Disassembling tool for molecular pump

Abstract

The utility model discloses a dismounting tool for a molecular pump. The molecular pump comprises a pump base, a pump shell arranged on the pump base and provided with an air inlet and an air outlet, and an air exhaust assembly arranged on the pump base and located in the pump shell. The dismounting tool comprises a supporting frame body and a lifting-out assembly. The supporting frame body is detachably connected with the pump shell and arranged above the air inlet of the pump shell in a spanning mode. The lifting-out assembly comprises a rotating screw and a protection cushion block, wherein the rotating screw is in threaded connection with the supporting frame body and is arranged to be coaxial with the air exhaust assembly, and the protection cushion block is rotationally arranged on the rotating screw and abuts against the air exhaust assembly. When the rotating screw rod is driven to rotate relative to the supporting frame body, the rotating screw rod can abut against the air exhaust assembly through the protection cushion block so as to force the supporting frame body to move relative to the rotating screw rod to be away from the air exhaust assembly and drive the pump shell to be separated from the pump base. The dismounting tool can prevent the dismounting tool from damaging the air exhaust assembly in the process of dismounting the pump shell and the pump base of the molecular pump, so that the structural integrity of the air exhaust assembly is guaranteed.

Description

TECHNICAL FIELD

[0001] The embodiment of the utility model relates to the technical field of dismounting tool of molecular pump, more particularly, the utility model relates to a kind of dismounting tool for molecular pump. BACKGROUND

[0002] In the field of vacuum technology, molecular pump is widely used in semiconductor manufacturing, material science research, aerospace and other industrial fields requiring high vacuum environment as an important vacuum obtaining equipment. Molecular pump realizes the extraction of gas by the principle of molecular collision and momentum transfer through the small gap between the high-speed rotating rotor and the stator, thereby achieving the required vacuum degree. However, as the use time of molecular pump increases or the maintenance requirement appears, it is necessary to dismount, clean, repair or replace the components.

[0003] Specifically, the molecular pump includes a pump base, a pump shell provided on the pump base and having an air inlet and an air outlet, a gas extraction assembly provided on the pump base and located in the pump shell, and a filter screen cover that has been dismounted from the top of the pump shell and used to cover the air inlet. During the dismounting process of the molecular pump, the pump shell and the pump base are arranged in interference fit to ensure the sealing of the whole molecular pump. The molecular pump mainly relies on the gas extraction assembly to realize the extraction of vacuum in the environment. When the gas extraction assembly needs to be maintained or repaired, the pump shell and the pump base of the molecular pump need to be dismounted. The interference fit between the pump shell and the pump base makes the dismounting extremely difficult. The existing dismounting tool for molecular pump can separate the pump shell and the pump base to realize the dismounting, but often causes damage to the gas extraction assembly during the dismounting process, such as scratching or wearing on the surface of the gas extraction assembly, which affects the structural integrity of the gas extraction assembly. SUMMARY

[0004] To solve one or more technical problems mentioned above, the utility model provides a kind of dismounting tool for molecular pump, it can avoid that dismounting tool causes damage to gas extraction assembly during the process of dismounting the pump shell and pump base of molecular pump, to ensure the structural integrity of gas extraction assembly.

[0005] The utility model embodiment provides a kind of dismounting tool for molecular pump, the molecular pump includes pump base, the pump shell being arranged on the pump base and having air inlet and air outlet, the gas extraction assembly being arranged on the pump base and being located in the pump shell, and the filter screen cover that has been dismounted from the top of the pump shell and is used to cover the air inlet, the dismounting tool includes:

[0006] support frame body, which is detachably connected with the pump shell and is arranged across above the air inlet of the pump shell;

[0007] a lifting assembly comprising a rotating screw threadedly connected to the support frame body and coaxially arranged with the air exhaust assembly, and a protective pad rotatably arranged on the rotating screw and abutting against the air exhaust assembly;

[0008] wherein, when the rotating screw is driven to rotate relative to the support frame body, the rotating screw can push the air exhaust assembly through the protective pad to force the support frame body to move away from the air exhaust assembly relative to the rotating screw and drive the pump shell to disengage from the pump base.

