Automatic grabbing device for thermal field assembly

Abstract

The utility model discloses a thermal field assembly automatic grabbing device and belongs to the technical field of semiconductor automatic production. The device comprises a cross-shaped assembly frame, a driving motor is arranged on one side of the cross-shaped assembly frame, a driving wheel is connected to an output shaft of the driving motor, a main driving belt is wound on the driving wheel, upper synchronizing wheels are arranged at the outer ends of the other two opposite frame arms of the cross-shaped assembly frame, and the upper synchronizing wheels are arranged on the outer ends of the other two opposite frame arms of the cross-shaped assembly frame. The main driving belt further bypasses the two upper synchronizing wheels at the same time, an anti-collapse supporting swing rod mechanism is arranged at the outer end of each frame arm of the cross-shaped assembly frame, and the two upper synchronizing wheels drive all the anti-collapse supporting swing rod mechanisms to rotate in the same direction. The lower side of the middle of the cross-shaped assembling frame is provided with a four-direction translation pin inserting mechanism, and the upper side of the middle of the cross-shaped assembling frame is provided with a quick-change disc. The automatic grabbing device can replace manual operation to automatically grab the thermal field assembly, the safety risk in the production process is reduced, the production efficiency is improved, and the production period is shortened.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of semiconductor automation production, and concretely relates to a hot field assembly automation grabbing device. BACKGROUND

[0002] Up to now, the single crystal furnace batch production has reached a large number scale, and the subsequent production scale will continue to grow. With the increase of the number of equipment, the efficiency of taking and placing the hot field assembly by manual operation has been difficult to guarantee the subsequent production demand, and manual operation has great safety hazards, and the operation consistency is also low, which affects the crystal growth quality, so at present, an automation device capable of completely replacing the manual operation action to grab the hot field assembly is needed. UTILITARY MODEL

[0003] The utility model is just for the above problem, makes up for the deficiency of prior art, provides a kind of hot field assembly automation grabbing device;The utility model can realize the automatic grabbing of hot field assembly to replace manual operation, reduce the security risk in production process, improve production efficiency, shorten production cycle.

[0004] To achieve the above object, the utility model adopts the following technical scheme.

[0005] The utility model provides a kind of hot field assembly automation grabbing device, it is characterized in that, including cross assembly frame, the side of cross assembly frame is provided with driving motor, the output shaft of driving motor is connected with driving wheel, and the main drive belt is wound on the driving wheel, and the outer end of the other two opposite frame arms of cross assembly frame is provided with upper synchronous wheel, and the main drive belt also simultaneously passes through two upper synchronous wheels, and the outer end of each frame arm of cross assembly frame is provided with anti-collapse support swing rod mechanism, and two upper synchronous wheels drive all anti-collapse support swing rod mechanism to rotate in the same direction, and the lower side of the middle part of cross assembly frame is provided with four-way translational pin mechanism, and the upper side of the middle part of cross assembly frame is provided with quick-change disc.

[0006] Further, the middle part of cross assembly frame is provided with two guide rollers, and the main drive belt also simultaneously passes through guide roller, so that the main drive belt is arranged in vertical bending in the middle part, and the direction is corresponding to the three frame arms of cross assembly frame.

[0007] Furthermore, each of the anti-collapse support swing arm mechanisms includes a fixed frame, a rotating rod, a lower synchronous wheel, and a swing arm. The fixed frame is fixed below the end of the frame arm of the cross assembly frame. The rotating rod is mounted on the fixed frame and passes through the fixed frame at both ends. The rotating rod can rotate within the fixed frame. The two upper synchronous wheels are fixedly connected to the upper ends of the corresponding two rotating rods. The lower synchronous wheel is fixed in the middle of the rotating rod and rotates simultaneously with the rotating rod. The lower synchronous wheels are connected by a driven belt. The swing arm is fixed at the lower end of the rotating rod.

[0008] Furthermore, all the swing arms are arc-shaped, and the four arc-shaped swing arms are arranged in the same direction towards the center.

[0009] Furthermore, two adjacent lower synchronizing pulleys form a group, and the two lower synchronizing pulleys in each group are connected by the driven belt.

[0010] Furthermore, the four-way translational pin insertion mechanism includes a slide table electric cylinder, four linkage mechanisms, four linear slide rails, and four pin plates. The slide table electric cylinder is mounted on the cross assembly frame and connected to one end of each of the four linkage mechanisms. The other end of each linkage mechanism is connected to one of the linear slide rails. The four linear slide rails are respectively located below each arm of the cross assembly frame and can slide linearly along the corresponding arm of the cross assembly frame. Each pin plate is connected to the end of each linear slide rail.

