Automatic control device for vacuum cavity door plate

Abstract

The utility model discloses an automatic control device for a vacuum chamber door plate, which belongs to the technical field of electrical control and comprises a circuit breaker (QF) used for supplying power to a system; a frequency converter (VFD) connected with the circuit breaker; a variable frequency motor (M1) driven by a frequency converter; the speed reducer is connected with the output end of the variable frequency motor and used for controlling the movement speed of the executing mechanism; the PLC is respectively in signal connection with the frequency converter, the photoelectric switches (SQ1 and SQ2) and the three-hole button box (SB); the photoelectric switches (SQ1 and SQ2) are arranged at the starting point and the final point of the travel of the door plate and are used for detecting the state of the door plate and feeding back a signal to the PLC; the three-hole button box (SB) comprises a door opening button (SB1), a door closing button (SB2) and an emergency stop button (SB3) and is used for sending an operation instruction to the PLC; pLC staged speed regulation control is combined with photoelectric switch feedback, full automation of opening and closing of the door plate is achieved, existing defects are effectively overcome, and high efficiency, safety and economical efficiency are achieved.

Description

TECHNICAL FIELD

[0001] The utility model relates to electrical control technical field, especially suitable for the chamber door plate automation control of vacuum coating machine and other equipment. BACKGROUND

[0002] In the semiconductor and photoelectric industry, the chamber door plate of vacuum coating machine needs to be frequently opened and closed to realize continuous production. However, the traditional door plate control relies on manual or semi-automatic operation, which has the following defects:

[0003] 1. Low efficiency: manual unlocking of hydraulic device and traction rod is required, and the operation process is complicated, which is difficult to meet the demand of efficient production;

[0004] 2. Safety hazard: door plate inertia out of control can easily cause equipment damage or personal injury, and manual operation can easily cause muscle strain;

[0005] 3. Lack of precision: manual control is difficult to accurately match the door plate stroke, which can easily affect the service life of the equipment due to collision.

[0006] In the prior art, although there are some automatic solutions, there are problems of high cost, poor compatibility or single control logic, therefore, the present scheme provides a kind of vacuum cavity door plate automatic control device. CONTENT OF THE UTILITY MODEL

[0007] 1. Technical problem to be solved:

[0008] In view of the problems existing in the prior art, the purpose of the utility model is to provide a kind of vacuum cavity door plate automatic control device, which realizes the full automation of door plate opening and closing by PLC stage speed control combined with photoelectric switch feedback, effectively solves the existing defects, and has high efficiency, safety and economy.

[0009] 2. Technical scheme:

[0010] To solve the above problems, the utility model adopts the following technical scheme.

[0011] A kind of vacuum cavity door plate automatic control device, comprising:

[0012] A circuit breaker (QF) for powering the system;

[0013] A frequency converter (VFD) connected to the circuit breaker;

[0014] A variable frequency motor (M1) driven by the frequency converter;

[0015] A speed reducer connected to the output end of the variable frequency motor for controlling the movement speed of the actuator;

[0016] PLC controller, respectively, with the frequency converter, photoelectric switch (SQ1, SQ2) and 3 hole button box (SB) signal connection;

[0017] Photoelectric switch (SQ1, SQ2), installed at the start and end of the door plate travel position, for detecting the door plate state and feedback signal to PLC controller;

[0018] 3 hole button box (SB), including open door button (SB1), close door button (SB2) and emergency stop button (SB3), for sending operation instructions to PLC controller;

[0019] The PLC controller according to the button command and photoelectric switch feedback signal, stage output frequency control signal to frequency converter, drive variable frequency motor and speed reducer to realize the automatic opening and closing of the door plate.

[0020] Further improvement lies in that the program of the PLC controller includes three stages:

[0021] The first stage: the initial stage of door plate start or close, low frequency drive motor low speed operation;

[0022] The second stage: after a predetermined time, increase the frequency of the frequency converter to accelerate the door plate movement;

[0023] The third stage: before the door plate approaches the end of the travel, reduce the frequency to the lowest running frequency to prevent inertial collision.

