Inorganic salt evaporator
By installing baffles in the inorganic salt vapor deposition machine and controlling their movement, the time consumption problem during line source switching is solved, enabling rapid switching and reducing interference, thus improving the efficiency of the inorganic salt vapor deposition machine.
Patent Information
- Application Number
- CN202520121337.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-17
- Publication Date
- 2025-12-30
- Estimated Expiration
- 2035-01-17
AI Technical Summary
Existing inorganic salt vapor deposition machines require waiting for the line source to cool down and heat up when switching line sources for material verification, resulting in excessive time consumption.
A baffle is installed in the inorganic salt vapor deposition machine. The baffle is moved by a motor to block the material evaporated from the unused wire source, keeping the power supply on and reducing interference during wire source switching.
This reduced the line source switching time from over 11 hours to 1 minute, significantly improving the efficiency of the inorganic salt vapor deposition machine.
Smart Images
Figure CN223738100U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the field of evaporation, especially to an inorganic salt evaporation machine. BACKGROUND
[0002] The inorganic salt evaporation machine can be used for the preparation of metal electrodes, perovskite solar cells, semiconductor thin films and other devices. The inorganic salt evaporation machine can include multiple line sources for realizing evaporation.
[0003] If the existing inorganic salt evaporation machine needs to verify the material evaporated by one of the line sources alone, it can only be realized by turning off the power supply of the other line sources. When the line source is working, the temperature is 400-700℃. The line source takes about 3-5 hours to heat up after the power is turned on, and about 8-13 hours to cool down after the power is turned off. When the existing inorganic salt evaporation machine switches to other line sources for verification, it needs to wait for the previously verified line source to turn off the power supply and cool down to the appropriate temperature before turning on the power supply of the next line source to be verified. However, due to the long time for the line source to cool down and heat up, the existing inorganic salt evaporation machine will consume a lot of time when verifying the materials evaporated by different line sources.
[0004] In order to overcome the above-mentioned defects existing in the prior art, the technical field urgently needs an inorganic salt evaporation machine that can reduce the time consumed for switching line sources and reduce the interference of other line sources when verifying materials evaporated by different line sources. SUMMARY
[0005] The following gives a brief summary of one or more aspects to provide a basic understanding of these aspects. This summary is not an exhaustive overview of all contemplated aspects, and is neither intended to identify key or critical elements of all aspects nor to delineate the scope of any or all aspects. Its sole purpose is to present some concepts of one or more aspects in a simplified form as a prelude to the more detailed description to be given later.
[0006] In order to overcome the above-mentioned defects existing in the prior art, the utility model provides an inorganic salt evaporation machine that can reduce the time consumed for switching line sources and reduce the interference of other line sources when verifying materials evaporated by different line sources.
[0007] Specifically, the above-mentioned inorganic salt evaporation machine provided according to the present disclosure includes a substrate and multiple line sources, and further includes multiple baffles located between the substrate and the multiple line sources and respectively located directly above the line sources to block the materials evaporated by the line sources during the verification process. The two ends of the baffle are connected to the guide rails of the chamber bottom through the connecting plate perpendicular to the chamber bottom to respectively realize the movement of the baffle.
[0008] Preferably, in an embodiment of the present disclosure, a motor is further included for controlling the movement of the baffle.
[0009] Preferably, in an embodiment of the present disclosure, the width of the plurality of baffles is greater than the width of the linear source to cover the linear source.
[0010] Preferably, in an embodiment of the present disclosure, the plurality of baffles includes a verification baffle and a shielding baffle, and the plurality of linear sources includes a verification linear source and a shielding linear source, the verification baffle is located above the gap between the verification linear source and the adjacent linear source, and the shielding baffle is located directly above the shielding linear source.
[0011] Preferably, in an embodiment of the present disclosure, the verification baffle is a plurality of verification baffles to achieve combined verification of multiple materials.
[0012] Preferably, in an embodiment of the present disclosure, the width of the plurality of baffles is less than the width of the gap between the plurality of linear sources.
