Universal tool for testing durability of TaC coated part

Abstract

The utility model discloses a universal tool for a durability test of a TaC coating part, which comprises two parallel annular horizontal supports and at least three vertical supports, the vertical supports are connected with the two horizontal supports to form a whole tool, each vertical support comprises a rod part used for connecting the two horizontal supports and a supporting part used for supporting a workpiece, and the rod parts are connected with the two horizontal supports. The supporting parts are installed on the rod part, the multiple supporting parts form multi-point supporting of a workpiece, the rod part comprises multiple connecting columns, the multiple connecting columns are coaxially connected in an inserted mode to form the rod part, and the supporting parts are connected between the connecting columns in an inserted mode to form connection between the supporting parts and the rod part. The tool is simple in structure and convenient to operate, the tool cost is saved, meanwhile, the tool supports the TaC coating piece, the TaC coating piece is located at the center position of the top of the crucible, the position is a better testing position, and a more accurate testing result is obtained.

Description

TECHNICAL FIELD

[0001] The utility model relates to TaC coating piece test technical field especially relates to a TaC coating piece durability test's general type frock. BACKGROUND

[0002] SiC is the representative of the third generation semiconductor material, and is widely used in new energy vehicles, power transmission, photovoltaic, energy storage and other fields due to its excellent performance in extreme environments such as high temperature, high pressure and high frequency. The mature SiC crystal growth technology is physical vapor transport method (PVT method), and graphite as its thermal field material is easily corroded by Si atmosphere, causing carbon inclusions in SiC crystals, which affects the quality of SiC crystals. Because TaC has excellent high temperature resistance and corrosion resistance, TaC coating is commonly used in the industry to coat graphite materials, and TaC coating can block the corrosion of Si atmosphere on SiC crystals, thereby improving the quality of SiC crystals.

[0003] To ensure the coating effect of TaC coating on the product, the durability of the TaC coating on the surface of the product needs to be tested. Different products have different sizes, so different devices (crucibles) are needed as test carriers, so each product needs to be configured with a corresponding frock. The configuration of multiple frocks will increase the test cost and require a large storage space. UTILITY MODEL CONTENT

[0004] The utility model discloses a TaC coating piece durability test's general type frock for the TaC coating piece durability test of each product in prior art needs to be configured with a corresponding frock, and the general frock can bear multiple size products, and frock cost is saved.

[0005] In order to achieve the above purpose, the utility model adopts the following technical scheme:

[0006] A general frock for TaC coating piece durability test, comprising two parallel ring-shaped horizontal supports and at least three vertical supports, the vertical supports are located between the two horizontal supports and connected to the two horizontal supports, forming a frock whole. The vertical support includes a rod part for connecting the two horizontal supports and a support part for supporting the workpiece, the support part is installed on the rod part, the rod part is wrapped around the horizontal support, the support part extends towards the center of the horizontal support, and the multiple support parts form multiple point supports for the workpiece. The rod part includes a plurality of connecting columns, and the plurality of connecting columns are coaxially inserted to form a rod part. The support part includes a support rod for supporting the workpiece and a connecting rod for connecting the rod part, and the connecting rod is inserted between the connecting columns to form the connection between the support part and the rod part.

[0007] Preferably, the rod part comprises a first connecting column and a second connecting column, the first connecting column is used for connecting the horizontal support, and the second connecting column is used for connecting the first connecting column and forming the connection between the second connecting columns.

[0008] Preferably, the connecting rod is inserted between the two second connecting columns to form the connection between the support part and the rod part.

[0009] Preferably, the horizontal support is provided with a first insertion hole, the first connecting column comprises a first column body, two ends of the first column body are respectively provided with first insertion heads, the second connecting column comprises a second column body, one end of the second column body is provided with a second insertion head, and the other end of the second column body is provided with a second insertion hole, the first insertion hole and the second insertion hole have the same inner diameter, the first insertion head and the second insertion head have the same outer diameter, and the first insertion head and the second insertion head are matched with the first insertion hole and the second insertion hole respectively to form the insertion.

[0010] Preferably, the connecting rod comprises a third column body, one end of the third column body is provided with a third insertion head, and the other end of the third column body is provided with a third insertion hole, the third insertion hole and the second insertion hole have the same inner diameter, the third insertion head and the second insertion head have the same outer diameter, and the third insertion head and the second insertion head are matched with the third insertion hole and the second insertion hole respectively to form the insertion.