[0009] Further, the protective pad comprises a hard pad with a penetrating hole, a soft pad fixedly connected to the hard pad and closer to the air exhaust assembly than the hard pad, and a receiving cavity formed between the hard pad and the soft pad, the pushing end of the rotating screw close to the air exhaust assembly comprises a large-diameter portion abutting against the hard pad, a small-diameter portion connected to the large-diameter portion and inserted into the penetrating hole and the receiving cavity, and an anti-back-off member axially fixedly arranged on the small-diameter portion and located in the receiving cavity.

[0010] Further, the lifting assembly further comprises a thrust bearing arranged between the hard pad and the large-diameter portion of the pushing end of the rotating screw.

[0011] Further, the hard pad is made of metal material, and the soft pad is composed of rubber or resin.

[0012] Further, the air exhaust assembly comprises a motor fixedly arranged on the pump base and located in the pump shell, and a turbine fixedly arranged on an output shaft of the motor, the radial dimension of the hard pad is greater than or equal to the radial dimension of the soft pad, the radial dimension of the soft pad is greater than the radial dimension of the output shaft of the motor, and the soft pad can directly contact and abut against the turbine.

[0013] Further, the support frame body comprises a center block threadedly cooperating with the rotating screw, and a plurality of radial arms uniformly arranged on the center block along the circumference of the center block, wherein each of the radial arms is detachably connected to the pump shell.

[0014] Further, the support frame body further comprises a plurality of legs detachably arranged on each of the radial arms and each having a first internally threaded hole, and a plurality of first fastening bolts penetrating through different bolt holes of a flange structure of the pump shell and screwed into the first internally threaded holes of the corresponding legs.

[0015] Further, each of the legs further has a second internally threaded hole, and the support frame body further comprises second fastening bolts penetrating through each of the radial arms and screwed into the second internally threaded hole of the corresponding leg.

[0016] Further, the dismounting tool further comprises a plurality of third fastening bolts, and each of the radial arms is fixed to the center block by a different third fastening bolt.

[0017] Further, the cross section of the rotating screw away from the operation end of the air extraction assembly is a quadrilateral, a hexagon or a semicircle structure with an acute central angle.

[0018] The dismounting tool for the molecular pump provided by the embodiment utilizes the threaded cooperation between the support frame body and the rotating screw to convert the rotating motion of the rotating screw into the linear motion of the support frame body through the threaded structure, and separates the pump shell from the pump base by connecting the support frame body with the pump shell, so as to achieve the purpose of dismounting the molecular pump. The protective pad rotatably arranged on the rotating screw can serve as a buffer medium between the rotating screw and the air extraction assembly when the rotating screw applies pressure to the air extraction assembly, effectively avoiding the risk that the rotating screw directly contacts and possibly scratches the surface of the air extraction assembly, thereby ensuring the integrity of the structure of the air extraction assembly and improving the safety and reliability of the dismounting operation. In addition, the unique spanning layout of the support frame body is ingeniously arranged above the air inlet of the pump shell, which not only ensures the stability during the dismounting process, but also significantly reduces any form of scratches or abrasions that the support frame body may cause to the air inlet of the pump shell when driving the pump shell to separate from the pump base, thereby further ensuring the structural integrity of the air inlet of the pump shell and prolonging the service life of the molecular pump. In addition, the dismounting tool also fully considers the original structural characteristics of the molecular pump and arranges the protective pad on the air extraction assembly after the filter cover is removed. This innovative arrangement not only simplifies the overall structure of the dismounting tool, but also greatly improves the convenience and efficiency of the dismounting operation, truly realizing the maximum utilization of existing resources. BRIEF DESCRIPTION OF DRAWINGS

[0019] The above and other objects, features and advantages of the present embodiments will become more apparent from the following detailed description read in conjunction with the accompanying drawings. In the drawings, several embodiments of the present embodiments are shown by way of example, and identical or corresponding reference numbers denote identical or corresponding parts, in which:

[0020] Figure 1 A structure schematic diagram of a molecular pump is shown, which is related to the embodiments of the present embodiments;

[0021] Figure 2 A structure schematic diagram of a molecular pump in a use state is shown, which is provided by the embodiments of the present embodiments;

[0022] Figure 3 A sectional view of a molecular pump is shown in the embodiment of the present application.

[0023] Figure 4 A structural schematic diagram of the molecular pump in a non-use state is shown in the embodiment of the present application.

