Mounting auxiliary jig

Abstract

The utility model discloses an auxiliary jig for installation. The auxiliary jig at least comprises a positioning ring; the plurality of protruding pieces are arranged on the outer wall of the positioning ring; the fixing part penetrates through the protruding part; the scale component is arranged on one side of the positioning ring, the scale component comprises at least one plane, and the interior of the scale component is hollowed out; the clamping groove part is arranged at one end of the scale part; the clamping hook part extends from the interior of the scale part to the side far away from the clamping groove part, and the clamping hook part is movably connected with the scale part; and the at least one pressing part is connected with the clamping hook part and the scale part. By means of the installation auxiliary jig, the installation position of the graphite cylinder can be kept accurate and consistent.

Description

TECHNICAL FIELD

[0001] The utility model relates to epitaxial equipment technical field, concretely relates to a kind of installation auxiliary jig. BACKGROUND

[0002] In epitaxial equipment, graphite cylinder is arranged in the inside of reaction cavity, substrate is placed in graphite cylinder, gas enters graphite cylinder, deposits on the surface of substrate, and epitaxial layer is grown. However, in the growth process of epitaxial layer, deposition will inevitably be attached on the inner wall of graphite cylinder, and deposition can fall on the surface of substrate, which can damage the quality of epitaxial layer, so graphite cylinder must be replaced or maintained regularly. At present, the work of replacing or maintaining graphite cylinder is heavily dependent on the experience and observation of operators, and there are problems of inaccurate installation position of graphite cylinder and inconsistent installation position each time, thereby affecting the temperature uniformity and gas distribution inside the reaction cavity. SUMMARY

[0003] The utility model aims at providing a kind of installation auxiliary jig, which can quickly, accurately and stably replace or maintain graphite cylinder, so that the installation position of graphite cylinder remains accuracy and consistency, stably the temperature and gas distribution in graphite cylinder, and prolong the service cycle of graphite cylinder.

[0004] In order to achieve the above-mentioned purpose and other related purposes, the utility model is realized by the following technical solutions.

[0005] The utility model provides a kind of installation auxiliary jig, at least comprising:

[0006] Positioning ring;

[0007] A plurality of protruding pieces are arranged on the outer wall of the positioning ring;

[0008] Fixed component, through the protruding piece;

[0009] Scale component is arranged on one side of the positioning ring, and the scale component includes at least one plane, and the inside of the scale component is hollow;

[0010] Clamping groove component is arranged at one end of the scale component;

[0011] Latching hook component is extended from the inside of the scale component to the side away from the clamping groove component, and the latching hook component is movably connected with the scale component;And

[0012] At least one pressing component is connected between the latching hook component and the scale component.

[0013] In an embodiment of the utility model, the scale component further includes an opening, and the opening is arranged on the plane.

[0014] In an embodiment of the present application, the scale component comprises a scale line, and the scale line is arranged on the plane at one side of the opening.

[0015] In an embodiment of the present application, the clamping groove component comprises a first part, and the first part is symmetrically arranged at two sides of the end of the scale component.

[0016] In an embodiment of the present application, the clamping groove component comprises a second part, and the second part extends from one end of the first part away from the scale component to the direction where the scale component is located.

[0017] In an embodiment of the present application, the clamping hook component comprises a first part, and the first part extends from the inside of the scale component to the side away from the clamping groove component.

[0018] In an embodiment of the present application, the clamping hook component further comprises a second part, and the second part extends from one end of the first part away from the clamping groove component to the direction perpendicular to the first part.

[0019] In an embodiment of the present application, the clamping hook component moves forward and backward in the inside of the scale component.

[0020] In an embodiment of the present application, the pressing component is two, and the two pressing components respectively pass through the opening and connect the scale component and the clamping hook component.

[0021] In an embodiment of the present application, the pressing component is a threaded connection, a pin connection or a buckle connection.

[0022] In summary, the present application provides an installation auxiliary jig, which can keep the installation position of the graphite cylinder consistent and accurate, keep the temperature and gas distribution in the graphite cylinder stable, and improve the quality of the epitaxial layer.

[0023] Of course, implementing any of the present application does not necessarily need to achieve all the advantages mentioned above. BRIEF DESCRIPTION OF DRAWINGS

[0024] In order to more clearly illustrate the technical scheme of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiment description. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.