[0013] Preferably, in an embodiment of the present disclosure, the plurality of linear sources includes a power source, and the power source is in an on state during the verification process.
[0014] Preferably, in an embodiment of the present disclosure, the plurality of linear sources includes four linear sources, and the materials in the four linear sources are CSBR, PBI2, PBCL2, and PBBR, respectively.
[0015] Preferably, in an embodiment of the present disclosure, the linear source includes a plurality of nozzles.
[0016] Preferably, in an embodiment of the present disclosure, the guide rail is a linear guide rail.
[0017] The inorganic salt evaporation machine provided by the present disclosure can reduce the time of the inorganic salt evaporation machine when switching the linear source to verify different materials by installing a baffle above each linear source. BRIEF DESCRIPTION OF DRAWINGS
[0018] The above features and advantages of the present disclosure can be better understood by reading the detailed description of embodiments of the present disclosure in conjunction with the following drawings, in which the components are not necessarily drawn to scale and components having similar related functions or features can have the same or similar reference numbers. The present disclosure is not limited to the embodiments described herein, but can be practiced with modification and alteration within the scope of the appended claims.
[0019] Figure 1 A schematic diagram of a single verification linear source 110 of an existing inorganic salt machine is shown;
[0020] Figure 2 A schematic diagram of a single verification linear source 120 of an existing inorganic salt machine is shown;
[0021] Figure 3 A side view of an inorganic salt evaporation machine is shown according to some embodiments of the present disclosure;
[0022] Figure 4 A top view of an inorganic salt evaporation machine is shown according to some embodiments of the present disclosure;
[0023] Figure 5 A front view of an inorganic salt evaporation machine is shown according to some embodiments of the present disclosure;
[0024] Figure 6 A schematic diagram of the inorganic salt evaporation machine 300 verifying the line source S1 alone is shown according to some embodiments of the present disclosure; and
[0025] Figure 7 A schematic diagram of the inorganic salt evaporation machine 300 verifying the line source S2 alone is shown according to some embodiments of the present disclosure.
[0026] Reference signs:
[0027] 110, 120, 130, 140: line source;
[0028] 300: evaporation machine;
[0029] 310: substrate;
[0030] 321: nozzle;
[0031] 322: power supply;
[0032] 330: baffle;
[0033] 331: baffle;
[0034] 332: baffle;
[0035] 340: guide rail; and
[0036] S1, S2, S3, S4: line source. DETAILED DESCRIPTION
[0037] The present utility model is described in detail below in conjunction with the drawings and specific embodiments. Note that the aspects described below in conjunction with the drawings and specific embodiments are only exemplary and should not be understood as limiting the scope of protection of the present utility model in any way.
[0038] In the description of the utility model, it needs to explain, unless another explicit provision and limitation, the term "installation", "link", "connection" should do the broad sense understanding, for example, can be fixed connection, also can be detachable connection, or integrally connected; can be mechanical connection, also can be electrical connection; can be directly connected, also can be indirectly connected through the intermediate medium, can be two elements inside the communication. For ordinary skilled in the art, the above-mentioned terms can be understood in the specific meaning of the utility model according to specific circumstances.
[0039] In addition, "upper", "lower", "left", "right", "top", "bottom", "horizontal", "vertical" used in the following description should be understood as the orientation shown in the paragraph and the related drawings. The relative terms are only for the convenience of description, and they do not represent that the device described should be manufactured or operated in a particular orientation, so they should not be understood as a limitation on the utility model.
[0040] It can be understood that although the terms "first", "second", "third" and the like can be used herein to describe various components, regions, layers and / or parts, these components, regions, layers and / or parts should not be limited by these terms, and these terms are only used to distinguish different components, regions, layers and / or parts. Therefore, the first component, region, layer and / or part discussed below can be referred to as the second component, region, layer and / or part without departing from some embodiments of the utility model.
