High-frequency monochromator

Abstract

The utility model provides a high-frequency monochromator, which is characterized by comprising a spectrograph and a scanning emitting mechanism, and the scanning emitting mechanism is loaded after the spectrograph emits a light beam. An entrance slit, a spectrograph, a field diaphragm, a collimation optical assembly, a rotary reflector or a rotary reflector with a grating light splitting function, a convergence imaging assembly and an exit slit are sequentially arranged along a light path, and light is emitted through the field diaphragm and the exit slit to form an L-shaped light path; the entrance slit, the spectrograph, the field diaphragm, the collimation optical assembly, the rotary reflecting mirror or the rotary reflecting mirror with the grating light splitting function, the convergence imaging assembly and the exit slit are all vertically fixed to the horizontal plane, and the rotary reflecting mirror or the rotary reflecting mirror with the grating light splitting function is arranged at the switching position of the L-shaped light path; the monochromator is simple in light splitting structure and efficient in light splitting.

Description

TECHNICAL FIELD

[0001] The utility model belongs to a kind of spectral instrument technical field, especially involves monochromator technical field, specifically relates to a kind of high frequency monochromator. BACKGROUND

[0002] In prior art, monochromator can generally be used as light source, and the role is to provide standard monochromatic light source for optical system spectral calibration and other work.

[0003] The existing monochromator, the structure of monochromator is generally double C-T structure, to form symmetrical structure, to keep better monochromaticity, while, with the characteristics of good correction residual aberration. Its optical principle is generally that, in monochromator, white light (complex light) is incident to collimating system after passing through incident slit, and collimating system makes incident light into collimated parallel light beam, then is incident to plane grating, and is dispersed by plane grating, and white light is dispersed into monochromatic light and is emitted, and various monochromatic light emitted from plane grating is incident to converging optical system, and converging optical system makes emitted light beam converge to the vicinity of emission slit, and forms monochromatic slit image in turn (color band), at this time, monochromatic light dispersed by grating is arranged in turn according to dispersion law, and is present in the vicinity of emission slit. By rotating plane grating, the incidence angle of incident white light relative to grating is changed, so that the position of monochromatic light dispersed by grating at the emission slit of monochromator is changed, and monochromatic light is emitted through selective transmission of slit, and is used for spectral characteristic measurement or calibration of optical system.

[0004] But its problem lies in:

[0005] I. Internal optical path structure is relatively complex, such as domestic patent CN101275869B discloses monochromator, and secondary diffraction optical path is formed inside.

[0006] II. Only rotating plane grating structure is used, and the light splitting efficiency is not high. Component structure volume is large, and rotating inertia is large, and rotation is slow.

[0007] Therefore, a monochromator with simple light splitting structure and high light splitting efficiency is urgently needed. SUMMARY

[0008] In view of the above problems, the present application proposes a monochromator with simple light splitting structure and high light splitting efficiency for the technical problem of complex optical path of existing monochromator.

[0009] The present application provides a kind of high frequency monochromator, it is characterized in that, including spectrometer, scanning emission mechanism, scanning emission mechanism is loaded after spectrometer emission light beam, and incident slit, spectrometer, field diaphragm, collimating optical assembly, rotating mirror with grating light splitting function or rotating mirror, converging imaging assembly, emission slit are sequentially arranged along optical path, and light is emitted to form L-shaped optical path via field diaphragm and emission slit;

[0010] The incident slit, the spectrometer, the field stop, the collimating optical assembly, the rotating mirror with grating dispersion function or the rotating mirror, the converging imaging assembly, and the exit slit are all fixed perpendicularly to the horizontal plane, the rotating mirror with grating dispersion function or the rotating mirror is arranged at the transition of the L-shaped light path, the central axis of the collimating optical assembly and the central axis of the field stop are on the same optical axis, the converging imaging assembly and the exit slit are arranged on the straight optical axis in the light exit direction, the central axis of the converging imaging assembly and the central axis of the exit slit are on the same optical axis, and the corresponding exit slit is arranged at the image plane of the converging imaging assembly.

