Wafer tray
By designing a wafer tray with positioning blocks and push blocks, the problem of wafer displacement and detachment during handling was solved, achieving stable wafer positioning and safe transfer, and ensuring the normal operation of testing.
Patent Information
- Application Number
- CN202422992055.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-05
- Publication Date
- 2025-12-26
- Estimated Expiration
- 2034-12-05
AI Technical Summary
Existing wafer trays cannot effectively secure wafers during handling, leading to displacement, detachment, and breakage, which affects the normal progress of testing.
A wafer tray was designed, comprising a matrix of placement slots and positioning blocks. The positioning blocks are driven to move within the cavity by push blocks and automatically reset under the action of springs, locking onto the wafer for fixation. The positioning stability is improved by combining rubber pads and guide slots.
This achieves stable wafer positioning, preventing displacement and detachment, improving the convenience and safety of tray use, and ensuring the smooth progress of testing.
Smart Images
Figure CN223728738U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of wafer tray technology, and in particular to a wafer tray. Background Technology
[0002] A wafer is a silicon wafer used to fabricate silicon semiconductor circuits, and its raw material is silicon. High-purity polycrystalline silicon is dissolved, doped with silicon crystal seed crystals, and then slowly pulled out to form a cylindrical single-crystal silicon wafer. After grinding, polishing, and slicing, the silicon crystal rod forms a silicon wafer. Before testing the wafer, workers typically use tweezers to pick up the edge of the wafer, place it on a circular tray, move it to the required location, and then transfer it into the cavity of the SEM equipment for testing. In existing technologies, when wafers are moved using trays, the trays themselves do not provide a secure hold for the wafers. During the transfer process, the wafers are prone to displacement, detachment, and breakage, which can affect the normal operation of wafer testing. Therefore, we have proposed a wafer tray. Utility Model Content
[0003] To address the aforementioned problems, this invention provides a wafer tray. This invention solves the problem in the prior art where, when wafers are transported via trays, the trays themselves do not provide a secure hold, leading to issues such as wafer displacement, detachment, and breakage during transfer, which in turn affects the normal operation of wafer testing.
[0004] This utility model discloses a wafer tray, including a tray body, which is provided with a plurality of matrix-arranged placement slots. The tray body has cavities on both sides of the placement slots. A positioning block is provided in each cavity. The positioning block extends through the side wall of the cavity into the placement slot on the side closer to the placement slot. A through slot is provided in the middle of the upper part of the cavity. The positioning block is fixedly connected to a push block at one end of the cavity. The push block extends through the through slot to the upper part of the tray body. Both sides of the positioning block are fixedly connected to the inner wall of the cavity by springs. A slot is provided at the lower end of the positioning block on the side away from the springs.
[0005] In the above scheme, sliders are provided on both sides below the positioning block, and guide grooves matching the sliders are provided on the tray body.
[0006] In the above scheme, the positioning block is provided with a rubber pad below the slot.
[0007] In the above scheme, the push block is provided with an anti-slip groove on the side near the placement groove.
[0008] In the above scheme, a pad is provided in the middle of the placement groove.
[0009] The gusset plate is in a wave shape.
[0010] The tray body is provided with grooves on both sides of the placing groove.
[0011] The wafer tray has the advantages and beneficial effects that the push block drives the positioning block to move horizontally, the push block drives the positioning block to enter the cavity, after the wafer is placed in the placing groove, the positioning block is automatically reset under the action of the spring force, the clamping groove at the lower end of the positioning block is clamped on the wafer, and the wafer can be stably positioned in the placing groove. The wafer tray has the simple structure, convenient operation, good wafer positioning stability, can effectively protect the wafer, effectively avoids the wafer displacement and falling phenomenon, and improves the convenience of the tray use. BRIEF DESCRIPTION OF DRAWINGS
[0012] With reference to the accompanying drawings, the technical solutions in the embodiments of the present application will be described clearly and completely. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all the other embodiments obtained by those skilled in the art without creative work fall within the protection scope of the present application.
[0013] Fig. 1 The present application is a structural schematic view;
[0014] Fig. 2 The present application is a sectional view;
[0015] Fig. 3 The present application is a structural schematic view of part A.
[0016] In the figure, 1 is a tray body, 2 is a placing groove, 3 is a cavity, 4 is a positioning block
[0017] 5 is a through groove, 6 is a push block, 7 is a spring, and 8 is a clamping groove
[0018] 9 is a sliding block, 10 is a guide groove, 11 is a rubber pad, and 12 is an anti-skid groove
[0019] 13 is a gusset plate, and 14 is a groove. DETAILED DESCRIPTION
[0020] The specific embodiments of the present application will be further described in combination with the accompanying drawings and embodiments. The following embodiments are only used to more clearly illustrate the technical solutions of the present application, and cannot limit the protection scope of the present application.