[0025] Figure 1The top view of the installation auxiliary jig in one embodiment of the utility model.

[0026] Figure 2 For Figure 1 The enlarged view of A in the middle.

[0027] Figure 3 For Figure 1 The front view of the auxiliary jig in the middle.

[0028] Figure 4 For Figure 1 The schematic view of the auxiliary jig from the side of the clamping groove component.

[0029] Figure 5 The schematic view of the reaction cavity in one embodiment of the utility model.

[0030] Figure 6 The schematic view of the fixing component connecting the cavity and the protruding piece.

[0031] Figure 7 The schematic view of the installation of the graphite cylinder using the auxiliary jig.

[0032] Figure 8 For Figure 7 The top view.

[0033] Marking description:

[0034] 100, installation auxiliary jig; 200, scale component; 201, plane; 202, opening; 203, scale line; 300, clamping groove component; 301, first subpart; 302, second subpart; 400, clamping hook component; 401, first component; 402, second component; 500, pressing component; 600, positioning ring; 601, first protruding piece; 602, second protruding piece; 700, fixing component; 800, reaction cavity; 801, spraying component; 802, cavity; 802-1, first assembly; 802-2, second assembly; 900, graphite cylinder. DETAILED DESCRIPTION

[0035] The embodiments of the utility model are explained below through specific concrete examples, and the person skilled in the art can easily understand other advantages and effects of the utility model from the content disclosed in the specification. The utility model can also be implemented or applied through other different specific embodiments, and the details in the utility model can also be modified or changed based on different viewpoints and applications without departing from the spirit of the utility model. It should be noted that the following embodiments and the features in the embodiments can be combined with each other without conflict.

[0036] It is to be noted that the drawings provided in the following embodiments only illustrate the basic concept of the present application in a schematic manner, and only show the components related to the present application in the drawings, not according to the number, shape and size of the components in actual implementation. The shape, number and proportion of each component in actual implementation can be changed arbitrarily, and the component layout pattern can be more complex.

[0037] In the present application, it should be noted that, if the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like appear, the indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, if the terms "first", "second" appear, they are only for description and differentiation purposes, and cannot be understood as indicating or implying relative importance.

[0038] In the epitaxial equipment, whether the mounting device of the graphite cylinder is accurate seriously affects the uniformity of the temperature and gas distribution inside the graphite cylinder. Moreover, if the graphite cylinder mounting position is not accurate, it may cause the deposition attached to the inner wall of the graphite cylinder to be unevenly distributed, and the position with more deposition on the inner wall will be more likely to drop the deposition onto the substrate, affecting the growth of the epitaxial layer, so the graphite cylinder must be frequently replaced, thereby shortening the service life of the graphite cylinder. During the maintenance of the graphite cylinder, the operator basically operates manually, that is, the operator holds the graphite cylinder for installation and observes the position with eyes, but everyone's experience, height and observation position are different, which may easily cause the inconsistent installation position of the graphite cylinder. Through the installation auxiliary jig provided by the present application, the graphite cylinder can be quickly, accurately and stably replaced or maintained, so that the installation position of the graphite cylinder always remains consistent.

[0039] Please refer to Figures 1 to 8The utility model provides an installation auxiliary jig 100, can be applied to the installation process of relevant equipment to keep the consistency and accuracy of the installation position of equipment, for example, the graphite cylinder 900 is installed in the preset position in the reaction cavity 800, and the installation auxiliary jig 100 is explained, wherein when the graphite cylinder 900 is in the preset position in the reaction cavity 800, the outer wall of the reaction cavity 800 and the inner wall of the graphite cylinder 900 keep the preset distance, the reaction cavity 800 for example includes cavity 802 and spray component 801 etc., the cavity 802 is opened in one end, and the spray component 801 is arranged in the opening direction of cavity 802 to guide the gas outside the reaction cavity 800 into the cavity 802 uniformly, and a plurality of components are arranged on the outer wall of the cavity 802 close to the spray component 801, for example, two components are explained in the embodiment, and the two components are first component 802-1 and second component 802-2 respectively, and the first component 802-1 and the second component 802-2 are symmetrically arranged on the outer wall of the cavity 802.

