Continuously adjustable optical filter switching system
By cutting a continuously adjustable filter into multiple segments and using a rotary motor to drive it, the problem of slow spectral band switching speed was solved, and rapid spectral band switching was achieved.
Patent Information
- Application Number
- CN202423238156.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-26
- Publication Date
- 2025-12-26
- Estimated Expiration
- 2034-12-26
AI Technical Summary
In the existing technology, the length of the continuously adjustable filter is relatively long and the linear motor operates at a relatively slow speed, resulting in a low spectral band switching speed, which cannot meet the requirements for rapid switching.
The continuously adjustable filter is cut into multiple filter segments, and a rotary motor drives the filter setting device to rotate to the target position, thereby achieving rapid switching of spectral bands.
It enables rapid adjustment of filter position, improves the switching speed of spectral bands, and meets the requirements of rapid switching.
Smart Images
Figure CN223728042U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the field of semiconductor quantity detection, especially a continuous adjustable filter switching system. BACKGROUND
[0002] In the field of semiconductor quantity detection, microscopic imaging technology can be used to detect the quantity of the object to be measured, wherein the object to be measured can be a wafer. In the process of quantity detection, different light source brightness and different spectral bands can be used to illuminate the object to be measured, that is, the light source brightness or the spectral band is adjusted to obtain a better quantity detection result.
[0003] Currently, the adjustment of the spectral band is realized by using a whole continuous adjustable filter and a linear motor. The position of the continuous adjustable filter is switched by using the linear motor, the light spot position of the light source incident on the filter is changed, and different spectral bands are obtained.
[0004] However, due to the long length of the continuous adjustable filter and the slow running speed of the linear motor, the speed of adjusting the position of the continuous adjustable filter by using the linear motor is slow, and finally the switching speed of the spectral band is low. SUMMARY
[0005] Therefore, the purpose of the present application is to provide a continuous adjustable filter switching system that can quickly adjust the position of the continuous adjustable filter and quickly switch the spectral band.
[0006] The present application provides a continuous adjustable filter switching system, which comprises a filter, a filter setting device, a rotary motor and a connecting device. A whole filter is cut into N filter segments, and N is a positive integer greater than 1.
[0007] The N filter segments are installed on the filter setting device, and the filter setting device and the rotary motor are connected by the connecting device.
[0008] The rotary motor is used to drive the filter setting device to rotate to the target position of the target segment filter corresponding to the target spectral band. The target segment filter is one of the N filter segments.
[0009] Optionally, N is 2.
[0010] Optionally, the N filter segments are installed on the filter setting device in an axisymmetric manner.
[0011] Optionally, the filter setting device has a rotation center position, and the filter setting device is connected to the rotary motor by the connecting device at the rotation center position.
[0012] Optionally, the time taken to rotate the filter setting device to the target position of the target segment filter corresponding to the target spectral waveband is controlled by adjusting the rotation speed of the rotating motor.
[0013] Optionally, the filter comprises a continuously adjustable long-pass filter and a continuously adjustable short-pass filter, the N segment filter segments comprise N1 segment long-pass filter segments and N2 segment short-pass filter segments; an entire continuously adjustable long-pass filter is cut to obtain N1 segment long-pass filter segments, and an entire continuously adjustable short-pass filter is cut to obtain N2 segment short-pass filter segments; the filter setting device comprises a long-pass filter setting device and a short-pass filter setting device, the rotating motor comprises a long-pass filter rotating motor and a short-pass filter rotating motor, and the connecting device comprises a long-pass filter connecting device and a short-pass filter connecting device.
[0014] The N1 segment long-pass filter segments are mounted on the long-pass filter setting device, and the long-pass filter setting device and the long-pass filter rotating motor are connected by a long-pass filter connecting device; the N2 segment short-pass filter segments are mounted on the short-pass filter setting device, and the short-pass filter setting device and the short-pass filter rotating motor are connected by a short-pass filter connecting device.
