Torsion tool capable of standardizing installation of side nozzle

Abstract

The utility model discloses a torsion tool capable of standardizing installation of a side nozzle. The torsion tool comprises a torsion screwdriver body and a screwdriver edge connected to the torsion screwdriver body. The screwdriver edge comprises a claw head of a multi-claw self-centering structure, and the claw head is provided with a clamping opening used for tightly holding the side nozzle. The torsion tool capable of standardizing installation of the side nozzles is simple in structure, standardized assembly between the side nozzles and the gas ring can be achieved, uniformity of installation angles of the side nozzles is improved, and the problem that the film deposition quality is affected due to air leakage of part of the side nozzles can be avoided.

Description

TECHNICAL FIELD

[0001] The utility model relates to thin film deposition equipment technical field especially, relates to a torsion tool of normative side nozzle installation. BACKGROUND

[0002] In the process of starting the machine and adjusting the process of the HDP-CVD (high density plasma chemical vapor deposition) machine at the client end, it is often necessary to manually adjust the aperture size of the side nozzle to control the local reaction gas flow, so as to meet the uniformity specification requirements of the film thickness.

[0003] In the prior art, the installation method of the side nozzle is usually manually adjusted by an engineer, and the tightening degree between the side nozzle and the gas ring cannot be standardized, resulting in differences in process effects. At the same time, the installation angle between the side nozzle and the gas ring also differs when manually adjusted by the engineer, and the side nozzle will loosen to different degrees after the chamber temperature experiences several rises and falls, thereby causing local gas leakage, and ultimately causing changes in the film thickness at the corresponding points of the wafer. UTILITY MODEL CONTENTS

[0004] The utility model aims at overcoming the defects of the prior art, and provides a torsion tool for normative side nozzle installation, so as to solve the technical problem of uneven wafer film deposition thickness caused by differences in manual installation and adjustment of the side nozzle.

[0005] To achieve the above-mentioned purpose, the utility model adopts the following technical solutions:

[0006] In a first aspect, the embodiments of the utility model provide a torsion tool for normative side nozzle installation, which comprises a torsion screwdriver body and a screwdriver bit connected to the torsion screwdriver body.

[0007] The screwdriver bit comprises a claw head of a multi-claw self-centering structure, and the claw head is provided with a clamping opening for clamping the side nozzle.

[0008] The claw head comprises a connecting plate, at least three clamping arms vertically extending from the outer side plate surface of the connecting plate, the clamping arms collectively enclosing the clamping opening, and the inner side plate surface of the connecting plate is connected to the torsion screwdriver body.

[0009] The inner side surface of the clamping arm is further provided with an anti-slip structure.

[0010] The anti-slip structure is a protruding thread.

[0011] The outer side of the clamping arm is further provided with a locking member, and the locking member is used to adjust the clamping force of the clamping opening on the side nozzle.

[0012] The locking member comprises a clamp and a screw threadedly connected to the clamp, and the clamp is wrapped around the outer side of the clamping arm.

[0013] The clamping arm is made of rubber.

[0014] The difference between the inner diameter of the clamping opening and the outer diameter of the side nozzle is less than 3 mm.

[0015] The number of the clamping arms is three, and the three clamping arms are distributed in equal central angles.

[0016] The torsion tool for standardizing the installation of the side nozzle of the utility model adopts a simple structure tool, thereby realizing the standardized assembly between the side nozzle and the gas ring, avoiding the difference in manual mode, and solving the problem of uneven thickness of wafer film deposition.

[0017] The above description is only a summary of the technical scheme of the utility model, in order to more clearly understand the technical means of the utility model, the content of the specification can be implemented, and in order to make the above and other purposes, characteristics and advantages of the utility model more obvious and easy to understand, the following preferred embodiments are described in detail as follows. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 The structure schematic view of the side nozzle assembled by the torsion tool for standardizing the installation of the side nozzle of the utility model embodiment.

[0019] Figure 2 The structure schematic view of the first embodiment of the torsion tool for standardizing the installation of the side nozzle of the utility model embodiment.

[0020] Figure 3 The structure schematic view of the second embodiment of the torsion tool for standardizing the installation of the side nozzle of the utility model embodiment. Figure 2 The enlarged structure schematic view of the partial A shown.

