Ultrasonic photoresist removing device for mask plate

Abstract

The utility model discloses an ultrasonic degumming device for a mask plate, which comprises a mounting frame, and an ultrasonic cleaning machine for ultrasonically cleaning the mask plate is mounted at the top end of the mounting frame. A solidification assembly used for receiving liquid discharged by the ultrasonic cleaning machine and solidifying colloid in the liquid is arranged under the ultrasonic cleaning machine. A liquid discharging end at the bottom of the ultrasonic cleaning machine is provided with a flow dividing assembly for dividing the liquid discharged by the ultrasonic cleaning machine and stirring the liquid in the solidification assembly; and two groups of filtering assemblies for receiving the liquid discharged by the solidification assembly and filtering and heating the liquid are arranged below the solidification assembly. The mask plate cleaning and photoresist removing device can effectively remove residual colloids in cleaning liquid in the cleaning process of the mask plate in the ultrasonic cleaning machine, so that the cleaning liquid is recycled, the cost of cleaning and photoresist removing of the mask plate is reduced, and the effect of cleaning and photoresist removing of the mask plate is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to mask production equipment technical field, concretely is a kind of mask ultrasonic degumming device. BACKGROUND

[0002] Mask is made of various functional patterns on film, plastic or glass matrix material and accurately positioned, so as to be used for photoresist coating selective exposure structure, mask is widely used, in the field involving photolithography process needs to use mask, mask is removed from membrane process in manufacturing flow, both remove photoresist on the surface of mask, ultrasonic cleaning equipment is needed to remove photoresist on the surface of mask at this time.

[0003] After searching, patent announcement No. CN210546710U discloses an ultrasonic degumming machine for steel cleaning, which comprises a machine body (1), an ultrasonic degumming device (2), a conveying device (4) and a heating lamp (7). The ultrasonic degumming device (2) is fixed at the bottom of the machine body (1), the heating lamp (7) is fixed at the middle of the machine body (1) and above the ultrasonic degumming device (2), and the conveying device (4) is fixed at the top end of the machine body (1) and above the heating lamp (7). The ultrasonic degumming machine can efficiently and quickly clean the impurities on the surface of the steel as much as possible, reduce the amount of manpower and resources, and most importantly, it can form a safer operating environment.

[0004] The existing mask ultrasonic degumming device is used in practice, when the mask is degummed in the ultrasonic cleaning machine, the photoresist on the mask will melt in the cleaning liquid. When the photoresist melted in the cleaning liquid reaches a certain concentration, the worker needs to replace the cleaning liquid in the ultrasonic cleaning machine, and the replaced cleaning liquid will be directly discharged, causing waste of water resources. The cost of mask cleaning and degumming is high, and the mask is in the cleaning liquid containing high concentration of melted photoresist for ultrasonic cleaning, which reduces the effect of mask cleaning and degumming. Therefore, a mask ultrasonic degumming device is designed. UTILITY MODEL CONTENTS

[0005] In view of the defects or deficiencies of the mask ultrasonic degumming device, the utility model aims to provide a mask ultrasonic degumming device, which can effectively remove the gel left in the cleaning liquid during the cleaning process of the mask in the ultrasonic cleaning machine, so that the cleaning liquid can be recycled, the cost of mask cleaning and degumming is reduced, and the effect of mask cleaning and degumming is improved.

[0006] To achieve the above utility model purposes, the utility model adopts the following technical solutions:

[0007] The utility model provides a kind of mask plate ultrasonic wave degumming device, including mounting bracket, the top of mounting bracket is equipped with the ultrasonic cleaner for carrying out ultrasonic cleaning to mask plate, the positive of ultrasonic cleaner is equipped with the solidification component for receiving the liquid discharged by ultrasonic cleaner and carrying out solidification to colloid in liquid, the liquid discharge end on the bottom of ultrasonic cleaner is equipped with the shunt component that the liquid discharged by ultrasonic cleaner is shunted and the liquid in the solidification component is stirred, the lower of solidification component is equipped with two groups for receiving the liquid discharged by solidification component and filtering and heating to liquid filtration component, and the side of two filtration components is equipped with the solidification colloid collection groove for receiving the impurity discharged by filtration component, the side of the top of mounting bracket inboard is equipped with the pump body for conveying the liquid in filtration component to ultrasonic cleaner.