[0024] 1, support frame body; 11, center block; 12, radial support arm; 13, support leg; 14, first fastening bolt; 15, second fastening bolt; 16, third fastening bolt;

[0025] 2, lifting assembly; 21, rotating screw; 211, pressing end; 2111, large diameter part; 2112, small diameter part; 212, anti-back member; 213, control end; 22, protection pad block; 221, hard pad block; 222, soft pad block; 223, accommodating cavity; 224, fourth fastening bolt; 23, thrust bearing;

[0026] 100, pump base; 200, pump shell; 201, flange structure; 300, gas pumping assembly. DETAILED DESCRIPTION

[0027] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all the other embodiments obtained by those skilled in the art without creative work fall within the protection scope of the present application.

[0028] Figure 1 A structural schematic diagram of a molecular pump is shown in the present embodiment. As shown in the figure, the molecular pump comprises a pump base 100, a pump shell 200, a flange structure 201, and a gas pumping assembly 300. Figure 1As shown, the molecular pump comprises a pump base 100, a pump shell 200 provided on the pump base 100 and having an air inlet and an air outlet, a pumping assembly 300 provided on the pump base 100 and located in the pump shell 200, and a filter cover (not shown) which has been detached from the top of the pump shell 200 and is used to cover the air inlet. During disassembly of the molecular pump, the pump shell 200 and the pump base 100 are provided with an interference fit to ensure the sealing of the molecular pump as a whole. The molecular pump mainly relies on the pumping assembly 300 to realize the extraction of vacuum from the environment. When the pumping assembly 300 needs to be maintained or repaired, the pump shell 200 and the pump base 100 need to be disassembled. The interference fit between the pump shell 200 and the pump base 100 makes disassembly extremely difficult. The existing disassembly tool for the molecular pump can separate the pump shell 200 from the pump base 100 to realize disassembly, but often causes damage to the pumping assembly 300 during disassembly, such as scratching or wear on the surface of the pumping assembly 300, which affects the structural integrity of the pumping assembly 300.

[0029] Figure 2 The structure of the molecular pump provided by the embodiment is shown in a use state, as shown in Figure 2 and in combination with Figure 1 To solve the above problems, the embodiment provides a disassembly tool for a molecular pump, which comprises a support frame body 1 and a lifting assembly 2. The support frame body 1 is detachably connected with the pump shell 200 and is arranged across above the air inlet of the pump shell 200. The lifting assembly 2 comprises a rotating screw 21 which is threadedly connected with the support frame body 1 and is coaxial with the pumping assembly 300, and a protective pad 22 which is rotatably provided on the rotating screw 21 and abuts against the pumping assembly 300. When the rotating screw 21 is driven to rotate relative to the support frame body 1, the rotating screw 21 can press the pumping assembly 300 through the protective pad 22 to force the support frame body 1 to move away from the pumping assembly 300 relative to the rotating screw 21 and drive the pump shell 200 to separate from the pump base 100.

[0030] The dismounting tool for the molecular pump provided in the embodiment comprises a support frame body 1, a rotating screw rod 21 and a protection pad block 22. The support frame body 1 is connected with the pump shell 200, and the rotating screw rod 21 is rotatably arranged on the support frame body 1. The rotating screw rod 21 is arranged in threaded connection with the support frame body 1. The protection pad block 22 is arranged on the rotating screw rod 21 and is in contact with the surface of the air extraction assembly 300. When the molecular pump needs to be dismounted, the support frame body 1 is first connected with the pump shell 200, and then the rotating screw rod 21 is driven to rotate relative to the support frame body 1. At this time, the rotating screw rod 21 is pressed on the surface of the air extraction assembly 300 through the protection pad block 22. Since the air extraction assembly 300 is arranged on the pump base 100, and the pump base 100 is located on the ground, the air extraction assembly 300 remains stationary relative to the ground when it is pressed by the rotating screw rod 21, and the rotating screw rod 21 also remains stationary relative to the ground. The support frame body 1 connected with the rotating screw rod 21 moves away from the air extraction assembly 300 (i.e., moves relative to the ground) under the action of the rotating screw rod 21, thereby driving the pump shell 200 to separate from the pump base 100.

