Water cooling screen and single crystal furnace

Abstract

The utility model discloses a water cooling screen and a single crystal furnace. The water cooling screen comprises a cylindrical body, a water inlet channel and a water outlet channel; an annular cooling water channel is formed in the body, the water inlet channel and the water outlet channel are both communicated with the annular cooling water channel, an annular hollow cavity is further formed in the body, and the annular cooling water channel is surrounded by the hollow cavity; the annular cooling water channel is divided into an inner wall straight wall section and an inner wall inclined wall section in the circumferential direction of the body; the inner side wall of the inner wall straight wall section is provided with a wavy section, and the wavy section of the inner side wall of the inner wall straight wall section extends in the axial direction of the body. The inner side wall of the inner wall inclined wall section is gradually away from the central axis of the body from bottom to top. The cooling effect of the water cooling screen is better.

Description

Technical Field

[0001] This utility model relates to a water-cooled screen and a single-crystal furnace. Background Technology

[0002] During the growth of monocrystalline silicon, latent heat of crystallization is generated. A water-cooled screen is used to absorb this latent heat, helping to maintain an ideal temperature balance between the melt and the crystallization surface within the furnace. By adjusting the cooling effect of the water-cooled screen, the growth rate and quality of the crystal can be influenced. Optimized water-cooled screen design can accelerate heat exchange, increase the constant-diameter pulling speed, thereby improving the growth rate and production efficiency of monocrystalline silicon and reducing production costs. Furthermore, a well-designed water-cooled screen can reduce heater energy consumption, achieving energy conservation and cost reduction.

[0003] Currently, the inner wall of the water-cooled screen in single crystal furnaces is a sloping planar structure with a large diameter and a distance from the crystal rod. Relatively speaking, the amount of latent heat of crystallization that can be carried away from the surface of the crystal rod is limited, which restricts the improvement of crystal growth rate and affects output.

[0004] Therefore, how to improve the cooling effect of water-cooled screen structures is a technical problem that needs to be solved by those skilled in the art. Utility Model Content

[0005] This invention provides a water-cooled screen and a single-crystal furnace to improve the cooling effect of the water-cooled screen, increase the growth rate of the crystal rod, and reduce energy consumption.

[0006] The present invention achieves the above objectives through the following technical solutions.

[0007] On one hand, this utility model provides a water-cooled screen, including a cylindrical body, an inlet water channel, and an outlet water channel; an annular cooling water channel is formed within the body, and both the inlet water channel and the outlet water channel are connected to the annular cooling water channel.

[0008] The body also contains an annular hollow cavity that surrounds the annular cooling water channel;

[0009] The annular cooling water channel along the circumference of the body is divided into an inner wall straight section and an inner wall inclined section;

[0010] The inner wall of the straight inner wall section has a wavy section, and the wavy section of the inner wall of the straight inner wall section extends along the axial direction of the body.

[0011] The inner sidewall of the inclined inner wall section gradually moves away from the central axis of the body in an upward direction.

[0012] In some embodiments, the inner sidewall of the inner inclined wall segment has a truncated conical outer peripheral surface shape.

[0013] In some embodiments, the wavy section of the inner sidewall of the straight inner wall section is equidistant from the central axis of the body at the same elevation.

[0014] In some embodiments, the orthographic projection of the inner sidewall of the inner straight wall segment onto a plane perpendicular to the central axis of the body is a first orthographic projection.

[0015] The orthographic projection of the inner sidewall of the inclined inner wall section onto the plane is the second orthographic projection;

[0016] The first orthographic projection is adjacent to the second orthographic projection and does not overlap.

[0017] In some embodiments, the angle range occupied by the orthographic projection of the inner sidewall of the inner inclined wall segment onto a plane perpendicular to the central axis of the body is less than 180°.

[0018] The inclined section of the inner wall occupies a smaller angle range, while the straight section occupies a larger angle range, resulting in better heat exchange, which further benefits the growth of the crystal rod.

[0019] In some embodiments, the angle range occupied by the orthographic projection of the inner sidewall of the inner inclined wall segment onto a plane perpendicular to the central axis of the body is greater than or equal to 60° and less than or equal to 120°.

[0020] If the angle range occupied by the inclined section of the inner wall is too small, the straight section of the inner wall may block the image sensor.

[0021] If the angle range occupied by the inclined section of the inner wall is too large, the effect of accelerating the heat dissipation of the crystal rod will be reduced.