[0021] Figure 4 The structure schematic view of the second embodiment of the torsion tool for standardizing the installation of the side nozzle of the utility model embodiment.

[0022] Figure 5 The enlarged structure schematic view of the partial B shown. Figure 4 The enlarged structure schematic view of the partial C shown.

[0023] Figure 6 The connection state schematic view of the second embodiment structure of the torsion tool for standardizing the installation of the side nozzle of the utility model embodiment and the side nozzle.

[0024] Figure 7 The enlarged structure schematic view of the partial C shown. Figure 6 The enlarged structure schematic view of the partial C shown.

[0025] MARKS OF THE DRAWINGS:

[0026] The torque tool assembly 100, the side nozzle 200, the torque screwdriver body 11, the handle 111, the torque component 112, the screwdriver rod 113, the screwdriver head 12, the connecting plate 121, the clamping arm 122, the clamping head 123, the anti-skid structure 1221, the torque tool assembly 300, the torque screwdriver body 31, the handle 311, the torque component 312, the screwdriver rod 313, the screwdriver head 32, the connecting plate 321, the clamping arm 322, the clamping head 320, the locking piece 33, the clamp 331, the screw 332, and the nut 333. DETAILED DESCRIPTION

[0027] In order to make the purpose, technical scheme and advantages of the utility model more clearly understood, the utility model will be further described in detail below with the help of the drawings and specific embodiments.

[0028] The technical scheme in the embodiments of the utility model will be described clearly and completely below with the help of the drawings in the embodiments of the utility model. Obviously, the described embodiments are only a part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all the other embodiments obtained by the person skilled in the art without creative labor belong to the protection scope of the utility model.

[0029] In the description of the utility model, it is understood that the orientation or position relationship indicated by the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise" and the like is the orientation or position relationship described based on the drawings, which is only for the convenience of describing the utility model and simplifying the description, and cannot be understood as indicating or implying that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the utility model.

[0030] In addition, the terms "first" and "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined with "first" and "second" can explicitly or implicitly include one or more features. In the description of the utility model, the meaning of "multiple" is two or more, unless otherwise specifically limited.

[0031] In the utility model, unless another definite provision and limitation, the terms "mount", "connect", "connect", "fix" and so on should do the broad sense understanding, for example, can be fixed connection, also can be detachable connection, or integral molding;Can be mechanical connection, also can be electrical connection;Can be direct connection, also can be indirectly connected through the intermediate medium, can be the intercommunication of two elements or the interaction of two elements.For the person skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0032] In the utility model, unless another definite provision and limitation, the first feature is "on" or "under" the second feature can include that the first and second features are in direct contact, or the first and second features are not in direct contact but are in contact through another feature between them.Moreover, the first feature "on", "above" and "above" the second feature includes that the first feature is directly above and obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature.The first feature "under", "below" and "below" the second feature includes that the first feature is directly below and obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0033] In the description of the specification, the description of the terms "one embodiment", "some embodiments", "example", "specific example" or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model.In this specification, the illustrative description of the above terms should not be understood as necessarily referring to the same embodiment or example.Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0034] In the process of starting the machine of the HDP-CVD (high-density plasma chemical vapor deposition) machine at the client, it is often necessary to manually adjust the aperture size of the side nozzle to control the local reaction gas flow, so as to meet the uniformity specification requirements of the film thickness.

[0035] In the prior art, the installation method of the side nozzle is usually manually installed and adjusted by an engineer, and the tightening degree between the side nozzle and the gas ring cannot be standardized, resulting in differences in process effect.At the same time, the installation angle between the side nozzle and the gas ring is also different when manually adjusted by the engineer, and the side nozzle will loosen to different degrees after the chamber temperature experiences several rises and falls, thereby causing local gas leakage, and finally causing the film thickness at the corresponding point of the wafer to change.In order to solve the above problems, the embodiment discloses a torsion tool 200 (300) capable of standardizing the installation of the side nozzle.

[0036] Please refer to Figures 1 to 3 In this first embodiment, the present embodiment discloses a normative side nozzle installation torque tool 100 for installing a side nozzle 200 as shown in Figure 1 to a gas ring, which is a process gas output ring in a process chamber of a thin film deposition process equipment, the normative side nozzle installation torque tool 100 comprises a torque screwdriver body 11 and a screwdriver bit 12 connected to the torque screwdriver body 11.

