduces the energy consumption, and can reduce the constant temperature time in the process, increases the production capacity.

[0027] In the embodiment, by setting the insulating connecting seat 2 at the both ends of the first boat carrier 11 and the second boat carrier 12, the two boat carriers are stacked vertically, which improves the overall production capacity of the equipment and maximizes the use of the space of the reaction chamber.

[0028] As shown in Figure 1 The first boat carrier 11 is symmetrically provided with a first boat foot 111 at the bottom, the first boat foot 111 is lapped on the upper part of the insulating connecting seat 2, the lower part of the insulating connecting seat 2 is connected with the top of the second boat carrier 12, so as to realize the stacking of the first boat carrier 11 on the second boat carrier 12.

[0029] In the embodiment, by lapping the boat foot of the first boat carrier 11 on the upper part of the insulating connecting seat 2, connecting the lower part of the insulating connecting seat 2 with the top of the second boat carrier 12, and providing a gap between the lower part of the insulating connecting seat 2 and the bottom of the first boat carrier 11, the overall weight of the stacked boat carrier is reduced, the airflow passes through the insulating connecting seat and enters the middle position of the first boat carrier 11 and the second boat carrier 12 from the both ends of the first boat carrier 11 and the second boat carrier 12, the airflow field in the reaction chamber of the tube PECVD equipment is optimized, and the uniformity of the film coating is improved.

[0030] As shown in Figure 1 and Figure 2As shown, the insulating connecting seat 2 comprises a support plate 21 and a support boss 22. The support plate 21 is connected to the top of the second boat carrier 12, and the support boss 22 is symmetrically arranged at both ends of the support plate 21. The first boat foot 111 is overlapped on the support boss 22, that is, the first boat carrier 11 is stacked on the second boat carrier 12. There is a gap between the support plate 21 and the bottom of the first boat carrier 11, and the airflow passes through the gap to enter the middle position of the first boat carrier 11 and the second boat carrier 12.

[0031] As shown in the drawings, Figure 2 The inside of the support boss 22 is a hollow structure, so that the airflow passes through the support boss 22 to enter the middle position of the first boat carrier 11 and the second boat carrier 12.

[0032] As shown in the drawings, Figure 2 The support boss 22 is provided with a positioning slope 23 on one side, and the positioning slope 23 abuts against the side of the first boat foot 111, so as to limit the displacement of the first boat foot 111 and improve the safety of the stacking of the first boat carrier 11 and the second boat carrier 12.

[0033] As shown in the drawings, Figure 2 The support plate 21 is uniformly provided with a plurality of connecting holes 24, and corresponding mounting holes are formed at the top of the second boat carrier 12. The fasteners are screwed into the connecting holes 24 and the corresponding mounting holes, so as to connect and fix the support plate 21 to the top of the second boat carrier 12.

[0034] As shown in the drawings, Figure 1 The upper and lower parts of the end of the first boat carrier 11 are provided with first electrode holes 112, and the upper and lower parts of the end of the second boat carrier 12 are provided with second electrode holes 122. The first electrode holes 112 and the second electrode holes 122 are respectively located on both sides of the end of the stacked boat carrier 1. The electrode holes of a single boat carrier can match a single movable electrode mechanism, thereby improving the convenience and accuracy of electrode introduction.

[0035] In this embodiment, a tubular PECVD device is also provided, which comprises the above-mentioned stacked boat carrier 1.

[0036] The above is only a preferred embodiment of the present application, and the protection scope of the present application is not limited to the above-mentioned embodiments. Any technical solution falling within the scope of the present application shall be considered as falling within the protection scope of the present application. It should be noted that, for ordinary skilled persons in the technical field, some improvements and decorations without departing from the principles of the present application shall also be considered as falling within the protection scope of the present application.

Claims

1. A stacked boat carrier characterized by, The application relates to a stacked boat carrier. The first boat carrier (11) is provided with first boat feet (111) at the bottom, the first boat feet (111) are overlapped on the upper part of the insulating connecting seat (2), the lower part of the insulating connecting seat (2) is connected with the top of the second boat carrier (12), so that the first boat carrier (11) is stacked on the second boat carrier (12); and a gap exists between the lower part of the insulating connecting seat (2) and the bottom of the first boat carrier (11), so that air flows through the insulating connecting seat (2) and enters the middle position of the first boat carrier (11) and the second boat carrier (12) from the two ends of the first boat carrier (11) and the second boat carrier (12). The first boat feet (111) are symmetrically arranged at the bottom of the first boat carrier (11).

2. The stacked boat carrier of claim 1, wherein, The insulating connecting seat (2) comprises a supporting plate (21) and a supporting boss (22), the supporting plate (21) is connected with the top of the second boat carrier (12), the supporting boss (22) is symmetrically arranged at the two ends of the supporting plate (21), the first boat feet (111) are overlapped on the supporting boss (22), and a gap exists between the supporting plate (21) and the bottom of the first boat carrier (11).

3. The stacked boat carrier of claim 1, wherein, The supporting boss (22) is internally provided with a hollow structure, so that air flows through the supporting boss (22) and enters the middle position of the first boat carrier (11) and the second boat carrier (12).

4. The stacked boat carrier of claim 3, wherein, The supporting boss (22) is provided with a positioning slope (23) on one side, and the positioning slope (23) is used for limiting the displacement of the first boat feet (111).

5. The stacked boat carrier of claim 3, wherein, The supporting plate (21) is uniformly provided with a plurality of connecting holes (24), so that the supporting plate (21) is connected and fixed with the top of the second boat carrier (12).

6. The stacked boat carrier of claim 3, wherein, The upper and lower parts of the end of the first boat carrier (11) are provided with first electrode holes (112), the upper and lower parts of the end of the second boat carrier (12) are provided with second electrode holes (122), and the first electrode holes (112) and the second electrode holes (122) are respectively arranged on the two sides of the end of the stacked boat carrier.

7. The stacked boat carrier of any one of claims 1 to 6, wherein, The application further relates to a stacked boat carrier.

8. A tubular PECVD apparatus, characterized in that, The application relates to a stacked boat carrier.

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