Electrostatic chuck heater device capable of automatically adjusting temperature

Abstract

The utility model discloses an electrostatic chuck heater device capable of automatically adjusting temperature, which belongs to the technical field of electrostatic chuck heaters, and comprises a ceramic body and a ceramic support part, an adsorption electrode is arranged in the ceramic body, the adsorption electrode is electrically connected with an electrode lead, the ceramic body is also provided with a heater, the heater is arranged below the adsorption electrode, and the ceramic support part is electrically connected with the adsorption electrode. The heater is in contact with the temperature measuring sensor, the temperature measuring sensor is electrically connected with the controller, a groove is formed in the bottom of the ceramic body, a heating module is installed in the groove, the heating module is communicated with the heater through a plurality of electrodes, and the heating module is electrically connected with the controller through a heating wire. According to the technical scheme, the multiple electrodes are arranged, the heating module is heated, then the heat is transmitted to the heater through the multiple electrodes, the heat on the heating module can be transmitted to the multiple areas in the ceramic body, and the temperature uniformity of all the areas of the whole heater device can be improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to electrostatic chuck heater technical field, especially in automatic temperature regulation's electrostatic chuck heater device. BACKGROUND

[0002] Generally, the semiconductor device is manufactured in a manner that a plurality of thin film layers including a dielectric layer and a metal layer are sequentially stacked on an aluminum nitride substrate, a flexible substrate, or a semiconductor wafer substrate and then patterned, and the thin film layers are sequentially deposited on the substrate by a chemical vapor deposition process or a physical vapor deposition process, and the CVD process includes a low-pressure chemical vapor deposition process, a plasma-enhanced chemical vapor deposition process, and a metal-organic chemical vapor deposition process.

[0003] A heater for supporting the aluminum nitride substrate, the flexible substrate, the semiconductor wafer substrate, etc. and applying a predetermined heat is provided in the CVD device and the PVD device, and the heater is also used for substrate heating in an etching process of the thin film layer formed on the supported substrate and a baking process of a photoresist, etc. The heater provided in the CVD device and the PVD device is widely used as a ceramic heater in response to requirements for precise temperature control, fine wiring of semiconductor elements, and precise heat treatment of the semiconductor wafer substrate. SUMMARY

[0004] The utility model wants to solve the technical problem provides a kind of automatic temperature regulation's electrostatic chuck heater device, can automatically adjust temperature, the temperature uniformity of each area of heater device is better when high temperature.

[0005] To solve the above technical problem, the technical scheme of the utility model is as follows:

[0006] An electrostatic chuck heater device capable of automatically adjusting temperature includes a ceramic body and a ceramic support part connected to the ceramic body, an adsorption electrode is arranged in the ceramic body, the adsorption electrode is electrically connected to an electrode lead wire, the ceramic body is further provided with a heater, the heater is arranged below the adsorption electrode, the heater is in contact with a temperature measuring sensor, the temperature measuring sensor is electrically connected to a controller, a recess is arranged at the bottom of the ceramic body, a heating module is installed in the recess, the heating module is in communication with the heater through a plurality of electrodes, and the heating module is electrically connected to the controller through a heating lead wire.

[0007] Preferably, the ceramic support part is arranged below the ceramic body.

[0008] Preferably, the ceramic support part includes a through hole, the electrode lead wire passes through the ceramic body and enters the through hole, the temperature measuring sensor passes through the ceramic body and enters the through hole, and the heating lead wire is located in the through hole.

[0009] Preferably, the ceramic body is disc-shaped.

[0010] With the above technical solution, the following beneficial effects are achieved:

[0011] By providing a plurality of electrodes, the heating module is heated, and then the heat is transmitted to the heater through the plurality of electrodes, that is, the heat on the heating module is transmitted to a plurality of regions in the ceramic body, so that the uniformity of the temperature of each region of the entire heater device is improved. In addition, by providing the temperature measuring sensor, the temperature can be automatically controlled by the controller for automatic temperature adjustment. BRIEF DESCRIPTION OF DRAWINGS

[0012] Figure 1 It is a sectional view of the electrostatic chuck heater device with automatic temperature adjustment. DETAILED DESCRIPTION

[0013] The specific embodiments of the present application will be further described below with reference to the accompanying drawings. It should be noted that the description of these embodiments is used to help understand the present application, but does not constitute a limitation on the present application. In addition, the technical features involved in each embodiment of the present application described below can be combined with each other as long as they do not conflict with each other.