[0011] Preferably, the end of the first insertion head, the second insertion head and the third insertion head is provided with a limiting block, the hole wall of the first insertion hole, the second insertion hole and the third insertion hole is provided with a mounting groove for accommodating the limiting block, the bottom of the first insertion hole, the second insertion hole and the third insertion hole is provided with a limiting groove for accommodating the limiting block, and the limiting block enters the bottom of the first insertion hole, the second insertion hole and the third insertion hole from the mounting groove and then enters the limiting groove through rotation.

[0012] Preferably, the second end of the support rod is provided with at least one protrusion, and the protrusion is used for positioning the workpiece.

[0013] Preferably, the rod part of one vertical support is provided with at least one support part.

[0014] Preferably, the rod part of the vertical support is provided with a plurality of support parts, and the plurality of support parts are arranged at intervals in the axial direction of the rod part, and the intervals form a placing space for the workpiece.

[0015] The utility model discloses the beneficial effect is:

[0016] 1、The shape of the whole tool of the general tool for TaC coating piece durability test matches the size of the test general crucible, the support part on the tool is used for placing the TaC coating piece, the support part can support TaC coating pieces of different sizes, one crucible can adapt to more sizes of workpieces, improve the scope of application of the crucible, save the cost of the tool; At the same time, the tool supports the TaC coating piece, so that the TaC coating piece is in the center position at the top of the crucible, which is the preferred test position, and more accurate test results can be obtained.

[0017] 2、The vertical support of the general tool for TaC coating piece durability test is connected by connecting columns, which is used to adapt to the test environment with strong corrosion, and the replacement of the tool connecting column after corrosion is facilitated. At the same time, the support part is also connected with the rod part through the connecting rod, and the insertion position of the support part in the rod part can be adjusted according to the height of the workpiece, so as to adapt to workpieces of different heights. Moreover, the insertion of the connecting column can adjust the position of the TaC coating piece in the crucible, so that the TaC coating piece is in the preferred test position.

[0018] 3、The support rod of the general tool for TaC coating piece durability test is provided with a plurality of protrusions, which are used for positioning the workpiece. The plurality of protrusions can adapt to the diameter size of the workpiece, and the insertion position of the support part in the rod part can be adjusted. The general tool for TaC coating piece durability test can be applied to workpieces of various sizes, and has good applicability. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 It is a structure diagram of the general tool for TaC coating piece durability test (double-layer support);

[0020] Figure 2 It is a structure diagram of the first connecting column of the general tool;

[0021] Figure 3 It is a structure diagram of the second connecting column of the general tool;

[0022] Figure 4 It is a structure diagram of the cross section of the second connecting column of the general tool;

[0023] Figure 5 It is a structure diagram of the second connecting bottom surface of the general tool;

[0024] Figure 6 It is a structure diagram of the support part of the general tool;

[0025] Figure 7 It is a structure diagram of the horizontal support of the general tool;

[0026] Figure 8 It is a structure diagram of the general tool (single-layer support);

[0027] Figure 9 Structure diagram of the general tool for placing in the crucible.

[0028] In the figure: 1, horizontal support; 2. Vertical support; 3, crucible; 11, first socket; 21, rod; 22, support; 211, first connecting column; 212, second connecting column; 221, connecting rod; 222, support rod; 2111, first column; 2112, first plug; 2113, first limit block; 2121, second column; 2122, second plug; 2123, second limit block; 2124, second socket; 2125, mounting groove; 2126, limit groove; 2211, third column; 2212, third plug; 2213, third limit block; 2221, protrusion. DETAILED DESCRIPTION

[0029] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all embodiments.

[0030] Reference Figure 1 A general tool for durability test of TaC coating parts, comprising two parallel arranged annular horizontal supports 1 and three vertical supports 2, the vertical supports 2 are located between the two horizontal supports 1 and connect the two horizontal supports 1, the three vertical supports 2 are evenly arranged around the horizontal supports 1 with the axis of the horizontal supports 1 as the center line, and the three vertical supports 2 and the two horizontal supports 1 are combined to form the whole tool.