[0011] The application also provides another high-frequency monochromator, which is characterized by comprising a scanning exit mechanism, the scanning exit mechanism comprising an incident slit, a collimating optical assembly, a rotating mirror with grating dispersion function, a converging imaging assembly, and an exit slit, light rays form an L-shaped light path via the incident and exit, and the incident slit, the collimating optical assembly, the rotating mirror with grating dispersion function, the converging imaging assembly, and the exit slit are arranged in sequence along the L-shaped light path; the incident slit, the collimating optical assembly, the rotating mirror with grating dispersion function, the converging imaging assembly, and the exit slit are all fixed perpendicularly to the horizontal plane, the rotating mirror with grating dispersion function is arranged at the transition of the L-shaped light path, the central axis of the collimating optical assembly and the central axis of the incident slit are on the same optical axis, the central axis of the converging imaging assembly and the central axis of the exit slit are on the same optical axis, and the corresponding exit slit is arranged at the image plane of the converging imaging assembly.

[0012] Further, the rotating mirror with grating dispersion function or the rotating mirror is a rotating mirror with a grating structure or a rotating mirror.

[0013] Further, the rotating mirror with grating dispersion function or the rotating mirror is a rotating mirror with a grating structure or a rotating mirror.

[0014] Further, the collimating optical assembly is a lens or a mirror, and the resolution of the lens or the mirror is adapted to the resolution of the spectrum and the motor position.

[0015] Further, the converging imaging assembly is a lens or a mirror, and the resolution of the converging imaging assembly is adapted to the resolution of the spectrum and the motor position.

[0016] Further, the L-shaped light path forms a certain angle, specifically, the L-shaped light path can be adjusted as needed to form an acute angle or an obtuse angle.

[0017] Further, the rotating mirror with grating dispersion function or the rotating mirror is located at the entrance pupil and the exit pupil of the collimating optical assembly and the converging imaging assembly.

[0018] Further, the superimposed grating adopts a plane grating, a concave grating or a convex grating.

[0019] Further, the mirror with the grating spectrometer function or the rotating mirror is rotated at high speed by a rotating mechanism, so that the switching speed of monochromatic light is also high, and high-frequency switching monochromatic output is formed.

[0020] Compared with the prior art, the present application has the following beneficial effects:

[0021] (1) The high-frequency monochromatic instrument of the present application adopts an L-shaped light path, the light path is simple, and optical elements can be simply arranged; the L-shaped light path can be adjusted at an angle of 0°-180° as needed, and the adaptability is high.

[0022] (2) The high-frequency monochromatic instrument of the present application adopts a rotating mirror with a grating spectrometer function (or a rotating mirror), which simplifies and expands the component structure of the existing monochromatic instrument while ensuring the spectrometer efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0023] Figure 1 It is a structure schematic view of the high-frequency monochromatic instrument of the present application.

[0024] Figure 2 It is a structure schematic view of the spectrometer of the preferred embodiment of the present application containing a convex grating.

[0025] Figure 3 It is a working principle diagram of the high-frequency monochromatic instrument of the present application.

[0026] Figure 4 It is a structure schematic view of the high-frequency monochromatic instrument of the preferred embodiment of the present application.

[0027] Figure 5 It is a structure schematic view of the rotating mirror with a grating spectrometer function.

[0028] Mark explanation in the figure:

[0029] 1 incident slit, 2 convex grating, 3 exit slit, 4 collimating optical assembly, 5 converging imaging assembly, 6 grating, 7 mirror, 8 rotating shaft, 9 motor, 10 rotating mirror with grating spectrometer function (or rotating mirror), 11 field stop. DETAILED DESCRIPTION

[0030] The technical scheme of the present application will be further explained and described in combination with the drawings and specific embodiments, and it is believed that those skilled in the art can fully understand the technical scheme of the present application.

[0031] Embodiment one

[0032] As Figure 1As shown in the embodiment, the high-frequency monochromator comprises a spectrometer and a scanning exit mechanism. The scanning exit mechanism is loaded after the exit beam of the spectrometer. The incident slit 1, the spectrometer, the field stop 11, the collimating optical assembly 4, the rotating mirror with grating dispersion function or the rotating mirror 10, the converging imaging assembly 5, and the exit slit 3 are sequentially arranged along the light path. The light rays form an L-shaped light path via the field stop 11 and the exit slit 3.

[0033] The incident slit 1, the spectrometer, the field stop 11, the collimating optical assembly 4, the rotating mirror with grating dispersion function or the rotating mirror 10, the converging imaging assembly 5, and the exit slit 3 are fixed perpendicularly to the horizontal plane. The rotating mirror with grating dispersion function or the rotating mirror 10 is arranged at the switching position of the L-shaped light path. The central axis of the collimating optical assembly 4 and the central axis of the field stop 11 are on the same optical axis. The converging imaging assembly 5 and the exit slit 3 are arranged on the straight optical axis in the light exit direction. The central axis of the converging imaging assembly 5 and the central axis of the exit slit 3 are on the same optical axis. The corresponding exit slit 3 is arranged at the image plane of the converging imaging assembly 5.