[0037] The screwdriver bit 12 comprises a claw head of a multi-claw self-centering structure, and a clamping opening 123 is arranged on the claw head for clamping the side nozzle.

[0038] The torque screwdriver body 11 is a conventional torque screwdriver (also known as torque screw or moment screwdriver, or torque wrench, etc.), and the principle of the torque screwdriver is that a torque value can be set in advance, when the fastener being tightened reaches the predetermined torque value, the internal clutch of the torque screwdriver is automatically disengaged, and a click, click, click sound is emitted, and such an action can be felt by hand, at this time, the force can be further increased, and the pre-set limit will not be exceeded.

[0039] Method for using the preset torque screwdriver:

[0040] 1. Set the required torque: the required torque can be set by the scale on the shaft cylinder, align the zero scale of the secondary scale ring with the center line on the cylinder, then rotate the shaft cylinder clockwise to increase the reading, and stop when the required torque value is reached.

[0041] 2. Correct use of the preset torque driver: after being set, the preset torque driver can be connected to various fasteners through the adapter, and tightened clockwise to measure the tightening torque. When the set value is reached, a "click, click, click..." sound will be emitted. The preset torque driver can be repeatedly used at the same set value until another torque value needs to be set.

[0042] Please refer to Figure 2 and Figure 3 The claw head comprises a connecting plate 121, at least three clamping arms 122 vertically extending from the outer side plate surface of the connecting plate 121, the clamping arms 122 collectively form the clamping opening 123, and the inner side plate surface of the connecting plate 121 is connected to the torque screwdriver body 11.

[0043] It can be understood that the screwdriver opening 12 and the torque screwdriver body 11 can be detachably connected or integrally formed. The torque screwdriver body 11 comprises a handle 111, a torque component 112 connected to the handle 111, and a screwdriver rod 113 connected to the torque component 112. The inner side surface of the connecting plate 121 is connected to the end of the screwdriver rod 113. The connecting plate 121 and the screwdriver rod 113 can be integrally formed or detachably connected.

[0044] The inner side surface of the clamping arm 122 is further provided with an anti-skid structure 1221.

[0045] In this embodiment, the anti-skid structure 1221 is a protruding thread. In other embodiments, the anti-skid structure 1221 can also be any anti-skid structure with large friction that can prevent the side nozzle 200 and the claw head from sliding relative to each other within a preset torque range.

[0046] In this embodiment, the clamping arm 122 is made of rubber. Specifically, the clamping arm 122 is made of a material with good mechanical properties, such as nitrile rubber. The clamping arm 122 made of rubber can avoid particles generated by the contact between the tooling and the side nozzle, which affects the cleanliness of the process chamber. At the same time, the clamping arm 122 made of rubber can avoid damage to the side nozzle caused by rigid contact between the clamping arm 122 and the side nozzle 200.

[0047] It can be understood that the claw head can also be other structures, and its main function is to achieve automatic centering of the side nozzle 200 and to tightly hold the outer wall of the side nozzle 200 to rotate synchronously. The specific structure includes but is not limited to the combination of the clamping arm 122 and the connecting plate 121 of this embodiment.

[0048] The inner diameter of the clamping opening 123 is less than 3mm larger than the outer diameter of the side nozzle 200. Specifically, the inner diameter of the clamping opening 123 is larger than the outer diameter of the main body of the side nozzle 200, and the difference between the diameters is less than 3mm.

[0049] In this embodiment, the number of clamping arms 122 is three, and the three clamping arms 122 are equally angularly distributed in a ring shape. In other embodiments, a plurality of clamping arms 122 are also arranged in an equally angularly distributed ring shape, so as to maintain the automatic centering of the side nozzle 200 and the uniform holding force.

[0050] Please refer to Figures 4 to 7 In this second embodiment, the torque tooling 300 for installing the side nozzle is used to install the side nozzle 200 as shown in FIG. 1A or FIG. 1B. Figure 1The side nozzle 200 is assembled to the gas ring, which is a process gas output ring in a process chamber of a thin film deposition process equipment, and the torque tool 300 for installing the side nozzle includes a torque screwdriver body 31 and a screwdriver head 32 connected to the torque screwdriver body 31.