[0040] Please refer to Figures 1 to 8 The utility model provides an installation auxiliary jig 100, for example including scale component 200, clamping groove component 300, clamping hook component 400, pressing part 500, positioning ring 600 and fixed part 700 etc., wherein scale component 200 is arranged in one side of positioning ring 600, clamping hook component 400 is extended from the inside of scale component 200 to the outside of scale component 200, and clamping hook component 400 and scale component 200 are movably connected, the installation auxiliary jig 100 provided by the utility model is placed on the upper end ring surface of cavity 802 with positioning ring 600 overlapping, and fixed part 700 is used to sequentially penetrate protruding piece and component, and positioning ring 600 and cavity 802 are fixedly connected, so that the installation auxiliary jig 100 can be stably placed on the cavity 802, then the distance between clamping hook component 400 and clamping groove component 300 is adjusted to the preset distance by moving clamping hook component 400, the position of graphite cylinder 900 in the reaction cavity 800 is adjusted, clamping hook component 400 is attached to the inner wall of graphite cylinder 900, and clamping groove component 300 is attached to the outer wall of the reaction cavity 800, so that graphite cylinder 900 can be accurately positioned in the preset position in the reaction cavity 800, to keep the uniformity of temperature and gas distribution in graphite cylinder 900, and improve the quality of epitaxial layer.

[0041] Please refer to Figures 1 to 8As shown in the utility model one embodiment, the size of the positioning ring 600 and the cavity 802 is equal, and a plurality of protruding pieces are arranged on the outer wall of the positioning ring 600, the distribution and the number of the protruding pieces on the outer wall of the positioning ring 600 are same with the distribution and the number of the assembly on the outer wall of the cavity 802. In the embodiment, the protruding pieces are two, for example, the first protruding piece 601 and the second protruding piece 602, and the first protruding piece 601 and the second protruding piece 602 are symmetrically distributed on the outer wall of the positioning ring 600.

[0042] Please refer to Figures 1 to 8 As shown in the utility model one embodiment, the fixing component 700 penetrates the protruding piece and the assembly in turn, and is fixedly connected with the positioning ring 600 and the cavity 802. The number of the fixing component 700 is equal to the number of the protruding piece, and the fixing component 700 is, for example, a threaded connecting piece, a pin connecting piece or a buckle connecting piece. In the embodiment, the fixing component 700 is two, and each fixing component 700 penetrates one protruding piece and one assembly. By arranging the positioning ring 600, the protruding piece and the fixing component 700, the whole installation auxiliary jig 100 can be stably placed in the opening direction of the cavity 802, so as to facilitate subsequent operation of the scale component 200, the clamping groove component 300, the clamping hook component 400 and the pressing component 500.

[0043] Please refer to Figures 1 to 8 As shown in the utility model one embodiment, the scale component 200 is arranged on one side of the positioning ring 600, and is internally hollowed out, so as to facilitate arrangement of other structures in the scale component 200. In the embodiment, the scale component 200 comprises, for example, a plane 201, an opening 202 and a scale line 203. The plane 201 is, for example, at least one. In the embodiment, the shape of the scale component 200 is, for example, a tetrahedron, and the scale component 200 comprises, for example, four planes 201.

[0044] Please refer to Figures 1 to 8 As shown in the utility model one embodiment, the opening 202 is arranged on the plane 201. Through the opening 202, other structures in the scale component 200 can be observed, and the maintenance of the structures in the scale component 200 is facilitated. In the embodiment, the scale line 203 is arranged on the plane 201 on one side of the opening 202. By arranging the scale line 203, the distance between the clamping groove component 300 and the clamping hook component 400 arranged at two ends of the scale component 200 can be measured.

[0045] Please refer to Figures 1 to 8As shown in the utility model one embodiment, the card slot component 300 is arranged at one end of the scale component 200, in this embodiment, the card slot component 300 is located outside the scale component 200, and the card slot component 300 comprises a first part 301 and a second part 302, etc. Among them, the first part 301 is symmetrically arranged at both sides of the end of the scale component 200 with the scale component 200 as the center, and the second part 302 extends in the direction of the scale component 200 from the end of the first part 301 away from the scale component 200. By arranging the card slot component 300, the second part 302 can be attached to the outer wall of the reaction cavity 800, so that the scale component 200 can accurately measure the distance between the outer wall of the reaction cavity 800 and the inner wall of the graphite cylinder 900.