[0031] The above-mentioned vertical support 2 comprises a rod part 21 for connecting the two horizontal supports 1 and a support part 22 for supporting the workpiece, and the support part 22 is installed on the rod part 21. The rod part 21 is arranged around the horizontal support 1, and the three support parts 22 respectively point to the center of the horizontal support 1 to form a centripetal structure, and the three support parts 22 form multi-point support of the workpiece.

[0032] Further, the rod part 21 comprises a first connecting column 211 and a second connecting column 212, and the first connecting column 211 and the second connecting column 212 are coaxially inserted to form the rod part 21. The first connecting column 211 is used for connecting the horizontal support 1, and the second connecting column 212 is used for connecting the first connecting column 211 and forming the connection between the second connecting column 212.

[0033] Specifically, referring to Figure 2 The first connecting column 211 comprises a first column 2111, and the two ends of the first column 2111 are respectively provided with a first plug 2112, and the end of the first plug 2112 is further provided with a first limit block 2113.

[0034] Further, referring toFigures 3-5 The second connecting column 212 comprises a second column body 2121, one end of the second column body 2121 is provided with a second plug 2122, and the end of the second plug 2122 is further provided with a second limiting block 2123. The other end of the second column body 2121 is provided with a second socket 2124. The hole wall of the second socket 2124 is provided with a mounting groove 2125 extending along the axis of the second socket 2124, and the mounting groove 2125 is used to accommodate the first limiting block 2113.

[0035] The first limiting block 2113 can enter the bottom of the second socket 2124 from the mounting groove 2125, and then enter the limiting groove 2126 by rotating. The limiting groove 2126 limits the first limiting block 2113, and realizes the plug-in and limiting between the second connecting column 212 and the first connecting column 211.

[0036] Further, referring to Figure 7 The horizontal support 1 is provided with a first socket 11, the number and position of the first socket 11 correspond to the number and position of the vertical support 2. The structure of the first socket 11 is the same as that of the second socket 2124, and the first socket 11 is used to plug in the first plug 2112 of the first connecting column 211.

[0037] Further, referring to Figure 6 The support part 22 comprises a support rod 222 for supporting a workpiece and a connecting rod 221 for connecting to the rod part 21. The connecting rod 221 is connected between the support part 22 and the rod part 21 by plugging into the second connecting column 212.

[0038] The connecting rod 221 comprises a third column body 2211, one end of the third column body 2211 is provided with a third plug 2212, and the end of the third plug 2212 is further provided with a third limiting block 2213. The other end of the third column body 2211 is provided with a third socket.

[0039] Further, the structure and size of the first plug 2112, the second plug 2122 and the third plug 2212 are the same, and the structure and size of the first socket 11, the second socket 2124 and the third socket are the same. The first plug 2112, the second plug 2122 and the third plug 2212 can be matched with the first socket 11, the second socket 2124 or the third socket respectively to form a plug-in.

[0040] Referring to Figure 6The first end of the support rod 222 is fixedly connected to the connecting rod 221, and the second end of the support rod 222 is provided with a plurality of protrusions 2221 for positioning the inner hole or outer wall of the cylindrical TaC coating piece (workpiece), and the plurality of protrusions 2221 are used to adapt to TaC coating pieces (workpieces) of various sizes.

[0041] The principle of the TaC coating piece durability test is to simulate the actual crystal growth environment by using the PVT method. The PVT device is generally provided with a cylindrical crucible 3, and the TaC coating piece needs to be placed in the crucible 3 for testing. The mainstream SiC crystal is divided into 6 inches and 8 inches, and most of the crystal growth adopts the PVT method. The corresponding TaC coating piece is a ring piece, the diameter of the TaC coating piece is generally 150-250 cm, and the height of the TaC coating piece is generally 1-10 cm. The size of the universal tool in the embodiment is adapted to the general size of the TaC coating piece. When the universal tool is used, the universal tool is placed in the inside of the crucible 3, the cylindrical TaC coating piece can be placed on the support rod 222 of the tool, and the three support rods 222 can support the TaC coating piece. The tool supports the TaC coating piece, so that the TaC coating piece is in a better test position in the PVT device, and the test effect is guaranteed. Figure 9

[0042] The rod part 21 of the vertical support 2 can be provided with a plurality of support parts 22, and the plurality of support parts 22 are arranged in the axial direction of the rod part 21. The space between the support parts 22 forms a space for placing the workpiece.