[0015] The long-pass filter rotating motor is used to drive the long-pass filter setting device to rotate to a first target position of a target segment long-pass filter corresponding to the target spectral waveband, and the short-pass filter rotating motor is used to drive the short-pass filter setting device to rotate to a second target position of a target segment short-pass filter corresponding to the target spectral waveband; the target segment long-pass filter is one of the N1 segment long-pass filter segments, and the target segment short-pass filter is one of the N2 segment short-pass filter segments.
[0016] Optionally, the system further comprises M glass pieces.
[0017] The M glass pieces are mounted on the filter setting device.
[0018] Optionally, the M glass pieces are used to space the N segment filter segments.
[0019] Optionally, the N is 2, and the M is 2.
[0020] Optionally, the M glass pieces are mounted on the filter setting device in axial symmetry.
[0021] The application provides a continuously adjustable filter switching system, which comprises a filter, a filter setting device, a rotating motor and a connecting device, an entire filter is cut into N filter segments, N is a positive integer greater than 1, that is, the continuously adjustable filter is cut into multiple filter segments, so that the length of the continuously adjustable filter is avoided to be too long to reduce the spectrum band switching speed. The N filter segments are installed on the filter setting device, the filter setting device and the rotating motor are connected through the connecting device, and the rotating motor is used to drive the filter setting device to rotate to a target position of a target filter segment corresponding to a target spectrum band, wherein the target filter segment is one of the N filter segments, that is, the rotating motor can be used to drive the filter setting device to quickly adjust the position of the filter, so as to quickly switch the spectrum band. BRIEF DESCRIPTION OF DRAWINGS
[0022] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the embodiment description will be briefly introduced. Obviously, the drawings in the following description are some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.
[0023] Figure 1 The structure schematic diagram of a continuously adjustable filter switching system provided by the embodiments of the present application is shown;
[0024] Figure 2 The structure schematic diagram of another continuously adjustable filter switching system provided by the embodiments of the present application is shown;
[0025] Figure 3 The schematic diagram of spectrum band switching provided by the embodiments of the present application is shown. DETAILED DESCRIPTION
[0026] In order to make the person skilled in the art better understand the present application, the technical solutions in the embodiments of the present application will be described clearly and completely in the following description with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, not all. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the present application.
[0027] In the following description, many specific details are set forth in order to provide a thorough understanding of the present application, but the present application can also be implemented in other ways different from those described herein, and those skilled in the art can make similar generalizations without departing from the connotation of the present application, therefore the present application is not limited to the specific embodiments disclosed below.
[0028] The application is described in detail in combination with the schematic diagram. In the detailed description of the embodiments of the application, the cross-sectional view of the device structure is locally enlarged without the general proportion for the convenience of illustration, and the schematic diagram is only an example which should not limit the scope of protection of the application herein. In addition, the three-dimensional spatial dimensions of length, width and depth should be included in the actual manufacture.
[0029] Currently, in the field of semiconductor metrology, microscopic imaging technology can be used for metrology of a to-be-measured object, which can be a wafer. In the metrology process, different light source brightness and different spectral bands can be used to illuminate the to-be-measured object, that is, the light source brightness or the spectral band is adjusted, so as to obtain a better metrology result. Especially for high-end wafer manufacturing nodes, different spectral bands and different light source brightnesses are often required to illuminate different samples, so as to obtain a better metrology result. At this time, a coupling module that can switch the spectral band and the light source brightness of the light source is crucial.
[0030] Currently, the adjustment of the spectral band is realized by using a whole continuously adjustable filter and a linear motor. By using the linear motor to switch the position of the continuously adjustable filter, the position of the light spot of the light source incident on the filter is changed, so as to obtain different spectral bands.
[0031] However, due to the relatively long length of the continuously adjustable filter and the relatively slow running speed of the high-precision linear motor, the speed of adjusting the position of the continuously adjustable filter by using the linear motor is relatively slow, which finally leads to a relatively low switching speed of the spectral band, and cannot meet the requirement of quickly switching the continuously adjustable filter so as to quickly switch the spectral band.