[0046] Please refer to Figures 1 to 8 As shown in the utility model one embodiment, the card hook component 400 extends from the inside of the scale component 200 to the side away from the card slot component 300, in this embodiment, the card hook component 400 is arranged inside the scale component 200, and the card hook component 400 and the scale component 200 are movably connected. Among them, relative to the scale component 200 and the card slot component 300, the card hook component 400 can move outwardly from the scale component 200, so that the distance between the card hook component 400 and the card slot component 300 can be adjusted to meet the preset distance, and the inner wall of the graphite cylinder 900 is attached to the card hook component 400 and the outer wall of the reaction cavity 800 is attached to the card slot component 300, so that the graphite cylinder 900 is accurately positioned at the preset position in the reaction cavity 800.

[0047] Please refer to Figures 1 to 8 As shown in the utility model one embodiment, the card hook component 400 comprises a first component 401 and a second component 402, etc. Among them, the first component 401 extends from the inside of the scale component 200 to the outside of the scale component 200, and the second component 402 extends from the end of the first component 401 away from the card slot component 300 to the direction perpendicular to the first component 401. By moving the card hook component 400, the second component 402 is attached to the inner wall of the graphite cylinder 900, so that the scale component 200 can accurately measure the distance between the outer wall of the reaction cavity 800 and the inner wall of the graphite cylinder 900.

[0048] Please refer to Figures 1 to 8As shown in the embodiment of the utility model, the pressing component 500 connects the clamping hook component 400 and the scale component 200. Among them, the pressing component 500 is for example at least one, and the pressing component 500 is for example a threaded connecting piece, a pin connecting piece or a buckle connecting piece, etc. In this embodiment, the pressing component 500 is for example two, and the two pressing components 500 respectively pass through the opening 202, connecting the scale component 200 and the clamping hook component 400. When the distance between the clamping hook component 400 and the clamping groove component 300 meets the preset distance, the clamping hook component 400 and the scale component 200 can be firmly fixed together by the two pressing components 500, preventing the clamping hook component 400 from moving, fixing the distance between the clamping hook component 400 and the clamping groove component 300, so as to facilitate accurate positioning of the position of the graphite cylinder 900 in the reaction cavity 800.

[0049] In order to further illustrate the installation auxiliary jig 100 provided by the utility model, the process of installing the graphite cylinder 900 in the reaction cavity 800 using the installation auxiliary jig 100 is specifically described below.

[0050] Please refer to Figures 1 to 8 As shown in the embodiment of the utility model, the graphite cylinder 900 is installed at the center position of the reaction cavity 800, and at this time, the center position of the reaction cavity 800 is the original position of the graphite cylinder 900. Remove the spraying component 801, and place the positioning ring 600 on the upper end ring surface of the cavity 802, rotate the entire installation auxiliary jig 100, and when the first protruding piece 601 and the first assembly 802-1 are aligned, and the second protruding piece 602 and the second assembly 802-2 are aligned, use a fixing component 700 to penetrate the aligned first protruding piece 601 and the first assembly 802-1, and another fixing component 700 penetrates the aligned second protruding piece 602 and the second assembly 802-2, so that the installation auxiliary jig 100 can be stably placed on the cavity 802, and the clamping groove component 300 is attached to the outer wall A of the reaction cavity 800. Move the clamping hook component 400 forward and backward, so that the second component 402 is attached to the inner wall A' of the graphite cylinder 900. Adjust the pressing component 500 to fix the clamping hook component 400 and the scale component 200, and record the value a of the scale line 203, that is, the distance between the inner wall A' and the outer wall A.

[0051] Please refer to Figures 1 to 8As shown in the embodiment of the utility model, remove fixed part 700, 180° rotate whole installation auxiliary jig 100, when first protruding piece 601 and second assembly 802-2 are aligned, second protruding piece 602 and first assembly 802-1 are aligned, use one fixed part 700 to penetrate aligned first protruding piece 601 and second assembly 802-2, another fixed part 700 penetrates aligned second protruding piece 602 and first assembly 802-1, installation auxiliary jig 100 can be stably placed on cavity 802, and clamping groove part 300 is attached to outer wall B of cavity 802, outer wall A and outer wall B are symmetrically distributed on the outside of cavity 802 with the axis of cavity 802 as the center. Move clamping hook part 400 forward and backward, make second part 402 attach to inner wall B' of graphite cylinder 900. Adjust compression part 500 to fix clamping hook part 400 and scale part 200, record the value b of scale line 203, that is, the distance between inner wall B' and outer wall B.