[0011] The beneficial effects of this utility model.

[0012] This invention achieves automated and precise placement of hot zone components, while meeting the production needs of hot zone components of different specifications, significantly improving production efficiency and reducing labor costs. The automated placement and handling improves the consistency and flatness of the hot zone components within the single crystal furnace, greatly enhancing crystal growth quality. Attached Figure Description

[0013] To make the technical problems solved, the technical solutions, and the beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0014] Figure 1 This is a schematic diagram of the lower-view axonometric structure of this utility model.

[0015] Figure 2 This is a side view of the structure of this utility model.

[0016] Marked in the figure: 1 is a cross assembly frame, 2 is a drive motor, 3 is a drive wheel, 4 is a main drive belt, 5 is an upper synchronous wheel, 6 is a quick-change disc, 7 is a guide roller, 8 is a fixed frame, 9 is a rotating rod, 10 is a lower synchronous wheel, 11 is a swing rod, 12 is a driven belt, 13 is a sliding table electric cylinder, 14 is a connecting rod mechanism, 15 is a linear slide rail, and 16 is a needle plate. DETAILED DESCRIPTION

[0017] In combination with the drawings, the embodiment provides a hot field assembly automatic grabbing device, which comprises a cross assembly frame 1, one side of the cross assembly frame 1 is provided with a drive motor 2, a drive wheel 3 is connected to an output shaft of the drive motor 2, a main drive belt 4 is wound around the drive wheel 3, the other two opposite frame arm outer ends of the cross assembly frame 1 are provided with upper synchronous wheels 5, the main drive belt 4 also simultaneously passes through the two upper synchronous wheels 5, two guide rollers 7 are arranged in the middle of the cross assembly frame 1, and the main drive belt 4 also simultaneously passes through the guide rollers 7, so that the main drive belt 4 is arranged to be vertically bent in the middle, the direction is corresponding to the three frame arms of the cross assembly frame 1, the direction of the main drive belt 4 is more tidy, space-saving and safer.

[0018] The drive motor 2 drives the drive wheel 3 to rotate, and the drive wheel 3 drives the two upper synchronous wheels 5 to synchronously rotate through the action of the main drive belt 4.

[0019] The outer end of each frame arm of the cross assembly frame 1 is provided with an anti-collapse support swing rod mechanism, and each anti-collapse support swing rod mechanism comprises a fixed frame 8, a rotating rod 9, a lower synchronous wheel 10 and a swing rod 11.

[0020] The fixed frame 8 is fixed below the frame arm end of the cross assembly frame 1, the rotating rod 9 is arranged on the fixed frame 8 and penetrates the fixed frame 8 at the upper and lower ends, the rotating rod 9 can rotate in the fixed frame 8, the two upper synchronous wheels 5 are fixedly connected with the upper ends of the corresponding two rotating rods 9, and the two upper synchronous wheels 5 drive the corresponding two rotating rods 9 to actively rotate.

[0021] The lower synchronous wheel 10 is fixed to the middle of the rotating rod 9 and rotates with the rotating rod 9, two adjacent lower synchronous wheels 10 form a group, and the two lower synchronous wheels 10 in each group are connected by a driven belt 12. In this way, the two lower synchronous wheels 10 fixed on the two actively rotating rotating rods 9 are synchronously actively rotated, the two actively rotating lower synchronous wheels 10 drive the other lower synchronous wheel 10 in the same group to be driven to rotate through the action of the driven belt 12, and then drive the other two rotating rods 9 to be driven to rotate, so as to realize the function of one drive motor 2 driving two upper synchronous wheels 5, and then driving all the anti-collapse support swing rod mechanisms to rotate in the same direction.

[0022] The swing rod 11 is fixed at the lower end of the rotating rod 9, and the swing rod 11 is in a circular arc shape, and the four swing rods 11 are arranged in the same direction towards the center, and the rotation of each rotating rod 9 drives the swing rod 11 to rotate, so as to realize the function of avoiding the inner wall of the single crystal furnace and the heating coil.

[0023] The four-way horizontal moving pin mechanism is arranged at the lower side of the middle part of the cross assembly frame 1, and comprises a sliding table electric cylinder 13, four connecting rod mechanisms 14, four linear slide rails 15 and four pin plates 16.