[0022] Note: The above angle range refers to the angle range of a sector area centered on the intersection of the central axis of the main body and the plane of the orthographic projection.

[0023] In some embodiments, the body includes a heat shield that is annular, with its lower end connected to the lower end wall of the body and its upper end connected to the upper middle part of the outer side wall of the body. The heat shield, the lower end wall, and the outer side wall together form the hollow cavity.

[0024] In some embodiments, the body is divided into a frustum segment and a cylindrical segment from bottom to top, wherein the bottom diameter of the frustum segment is smaller than the top diameter of the frustum segment, and the top diameter of the frustum segment is equal to the diameter of the cylindrical segment.

[0025] The heat insulation cover is divided into three sections from bottom to top: the first section, the second section, and the third section.

[0026] The first section of the heat insulation cover is opposite to the frustum section of the main body, and the lateral distance between the first section of the heat insulation cover and the outer side wall of the main body is equal.

[0027] The second section of the heat shield has a cylindrical outer circumferential shape, and the lower part of the second section of the heat shield is opposite to the frustum section of the main body, while the upper part of the second section of the heat shield is opposite to the cylindrical section of the main body.

[0028] The third section of the heat shield has a frustum-shaped outer circumference.

[0029] The hollow cavity at its lower part should not affect the cooling effect of the annular cooling water channel as much as possible.

[0030] The hollow cavity has its lateral dimensions appropriately increased at the top, thereby improving the heat insulation effect.

[0031] In some embodiments, the water inlet channel is connected to the upper end wall of the straight inner wall section.

[0032] This design makes it easier for cold water to flow into the annular cooling water channel.

[0033] It should be noted that the water outlet channel is preferably connected to the inner sidewall of the inclined inner wall section to ensure uniform cooling of the crystal rod.

[0034] The upper end of the inner sidewall of the straight inner wall section is connected to the junction of the upper end wall and the outer sidewall of the main body, or connected to the outer sidewall of the main body.

[0035] It should be noted that the functions of the outlet waterway and the inlet waterway are interchangeable.

[0036] On the other hand, this utility model provides a single crystal furnace, including the aforementioned water-cooled screen;

[0037] It also includes an image sensor disposed above the inclined section of the inner wall;

[0038] The angle occupied by the image sensor in the circumferential direction of the water-cooled screen body is within the angle range occupied by the inclined inner wall segment in the circumferential direction of the water-cooled screen body.

[0039] The technical effects of this utility model are as follows.

[0040] The inclined inner wall section is designed to facilitate the image sensor inside the single crystal furnace to observe the growth status of the single crystal rod and avoid obstructing the image sensor's field of view.

[0041] The annular hollow chamber serves as an insulation chamber, improving the insulation effect and reducing the heat exchange between the heat inside the single crystal furnace and the cooling water in the annular cooling channel inside the water-cooled screen. This reduces the energy consumption of the single crystal furnace on the one hand, and effectively improves the cooling effect of the cooling water on the crystal rod on the other.

[0042] The straight inner wall section is closer to the crystal rod in terms of horizontal distance, which accelerates the removal of the latent heat of crystallization. On the other hand, the inner circumferential surface of the straight inner wall section is wavy, which increases the heat exchange area, improves the heat dissipation effect of the crystal rod, and increases the growth rate of the crystal rod.

[0043] Furthermore, the annular hollow chamber encroaches on the space of the annular cooling water channel, making the annular cooling water channel narrower. Combined with the wave-shaped structure of the inner wall of the annular cooling water channel, the water flow velocity is further increased, thereby enhancing the heat dissipation effect and improving the growth rate of the crystal rod. Attached Figure Description

[0044] Figure 1 This is a perspective view of the water-cooled screen according to an embodiment of the present invention.

[0045] Figure 2 This is a perspective view of the water-cooled screen from another angle, according to an embodiment of this utility model.

[0046] Figure 3 This is a cross-sectional view of the water-cooled screen according to an embodiment of the present invention.

[0047] Figure 4 yes Figure 3 A magnified view of a portion of the image.

[0048] Figure 5 This is a cross-sectional view of the single crystal furnace of this utility model.