[0031] The dismounting tool for the molecular pump provided in the embodiment comprises a support frame body 1, a rotating screw rod 21 and a protection pad block 22. The support frame body 1 is connected with the pump shell 200, and the rotating screw rod 21 is rotatably arranged on the support frame body 1. The rotating screw rod 21 is arranged in threaded connection with the support frame body 1. The protection pad block 22 is arranged on the rotating screw rod 21 and is in contact with the surface of the air extraction assembly 300. When the molecular pump needs to be dismounted, the support frame body 1 is first connected with the pump shell 200, and then the rotating screw rod 21 is driven to rotate relative to the support frame body 1. At this time, the rotating screw rod 21 is pressed on the surface of the air extraction assembly 300 through the protection pad block 22. Since the air extraction assembly 300 is arranged on the pump base 100, and the pump base 100 is located on the ground, the air extraction assembly 300 remains stationary relative to the ground when it is pressed by the rotating screw rod 21, and the rotating screw rod 21 also remains stationary relative to the ground. The support frame body 1 connected with the rotating screw rod 21 moves away from the air extraction assembly 300 (i.e., moves relative to the ground) under the action of the rotating screw rod 21, thereby driving the pump shell 200 to separate from the pump base 100.

[0032] Figure 3 A sectional view of the molecular pump provided in the embodiment is shown. As shown in the figure, the molecular pump comprises a pump shell 200, a pump base 100, an air extraction assembly 300 and a filter screen cover 400. The pump shell 200 is arranged on the pump base 100. The air extraction assembly 300 is arranged on the pump base 100 and is in contact with the surface of the pump shell 200. The filter screen cover 400 is arranged on the air extraction assembly 300. Figure 3 In combination with Figure 1 And Figure 2As shown, the protective pad 22 comprises a hard pad 221 with a penetrating hole, a soft pad 222 fixedly connected with the hard pad 221 and closer to the air extraction assembly 300 than the hard pad 221, and a receiving cavity 223 formed between the hard pad 221 and the soft pad 222. The top pressing end 211 of the rotating screw 21 close to the air extraction assembly 300 comprises a large-diameter portion 2111 abutting against the hard pad 221, a small-diameter portion 2112 connected with the large-diameter portion 2111 and inserted into the penetrating hole and the receiving cavity 223, and a retreat-preventing member 212 fixedly arranged at least axially on the small-diameter portion 2112 and located in the receiving cavity 223. When the rotating screw 21 exerts pressure on the air extraction assembly 300, the pressure of the rotating screw 21 is dispersed from the large-diameter portion 2111 to the hard pad 221. Since the large-diameter portion 2111 has a larger diameter than the small-diameter portion 2112, it can disperse more pressure to the hard pad 221 for supporting the rotating screw 21 on one hand, and prevent the rotating screw 21 from being broken or the like on the other hand. The soft pad 222 can absorb part of the pressure of the rotating screw 21 acting on the air extraction assembly 300, so as to prevent the air extraction assembly 300 from being excessively pressed by the rotating screw 21 and being concave or the like. The retreat-preventing member 212 can ensure that the hard pad 221 and the top pressing end 211 of the rotating screw 21 are always in close connection, so as to prevent the hard pad 221 from falling off.

[0033] Preferably, the protective pad 22 further comprises a fourth fastening bolt 224 screwed into the soft pad 222 and the hard pad 221, so as to stably fix the soft pad 222 on the hard pad 221.

[0034] In the embodiment, the retreat-preventing member 212 can be a circlip or a double-nut structure, so as to prevent the hard pad 221 from falling off from the top pressing end 211 of the rotating screw 21. In other embodiments, the retreat-preventing member 212 can also be other parts capable of achieving the above effect, which are not limited in the embodiment.

[0035] Further, the lifting assembly 2 further comprises a thrust bearing 23 arranged between the hard pad 221 and the large-diameter portion 2111 of the top pressing end 211 of the rotating screw 21. The thrust bearing 23 can reduce the friction between the rotating screw 21 and the hard pad 221 when the rotating screw 21 is driven to rotate, so as to facilitate the operator to drive the rotating screw 21 to rotate.

[0036] Preferably, the hard pad 221 is made of metal material to ensure that the hard pad 221 has good supporting effect by taking advantage of the characteristics of metal material. The soft pad 222 is made of rubber or resin to ensure that the soft pad 222 can absorb part of the pressure of the rotating screw 21 acting on the pumping assembly 300 by taking advantage of the characteristics of rubber or resin.