[0008] Preferably, a refrigeration box is arranged on the solidification component, semiconductor refrigerators are arranged on the two side outer walls of the refrigeration box, liquid discharge pipes are arranged at the front and rear ends of the bottom of the refrigeration box, and electromagnetic valves are arranged on the liquid discharge pipes.

[0009] Preferably, the shunt component is composed of a liquid inlet pipe, a sealing bearing, an impeller, a shunt plate, a rotating shaft and a stirring rod, the sealing bearing is arranged on the circumferential inner wall of the liquid inlet pipe, the impeller is arranged on the circumferential inner wall of the sealing bearing, the rotating shaft is arranged at the bottom of the impeller, and the other end of the rotating shaft extends into the refrigeration box through the bearing arranged at the center of the surface of the shunt plate.

[0010] Preferably, the stirring rod is arranged below the circumferential outer wall of the rotating shaft and located in the refrigeration box, a flange plate is arranged above the circumferential outer wall of the liquid inlet pipe, and the flange plate on the liquid inlet pipe is fixedly connected to the flange plate on the liquid discharge end of the ultrasonic cleaner through fastening bolts.

[0011] Preferably, a filter box is arranged on the filtration component, a filter plate is arranged in the filter box, a discharge slot hole is formed in the side outer wall of the filter box, an electric heating plate is arranged at the bottom end in the filter box, a liquid outlet pipe is arranged on the other side outer wall of the filter box, and an electromagnetic valve is arranged on the liquid outlet pipe.

[0012] Preferably, the liquid inlet end on the side outer wall of the pump body is connected to the liquid outlet end on one side of the circumferential outer wall of the three-way connecting pipe through a pipe joint, the two liquid inlet ends on the other side of the circumferential outer wall of the three-way connecting pipe are respectively connected to the liquid outlet pipes on the two filter boxes, the liquid outlet end on the other side outer wall of the pump body is connected to the liquid inlet end on the side outer wall of the ultrasonic cleaner through a pipe joint, and the other end of the conveying pipeline is connected to the liquid inlet end on the side outer wall of the ultrasonic cleaner through a pipe joint.

[0013] Preferably, the coagulation gel collecting groove is mounted on the other side of the inside bottom end of the mounting frame.

[0014] Compared with the prior art, the above one or more technical solutions have the following beneficial effects:

[0015] 1. In the utility model, when the staff discharges the cleaning liquid in the ultrasonic cleaning machine, the cleaning liquid falls on the shunt assembly first, the shunt plate on the shunt assembly shunts the falling cleaning liquid, the shunted cleaning liquid falls into the refrigeration box body on the coagulation assembly, when the cleaning liquid contacts the liquid in the refrigeration box body, the melted gel in the cleaning liquid coagulates due to the cold and falls into the bottom end inside the refrigeration box body, when the liquid and the solidified gel in the refrigeration box body fall on the filter plate on the filter assembly, the filter plate filters and separates the solidified gel and the liquid, the filtered liquid flows to the inside below the filter box body, and the pump body can convey the liquid in the filter box body into the ultrasonic cleaning machine again for use, so that the utility model can effectively remove the gel left in the cleaning liquid during the cleaning process of the mask plate in the ultrasonic cleaning machine, the cleaning liquid can be recycled, water resource waste is avoided, and the cost of mask plate cleaning and gel removal is reduced.

[0016] 2. In the utility model, when the cleaning liquid in the ultrasonic cleaning machine flows into the liquid inlet pipe and is discharged from the liquid inlet pipe, the flowing liquid drives the impeller to rotate, the impeller rotation drives the rotating shaft to rotate, the rotating shaft rotation drives the stirring rod to rotate, the stirring rod rotation stirs the liquid in the refrigeration box body, the flowability of the liquid in the refrigeration box body is increased, the uniform cooling of the liquid in the refrigeration box body is improved, and the situation that the solidification of the gel is affected by the liquid at a certain temperature inside the refrigeration box body is avoided.

[0017] 3. As known from the above, the cleaning liquid in the ultrasonic cleaning machine is in a state of frequent replacement, the photoresist melted in the cleaning liquid does not need to reach a certain concentration before the cleaning liquid is replaced, the mask plate is in the cleaning liquid containing a lower concentration of melted photoresist for ultrasonic cleaning or in the cleaning liquid without melted photoresist for ultrasonic cleaning, and therefore the effect of mask plate gel removal is improved. BRIEF DESCRIPTION OF DRAWINGS

[0018] The drawings constituting a part of the utility model are used to provide further understanding of the utility model, and the schematic embodiment of the utility model and the description thereof are used to explain the utility model and do not constitute improper limitation on the utility model.