[0049] The attached figures are labeled as follows:

[0050] 100. Water-cooled screen;

[0051] 11. Outer wall; 12. Heat insulation cover; 131. Straight inner wall section; 132. Sloping inner wall section;

[0052] 14. Hollow cavity; 15. Inlet water channel; 16. Outlet water channel; 17. Upper wall;

[0053] 18. Annular cooling water channel; 19. Lower end wall;

[0054] 151. First vertical intake section; 152. First horizontal intake section;

[0055] 153. Second vertical intake section;

[0056] 161. First vertical water outlet section; 162. First horizontal water outlet section;

[0057] 163. Second vertical water outlet section;

[0058] 200. Crystal rod;

[0059] 300. Image sensor;

[0060] 400. Furnace lid;

[0061] 500. Main heater;

[0062] 600, furnace drum;

[0063] 700. Crucible. Detailed Implementation

[0064] The present invention will be further described below with reference to specific embodiments, but the scope of protection of the present invention is not limited thereto.

[0065] Note: The vertical positional relationship defined in this utility model refers to the positional relationship of the water-cooled screen when it is in working state.

[0066] Example 1

[0067] Figure 1 This is a perspective view of the water-cooled screen according to an embodiment of the present invention. Figure 2 This is a perspective view of the water-cooled screen from another angle, according to an embodiment of this utility model. Figure 3 This is a cross-sectional view of the water-cooled screen according to an embodiment of the present invention. Figure 4 yes Figure 3 A magnified view of a portion of the image.

[0068] refer to Figures 1 to 4 Embodiment 1 of this utility model provides a water-cooled screen 100 including a cylindrical body, an inlet water channel 15 and an outlet water channel 16; an annular cooling water channel 18 is formed in the body, and the inlet water channel 15 and the outlet water channel 16 are both connected to the annular cooling water channel 18.

[0069] The body also contains an annular hollow chamber 14, which surrounds an annular cooling water channel 18.

[0070] The circumferential annular cooling water channel 18 along the body is divided into an inner straight wall section 131 and an inner inclined straight wall section 132;

[0071] The inner wall of the straight inner wall section 131 has a wavy section, and the wavy section of the inner wall of the straight inner wall section 131 extends along the axial direction of the body.

[0072] The inner sidewall of the inner inclined straight wall section 132 gradually moves away from the central axis of the body in the direction from bottom to top.

[0073] The inner sidewall of the inner inclined straight wall section 132 has a truncated conical outer circumferential shape.

[0074] The wavy section of the inner sidewall of the straight inner wall section 131 is equidistant from the central axis of the body at the same elevation position.

[0075] The orthographic projection of the inner sidewall of the straight inner wall section 131 onto a plane perpendicular to the central axis of the body is the first orthographic projection.

[0076] The orthographic projection of the inner sidewall of the inner inclined straight wall section 132 onto this plane is the second orthographic projection;

[0077] The first orthographic projection and the second orthographic projection are adjacent and do not overlap.

[0078] The angle range occupied by the orthographic projection of the inner sidewall of the inner inclined straight wall section 132 on the plane perpendicular to the central axis of the body is less than 180°.

[0079] In comparison, the inner inclined straight wall section 132 occupies a smaller angle range, while the inner straight wall section 131 occupies a larger angle range, resulting in better heat exchange, which further benefits the growth of the crystal rod 200.

[0080] The angle occupied by the orthographic projection of the inner sidewall of the inner inclined straight wall section 132 on a plane perpendicular to the central axis of the body is greater than or equal to 60° and less than or equal to 120°.

[0081] If the angle range occupied by the inner inclined straight wall section 132 is too small, the inner straight wall section 131 may block the image sensor 300.

[0082] If the angle range occupied by the inner inclined straight wall section 132 is too large, the effect of accelerating the heat dissipation of the crystal rod 200 will be worse.

[0083] The main body includes a heat insulation cover 12, which is annular. The lower end of the heat insulation cover 12 is connected to the lower end wall 19 of the main body, and the upper end of the heat insulation cover 12 is connected to the upper middle part of the outer side wall 11 of the main body. The heat insulation cover 12, the lower end wall 19 and the outer side wall 11 together form a hollow cavity 14.

[0084] The body is divided into a frustum section and a cylindrical section from bottom to top. The bottom diameter of the frustum section is smaller than the top diameter of the frustum section, and the top diameter of the frustum section is equal to the diameter of the cylindrical section.

[0085] The heat insulation cover 12 is divided into three sections from bottom to top: the first section, the second section, and the third section.