[0037] The pumping assembly 300 of the molecular pump according to the present embodiment comprises a motor fixed on the pump base 100 and located in the pump shell 200, and a turbine fixed on the output shaft of the motor. The radial dimension of the hard pad 221 is greater than or equal to the radial dimension of the soft pad 222, so that the pressure of the hard pad 221 when subjected to the rotating screw 21 can comprehensively press the soft pad 222, so that the soft pad 222 can absorb more pressure generated by the rotating screw 21. The radial dimension of the soft pad 222 is greater than the radial dimension of the output shaft of the motor, and the soft pad 222 can directly contact and abut against the turbine, so that the soft pad 222 can contact the turbine with a larger area, thereby improving the stability of the present rotating screw.

[0038] Figure 4 The structure schematic diagram of the molecular pump according to the present embodiment in the unused state is shown. As shown in Figure 4 and in combination with Figures 1-3 It is shown that the support frame body 1 comprises a central block 11 threadedly matched with the rotating screw 21, and a plurality of radial arms 12 uniformly arranged on the central block 11 in the circumferential direction of the central block 11, wherein the plurality of radial arms 12 are detachably connected to the pump shell 200, so as to selectively connect or disconnect the present disassembly tool with the pump shell 200, and the arrangement of the radial arms 12 can also realize that the overall structure of the support frame body 1 spans the gas inlet, so as to prevent the structure near the gas inlet from being adversely affected during disassembly.

[0039] Further, the support frame body 1 further comprises a plurality of legs 13 detachably arranged on each radial arm 12 and each having a first internal threaded hole, and a plurality of first fastening screws 14 passing through different bolt holes of the flange structure 201 of the pump shell 200 and screwed into the first internal threaded holes of the corresponding legs 13. The legs 13 and the first fastening screws 14 can on the one hand realize that the plurality of radial arms 12 are detachably connected to the pump shell 200, and on the other hand, since the legs 13 and the radial arms 12 are detachably connected, different lengths of the legs 13 can be replaced according to actual needs, so that the present disassembly tool can adapt to different molecular pumps with different heights of the pump shell 200 for adaptive adjustment.

[0040] Further, each leg 13 also has a second internally threaded hole, and the support frame body 1 further comprises a second fastening bolt 15 passing through each radial arm 12 and screwed into the corresponding second internally threaded hole of the leg 13, which is screwed into the radial arm 12 and the leg 13 in such a way that, on the one hand, the detachable connection between the radial arm 12 and the leg 13 can be realized, and on the other hand, the stability of the radial arm 12 and the leg 13 when connected can be ensured due to the support frame body 1 which needs to be supported.

[0041] Further, the dismounting tool further comprises a plurality of third fastening bolts 16, each radial arm 12 is fixed to the center block 11 by a different third fastening bolt 16, and the radial arm 12 is fixed to the center block 11 by the third fastening bolt 16 in such a way that, on the one hand, the support frame body 1 can have a good supporting effect, and on the other hand, different lengths of radial arms 12 can be replaced according to actual needs, so that the dismounting tool can be adapted to molecular pumps of different radii for adaptive adjustment.

[0042] Preferably, the cross section of the rotating screw 21 away from the operating end 213 of the gas extraction assembly 300 is a quadrilateral, a hexagon or a semicircle structure with an acute central angle, so as to facilitate the operator to operate the operating end 213 of the rotating screw 21 (such as directly rotating by manual method or rotating by means of a tool).

[0043] In the above description of the present application, unless otherwise explicitly specified and limited, the terms "fixed", "mounted", "connected" or "linked" and the like should be understood in a broad sense. For example, as to the term "connected", it can be fixed connection, detachable connection or integral; it can be mechanical connection, electrical connection; it can be direct connection, indirect connection through an intermediate medium, or internal communication of two elements or interaction relationship between two elements. Therefore, unless otherwise explicitly limited in the present application, the above terms can be understood in the specific meaning in the present application by the person skilled in the art according to the specific circumstances.

[0044] According to the above description of the present application, the person skilled in the art can also understand that the terms used in the present application, such as "upper", "top", "bottom", "inner", "axial", "radial", "circumferential", "center" and the like indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the drawings of the present application, which is only for the purpose of facilitating the description of the scheme of the present application and simplifying the description, and is not to indicate or imply that the devices or elements involved must have the specific orientation, be constructed and operated in the specific orientation, therefore the above orientation or positional relationship terms cannot be understood or interpreted as a limitation on the scheme of the present application.