[0024] Further improvement lies in that when the emergency stop button (SB3) is triggered, the PLC controller immediately cuts off the frequency converter output signal and stops the motor running.

[0025] Further improvement lies in that the photoelectric switch (SQ1, SQ2) uses infrared or laser sensor to ensure the accuracy of the door plate position detection.

[0026] 3. Beneficial effects:

[0027] Compared with the prior art, the technical scheme provided by the utility model has the following beneficial effects:

[0028] (1) High efficiency automation: replace traditional manual operation, one key control door plate opening and closing through button instruction, greatly shorten the operation time, meet the continuous high efficiency production demand of vacuum coating equipment;

[0029] (2) Safety improvement: photoelectric switch real-time monitoring door plate position, combined with emergency stop button and stage speed regulation logic, effectively avoid the risk of inertial collision, equipment damage and personnel injury;

[0030] (3) Stable and reliable operation: the door opening and closing process is divided into three stages of low-speed start, acceleration and low-speed stop, reducing mechanical impact and prolonging equipment service life;

[0031] (4) Strong intelligent compatibility: modular design (PLC, frequency converter, standard button box) facilitates system maintenance and adaptation to different types of equipment, reducing upgrade cost;

[0032] (5) Convenient operation: intuitive control through human-machine interface or button box, reducing manual intervention, reducing operation complexity and training cost.

[0033] It should be noted that the structures not introduced in the utility model are the same as the prior art or can be realized by using the prior art since they do not involve the design points and improvement direction of the utility model, and details are not described here. BRIEF DESCRIPTION OF DRAWINGS

[0034] Fig. 1 is the electrical schematic diagram of the utility model;

[0035] Fig. 2 is the mechanical structure schematic diagram of the device. DETAILED DESCRIPTION

[0036] In order to facilitate the understanding of the utility model, the utility model will be described more fully below with reference to the relevant drawings, and the drawings show several embodiments of the utility model, but the utility model can be realized in many different forms and is not limited to the embodiments described herein, on the contrary, the purpose of providing these embodiments is to make the disclosure of the utility model more thorough and comprehensive.

[0037] Please refer to Figs. 1-2 , a vacuum cavity door plate automatic control device, comprising:

[0038] A circuit breaker (QF) is used to supply power to the system;

[0039] A frequency converter (VFD) is connected with the circuit breaker;

[0040] A variable frequency motor (M1) is driven by the frequency converter;

[0041] A speed reducer is connected with the output end of the variable frequency motor and is used to control the movement speed of the actuator;

[0042] A PLC controller is respectively connected with the frequency converter, photoelectric switch (SQ1, SQ2) and 3-hole button box (SB) signal;

[0043] Photoelectric switches (SQ1, SQ2) are installed at the starting point and the ending point of the door plate travel, and are used to detect the door plate state and feed back signals to the PLC controller;

[0044] 3-hole button box (SB) including open door button (SB1), close door button (SB2) and emergency stop button (SB3) for sending operation instructions to PLC controller;

[0045] The PLC controller outputs frequency control signals to the frequency converter in stages according to the button instructions and the photoelectric switch feedback signals, drives the variable frequency motor and the speed reducer to realize the automatic opening and closing of the door plate.

[0046] More specifically, the program of the PLC controller includes three stages:

[0047] First stage: at the initial stage of door plate starting or closing, drive the motor at low speed with low frequency;

[0048] Second stage: after a preset time, increase the frequency of the frequency converter to speed up the movement of the door plate;

[0049] Third stage: before the door plate approaches the end of the stroke, reduce the frequency to the lowest running frequency to prevent inertial collision.

[0050] More specifically, when the emergency stop button (SB3) is triggered, the PLC controller immediately cuts off the output signal of the frequency converter to stop the motor.

