Single-shaft multi-layer pressure control valve

Abstract

The utility model discloses a single-shaft multi-layer pressure control valve, which relates to the field of pressure control valves and comprises a valve shell, one end of the valve shell is provided with an open hole, the other end of the valve shell is provided with a first flow guide hole, a support plate is arranged at the first flow guide hole, a connecting rod is arranged outside the support plate, and the connecting rod is connected with the open hole. And the connecting rod is connected with the valve shell. The transmission shaft is controlled by the motor to rotate, the movement of the placement plate is further controlled, the distance between the pressure control device and the first flow limiting plate is further controlled, and the valve is opened under the cooperation of the second flow guide hole and the second limiting plate, so that the flow control effect is achieved; and meanwhile, the arranged first flow limiting plate is matched with the second flow baffle to limit the medium, and the medium is further stabilized through the second flow limiting plate.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of pressure control valve, concretely is a single axle multilayer pressure control valve. BACKGROUND

[0002] Pressure control valve refers to the valve that is used for controlling and adjusting the pressure of liquid flow in the hydraulic system. This kind of valve works by using the principle that the liquid pressure acting on the valve core and the spring force are balanced.

[0003] In the dry etching and deposition equipment of semiconductor and solar energy, pressure control valve is often needed to control the flow rate of gas flow and then to control the rate of deposition and etching. The way of pressure control valve to control the flow rate of gas flow is realized by changing the opening of the valve. The opening of the valve refers to the effective passage area of gas flow / the area of valve plate fully opened.

[0004] The existing pressure control swing valve structure controls the swing of valve plate through driving shaft, seals through vacuum cover, and then controls the opening degree of valve.

[0005] However, due to the space occupied by the valve plate in the open state, the flow of the medium is affected, which easily leads to quality problems of products in the application of high-precision scenes such as semiconductor. UTILITY MODEL CONTENT

[0006] Therefore, the utility model aims at providing a single axle multilayer pressure control valve to solve the technical problem that the space occupied by the valve plate in the open state affects the flow of the medium, which easily leads to quality problems of products in the application of high-precision scenes such as semiconductor.

[0007] To achieve the above-mentioned purpose, the utility model provides the following technical scheme: a single axle multilayer pressure control valve, comprising a valve housing, an opening is formed in one end of the valve housing, a first flow guide hole is arranged at the other end of the valve housing, a support plate is arranged at the first flow guide hole, a connecting rod is arranged outside the support plate, and the connecting rod is connected with the valve housing.

[0008] By adopting the above technical scheme, the medium enters the valve by setting the first flow guide hole, and the device in the valve is supported by the support plate.

[0009] The utility model is further provided with a pressure control device which is slidably arranged in the valve housing, the pressure control device comprises a mounting plate, a first mounting plate is arranged on one side of the mounting plate close to the opening, a first limiting plate is arranged on the first mounting plate in cooperation with the opening, and a second mounting plate is arranged on one side of the mounting plate close to the support plate.

[0010] Through the technical scheme, the first mounting plate and the second mounting plate are connected through the setting of the placing plate, and the first mounting plate and the second mounting plate are synchronously driven to move when the placing plate moves.

[0011] The utility model further sets up, one side of second mounting plate away from placing plate is provided with first current limiting plate.

[0012] Through the technical scheme, the first current limiting plate is set to limit the medium

[0013] The utility model further sets up, first current limiting plate is provided with a plurality of second flow guide holes, and the second mounting plate is provided with a plurality of second limiting plates matched with the second flow guide holes.

[0014] Through the technical scheme, the second limiting plate matched with the second flow guide hole is set to limit the flow of the medium.

[0015] The utility model further sets up, the outer directing block of placing plate is provided with the guide groove matched with the directing block in the valve housing inner wall.

[0016] Through the technical scheme, the guide groove matched with the directing block is set, so that the pressure control device only moves along the radial direction.

[0017] The utility model further sets up, the motor is provided with the transmission shaft on one end of the valve housing in the aperture, and the transmission shaft is set through the placing plate, the second mounting plate and the first mounting plate.

[0018] Through the technical scheme, the motor is set to drive the transmission shaft to rotate and control the movement of the placing plate.

[0019] The utility model further sets up, the first current limiting plate is same with the inner diameter of the valve housing, and the pressure control device is smaller than the first current limiting plate in diameter.

[0020] Through the technical scheme, the first current limiting plate matched with the second flow guide plate is set to limit the medium, and the second current limiting plate is set to further stabilize the medium.

[0021] In summary, the utility model mainly has the following beneficial effects:

[0022] The utility model is driven by the motor to rotate the transmission shaft, and then controls the movement of the placing plate, and then controls the distance between the pressure control device and the first current limiting plate, so that the valve is opened under the cooperation of the second flow guide hole and the second limiting plate, so that the flow control effect is achieved. BRIEF DESCRIPTION OF DRAWINGS

[0023] Figure 1 It is the whole structure schematic view of the utility model;

[0024] Figure 2 It is the control pressure structure schematic view of the utility model;

[0025] Figure 3 It is the control pressure back surface schematic view of the utility model;

[0026] Figure 4 It is the control pressure explosion schematic view of the utility model.

[0027] Figure 5 It is the whole structure back surface schematic view of the utility model.

[0028] Figure 6 It is the mounting plate structure schematic view of the utility model.

[0029] Figure 7 It is the valve housing structure schematic view of the utility model.