[0043] Referring to Figure 1 , the rod part 21 of the vertical support 2 can be provided with two support parts 22, and the tool can support two TaC coating pieces at a time, which is used to save test cost. Since the corrosion effect of Si atmosphere near the top of the crucible 3 in the PVT device is better, the test effect of the TaC coating piece located on the upper layer is better.

[0044] In order to obtain better test effect of the TaC coating piece, referring to Figure 8 , the rod part 21 of the vertical support 2 is provided with one support part 22, and the tool supports one TaC coating piece at a time. The position of the TaC coating piece is adjusted by increasing or decreasing the second connecting column 212, so that the TaC coating piece is located near the top of the crucible 3, and the corrosion effect of Si atmosphere at this position is better, and the test effect is better.

[0045] The above is only a preferred specific embodiment of the present application, but the protection scope of the present application is not limited to this. Any person skilled in the art can make equivalent replacement or change according to the technical scheme and the inventive concept of the present application within the technical range disclosed by the present application, which should be covered within the protection scope of the present application.​

Claims

1. A general-purpose jig for durability test of a TaC-coated member, comprising two ring-shaped horizontal supports arranged in parallel and at least three vertical supports located between and connecting the two horizontal supports to form a whole of the jig, characterized in that, The vertical support includes a rod part for connecting two horizontal supports and a support part for supporting a workpiece, the support part is mounted on the rod part, the rod part is arranged around the horizontal support, the support part extends towards the center of the horizontal support, multiple support parts form multiple-point support for the workpiece, the rod part includes multiple connecting columns, multiple connecting columns are coaxially inserted to form the rod part, the support part includes a support rod for supporting the workpiece and a connecting rod for connecting the rod part, the connecting rod is inserted between the connecting columns to form the connection between the support part and the rod part.

2. The universal tooling fixture of claim 1, wherein, The rod part includes a first connecting column and a second connecting column, the first connecting column is used to connect the horizontal support, and the second connecting column is used to connect the first connecting column and form the connection between the second connecting columns.

3. The universal tooling fixture of claim 2, wherein, The connecting rod is inserted between two second connecting columns to form the connection between the support part and the rod part.

4. The universal tooling fixture of claim 3, wherein, The horizontal support is provided with a first insertion hole, the first connecting column includes a first column body, both ends of the first column body are respectively provided with a first insertion head, the second connecting column includes a second column body, one end of the second column body is provided with a second insertion head, and the other end of the second column body is provided with a second insertion hole, the inner diameters of the first insertion hole and the second insertion hole are the same, the outer diameters of the first insertion head and the second insertion head are the same, and the first insertion head and the second insertion head are matched with the first insertion hole and the second insertion hole respectively to form insertion.

5. The universal tooling fixture of claim 4, wherein, The connecting rod includes a third column body, one end of the third column body is provided with a third insertion head, and the other end of the third column body is provided with a third insertion hole, the inner diameters of the third insertion hole and the second insertion hole are the same, the outer diameters of the third insertion head and the second insertion head are the same, and the third insertion head and the second insertion head are matched with the third insertion hole and the second insertion hole respectively to form insertion.

6. The universal tooling fixture of claim 5, wherein, Ends of the first insertion head, the second insertion head and the third insertion head are provided with limiting blocks, hole walls of the first insertion hole, the second insertion hole and the third insertion hole are provided with mounting grooves accommodating the limiting blocks, bottoms of the first insertion hole, the second insertion hole and the third insertion hole have limiting grooves accommodating the limiting blocks, the limiting blocks enter the bottoms of the first insertion hole, the second insertion hole and the third insertion hole from the mounting grooves, and then enter the limiting grooves by rotating.

7. The universal tooling fixture of any of claims 1-6, wherein, A second end of the support rod is provided with at least one protrusion, and the protrusion is used for positioning the workpiece.

8. The universal tooling fixture of claim 7, wherein, The rod part of one vertical support is provided with at least one support part.

9. The universal tooling fixture of claim 8, wherein, The rod part of the vertical support is provided with multiple support parts, and the multiple support parts are arranged at intervals in the axial direction of the rod part, and the intervals form a placement space for the workpiece.

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