[0021] As Figs. 1-3The utility model discloses a wafer tray, including tray body 1, still be equipped with a plurality of matrix arrangement's placing groove 2 on tray body 1, and the wafer can be placed in the placing groove 2 inside, the cavity 3 is set up on both sides of placing groove 2 of tray body 1, be equipped with the locating block 4 in the cavity 3, and the locating block 4 can move in horizontal direction inside the cavity 3, the locating block 4 is close to the side extension of cavity 3 side wall and reaches the placing groove 2 inside, the through slot 5 is set up in the upper middle part of cavity 3, and the locating block 4 is fixedly connected with the push block 6 on one end top in the cavity 3, when pushing the push block 6, the push block 6 can drive the locating block 4 to move in horizontal direction, the push block 6 is extended to the upper of tray body 1 through the through slot 5 top, the locating block 4 both sides are fixedly connected with the inner wall of cavity 3 through the spring 7, the clamping groove 8 is set up on the lower end of the locating block 4 on the side away from the spring 7, when positioning the round crystal, push the push block 6, and the push block 6 drives the locating block 4 to move in horizontal direction, makes the push block 6 drive the locating block 4 to enter the cavity 3 inside, after the round crystal is placed in the placing groove 2 inside, under the action of spring 7 elasticity, the locating block 4 resets automatically, and the clamping groove 8 on the lower end of the locating block 4 is connected on the top of the round crystal, to reach the purpose of positioning the round crystal.
[0022] The locating block 4 is provided with a sliding block 9 below both sides, a guide groove 10 matched with the sliding block 9 is formed in the tray body 1, and the sliding block 9 can slide in the guide groove 10; the guide groove 10 can guide and limit the sliding block 9; through the cooperation between the sliding block 9 and the guide groove 10, the movement stability of the locating block 4 is effectively improved.
[0023] The locating block 4 is provided with a rubber pad 11 below the clamping groove 8, the rubber pad 11 can protect the contact surface between the locating block 4 and the round crystal, and the phenomenon that the round crystal is damaged by the locating block 4 is avoided.
[0024] The push block 6 is provided with an anti-skid groove 12 close to one side of the placing groove 2, and the anti-skid groove 12 effectively improves the friction between the finger and the push block 6, so that the push block 6 is more convenient to push.
[0025] A pad 13 is arranged in the middle of the placing groove 2, and the pad 13 can support the lower side of the round crystal.
[0026] The cross section of the pad 13 is wave-shaped.
[0027] Grooves 14 are formed in both sides of the placing groove 2 of the tray body 1, and the grooves 14 make it more convenient to take and place the round crystal.
[0028] Specifically, in the utility model, when the round crystal is placed, the push block 6 is pushed, the push block 6 drives the positioning block 4 to move horizontally, the push block 6 drives the positioning block 4 to enter the cavity 3, after the round crystal is placed in the placing groove 2, under the action of the spring 7, the positioning block 4 is automatically reset, the clamping groove 8 at the lower end of the positioning block 4 is clamped on the round crystal, thereby the positioning purpose of the round crystal is achieved, the guide slot 10 can guide and limit the sliding block 9, through the cooperation between the sliding block 9 and the guide slot 10, the moving stability of the positioning block 4 is effectively improved.
[0029] The above merely describes the preferred embodiments of the utility model and is not intended to limit the utility model, and any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.
Claims
1. A wafer tray comprising a tray body (1), characterized in that The tray body (1) is further provided with a plurality of matrix arranged placing grooves (2), the tray body (1) is provided with a cavity (3) on both sides of the placing groove (2), the cavity (3) is provided with a positioning block (4), the positioning block (4) is close to the side of the placing groove (2) and extends to the inside of the placing groove (2) through the side wall of the cavity (3), the cavity (3) is provided with a through groove (5) in the upper middle part, one end of the positioning block (4) in the cavity (3) is fixedly connected with a push block (6), the push block (6) extends to the upper side of the tray body (1) through the through groove (5), the positioning block (4) is fixedly connected with the inner wall of the cavity (3) through a spring (7) on both sides, and the positioning block (4) is provided with a clamping groove (8) on the lower end away from the spring (7).
2. The wafer tray of claim 1, wherein, The positioning block (4) is provided with a sliding block (9) on both sides below the positioning block (4), and the tray body (1) is provided with a guide groove (10) matched with the sliding block (9).
3. The wafer tray of claim 1, wherein, The positioning block (4) is provided with a rubber pad (11) below the clamping groove (8).
4. The wafer tray of claim 1, wherein, The push block (6) is provided with an anti-skid groove (12) on the side close to the placing groove (2).
5. The wafer tray of claim 1, wherein, The placing groove (2) is provided with a pad (13) in the middle.
6. The wafer tray of claim 5, wherein, The cross section of the pad (13) is wave-shaped.
7. The wafer tray of claim 1, wherein, The tray body (1) is provided with a groove (14) on both sides of the placing groove (2).