[0041] As described above, if the existing inorganic salt evaporation machine needs to verify the material evaporated by one of the line sources alone, it can only turn off the power supply of other line sources to achieve it. When the line source is working, the temperature is 400-700 DEG C. The temperature rising time of the line source after the power is turned on is about 3-5 hours, and the temperature falling time of the line source after the power is turned off is about 8-13 hours. When the existing inorganic salt evaporation machine is switched to other line source for verification, it needs to wait for the line source verified before to turn off the power supply and cool down to the appropriate temperature, and then turn on the power supply of the next line source to be verified. However, since the line source takes a long time to cool down and heat up, the existing inorganic salt evaporation machine will consume a lot of time when verifying the materials evaporated by different line sources.
[0042] Please refer to Figure 1 and Figure 2 , Figure 1 shows a schematic diagram of the existing inorganic salt machine platform verifying the line source 110 alone, Figure 2 shows a schematic diagram of the existing inorganic salt machine platform verifying the line source 120 alone.
[0043] As Figure 1As shown, the existing inorganic salt equipment includes four line sources: line source 110, line source 120, line source 130, and line source 140. None of the line sources have a main-shutter or cell-shutter installed above them. Because of the lack of main-shutters or cell-shutters, when verifying the material deposited by one of the line sources individually, the inorganic salt equipment must shut down the power to the other line sources. Figure 1 As shown, existing inorganic salt testing equipment can only turn on the power to the wire source 110 when individually verifying the material in the wire source 110; that is, the power is set to the "Power On" state. For individual verification, the power to other wire sources is always in the "Power Off" state.
[0044] like Figure 2 As shown, when individually verifying wire source 120, to reduce interference from materials in other wire sources, the power supplies of other wire sources need to be turned off and maintained at a suitable temperature. For example, to reduce interference from the previously verified wire source 110, the inorganic salt instrument needs to first turn off the power to wire source 110 and wait for it to cool down to a suitable temperature. In some embodiments, the inorganic salt instrument can cool the temperature of wire source 110 from 400–700°C to 100°C. Then, the power to wire source 120 is turned on again, and the temperature of wire source 120 is increased for verification. Therefore, the existing inorganic salt instrument consumes at least 11 hours in the process of switching wire sources to verify different materials.
[0045] In order to overcome the above-mentioned defects in the existing technology, this utility model provides an inorganic salt vapor deposition machine that can reduce the time lost by switching line sources and reduce interference from other line sources when verifying materials vapor deposition by different line sources.
[0046] Please refer to Figure 3 , Figure 4 and Figure 5 , Figure 3 A side view of an inorganic salt vapor deposition machine provided according to some embodiments of the present disclosure is shown. Figure 4 A top view of an inorganic salt vapor deposition machine provided according to some embodiments of the present disclosure is shown. Figure 5 A front view of an inorganic salt vapor deposition machine provided according to some embodiments of the present disclosure is shown.
[0047] like Figures 3 to 5 As shown, the inorganic salt evaporation machine 300 may include a substrate 310 and multiple line sources. Figures 3 to 5 In the embodiment shown, the multiple line sources can be four line sources, namely line source S1, line source S2, line source S3 and line source S4.
[0048] In some embodiments, the materials in the four line sources can be CSBR (cesium bromide), PBI2 (lead iodide), PBCL2 (lead chloride), and PBBR (lead bromide), respectively. Those skilled in the art can understand that, in other embodiments, the number of line sources and the materials in the line sources of the inorganic salt evaporation machine can be set according to actual conditions.
[0049] As shown in Figure 4 and Figure 5 , the line source can also include a plurality of nozzles 321. The plurality of line sources can include a power supply 322, and the power supply 322 of the plurality of line sources can be in an on state during the verification process. In the on state of the power supply 322, each line source sprays the material in the line source upward through the nozzles 321 to evaporate the material.
[0050] The inorganic salt evaporation machine 300 can add a baffle above each line source to solve the problem of excessive time consumption when the existing inorganic salt machine switches the line source to verify different materials.