[0086] The first section of the heat shield 12 is opposite to the frustum section of the main body, and the lateral distance between the first section of the heat shield 12 and the outer side wall 11 of the main body is equal.

[0087] The second section of the heat shield 12 has a cylindrical outer circumferential shape, and the lower part of the second section of the heat shield 12 is opposite to the frustum section of the main body, while the upper part of the second section of the heat shield 12 is opposite to the cylindrical section of the main body.

[0088] The third section of the heat shield 12 has a frustum-shaped outer circumference.

[0089] The hollow chamber 14 is designed to minimize its impact on the cooling effect of the annular cooling channel 18 at its lower part.

[0090] The hollow cavity 14 has its lateral dimensions appropriately increased at its upper part, thereby improving the heat insulation effect.

[0091] The main body is made of stainless steel, and the connections of the internal components are welded and fixed.

[0092] The water inlet channel 15 is connected to the upper end wall 17 of the inner inclined straight wall section 132.

[0093] The water inlet channel 15 is divided into the first vertical water inlet section 151, the first horizontal water inlet section 152, and the second vertical water inlet section 153 from top to bottom.

[0094] The first vertical water intake section 151 and the second vertical water intake section 153 both extend in the vertical direction.

[0095] The first water intake horizontal section 152 extends horizontally.

[0096] The lower part of the second water inlet vertical section 153 passes through the upper end wall 17 and through the inner side wall of the inner wall vertical section 131.

[0097] The upper end of the inner sidewall of the inner straight wall section 131 is connected to the junction of the upper end wall 17 and the outer sidewall 11 of the main body.

[0098] The water outlet channel 16 is divided into the first vertical water outlet section 161, the first horizontal water outlet section 162, and the second vertical water outlet section 163 from top to bottom.

[0099] The first vertical water outlet section 161 and the second vertical water outlet section 163 both extend in the vertical direction.

[0100] The first horizontal section 162 extends horizontally.

[0101] The lower part of the second water outlet vertical section 163 passes through the upper end wall 17 and through the inner side wall of the inner inclined vertical wall section 132.

[0102] Example 2

[0103] Figure 5 This is a cross-sectional view of the single crystal furnace of this utility model.

[0104] refer to Figure 5 and combined Figures 1 to 4 Example 2 provides a single crystal furnace, including the water-cooled screen 100 of Example 1;

[0105] It also includes an image sensor 300 disposed above the inner inclined straight wall section 132;

[0106] The angle occupied by the image sensor 300 in the circumferential direction of the water-cooled screen 100 body is within the range of the angle occupied by the inner inclined straight wall section 132 in the circumferential direction of the water-cooled screen 100 body.

[0107] In other words, the orthographic projection of the image sensor 300 onto a plane perpendicular to the central axis of the water-cooled screen 100 body is located within the fan-shaped region defined by the orthographic projection of the inner inclined straight wall section 132 onto this plane, and the center of this fan-shaped region is located on the central axis of the water-cooled screen 100 body.

[0108] The single crystal furnace further includes components such as a furnace lid 400, a furnace cylinder 600, a crucible 700, and a main heater 500. This part can be designed according to existing technology.

[0109] Specifically, the crucible 700 is used to hold liquid semiconductor materials.

[0110] The main heater 500 surrounds the upper outer part of the crucible 700 and is used to heat the crucible 700.

[0111] The water-cooled screen 100 is positioned above the crucible 700 and opposite the central region of the crucible 700. The diameter of the lower opening of the water-cooled screen 100 is smaller than the diameter of the upper opening of the water-cooled screen 100.

[0112] The furnace cylinder 600 surrounds the outside of the main heater 500. The furnace cover 400 covers the upper opening of the furnace cylinder 600.

[0113] The image sensor 300 is located below the top of the furnace cover 400.

[0114] When using this single crystal furnace to pull single crystals, the inner inclined straight wall section 132 is designed to facilitate the image sensor 300 inside the single crystal furnace to observe the growth state of the single crystal rod 200 and avoid obstructing the field of view of the image sensor 300.

[0115] The annular hollow chamber 14 serves as a heat insulation chamber, improving the heat insulation effect and reducing the heat exchange between the heat inside the single crystal furnace and the cooling water in the annular cooling water channel 18 inside the water-cooled screen 100. This reduces the energy consumption of the single crystal furnace on the one hand, and effectively improves the cooling effect of the cooling water on the crystal rod 200 on the other hand.