[0019] Figure 1 It is a whole three-dimensional structure of the utility model Figure 1 .

[0020] Figure 2 is the overall three-dimensional structure of the utility model Figure 2 .

[0021] Figure 3 is the overall three-dimensional structure of the utility model Figure 3 .

[0022] Figure 4 is the structure diagram of the shunt assembly of the utility model.

[0023] Figure 5 is the sectional view of the shunt assembly of the utility model.

[0024] Figure 6 is the structure diagram of the solidification assembly of the utility model Figure 1 .

[0025] Figure 7 is the structure diagram of the solidification assembly of the utility model Figure 2 .

[0026] Figure 8 is the sectional view of the filter assembly of the utility model.

[0027] In the drawings:

[0028] 100, ultrasonic cleaning machine;

[0029] 200, conveying pipeline;

[0030] 300, shunt assembly; 310, liquid inlet pipe; 320, sealing bearing; 330, impeller; 340, shunt plate; 350, rotating shaft; 360, stirring rod;

[0031] 400, mounting frame;

[0032] 500, tee connection pipe;

[0033] 600, solidification assembly; 610, semiconductor refrigerator; 620, liquid discharge pipe; 630, refrigeration box body;

[0034] 700, pump body;

[0035] 800, filter assembly; 810, filter box body; 820, filter plate; 830, electric heating plate; 840, flow guide plate; 850, liquid outlet pipe; 860, discharge slot hole;

[0036] 900, solidified gel collecting tank. DETAILED DESCRIPTION

[0037] The utility model will be further described below in combination with the drawings and examples.

[0038] It should be noted that the following detailed description is exemplary and intended to provide further explanation of the present invention. Unless otherwise specified, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains.

[0039] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the scope of exemplary embodiments according to the invention. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0040] like Figures 1-8 As shown, an ultrasonic adhesive removal device for a mask includes a mounting frame 400. An ultrasonic cleaner 100 for ultrasonically cleaning the mask is mounted on the top of the mounting frame 400. A coagulation component 600 is positioned directly below the ultrasonic cleaner 100 to receive the liquid discharged from the ultrasonic cleaner 100 and coagulate the colloids in the liquid. A diversion component 300 is positioned at the drain end at the bottom of the ultrasonic cleaner 100 to divert the liquid discharged from the ultrasonic cleaner 100 and stir the liquid within the coagulation component 600. Two sets of filter components 800 are positioned below the coagulation component 600 to receive the liquid discharged from the coagulation component 600, filter the liquid, and heat the liquid. Each of the two filter components 800 has a coagulated colloid collection tank 900 on one side to receive impurities discharged from the filter components 800. A pump 700 is mounted on one side of the top inner side of the mounting frame 400 to transport the liquid within the filter components 800 into the ultrasonic cleaner 100.

[0041] A refrigeration chamber 630 is provided on the solidification component 600. Semiconductor coolers 610 are provided on both outer walls of the refrigeration chamber 630. When the semiconductor coolers 610 are activated, they can cool the liquid inside the refrigeration chamber 630. Drain pipes 620 are provided at both the front and rear ends of the bottom of the refrigeration chamber 630, and solenoid valves are provided on the drain pipes 620. The refrigeration chamber 630 is installed on the inner top of the mounting bracket 400.

[0042] The shunt assembly 300 is composed of the liquid inlet pipe 310, the sealing bearing 320, the impeller 330, the shunt plate 340, the rotating shaft 350 and the stirring rod 360, the sealing bearing 320 is installed on the circumferential inner wall of the liquid inlet pipe 310, the impeller 330 is installed on the circumferential inner wall of the sealing bearing 320, the rotating shaft 350 is arranged at the bottom of the impeller 330, and the other end of the rotating shaft 350 penetrates through the bearing at the surface center position of the shunt plate 340 and extends to the inside of the refrigeration box body 630, when the cleaning liquid falls on the shunt plate 340, the shunt plate 340 can shunt the cleaning liquid, and when the shunted cleaning liquid falls into the refrigeration box body 630, the situation that the melted gel in the cleaning liquid solidifies into a larger block of gel is avoided.