[0051] Please continue to refer to Figure 3 , the inorganic salt evaporation machine 300 can include a plurality of baffles 330, which are located between the substrate 310 and the plurality of line sources and are located directly above each line source to block the material evaporated by the line source during the verification process. The baffle 330 can be a cell-shutter.
[0052] Please refer to Figures 3 to 5 , both ends of the baffle 330 of the inorganic salt evaporation machine 300 can be connected to the guide rail 340 of the chamber bottom through the connecting plate 331 perpendicular to the chamber bottom of the inorganic salt evaporation machine, so as to realize the movement of the baffle 330 respectively. In some embodiments, the guide rail 340 can be a linear motion guide (LM Guide). In addition, the inorganic salt evaporation machine 300 can also include a motor, which can be used to control the movement of the baffle 330 of the inorganic salt evaporation machine 300.
[0053] As shown in Figure 4 , in some embodiments, the baffles 330 located between the substrate 310 and the plurality of line sources can also be located above the gap between adjacent line sources. During the verification process of the inorganic salt evaporation machine 300, the baffles 330 are driven by the motor to move directly above the corresponding line source, for example, to move uniformly to the left, so as to block the material evaporated by the line source.
[0054] In some embodiments, the width of the plurality of baffles 330 can be greater than the width of the line source, so as to cover the line source and better achieve the blocking effect.
[0055] Further, the plurality of baffles 330 can include a verification baffle and a shielding baffle. Accordingly, the plurality of line sources can include a verification line source and a shielding line source. The line source that the inorganic salt evaporation machine 300 verifies in the verification process is the verification line source, and the baffle corresponding to the verification line source is the verification baffle. In the verification process, to reduce the interference of the materials in other line sources, the other line sources can be shielded. The line source that is shielded is the shielding line source, and the baffle corresponding to the shielding line source is the shielding baffle.
[0056] To achieve the verification of the verification line source and reduce the interference of the shielding line source, the verification baffle is located in the gap between the verification line source and the adjacent line source, and the shielding baffle is located directly above the shielding line source.
[0057] Please refer to Figure 6 , Figure 6 A schematic diagram of the inorganic salt evaporation machine 300 provided according to some embodiments of the present disclosure is shown, which verifies the line source S1 alone.
[0058] As shown in Figure 6 , at the beginning of the verification, the power sources of the line source S1, the line source S2, the line source S3, and the line source S4 can all be in the Power On state, and the materials evaporated by the plurality of line sources are all blocked by the baffles 330. When verifying the line source S1 alone, that is, the line source S1 is the verification line source, only the baffle 331 above the line source S1 needs to be opened. The baffle 331 is a verification baffle. The inorganic salt evaporation machine 300 can open the baffle 331 by moving the baffle 331 to the left to the upper part of the gap between the line source S1 and the adjacent line source S2.
[0059] The line source S2, the line source S3, and the line source S4 are shielding line sources. To reduce the interference of the shielding line sources, the shielding baffles of the shielding line sources are not moved and are still located directly above the shielding line sources, continuing to block the materials evaporated by the shielding line sources.
[0060] Please refer to Figure 7 , Figure 7 A schematic diagram of the inorganic salt evaporation machine 300 provided according to some embodiments of the present disclosure is shown, which verifies the line source S2 alone.
[0061] As shown in Figure 7 , in the verification process, the inorganic salt evaporation machine 300 can verify the line source S2 alone after verifying the line source S1 alone. When verifying the line source S2 alone, the line source S2 is the verification line source, and the line source S1, the line source S3, and the line source S4 are shielding line sources. The inorganic salt evaporation machine 300 can first move the baffle 331 of the line source S1 from the upper part of the gap between the line source S1 and the adjacent line source S2 back to the upper part of the line source S1, thereby closing the baffle 331 above the line source S1, so as to shield the influence of the materials of the line source S1 when verifying the line source S2 alone.