[0032] Based on this, the embodiments of the application provide a continuously adjustable filter switching system. The system comprises a filter, a filter setting device, a rotary motor and a connecting device. A whole filter is cut into N filter segments, N being a positive integer greater than 1, that is, the continuously adjustable filter is cut into multiple filter segments, so as to avoid the reduction of the switching speed of the spectral band caused by the relatively long length of the continuously adjustable filter. The N filter segments are installed on the filter setting device, the filter setting device and the rotary motor are connected by the connecting device, and the rotary motor is used to drive the filter setting device to rotate to a target position of a target segment filter corresponding to a target spectral band, wherein the target segment filter is one of the N filter segments, that is, the rotary motor can be used to quickly adjust the position of the filter by driving the filter setting device, so as to quickly switch the spectral band.
[0033] In order to better understand the technical solutions and technical effects of the application, specific embodiments will be described in detail in combination with the drawings.
[0034] Referring toFigure 1 The figure is a schematic diagram of the structure of a continuously adjustable filter switching system provided in an embodiment of this application.
[0035] The continuously adjustable filter switching system 100 provided in this application embodiment includes: a filter 110, a filter setting device 120, a rotary motor 130, and a connecting device 140.
[0036] In the embodiments of this application, considering that the length of a whole filter 110 is relatively long, the continuously adjustable filter 110 can be cut into N filter segments, where N is a positive integer greater than 1. That is, the continuously adjustable filter 110 is cut into multiple filter segments, thereby avoiding the reduction in spectral band switching speed caused by the long length of the continuously adjustable filter 110.
[0037] N filter segments are installed in the filter setting device 120, that is, the filter setting device 120 is used to install N filter segments, so as to facilitate the quick switching of the position of the filter 110 later.
[0038] The filter setting device 120 and the rotary motor 130 are connected by a connecting device 140, so that the rotary motor 130 drives the filter setting device 120 to rotate through the connecting device 140.
[0039] The rotary motor 130 is used to drive the filter setting device 120 to rotate to the target position of the target segment filter corresponding to the target spectral band. The target segment filter is one of the N filter segments. That is, the rotary motor 130 can be used to drive the filter setting device 120 to quickly adjust the position of the filter 110, thereby realizing the rapid switching of spectral bands.
[0040] In other words, by cutting the continuously adjustable filter 110 into multiple filter segments and installing them in the filter setting device 120, and then using the rotary motor 140 to drive the multiple filter segments to rotate to switch the spectral band of the light source after passing through the filter 110, a very fast spectral band switching speed can be obtained because the rotary motor 140 can rotate at a very high speed.
[0041] As one possible implementation, N is 2, see reference. Figure 2 As shown, this means that a single continuous adjustable filter 110 is cut into two filter segments. By cutting a single continuous adjustable filter 110 into two filter segments, a filter 110 that is compatible with the filter setting device 120 and the rotary motor 140 can be obtained at a lower cutting cost. Compared to a single filter 110, the two filter segments have a smaller rotation radius, which allows for faster rotation using the rotary motor 140.
[0042] In the embodiments of the present application, the N segments of filter segments can be installed in axial symmetry on the filter setting device 120. By installing the multiple segments of filter segments in axial symmetry on the filter setting device 120, the filter setting device 120 can be balanced to set the multiple segments of filter segments, and the subsequent rotation motor 140 can drive the filter setting device 120 to realize balanced and stable rotation.
[0043] As an example, when N is 2, the two segments of filter segments can be installed in axial symmetry on the filter setting device 120, as shown in FIG. 2. Figure 2
[0044] In the embodiments of the present application, the time taken by the rotation motor 130 to rotate to the target position of the target segment of filter corresponding to the target spectral band can be controlled by adjusting the rotation speed of the rotation motor 130. That is, the switching time of the spectral band can be adjusted by adjusting the rotation speed of the rotation motor 130, so as to realize accurate control of the switching of the spectral band.