[0051] The screwdriver head 32 includes a claw head of a multi-claw self-centering structure, and the claw head is provided with a clamping opening 320 for clamping the side nozzle.

[0052] The torque screwdriver body 31 is a conventional torque screwdriver (also known as a torque screw or moment screwdriver, or a torque wrench, etc.), and the principle of the torque screwdriver is that a torque value can be set in advance, when the fastener being tightened reaches the predetermined torque value, the internal clutch of the torque screwdriver is automatically disengaged, and a click, click, click sound is emitted, and such an action can be felt by hand, at this time, the force can be further increased, and the predetermined limit will not be exceeded.

[0053] Please refer to Figure 4 and Figure 5 again, the claw head includes a connecting plate 321, at least three clamping arms 322 vertically extending from the outer side plate surface of the connecting plate 321, the clamping arms 322 collectively enclose the clamping opening 320, and the inner side plate surface of the connecting plate 321 is connected to the torque component 312.

[0054] It can be understood that the screwdriver head 32 and the torque screwdriver body 31 can be detachably connected or can be an integral structure. The torque screwdriver body 31 includes a handle 311, a torque component 312 connected to the handle 311, and a screwdriver rod 313 connected to the torque component 312, the inner side plate surface of the connecting plate 321 is connected to the end of the screwdriver rod 313, and the connecting plate 321 and the screwdriver rod 313 can be an integral molding mechanism or a detachable connection structure.

[0055] Among them, the outer side of the clamping arm 322 is further provided with a locking piece 33, and the locking piece 33 is used to adjust the clamping force of the clamping opening 320 on the side nozzle 200.

[0056] Specifically, the locking piece 33 includes a clamp 331 and a screw 332 screwed to the clamp 331, the screw 332 is connected with a nut 333, and the clamp 331 is wrapped around the outer side of the clamping arm 322. Adjusting the tightness of the screw 332 can simultaneously adjust the clamping force of the clamp 331 on the clamping arm 322, so as to change the clamping force between the clamping opening 320 and the side nozzle 200.

[0057] In the embodiment, the clamping arms 322 are made of rubber. Specifically, the clamping arms 322 are made of intersecting materials with good mechanical properties, such as nitrile rubber, etc. The clamping arms 322 made of rubber can avoid the generation of particles due to the contact between the tooling and the side nozzle, thereby affecting the cleanliness of the process chamber. At the same time, the clamping arms 322 made of rubber can avoid damage to the side nozzle caused by rigid contact between the clamping arms 322 and the side nozzle 200.

[0058] It can be understood that the claw head can also have other structures, and the main function is to be able to realize the automatic centering of the side nozzle 200 and can tightly hold the outer wall of the side nozzle 200 to make it rotate synchronously. The specific structure includes, but is not limited to, the combined structure of the clamping arms 322 and the connecting plate 321 of the embodiment.

[0059] Specifically, the inner diameter of the clamping opening 320 is greater than the outer diameter of the main body of the side nozzle 200, and the difference between the diameters is less than 3 mm.

[0060] In the embodiment, the number of clamping arms 322 is three, and the three clamping arms 322 are equally angularly distributed in a ring shape. In other embodiments, a plurality of clamping arms 322 are also arranged in an equally angularly distributed ring shape with equal spacing, thereby maintaining the automatic centering of the side nozzle 200 and the uniform holding force.

[0061] The embodiment also provides a mounting method of a side nozzle and a gas ring, which is performed by the torque tool 100 or 300 capable of standardizing the mounting of the side nozzle according to any one of the above, and includes the following steps:

[0062] Firstly, the torque preset value of the torque screwdriver body 11 (31) is set according to the assembly specification requirements of the side nozzle 200 and the gas ring assembled with the side nozzle;

[0063] Secondly, the side nozzle 200 is inserted into the connecting hole on the gas ring, and the front end of the side nozzle 200 is provided with external threads 21 which can be screwed with the inner wall threads of the connecting hole of the gas ring. Specifically, the side nozzle 200 can be manually inserted into the connecting hole on the gas ring in this step, so that the side nozzle 200 and the gas ring are preliminarily assembled. Of course, this step can also be completed by using automatic equipment, such as a robot.