[0034] In the embodiment, the spectrometer can be any conventional spectrometer.

[0035] In the embodiment, the L-shaped light path forms an angle. Specifically, the L-shaped light path can be adjusted as needed to form an acute angle or an obtuse angle.

[0036] In the embodiment, as shown in the embodiment, Figure 5 The rotating mirror with grating dispersion function or the rotating mirror 10 is a rotating mirror with a grating structure or a rotating mirror. The rotating mirror with grating dispersion function is a rotating mirror with a grating structure. The rotating mirror can be a plane or a grating. The grating is not limited, and the stacked grating 6 can be a plane grating, a concave grating, or a convex grating.

[0037] In another embodiment, as shown in the embodiment, Figure 5 The rotating mirror with grating dispersion function or the rotating mirror 10 is a rotating mirror with a grating structure or a rotating mirror. The rotating mirror can be a plane or a grating. The grating is not limited, and the stacked grating 6 can be a plane grating, a concave grating, or a convex grating.

[0038] In the embodiment, the collimating optical assembly 4 is a lens or a mirror. The resolution of the lens or the mirror is adapted to the resolution of the spectrometer and the motor position.

[0039] In the embodiment, the converging imaging assembly 5 is a lens or a mirror. The resolution of the converging imaging assembly 5 is adapted to the resolution of the spectrometer and the motor position.

[0040] In this embodiment, the rotating mirror or rotating mirror 10 with grating light splitting function is located at the entrance pupil and exit pupil of the collimating optical assembly 4 and the converging imaging assembly 5. It is convenient and efficient to utilize the input and output beam energy.

[0041] In this embodiment, the line width of the slit affects the spectral resolution and energy of the spectrometer. The line width of the slit (the last end in the figure) affects the spectral resolution and energy of the spectrometer. It can be adjusted as needed.

[0042] In this embodiment, the rotating mirror 10 with grating light splitting function is rotated at high speed by the rotating mechanism, so the switching speed of monochromatic light is also high, forming a high-frequency switching monochromatic light output. The rotating mirror (mirror 10 with grating light splitting function) is rotated at high speed, so the switching speed of monochromatic light is also high, thus realizing a high-frequency switching monochromatic light output.

[0043] A monochromator light splitting method includes the following steps: sequentially setting the incident slit 1, the spectrometer, the field stop 11, the collimating optical assembly 4, the rotating mirror or rotating mirror 10 with grating light splitting function, the converging imaging assembly 5, and the exit slit 3 along the light incident direction. White light or polychromatic light is incident from the incident slit 1, passes through the spectrometer, the field stop 11, and the collimating optical assembly 4 to change the incident divergent light beam into a collimated parallel light beam, and then is incident to the rotating mirror or rotating mirror 10 with grating light splitting function. Various color lights are incident to the converging imaging assembly 5 and imaged to its image plane. The color bands of the slit 1 of various color lights are presented at the image plane of the converging imaging assembly 5. The corresponding exit slit 3 is set at the image plane of the converging imaging assembly 5. By rotating the rotating mirror or rotating mirror 10 with grating light splitting function, various color lights are sequentially emitted at the exit slit 3, i.e., monochromatic light is emitted, forming a monochromator. The rotating mirror or rotating mirror with grating light splitting function obtains monochromatic light of one color every time it rotates by one angle.

[0044] And a scanning optical system is loaded behind the exit beam. The scanning mirror in the scanning optical system is used to scan the monochromatic light incident to the exit optical system, and the monochromatic light is emitted behind the fixed exit slit 3. The scanning mirror can provide a fast monochromatic light switching action, and the switching frequency can exceed 1000 Hz. On the focal plane of the exit optical system, the fixed-position exit slit 3 is set, and the scanning of the scanning mirror can realize the output of specified monochromatic light.

[0045] Embodiment two

[0046] As Figure 2As shown in the figure, based on the first embodiment, the spectrometer is preferably a spectrometer with a convex grating. The structure of the spectrometer is shown in the schematic diagram, including an entrance slit 1, a mirror, a convex grating, an exit slit 3 or a field stop 11, and an entrance slit 1, an exit slit 3 or a field stop 11, a mirror, a convex grating, an exit slit 3 or a field stop 11 are arranged sequentially along the optical path.