[0045] In the embodiments of the present application, the filter setting device 120 has a rotation center position, and the filter setting device 120 is connected with the rotation motor 130 at the rotation center position by the connecting device 140. By connecting the filter setting device 120 with the rotation motor 130 at the rotation center position of the filter setting device 120 by the connecting device 140, the rotation motor 140 can drive the filter setting device 120 to realize balanced and stable rotation.
[0046] In the embodiments of the present application, the continuous adjustable filter switching system further comprises M glass pieces 150, M being a positive integer greater than 0, and the M glass pieces 150 are installed on the filter setting device 120, as shown in FIG. 3. Figure 3 By installing the glass pieces 150 on the filter setting device 120, when the filter 110 is not needed for filtering, the rotation motor 130 can be controlled to drive the filter setting device 120 to rotate to the position of the glass piece 150.
[0047] As a possible implementation, the M glass pieces 150 can be spaced apart from the N segments of filter segments, that is, the N segments of filter segments and the M glass pieces 150 are arranged in a spaced apart manner, so as to realize switching between filtering and non-filtering.
[0048] The M glass pieces 150 are installed in axial symmetry on the filter setting device 120, that is, by installing the M glass pieces 150 in axial symmetry on the filter setting device 120, the filter setting device 120 can be balanced to set the M glass pieces 150, and the subsequent rotation motor 140 can drive the filter setting device 120 to realize balanced and stable rotation.
[0049] When N is 2, M can also be 2, that is, when 2 filter segments are installed in the filter setting device 120, 2 glass pieces 150 can also be installed.
[0050] As an example, referring to Figure 2 As shown, 2 glass pieces 150 are spaced 2 filter segments, and 2 glass pieces 150 and 2 filter segments are respectively installed in the filter setting device 120 in axial symmetry.
[0051] In the embodiments of the present application, when switching the spectral band by using the filter 110, it is usually cooperated by using a continuously adjustable long-pass filter and a short-pass filter, therefore, the filter 110 includes a continuously adjustable long-pass filter 111 and a continuously adjustable short-pass filter 112. The N filter segments include N1 long-pass filter segments and N2 short-pass filter segments, that is, N=N1+N2, N1 and N2 are positive integers, that is, an entire continuously adjustable long-pass filter 111 is cut to obtain N1 long-pass filter segments, and an entire continuously adjustable short-pass filter 112 is cut to obtain N2 short-pass filter segments.
[0052] The filter setting device 120 includes a long-pass filter setting device and a short-pass filter setting device, the rotating motor 130 includes a long-pass filter rotating motor and a short-pass filter rotating motor, and the connecting device 140 includes a long-pass filter connecting device and a short-pass filter connecting device; then the N1 long-pass filter segments are installed in the long-pass filter setting device, the long-pass filter setting device and the long-pass filter rotating motor are connected by using the long-pass filter connecting device; the N2 short-pass filter segments are installed in the short-pass filter setting device, and the short-pass filter setting device and the short-pass filter rotating motor are connected by using the short-pass filter connecting device.
[0053] The long-pass filter rotating motor is used to drive the long-pass filter setting device to rotate to a first target position of a target long-pass filter segment corresponding to a target spectral band, and the short-pass filter rotating motor is used to drive the short-pass filter setting device to rotate to a second target position of a target short-pass filter segment corresponding to the target spectral band, the target long-pass filter segment is one of the N1 long-pass filter segments, and the target short-pass filter segment is one of the N2 short-pass filter segments.
[0054] That is, the long-pass filter segments and the short-pass filter segments are respectively installed in the long-pass filter setting device and the short-pass filter setting device, and are respectively driven to rotate by using the long-pass filter rotating motor and the short-pass filter rotating motor, so as to realize the switching of the spectral band by using the long-pass filter segments and the short-pass filter segments.
[0055] Referring to Figure 3As shown, the wide spectrum light emitted by the laser driven light source (LDLS) 210 is coupled into the light source coupling module 230 through the optical fiber 220, and is incident on the continuously adjustable long-pass filter 111 and the continuously adjustable short-pass filter 112 to switch the spectral band, and then the filtered light continues to be coupled into the light source coupling module 230 through the continuously adjustable long-pass filter 111 and the continuously adjustable short-pass filter 112, and finally is transmitted out through the optical fiber 220.