[0043] The stirring rod 360 is arranged below the circumferential outer wall of the rotating shaft 350 and located in the inside of the refrigeration box body 630, the flange plate is arranged above the circumferential outer wall of the liquid inlet pipe 310, and the flange plate on the liquid inlet pipe 310 is fixedly connected with the flange plate on the liquid discharge end of the ultrasonic cleaning machine 100 through the fastening bolt.

[0044] The filter assembly 800 is provided with the filter box body 810, the filter plate 820 is arranged in the inside of the filter box body 810, the discharge groove hole 860 is formed in the outer wall of one side of the filter box body 810, the electric heating plate 830 is arranged at the bottom end in the inside of the filter box body 810, the electric heating plate 830 can heat the liquid in the filter box body 810, the liquid outlet pipe 850 is arranged on the outer wall of the other side of the filter box body 810, and the electromagnetic valve is arranged on the liquid outlet pipe 850.

[0045] The liquid inlet end on the outer wall of one side of the pump body 700 is connected with the liquid outlet end on one side of the circumferential outer wall of the three-way connecting pipe 500 through the pipe joint, the two liquid inlet ends on the other side of the circumferential outer wall of the three-way connecting pipe 500 are connected with the liquid outlet pipes 850 on the two filter box bodies 810 respectively, the liquid outlet end on the outer wall of the other side of the pump body 700 is connected with the conveying pipeline 200 through the pipe joint, and the other end of the conveying pipeline 200 is connected with the liquid inlet end on the outer wall of one side of the ultrasonic cleaning machine 100 through the pipe joint.

[0046] The solidified gel collecting tank 900 is arranged on the other side of the inside bottom end of the mounting bracket 400, the solidified gel collecting tank 900 is arranged, the solidified gel filtered by the filter plate 820 is discharged from the discharge groove hole 860 and flows into the solidified gel collecting tank 900 through the flow guide plate 840.

[0047] Working principle: in use, turn on the external power supply, the mask in the process of cleaning in ultrasonic cleaner 100, the photoresist on the mask will melt in the cleaning liquid, when the photoresist in the cleaning liquid reaches a certain concentration, the worker needs to replace the cleaning liquid in the ultrasonic cleaner 100, the worker discharges the cleaning liquid in the ultrasonic cleaner 100, the cleaning liquid in the ultrasonic cleaner 100 flows into the inlet pipe 310 when discharging, the flowing liquid drives the impeller 330 to rotate, the impeller 330 rotates and drives the rotating shaft 350 to rotate, the rotating shaft 350 rotates and drives the stirring rod 360 to rotate, the stirring rod 360 rotates and stirs the liquid in the refrigeration box 630, increases the liquidity of the liquid in the refrigeration box 630, so as to improve the uniform cooling of the liquid in the refrigeration box 630, when the cleaning liquid in the inlet pipe 310 is discharged to the flow distribution plate 340, the flow distribution plate 340 can distribute the falling cleaning liquid, the distributed cleaning liquid falls into the refrigeration box 630 on the solidification assembly 600, when the cleaning liquid contacts with the liquid in the refrigeration box 630, the gel in the cleaning liquid will solidify due to cooling and fall into the bottom of the refrigeration box 630, the liquid and solidified gel in the refrigeration box 630 are discharged to a filter assembly 800, the filter plate 820 filters and separates the solidified gel and liquid, the filtered liquid flows to the lower part of the filter box 810, another filter assembly 800 preheats the liquid in the filter box 810, the pump body 700 can transport the preheated liquid in another filter assembly 800 to the ultrasonic cleaner 100 for use, so that when the liquid preheated in a filter assembly 800 is transported, the worker makes a filter assembly 800 receive the solidified gel and liquid discharged from the refrigeration box 630, and another filter assembly 800 preheats the filtered liquid, so that the utility model can effectively remove the gel remaining in the cleaning liquid in the process of cleaning the mask in the ultrasonic cleaner 100, can make the cleaning liquid be recycled, avoid the waste of water resources, reduce the cost of mask cleaning and gel removal, so that the cleaning liquid in the ultrasonic cleaner 100 is in a state of frequent replacement, the photoresist in the cleaning liquid does not need to reach a certain concentration before replacing the cleaning liquid, so that the mask is in the cleaning liquid containing low concentration of melted photoresist or in the cleaning liquid without melted photoresist for ultrasonic cleaning, thereby improving the effect of mask gel removal.