[0064] Thirdly, the torque tool 100 (or 300) capable of standardizing the mounting of the side nozzle is used to clamp the side nozzle 200, and the rotation is continued until the torque screwdriver reaches the torque preset value, and then the assembly of the side nozzle 200 and the gas ring is completed. If the claw head structure of the second embodiment is used, the locking force of the locking member 33 needs to be adjusted synchronously, so that the relative sliding between the claw head and the side nozzle 200 does not occur.

[0065] The torque tool of the normalizable side nozzle installation of the embodiment adopts a front pipeline cleaning module to simultaneously or step by step provide cleaning processes for process modules of at least two groups of machines, thereby improving the utilization rate of the front pipeline cleaning module, simplifying the structure, reducing the equipment occupied space, facilitating the machine maintenance, and reducing the device manufacturing cost.

[0066] The above is only used to further illustrate the technical content of the present application by way of examples, so that the reader can more easily understand, but does not represent that the embodiments of the present application are limited to this, any technical extension or re-creation made according to the present application is protected by the present application. The protection scope of the present application is subject to the claims.

Claims

1. A torque tool for normative side nozzle installation, characterized by, The utility model relates to a torque screwdriver and a side nozzle, and belongs to the technical field of tools. The utility model discloses a torque screwdriver and a side nozzle, and belongs to the technical field of tools. The utility model discloses a torque screwdriver and a side nozzle, and belongs to the technical field of tools.

2. The torque tool of claim 1, wherein, The utility model discloses a torque screwdriver and a side nozzle, and belongs to the technical field of tools.

3. The normotively side nozzle mountable torque tool of claim 2, wherein, The utility model discloses a torque screwdriver and a side nozzle, and belongs to the technical field of tools.

4. The normotively side nozzle mountable torque tool of claim 3, wherein, The utility model discloses a torque screwdriver and a side nozzle, and belongs to the technical field of tools.

5. The normotively side nozzle mountable torque tool of claim 2, wherein, The utility model discloses a torque screwdriver and a side nozzle, and belongs to the technical field of tools.

6. A normal side nozzle mountable torsion tool according to claim 5, characterized in that, The utility model discloses a torque screwdriver and a side nozzle, and belongs to the technical field of tools.

7. A torque tool with normative side nozzle mounting according to any one of claims 2 to 6, characterized in that, The utility model discloses a torque screwdriver and a side nozzle, and belongs to the technical field of tools.

8. The normotively side nozzle mountable torque tool according to claim 7, characterized in that The utility model discloses a torque screwdriver and a side nozzle, and belongs to the technical field of tools.

9. A normotively side nozzle mountable torsion tool according to claim 8, characterized in that, The utility model discloses a torque screwdriver and a side nozzle, and belongs to the technical field of tools. The utility model discloses a torque screwdriver and a side nozzle, and belongs to the technical field of tools. The utility model discloses a torque screwdriver and a side nozzle, and belongs to the technical field of tools. The utility model discloses a torque screwdriver and a side nozzle, and belongs to the technical field of tools. The utility model discloses a torque screwdriver and a side nozzle, and belongs to the technical field of tools. The utility model discloses a torque screwdriver and a side nozzle, and belongs to the technical field of tools. The utility model discloses a torque screwdriver and a side nozzle, and belongs to the technical field of tools. The utility model discloses a torque screwdriver and a side nozzle, and belongs to the technical field of tools. The utility model discloses a torque screwdriver and a side nozzle, and belongs to the technical field of tools. The utility model discloses a torque screwdriver and a side nozzle, and belongs to the technical field of tools. The utility model discloses a torque screwdriver and a side nozzle, and belongs to the technical field of tools. The utility model discloses a torque screwdriver and a side nozzle, and belongs to the technical field of tools. The utility model discloses a torque screwdriver and a side nozzle, and belongs to the technical field of tools. The utility model discloses a torque screwdriver and a side nozzle, and belongs to the technical field of tools. The utility model discloses a torque screwdriver and a side nozzle, and belongs to the technical field of tools. The utility model discloses a torque screwdriver and a side nozzle, and belongs to the technical field of tools. The utility model discloses a torque screwdriver and a side nozzle, and belongs to the technical field of tools. The utility model discloses a torque screwdriver and a side nozzle

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