[0024] The sliding table electric cylinder 13 is arranged on the cross assembly frame 1 and connected with one end of the four connecting rod mechanisms 14, and the other end of each connecting rod mechanism 14 is connected with one linear slide rail 15, respectively. The four linear slide rails 15 are arranged below the corresponding frame arms of the cross assembly frame 1 and can slide horizontally along the frame arms of the cross assembly frame 1, and each pin plate 16 is connected at the end of each linear slide rail 15. Through the driving of the sliding table electric cylinder 13 on each connecting rod mechanism 14, the linear guide rail is driven to slide horizontally by the action of the connecting rod mechanism 14, the vertical lifting action is converted into the horizontal pushing action, and finally the four-way horizontal pushing action of the four pin plates 16 can be realized to complete the hot field component grabbing action.

[0025] The quick change disc 6 is arranged at the upper side of the middle part of the cross assembly frame 1 and can be quickly connected with the main quick change disc 6 of the robot to complete the power supply operation.

[0026] The automatic extraction work flow of the device is that the single crystal furnace cover is automatically opened, the hot field component is driven into the single crystal furnace cavity by the six-axis mechanical arm driving device.

[0027] It can be understood that the above specific description of the utility model is only used for illustration of the utility model and is not limited to the technical solutions described in the utility model embodiment. The ordinary skilled in the art should understand that the utility model can still be modified or replaced equivalently to achieve the same technical effect, as long as the use needs are met, which is within the protection scope of the utility model.

Claims

1. A thermal field assembly automated gripping device, characterized by, The utility model provides a cross assembly frame (1) is provided with a drive motor (2) on one side, the output shaft of drive motor (2) is connected with drive wheel (3), the drive wheel (3) is wound with main drive belt (4), the other two opposite frame arms outer end of cross assembly frame (1) is provided with upper synchronous wheel (5), main drive belt (4) also simultaneously passes through two upper synchronous wheel (5), the outer end of every frame arm of cross assembly frame (1) is provided with anti-collapse support swing lever mechanism, two upper synchronous wheel (5) drives all anti-collapse support swing lever mechanism to rotate in the same direction, the middle lower side of cross assembly frame (1) is provided with four-way translational pin mechanism, the middle upper side of cross assembly frame (1) is provided with quick change disc (6).

2. The automated hot cell assembly gripping device of claim 1, wherein, Two guide rollers (7) are arranged in the middle of the cross assembly frame (1), and the main drive belt (4) also simultaneously passes through the guide rollers (7), so that the main drive belt (4) is arranged in a vertical bending manner in the middle and has a walking direction corresponding to the three frame arms of the cross assembly frame (1).

3. The thermal field component automated gripping device of claim 1, wherein, Each anti-collapse support swing lever mechanism includes a fixed frame (8), a rotating rod (9), a lower synchronous wheel (10), and a swing lever (11). The fixed frame (8) is fixed below the end of the frame arm of the cross assembly frame (1). The rotating rod (9) is arranged on the fixed frame (8) and passes through the fixed frame (8) at the upper and lower ends. The rotating rod (9) can rotate in the fixed frame (8). The upper synchronous wheels (5) are fixedly connected to the upper ends of the corresponding two rotating rods (9). The lower synchronous wheels (10) are fixed to the middle of the rotating rod (9) and rotate simultaneously with the rotating rod (9). The lower synchronous wheels (10) are connected by a driven belt (12). The swing lever (11) is fixed to the lower end of the rotating rod (9).

4. The automated hot cell assembly gripper of claim 3, wherein, The swing levers (11) are all arc-shaped, and the four arc-shaped swing levers (11) are arranged in the same direction towards the center.

5. The thermal field component automated gripping device of claim 3, wherein, Two adjacent lower synchronous wheels (10) form a group, and the two lower synchronous wheels (10) in each group are connected by the driven belt (12).

6. The thermal field component automated gripping device of claim 1, wherein, The four-way translational pin mechanism includes a sliding table electric cylinder (13), four connecting rod mechanisms (14), four linear slide rails (15), and four needle plates (16). The sliding table electric cylinder (13) is arranged on the cross assembly frame (1) and connected to one end of the four connecting rod mechanisms (14). The other end of each connecting rod mechanism (14) is connected to one linear slide rail (15). The four linear slide rails (15) are arranged below the frame arms of the cross assembly frame (1) and can slide linearly along the corresponding frame arms of the cross assembly frame (1). Each needle plate (16) is connected to the end of each linear slide rail (15).

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