[0014] REFERENCE Figure 1 The electrostatic chuck heater device with automatic temperature adjustment includes a ceramic body 1 and a ceramic support part 2 connected to the ceramic body 1. The ceramic body 1 is provided with an adsorption electrode 11, the adsorption electrode 11 is electrically connected with an electrode lead 15, the ceramic body 1 is also provided with a heater 12, the heater 12 is arranged below the adsorption electrode 11, the heater 12 is in contact with a temperature measuring sensor 16, the temperature measuring sensor 16 is electrically connected with a controller, the bottom of the ceramic body 1 is provided with a groove, a heating module 14 is installed in the groove, the heating module 14 is communicated with the heater 12 through a plurality of electrodes 13, the heating module 14 is electrically connected with the controller through a heating lead 22, and the heating of the heating module 14 is controlled by the controller.

[0015] The ceramic body 1 and the ceramic support part 2 can be connected in many ways, such as bonding. In order to make the ceramic support part 2 match more machines and processes, the ceramic body 1 and the ceramic support part 2 can be connected in a detachable manner, such as snap connection. The ceramic body 1 can be alumina ceramic.

[0016] The heater 12 can be formed by winding a circular strip into a disc, facilitating the arrangement in the disc-shaped ceramic body 1, and by arranging a plurality of electrodes 13, when the heating module 14 generates heat, the heat is transmitted to the heater 12 through the plurality of electrodes 13, and the ceramic body 1 is heated through the heater 12, and the heating is more uniform, and the material of the electrode 13 can be Mo, Ni, W, and the specific number of the electrode 13 can be 4-12;

[0017] By arranging the temperature measuring sensor 16, the temperature of the heater 12 can be detected, and then the temperature of the heater is controlled by the controller, so that the heater device can automatically adjust the temperature;

[0018] The ceramic support part 2 is arranged below the ceramic body 1, and the upper part of the ceramic body 1 is a working surface;

[0019] The ceramic support part 2 comprises a through hole 21, the electrode lead wire 15 passes through the ceramic body 1 into the through hole 21, the temperature measuring sensor 16 passes through the ceramic body 1 into the through hole 21, and the heating lead wire 22 is located in the through hole 21;

[0020] The electrode lead wire 15 is electrified after passing through the ceramic body 1 into the through hole 21, generating an adsorption force, and the heating lead wire 22 enters the through hole 21 and comes out from the bottom to be connected with other components;

[0021] The ceramic body 1 is disc-shaped, used for adsorbing disc-shaped semiconductor wafers, and is therefore disc-shaped;

[0022] The technical scheme of the present application arranges a plurality of electrodes 13, heats the heating module 14, and then transmits the heat to the heater 12 through the plurality of electrodes 13, that is, the heat on the heating module 14 is transmitted to a plurality of areas in the ceramic body 1, so as to improve the uniformity of the temperature of each area of the entire heater device; in addition, by arranging the temperature measuring sensor 16, the temperature can be automatically controlled by the controller, and the automatic temperature adjustment is realized.

[0023] The embodiments of the present application are described in detail above in combination with the drawings, but the present application is not limited to the described embodiments. For those skilled in the art, various changes, modifications, replacements and modifications can be made to these embodiments without departing from the principles and spirits of the present application, and still fall within the protection scope of the present application.

Claims

1. An electrostatic chuck heater assembly for automatically adjusting temperature, characterized by, The application relates to a ceramic body (1) provided with an adsorption electrode (11) and an electrode lead (15) electrically connected to the adsorption electrode (11), and a heater (12) arranged below the adsorption electrode (11), wherein the heater (12) is in contact with a temperature sensor (16) electrically connected to a controller, and the bottom of the ceramic body (1) is provided with a recess in which a heating module (14) is arranged, and the heating module (14) is in communication with the heater (12) through a plurality of electrodes (13), and the heating module (14) is electrically connected to the controller through a heating lead (22).

2. An automatically temperature-regulated electrostatic chuck heater apparatus as set forth in claim 1, wherein, The ceramic support (2) is arranged below the ceramic body (1).

3. The self-regulating temperature electrostatic chuck heater apparatus of claim 1, wherein, The ceramic support (2) is provided with a through hole (21), the electrode lead (15) passes through the ceramic body (1) and enters the through hole (21), the temperature sensor (16) passes through the ceramic body (1) and enters the through hole (21), and the heating lead (22) is arranged in the through hole (21).

4. The self-regulating temperature electrostatic chuck heater apparatus of claim 1, wherein, The ceramic body (1) is disc-shaped.

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