[0062] Afterwards, the inorganic salt evaporation machine 300 can open the shutter 332 by moving the shutter 332 above the line source S2 to above the gap between the line source S2 and the adjacent line source S3 to the left, thereby achieving the individual verification of the line source S2. By opening and closing the shutter, the influence of other line sources that do not need to be verified can be shielded, thereby greatly reducing the temperature rise and fall time of the inorganic salt evaporation machine 300 when switching verification.
[0063] In some embodiments, the verification shutter can be multiple verification shutters. The inorganic salt evaporation machine 300 can simultaneously verify multiple materials. The shutter corresponding to the verification line source to be verified is a verification shutter, and the shutter corresponding to the shielding line source is a shielding shutter.
[0064] By setting the verification shutter above the gap between the verification line source and the adjacent line source and setting the shielding shutter directly above the shielding line source, the combined verification of multiple materials can be achieved by opening the verification shutter and closing the shielding shutter.
[0065] In some embodiments, the width of the multiple shutters can be less than the width of the gap between the multiple line sources, so as to avoid shielding other line sources and their nozzles as much as possible.
[0066] The existing inorganic salt evaporation machine takes more than 11 hours to switch line sources to verify materials of different line sources in order to reduce the interference of other line sources. The inorganic salt evaporation machine provided by the present disclosure only needs 1 minute to switch line sources while reducing the interference of other line sources.
[0067] In summary, the inorganic salt evaporation machine provided by the present disclosure can reduce the time of switching line sources to verify different materials by installing a shutter above each line source.
[0068] The foregoing description of the present disclosure has been presented for purposes of illustration and description. It is not intended to be exhaustive or to limit the present disclosure to the precise form disclosed, and various modifications and variations are possible in light of the above teachings or can be acquired from practice of the present disclosure. The exemplary embodiments were chosen and described in order to explain the principles of the present disclosure and its best mode applied to practical applications. It will be recognized by those skilled in the art that various modifications and changes can be made to the above exemplary embodiment without departing from the scope of the present disclosure. Thus, it is intended that the present disclosure not be limited to the particular embodiment disclosed as the best mode contemplated for carrying out this present disclosure, but that the present disclosure will include all embodiments falling within the scope of the appended claims, and their equivalents.
Claims
1. An inorganic salt evaporation machine comprising a substrate and a plurality of line sources, characterized by, A plurality of baffle plates are arranged between the substrate and the plurality of line sources and above the line sources respectively to block the material evaporated by the line sources during the verification process, and the two ends of the baffle plates are connected to the guide rails of the chamber bottom through the connecting plates perpendicular to the chamber bottom of the inorganic salt evaporation machine to realize the movement of the baffle plates respectively.
2. The inorganic salt evaporator as claimed in claim 1, wherein A motor is further included to control the movement of the baffle plates.
3. The inorganic salt evaporator as claimed in claim 1, wherein The width of the plurality of baffle plates is greater than the width of the line sources to cover the line sources.
4. The inorganic salt evaporator as claimed in claim 1, wherein The plurality of baffle plates include verification baffle plates and shielding baffle plates, and the plurality of line sources include verification line sources and shielding line sources, The verification baffle plates are arranged above the gaps between the verification line sources and adjacent line sources, and the shielding baffle plates are arranged above the shielding line sources.
5. The inorganic salt evaporator as claimed in claim 4, wherein The verification baffle plates are a plurality of verification baffle plates to realize the combined verification of a plurality of materials.
6. The inorganic salt evaporator as claimed in claim 1, wherein The width of the plurality of baffle plates is less than the width of the gaps between the plurality of line sources.
7. The inorganic salt evaporator as claimed in claim 1, wherein The plurality of line sources include a power supply, and the power supply is in an open state during the verification process.
8. The inorganic salt evaporator as claimed in claim 1, wherein The plurality of line sources include four line sources, and the materials in the four line sources are CSBR, PBI2, PBCL2 and PBBR respectively.
9. The inorganic salt evaporator as claimed in claim 1, wherein The line sources include a plurality of nozzles.
10. The inorganic salt evaporator as claimed in claim 1, wherein The guide rails are linear guide rails.