[0047] In this embodiment, a convex grating is used as the beam-splitting element. The convex grating does not need to rotate during the beam splitting process, thus ensuring that the position of the emitted monochromatic light is relatively fixed. A scanning optical system is then loaded after the emitted beam. The scanning mirror in the scanning optical system scans the monochromatic light into the emitted optical system, and the monochromatic light is emitted after the fixed emitted slit 3.

[0048] Of course, the beam splitter can also be a planar grating. The scanning optical system is loaded after the diffraction spectrum exit position. The scanning mirror in the scanning optical system scans the monochromatic light to the exit optical system and exits the monochromatic light after the fixed exit slit 3.

[0049] Example 3

[0050] This embodiment is a simplification of Embodiment 1. Its principle is that a simple high-speed monochromator consists of two matched objective lenses and a high-speed grating mirror. A white light beam collimated by the front objective lens is incident on the rotating mirror (grating). After diffraction by the high-speed mirror, it forms a collimated beam with a monochromatic spectrum. This beam is then converged by the second objective lens, and the monochromatic spectrum is arranged on the focal plane of the objective lens before exiting through the exit slit 3. When the exit slit 3 is fixed, the rotation of the mirror can select the wavelength, i.e., the spectrum, of the emitted monochromatic light.

[0051] like Figures 3-4 As shown, this embodiment provides another high-frequency monochromator, including a scanning and exiting mechanism. The scanning and exiting mechanism includes an entrance slit 1, a collimating optical component 4, a rotating mirror or rotating mirror 10 with grating beam splitting function, a converging imaging component 5, and an exit slit 3. Light passes through the entrance and exit to form an L-shaped light path. The entrance slit 11, collimating optical component 4, rotating mirror 10 with grating beam splitting function, converging imaging component 5, and exit slit 3 are arranged sequentially along the L-shaped light path. The entrance slit 1, collimating optical component 4, rotating mirror with grating beam splitting function, converging imaging component 5, and exit slit 3 are all fixed perpendicularly to the horizontal plane. The rotating mirror with grating beam splitting function is located at the junction of the L-shaped light path. The central axis of the collimating optical component 4 and the central axis of the entrance slit 1 are on the same optical axis. The central axis of the converging imaging component 5 and the central axis of the exit slit 3 are on the same optical axis. A corresponding exit slit 3 is set at the image plane of the converging imaging component 5.

[0052] In the embodiment, the L-shaped light path can be adjusted to an acute angle or an obtuse angle, i.e. an included angle of 0°-180° as required.

[0053] In the embodiment, as shown in Figure 5 The rotating mirror with the grating light splitting function is a rotating mirror with a grating structure or a rotating mirror. The rotating mirror with the grating light splitting function is a rotating mirror with a grating structure. The rotating mirror can be a plane or a grating. The grating is not limited, and the superimposed grating can be a plane grating, a concave grating or a convex grating.

[0054] In another embodiment, as shown in Figure 5 The rotating mirror with the grating light splitting function is a rotating mirror with a grating structure or a rotating mirror. The rotating mirror can be a plane or a grating. The grating 6 is not limited, and the superimposed grating can be a plane grating, a concave grating or a convex grating.

[0055] In the embodiment, the collimating optical assembly 4 is a lens or a mirror. The resolution of the collimating mirror is adapted to the resolution of the spectrum and the motor position.

[0056] In the embodiment, the rotating mirror with the grating light splitting function is located at the entrance pupil and the exit pupil of the collimating optical assembly 4 and the converging imaging assembly 5. The input and output beam energy is conveniently and efficiently utilized.

[0057] In the embodiment, the line width of the slit affects the spectral resolution and energy of the spectrometer. The line width of the slit (the last end in the figure) affects the spectral resolution and energy of the spectrometer. The line width of the slit can be adjusted as required.

[0058] In the embodiment, the mirror 10 with the grating light splitting function is rotated at high speed by a rotating mechanism (motor and rotating shaft), so the switching speed of monochromatic light is also high, forming a high-frequency switching monochromatic light output. The mirror 10 with the grating light splitting function is rotated at high speed, so the switching speed of monochromatic light is also high, thus realizing a high-frequency switching monochromatic light output.