[0048] The above only describes the preferred embodiments of the present application and is not intended to limit the present application. Those skilled in the art can make various changes and modifications to the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A reticle ultrasonic debonding apparatus comprising a mounting frame (400), characterized in that: The top end of the mounting frame (400) is provided with an ultrasonic cleaning machine (100) for ultrasonic cleaning of a mask, and a coagulation assembly (600) is arranged directly below the ultrasonic cleaning machine (100) to receive liquid discharged by the ultrasonic cleaning machine (100) and coagulate colloid in the liquid; a liquid discharge end on the bottom of the ultrasonic cleaning machine (100) is provided with a shunt assembly (300) to shunt liquid discharged by the ultrasonic cleaning machine (100) and stir the liquid in the coagulation assembly (600); two groups of filter assemblies (800) are arranged below the coagulation assembly (600) to receive liquid discharged by the coagulation assembly (600) and filter and heat the liquid, and one side of each of the two groups of filter assemblies (800) is provided with a coagulation colloid collection tank (900) to receive impurities discharged by the filter assembly (800); and one side of the top end of the inner side of the mounting frame (400) is provided with a pump body (700) to deliver liquid in the filter assembly (800) to the ultrasonic cleaning machine (100).

2. The reticle ultrasonic debonding apparatus of claim 1, wherein: The coagulation assembly (600) is provided with a refrigeration box (630), and semiconductor refrigerators (610) are arranged on the outer walls on both sides of the refrigeration box (630); liquid discharge pipes (620) are arranged at the front and rear ends of the bottom of the refrigeration box (630), and electromagnetic valves are arranged on the liquid discharge pipes (620); and the refrigeration box (630) is mounted on the top end of the inner side of the mounting frame (400).

3. The reticle ultrasonic debonding apparatus of claim 1, wherein: The shunt assembly (300) is composed of a liquid inlet pipe (310), a sealing bearing (320), an impeller (330), a shunt plate (340), a rotating shaft (350), and a stirring rod (360); the sealing bearing (320) is mounted on the circumferential inner wall of the liquid inlet pipe (310); the impeller (330) is mounted on the circumferential inner wall of the sealing bearing (320); the rotating shaft (350) is arranged at the bottom of the impeller (330); and the other end of the rotating shaft (350) penetrates through a bearing arranged at the center of the surface of the shunt plate (340) and extends into the interior of the refrigeration box (630).

4. The reticle super sonic debonding apparatus of claim 3, wherein: The stirring rod (360) is arranged below the circumferential outer wall of the rotating shaft (350) and located in the interior of the refrigeration box (630); a flange plate is arranged above the circumferential outer wall of the liquid inlet pipe (310); and the flange plate on the liquid inlet pipe (310) is fixedly connected to the flange plate on the liquid discharge end of the ultrasonic cleaning machine (100) through fastening bolts.

5. The reticle ultrasonic debonding apparatus of claim 1, wherein: The filter assembly (800) is provided with a filter box (810), and the interior of the filter box (810) is provided with a filter plate (820); a discharge slot hole (860) is formed in the outer wall on one side of the filter box (810); an electric heating plate (830) is mounted at the bottom end in the interior of the filter box (810); and an outlet pipe (850) is arranged on the outer wall on the other side of the filter box (810), and an electromagnetic valve is arranged on the outlet pipe (850).

6. The reticle ultrasonic debonding apparatus of claim 1, wherein: The liquid inlet end on one side of the outer wall of the pump body (700) is connected with the liquid outlet end on one side of the circumferential outer wall of the three-way connecting pipe (500) through a pipe joint, two liquid inlet ends on the other side of the circumferential outer wall of the three-way connecting pipe (500) are respectively connected with the liquid outlet pipes (850) on two filter box bodies (810), the liquid outlet end on the other side of the outer wall of the pump body (700) is connected with the conveying pipe (200) through a pipe joint, and the other end of the conveying pipe (200) is connected with the liquid inlet end on one side of the ultrasonic cleaning machine (100) through a pipe joint.

7. The reticle ultrasonic debonding apparatus of claim 1, wherein: The coagulation gel collecting groove (900) is installed on the other side of the inner bottom end of the mounting rack (400).

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