[0045] In addition, the terms "first" or "second" or the like used in the present application are terms used to refer to numbers or ordinal numbers only for the purpose of description, and cannot be understood as explicitly or implicitly indicating relative importance or implicitly indicating the number of the indicated technical features. Thus, the features defined with "first" or "second" can explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of "a plurality of" is at least two, for example, two, three or more, etc., unless otherwise explicitly and specifically limited.

[0046] While the embodiments of the present application have been shown and described herein, it will be apparent to those skilled in the art that such embodiments are provided by way of example only. Many changes, modifications and alternatives will occur to those skilled in the art without departing from the spirit and scope of the present application. It should be understood that various alternatives to the embodiments of the present application described herein can be employed in practicing the present application. The appended claims are intended to define the scope of the present application and thus cover any equivalents or alternatives within the scope of these claims.

Claims

1. A disassembly tool for a molecular pump, the molecular pump comprising a pump base, a pump housing disposed on the pump base and having an inlet and an outlet, an air extraction assembly disposed on the pump base and located within the pump housing, and a filter cover removed from the top of the pump housing for covering the inlet, characterized in that, The dismounting tool comprises: a support frame body detachably connected with the pump shell and arranged across above the air inlet of the pump shell; a lifting assembly comprising a rotating screw threadedly connected with the support frame body and coaxially arranged with the air extraction assembly, and a protective pad rotatably arranged on the rotating screw and abutting against the air extraction assembly; wherein when the rotating screw is driven to rotate relative to the support frame body, the rotating screw can push the air extraction assembly through the protective pad to force the support frame body to move away from the air extraction assembly relative to the rotating screw and drive the pump shell to detach from the pump base.

2. The disassembly tool according to claim 1, characterized in that The protective pad comprises a hard pad with a penetrating hole, a soft pad fixedly connected with the hard pad and closer to the air extraction assembly than the hard pad, and a receiving cavity formed between the hard pad and the soft pad, the pushing end of the rotating screw close to the air extraction assembly comprises a large-diameter portion abutting against the hard pad, a small-diameter portion connected with the large-diameter portion and inserted into the penetrating hole and the receiving cavity, and an anti-back-off member at least axially fixedly arranged on the small-diameter portion and located in the receiving cavity.

3. The tool of claim 2, wherein The lifting assembly further comprises a thrust bearing arranged between the hard pad and the large-diameter portion of the pushing end of the rotating screw.

4. The tool of claim 2, wherein The hard pad is made of metal material, and the soft pad is composed of rubber or resin.

5. The tool of claim 2 wherein, The air extraction assembly comprises a motor fixed on the pump base and located in the pump shell, and a turbine fixedly arranged on an output shaft of the motor, the radial dimension of the hard pad is greater than or equal to the radial dimension of the soft pad, the radial dimension of the soft pad is greater than the radial dimension of the output shaft of the motor, and the soft pad can directly contact and abut against the turbine.

6. The disassembly tool according to any one of claims 1 to 5, characterized in that The support frame body comprises a center block threadedly matched with the rotating screw, and a plurality of radial arms uniformly arranged on the center block in the circumferential direction of the center block, wherein the plurality of radial arms are detachably connected with the pump shell.

7. The disassembly tool according to claim 6, characterized in that The support frame body further comprises a plurality of legs detachably arranged on each radial arm and each having a first internally threaded hole, and a plurality of first fastening bolts passing through different bolt holes of a flange structure of the pump shell and screwed into the first internally threaded holes of corresponding legs.

8. The disassembly tool according to claim 7, characterized in that Each leg further has a second internally threaded hole, and the support frame body further comprises a second fastening bolt passing through each radial arm and screwed into the second internally threaded hole of the corresponding leg.

9. The disassembly tool according to claim 6, characterized in that The dismounting tool further comprises a plurality of third fastening bolts, and each radial arm is fixed on the center block by a different third fastening bolt.

10. The disassembly tool according to any one of claims 1 to 5, characterized in that The control end of the rotating screw away from the air extraction assembly has a cross section in the shape of a quadrilateral, a hexagon, or a semicircle with an acute central angle.

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