[0051] More specifically, the photoelectric switch (SQ1, SQ2) uses infrared or laser sensors to ensure the accuracy of door plate position detection.

[0052] In combination with the accompanying drawings Fig. 1 and the accompanying drawings Fig. 2 , the specific implementation of the device is as follows:

[0053] 1. Electrical connection:

[0054] In the main circuit, the circuit breaker (QF) is connected to the frequency converter (VFD) and the variable frequency motor (M1) in sequence through the cable;

[0055] In the control circuit, the PLC controller receives the open door (SB1), close door (SB2) and emergency stop (SB3) signals of the 3-hole button box (SB), as well as the feedback signals of the photoelectric switch (SQ1, SQ2), and sends control instructions to the frequency converter (VFD) through the output module.

[0056] 2. Operation process:

[0057] The user sends the open door or close door instruction through the button box (SB), and the PLC controller starts the variable frequency motor (M1) after receiving the instruction;

[0058] At the initial stage of door plate movement, the PLC outputs low frequency signal (low speed 1 stage) to avoid starting impact;

[0059] After a preset time, the PLC switches to a medium frequency signal (acceleration stage), increasing the door panel moving speed;

[0060] When the photoelectric switch (SQ1 or SQ2) detects that the door panel approaches the end point, the PLC switches to the lowest frequency (low speed 2 stage), ensuring that the door panel stops smoothly;

[0061] When the emergency stop button (SB3) is triggered, the PLC immediately disconnects the frequency converter output, and the motor stops running.

[0062] 3. Safety protection:

[0063] The photoelectric switch monitors the door panel position in real time, and if it does not reach the end point within a predetermined time, the PLC automatically triggers the emergency stop program.

[0064] If an overload signal is detected during motor operation, the frequency converter automatically cuts off the power supply and alarms.

[0065] The above-described embodiments only express certain embodiments of the present application, and the description is more specific and detailed, but it should not be interpreted as limiting the scope of the present application. It should be noted that for ordinary skilled persons in the art, without departing from the concept of the present application, a number of modifications and improvements can be made, which are within the scope of protection of the present application. Therefore, the scope of protection of the present application should be subject to the appended claims.

Claims

1. A vacuum chamber door plate automatic control device, characterized by, Comprising: a circuit breaker (QF) for powering the system; a frequency converter (VFD) connected to the circuit breaker; a frequency motor (M1) driven by the frequency converter; a speed reducer connected to the output of the frequency motor for controlling the movement speed of the actuator; a PLC controller connected to the frequency converter, photoelectric switches (SQ1, SQ2) and 3-hole button box (SB) respectively; photoelectric switches (SQ1, SQ2) installed at the starting and ending points of the door panel stroke for detecting the door panel state and feeding back signals to the PLC controller; a 3-hole button box (SB) including an open door button (SB1), a close door button (SB2) and an emergency stop button (SB3) for sending operation instructions to the PLC controller; The PLC controller outputs frequency control signals to the frequency converter in stages according to the button instructions and photoelectric switch feedback signals, drives the frequency motor and speed reducer to realize the automatic opening and closing of the door panel.

2. The automatic control device for a vacuum chamber door plate according to claim 1, characterized in that, The program of the PLC controller includes three stages: First stage: In the initial stage of door panel starting or closing, drive the motor at low speed with low frequency; Second stage: After a preset time, increase the frequency of the frequency converter to speed up the movement of the door panel; Third stage: Before the door panel approaches the end of the stroke, reduce the frequency to the lowest running frequency to prevent inertial collision.

3. The automatic control device for a vacuum chamber door plate according to claim 1, characterized in that: When the emergency stop button (SB3) is triggered, the PLC controller immediately cuts off the frequency converter output signal and stops the motor running.

4. The automatic control device for a vacuum chamber door plate according to claim 1, characterized in that: The photoelectric switches (SQ1, SQ2) use infrared or laser sensors to ensure the accuracy of door panel position detection.

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