[0030] In the drawing: 1, valve housing; 2, opening; 3, motor; 4, support plate; 5, connecting rod; 6, first flow limiting plate; 7, first flow guide hole; 8, guide block; 9, guide slot; 10, transmission shaft; 11, first limiting plate; 12, first mounting plate; 13, second limiting plate; 14, second mounting plate; 15, second flow guide hole; 16, setting plate. DETAILED DESCRIPTION

[0031] The technical scheme in the embodiments of the utility model will be described clearly and completely below in conjunction with the drawings in the embodiments of the utility model. The embodiments described below with reference to the drawings are exemplary and are used only for explaining the utility model, and cannot be understood as limiting the utility model.

[0032] The embodiments of the utility model will be described below according to the whole structure of the utility model.

[0033] A single-shaft multilayer control pressure valve, like Figures 1-7As shown, including valve housing 1, the valve housing 1 one end opening 2, the valve housing 1 the other end is provided with first flow hole 7, the first flow hole 7 is provided with support plate 4, the support plate 4 outside is provided with connecting rod 5, the connecting rod 5 is connected with valve housing 1, the valve housing 1 inside slidingly arranged with pressure control device, the pressure control device includes the setting plate 16, one side of the setting plate 16 close to the opening 2 is provided with the first mounting plate 12, the first mounting plate 12 is provided with the first limiting plate 11 on the first mounting plate 12, one side of the setting plate 16 close to the support plate 4 is provided with the second mounting plate 14, the second mounting plate 14 is provided with the first flow limiting plate 6 away from the setting plate 16, the first flow limiting plate 6 is the same as the inner diameter of the valve housing 1, the diameter of the pressure control device is smaller than the first flow limiting plate 6, by such setting, in actual use process, the first flow limiting plate 6 is attached to the pressure control device, the first flow limiting plate 6 is limited by the pressure control device, thereby preventing the medium from passing.

[0034] Specifically, the first flow limiting plate 6 is provided with a plurality of second flow holes 15, and the second mounting plate 14 is provided with a plurality of second limiting plates 13 matched with the second flow holes 15. When attached, the second limiting plates 13 block the second flow holes 15, and the first flow limiting plate 6 contacts the inner wall of the valve housing 1 to block the medium.

[0035] Further, the valve housing 1 is provided with a motor 3 at one end of the opening 2, one side of the motor 3 close to the valve housing 1 is provided with a transmission shaft 10, the transmission shaft 10 penetrates the setting plate 16, the second mounting plate 14 and the first mounting plate 12, the movement of the pressure control device and the first flow limiting plate 6 is driven by the transmission shaft 10, thereby controlling the bulk closing of the valve.

[0036] The setting plate 16 is provided with a guide block 8, and the inner wall of the valve housing 1 is provided with a guide groove 9 matched with the guide block 8. The guide block 8 cooperates with the guide groove 9 to move the setting plate 16, the first mounting plate 12 and the second mounting plate 14 connected with the setting plate 16 radially.

[0037] Although the embodiments of the present application have been shown and described, the specific embodiments are only an explanation of the present application, and are not a limitation of the present application. The specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner, and those skilled in the art can make modifications, replacements and variations of the embodiments without creative contribution after reading the specification, as long as they are within the scope of the claims of the present application.

Claims

1. A single-shaft multilayer pressure control valve comprising a valve housing (1), characterized in that: The valve housing (1) is provided with an opening (2) at one end, and a first flow guide hole (7) is arranged at the other end of the valve housing (1), a supporting plate (4) is arranged at the first flow guide hole (7), a connecting rod (5) is arranged outside the supporting plate (4), and the connecting rod (5) is connected with the valve housing (1).

2. The single-shaft multilayer pressure control valve according to claim 1, characterized in that: A pressure control device is arranged in the valve housing (1) and comprises a mounting plate (16), a first mounting plate (12) is arranged on one side of the mounting plate (16) close to the opening (2), a first limiting plate (11) is arranged on the first mounting plate (12) in cooperation with the opening (2), and a second mounting plate (14) is arranged on the other side of the mounting plate (16) close to the supporting plate (4).

3. The single-axis multilayer pressure control valve according to claim 2, wherein: A first flow limiting plate (6) is arranged on the other side of the second mounting plate (14) away from the mounting plate (16), and the diameter of the pressure control device is smaller than that of the first flow limiting plate (6).

4. The single-axis multilayer pressure control valve according to claim 3, characterized in that: A plurality of second flow guide holes (15) are arranged on the first flow limiting plate (6), and a plurality of second limiting plates (13) are arranged on the second mounting plate (14) in cooperation with the second flow guide holes (15).

5. The single-axis multilayer pressure control valve according to claim 2, wherein: A guide block (8) is arranged outside the mounting plate (16), and a guide groove (9) is arranged on the inner wall of the valve housing (1) in cooperation with the guide block (8).

6. The single-axis multilayer pressure control valve according to claim 1, wherein: A motor (3) is arranged at one end of the opening (2) of the valve housing (1), a transmission shaft (10) is arranged on one side of the motor (3) close to the valve housing (1), and the transmission shaft (10) penetrates the mounting plate (16), the second mounting plate (14) and the first mounting plate (12).

7. The single-axis multilayer pressure control valve according to claim 3, wherein: The first flow limiting plate (6) has the same inner diameter as the valve housing (1).

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