[0059] White light or complex color light is incident from the entrance slit 1, the incident divergent light beam is changed into a collimated parallel light beam by the collimating optical assembly 4, then is incident to the rotating mirror with the grating light splitting function, after grating light splitting, various color lights are incident to the converging imaging assembly 5 to be imaged to its image plane, the image of the entrance slit 1 of various color lights is presented at the image plane of the converging imaging assembly 5, the corresponding exit slit 3 is arranged at the image plane of the converging imaging assembly 5, various color lights are sequentially exited at the exit slit 3 by rotating the rotating mirror with the grating light splitting function, that is, monochromatic light is exited, a monochromator is formed. The monochromatic light of one color is obtained every angle of rotation of the mirror with the grating light splitting function or the rotating mirror.

[0060] The above merely describes preferred embodiments of the present application and is not intended to limit the present application. Although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art will still be able to make modifications to the technical solutions described in the foregoing embodiments or make equivalent replacements to some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A high-frequency monochromator, characterized in that, It includes a spectrometer and a scanning exit mechanism. The scanning exit mechanism is loaded after the beam emitted by the spectrometer. Along the optical path, the entrance slit, spectrometer, field aperture, collimating optical component, rotating mirror or rotating mirror with grating beam splitting function, converging imaging component, and exit slit are sequentially arranged. The light rays are emitted through the field aperture and exit slit to form an L-shaped optical path. The entrance slit, spectrometer, field stop, collimating optical assembly, rotating mirror or rotating mirror with grating beam splitting function, converging imaging assembly, and exit slit are all fixed perpendicularly to the horizontal plane. The rotating mirror or rotating mirror with grating beam splitting function is located at the junction of the L-shaped optical path. The central axis of the collimating optical assembly and the central axis of the field stop are on the same optical axis. The converging imaging assembly and the exit slit are located on the straight optical axis of the light emission direction. The central axis of the converging imaging assembly and the central axis of the exit slit are on the same optical axis. A corresponding exit slit is set at the image plane of the converging imaging assembly.

2. A high-frequency monochromator, characterized in that, The system includes a scanning and exiting mechanism, which comprises an entrance slit, a collimating optical assembly, a rotating mirror with grating beam-splitting function, a converging imaging assembly, and an exit slit. Light rays pass through the incident and exit points to form an L-shaped light path. Along the L-shaped light path, an incident slit, a collimating optical component, a rotating mirror with grating beam splitting function, a converging imaging component, and an exit slit are sequentially arranged. The incident slit, collimating optical component, rotating mirror with grating beam splitting function, converging imaging component, and exit slit are all fixed perpendicularly to the horizontal plane. The rotating mirror with grating beam splitting function is located at the junction of the L-shaped light path. The central axis of the collimating optical component and the central axis of the incident slit are on the same optical axis. The central axis of the converging imaging component and the central axis of the exit slit are on the same optical axis. A corresponding exit slit is set at the image plane of the converging imaging component.

3. A high-frequency monochromator according to claim 1 or 2, characterized in that, The rotating mirror or rotating mirror with grating beam splitting function is a structure of rotating mirror superimposed with grating or a rotating mirror.

4. A high-frequency monochromator according to claim 1 or 2, characterized in that, The rotating mirror or rotating mirror with grating beam splitting function is a structure of scanning mirror superimposed with grating or a rotating mirror.

5. A high-frequency monochromator according to claim 1 or 2, characterized in that, The collimating optical component is a lens or a mirror, and the resolution of the collimating optical component is adapted to the resolution of the spectrum and the position of the motor.

6. A high-frequency monochromator according to claim 1 or 2, characterized in that, The converging imaging component is a lens or a reflector, and the resolution of the converging imaging component is adapted to the resolution of the spectrum and the position of the motor.

7. A high-frequency monochromator according to claim 1 or 2, characterized in that, The L-shaped optical path has a certain angle.

8. A high-frequency monochromator according to claim 1 or 2, characterized in that, The rotating mirror or rotating mirror with grating beam splitting function is located at the entrance pupil and exit pupil of the collimating optical component and the converging imaging component.

9. A high-frequency monochromator according to claim 1 or 2, characterized in that, The superimposed gratings can be planar gratings, concave gratings, or convex gratings.

10. A high-frequency monochromator according to claim 1 or 2, characterized in that, The reflector with grating beam splitting function is rotated at high speed by a rotating mechanism, so the switching speed of monochromatic light is also high, forming a high-frequency switching monochromatic output.

Images