[0056] It can be seen that the continuously adjustable filter switching system provided by the embodiment of the application cuts the filter into multiple filter segments, and installs the filter segments on the filter setting device, and drives the filter setting device to rotate rapidly by the rotary motor, so as to change the light spot position incident on the filter, and rapidly obtain different spectral bands. In addition, multiple glass pieces are arranged on the filter setting device, and when the continuously adjustable filter is not needed to be used for filtering, the glass pieces can be switched to.
[0057] The system embodiments described above are merely illustrative, wherein the units and modules described as separate components can or can not be physically separated. In addition, part or all of the units and modules can be selected according to actual needs to achieve the purpose of the embodiment scheme. Those skilled in the art can understand and implement without creative labor.
[0058] The above is only the preferred embodiment of the application, although the application has been disclosed as above with the preferred embodiment, however, it is not used to limit the application. Any skilled person in the art can make many possible changes and modifications to the technical scheme of the application, or modify it into equivalent embodiments with equivalent changes without departing from the scope of the technical scheme of the application. Therefore, any simple modification, equivalent change and modification made to the above embodiment according to the technical essence of the application, without departing from the content of the technical scheme of the application, still belongs to the protection scope of the technical scheme of the application.
Claims
1. A continuously tunable filter switching system, characterized by, The system comprises a filter, a filter setting device, a rotating motor and a connecting device, an entire filter is cut to obtain N filter segments, N is a positive integer greater than 1; The N filter segments are installed on the filter setting device, the filter setting device and the rotating motor are connected by the connecting device; The rotating motor is used to drive the filter setting device to rotate to the target position of the target filter segment corresponding to the target spectral wave band, the target filter segment is one of the N filter segments.
2. The system of claim 1, wherein, N is 2.
3. The system of claim 1, wherein, The N filter segments are installed on the filter setting device in axial symmetry.
4. The system of claim 1, wherein, The filter setting device has a rotation center position, and the filter setting device is connected to the rotating motor at the rotation center position by the connecting device.
5. The system of claim 1, wherein, The time spent in rotating to the target position of the target filter segment corresponding to the target spectral wave band is controlled by adjusting the rotating speed of the rotating motor.
6. The system of claim 1, wherein, The filter comprises a continuously adjustable long-pass filter and a continuously adjustable short-pass filter, the N filter segments comprise N1 long-pass filter segments and N2 short-pass filter segments; an entire continuously adjustable long-pass filter is cut to obtain the N1 long-pass filter segments, and an entire continuously adjustable short-pass filter is cut to obtain the N2 short-pass filter segments, the filter setting device comprises a long-pass filter setting device and a short-pass filter setting device, the rotating motor comprises a long-pass filter rotating motor and a short-pass filter rotating motor, and the connecting device comprises a long-pass filter connecting device and a short-pass filter connecting device; The N1 long-pass filter segments are installed on the long-pass filter setting device, the long-pass filter setting device and the long-pass filter rotating motor are connected by the long-pass filter connecting device, and the N2 short-pass filter segments are installed on the short-pass filter setting device, the short-pass filter setting device and the short-pass filter rotating motor are connected by the short-pass filter connecting device; The long-pass filter rotating motor is used to drive the long-pass filter setting device to rotate to the first target position of the target long-pass filter segment corresponding to the target spectral wave band, the short-pass filter rotating motor is used to drive the short-pass filter setting device to rotate to the second target position of the target short-pass filter segment corresponding to the target spectral wave band, the target long-pass filter segment is one of the N1 long-pass filter segments, and the target short-pass filter segment is one of the N2 short-pass filter segments.
7. The system of claim 1, wherein, The system further comprises M glass pieces; The M glass pieces are installed on the filter setting device.
8. The system of claim 7, wherein, The M glass pieces are used to space the N filter segments.
9. The system of claim 8, wherein, N is 2, and M is 2.
10. The system of claim 8, wherein, The M glass pieces are installed on the filter setting device in axial symmetry.