[0052] As shown in the embodiment of the utility model, record a and b as standard data. Figures 1 to 8 As shown in the embodiment of the utility model, record a and b as standard data.

[0053] As shown in the embodiment of the utility model, record a and b as standard data. Figures 1 to 8 As shown in the embodiment of the utility model, if the original position of graphite cylinder 900 is not in the center position of reaction cavity 800, calculate the average value of a and b, and record the average value as standard data. In the next maintenance or replacement of graphite cylinder 900, graphite cylinder 900 can be reinstalled to the center position of reaction cavity 800 according to the standard data by means of installation auxiliary jig 100, that is, the position of graphite cylinder 900 is reinstalled to the correct position, so that the installation position of graphite cylinder 900 is kept correct every time.

[0054] In summary, the utility model provides an installation auxiliary jig, which fixes the installation position of the graphite cylinder on the preset position according to the distance between the clamping groove part and the clamping hook part, improves the accuracy and consistency of the installation position of the graphite cylinder, ensures the uniformity of the internal temperature and gas distribution of the graphite cylinder, and improves the quality of the epitaxial layer. Moreover, the installation auxiliary jig can avoid the uneven distribution of the deposits on the inner wall of the graphite cylinder, prolong the service life of the graphite cylinder, and reduce the cost.

[0055] Reference throughout this specification to "one embodiment", "an embodiment", or "a specific embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment of the application and is not necessarily included in all embodiments. Thus, the appearances of the phrase "in one embodiment", "in an embodiment", or "in a specific embodiment" in various places throughout this specification are not necessarily referring to the same embodiment. Furthermore, the particular features, structures, or characteristics of any specific embodiment of the application can be combined in any suitable manner in one or more other embodiments. It is understood that other variations and modifications of the applications described and illustrated herein can be made based on the teachings herein, and that the present application is not limited to the particular embodiments described herein. Thus, to the extent that there are variations and modifications of this application, they should be considered to further illustrate the application and to fall within the scope of the application.

[0056] The above description is only preferred embodiments of the present application and the explanation of the technical principles used, and those skilled in the art should understand that the scope of the application involved in the present application is not limited to the technical solutions formed by the specific combinations of the above technical features, and should also cover other technical solutions formed by any combination of the above technical features or equivalent features, for example, the technical solutions formed by replacing the above features with the technical features disclosed in the present application (but not limited to) having similar functions. In addition to the technical features described in the specification, the remaining technical features are known to those skilled in the art, and in order to highlight the innovative features of the present application, the remaining technical features will not be described here.

Claims

1. A mounting aid jig characterized by, At least comprising: a positioning ring; a plurality of protrusions arranged on the outer wall of the positioning ring; a fixing component penetrating through the protrusions; a scale component arranged on one side of the positioning ring, and the scale component comprises at least one plane, and the inside of the scale component is hollow; a clamping groove component arranged at one end of the scale component; a clamping hook component extending from the inside of the scale component to the side away from the clamping groove component, and the clamping hook component is movably connected with the scale component; and at least one pressing component connecting the clamping hook component and the scale component.

2. The assist tool according to claim 1, wherein The scale component further comprises an opening arranged on the plane.

3. The assist tool according to claim 2, wherein The scale component further comprises a scale line arranged on the plane on one side of the opening.

4. The assist tool according to claim 1, wherein The clamping groove component comprises a first part, which is symmetrically arranged on both sides of the end of the scale component with the scale component as the center.

5. The assist tool according to claim 4, wherein The clamping groove component comprises a second part, which extends from the end of the first part away from the scale component to the direction in which the scale component is located.

6. The assist tool of claim 1, wherein The clamping hook component comprises a first part, which extends from the inside of the scale component to the side away from the clamping groove component.

7. The assist tool according to claim 6, wherein The clamping hook component further comprises a second part, which extends from the end of the first part away from the clamping groove component to the direction perpendicular to the first part.

8. The assist tool of claim 1, wherein The clamping hook component moves forward and backward in the inside of the scale component.

9. The assist tool according to claim 2, wherein The pressing component is two, and each of the two pressing components penetrates through the opening to connect the scale component and the clamping hook component.

10. The mounting aid jig of claim 1, wherein The pressing component is a threaded connection, a pin connection or a buckle connection.

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