[0116] The inner straight wall section 131 is closer to the horizontal distance of the crystal rod 200, thereby accelerating the removal of the latent heat of crystallization of the crystal rod 200; on the other hand, the inner circumferential surface of the inner straight wall section 131 is wavy, which increases the heat exchange area, improves the heat dissipation effect of the crystal rod 200, and increases the growth rate of the crystal rod 200.

[0117] Furthermore, the annular hollow chamber 14 encroaches on the space of the annular cooling water channel 18, making the annular cooling water channel 18 narrower. Combined with the wave-shaped structure of the inner sidewall of the annular cooling water channel 18, the water flow velocity is further increased, thereby enhancing the heat dissipation effect and improving the growth rate of the crystal rod 200.

[0118] This utility model is not limited to the above-described embodiments. Any modifications, improvements, or substitutions that can be conceived by those skilled in the art without departing from the essential content of this utility model fall within the scope of this utility model.

Claims

1. A water-cooled screen comprising a cylindrical body, a water inlet channel and a water outlet channel; an annular cooling water channel is formed in the body, and the water inlet channel and the water outlet channel are both in communication with the annular cooling water channel, characterized in that, an annular hollow chamber is further formed in the body, and the annular hollow chamber surrounds the annular cooling water channel; the annular cooling water channel is divided into an inner wall straight wall section and an inner wall inclined wall section along the circumference of the body; the inner side wall of the inner wall straight wall section has a wave-shaped section, and the wave-shaped section of the inner side wall of the inner wall straight wall section extends along the axial direction of the body; the inner side wall of the inner wall inclined wall section gradually moves away from the central axis of the body in the direction from bottom to top. The inner side wall of the inner wall inclined wall section has a truncated conical outer peripheral surface shape. The wave-shaped section of the inner side wall of the inner wall straight wall section is equal in distance to the central axis of the body at the same height position. 4.The water-cooled screen according to claim 1, characterized in that, the normal projection of the inner side wall of the inner wall straight wall section on a plane perpendicular to the central axis of the body is a first normal projection, the normal projection of the inner side wall of the inner wall inclined wall section on the plane is a second normal projection; and the first normal projection and the second normal projection are adjacent and have no overlap. 5.The water-cooled screen according to claim 1, characterized in that, the angle range occupied by the normal projection of the inner side wall of the inner wall inclined wall section on a plane perpendicular to the central axis of the body is less than 180°.

2. The water cooled panel of claim 1 wherein, 6.The water-cooled screen according to claim 5, characterized in that, the angle range occupied by the normal projection of the inner side wall of the inner wall inclined wall section on a plane perpendicular to the central axis of the body is greater than or equal to 60° and less than or equal to 120°.

3. The water screen of claim 1, wherein 7.The water-cooled screen according to claim 1, characterized in that, the body comprises a heat shield, the heat shield is annular, the lower end of the heat shield is connected with the lower end wall of the body, the upper end of the heat shield is connected with the middle upper part of the outer side wall of the body, and the heat shield, the lower end wall and the outer side wall jointly enclose the hollow chamber. 8.The water-cooled screen according to claim 7, characterized in that, the body is divided into a circular truncated cone section and a circular cylinder section from bottom to top, the bottom diameter of the circular truncated cone section is less than the top diameter of the circular truncated cone section, and the top diameter of the circular truncated cone section is equal to the diameter of the circular cylinder section; the heat shield is divided into a first section, a second section and a third section from bottom to top; the first section of the heat shield is opposite to the circular truncated cone section of the body, and the transverse distance between the first section of the heat shield and the outer side wall of the body is equal; the second section of the heat shield has a circular cylindrical outer peripheral surface shape, and the lower part of the second section of the heat shield is opposite to the circular truncated cone section of the body, and the upper part of the second section of the heat shield is opposite to the circular cylinder section of the body; the third section of the heat shield has a circular truncated cone outer peripheral surface shape. The water inlet channel is connected with the upper end wall of the inner wall straight wall section. It comprises the water-cooled screen according to any one of claims 1 to 9; It further comprises an image sensor arranged above the inner wall inclined wall section. ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ 9. The water screen of claim 1, wherein, ​ 10. A single crystal furnace characterized by comprising: ​ ​ The image sensor occupies an angle in the circumferential direction of the water cooling shield body within an angle range occupied by the inner wall inclined wall section in the circumferential direction of the water cooling shield body.

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