Quartz diffusion plate gap measuring tool

Abstract

The utility model discloses a quartz diffusion plate gap measuring tool which comprises a fixing frame and a measuring mechanism, the fixing frame comprises a base, an adapter rod and a measuring connecting plate, the base is provided with an arc-shaped structure and an arc-shaped clamping groove which are matched with the edge of an MOCVD cavity base, the adapter rod extends in the vertical direction and is vertically connected to the top of the base, and the measuring mechanism is arranged on the measuring connecting plate. The measurement connecting plate is horizontally connected to the upper part of the adapter rod; the measuring mechanism comprises a carrier plate, a standard ruler and a measuring tongue, the carrier plate extends in the vertical direction and is connected with the measuring connecting plate through the upper portion of the carrier plate in the mode that the carrier plate can be relatively close to or away from the adapter rod, and the standard ruler extends in the vertical direction and is fixedly connected to the inner side face of the carrier plate; the measuring tongue is arranged on the outer side face of the carrier plate in a height-adjustable mode and right faces the standard ruler. The quartz diffusion plate gap measuring tool provided by the utility model is convenient to measure, high in measuring efficiency and high in measuring accuracy.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor measurement equipment technology, and in particular to a tool for measuring the gap of quartz diffuser plates. Background Technology

[0002] The existing POWDEC MOCVD uses a quartz diffuser plate with a three-layer stacked structure. There are gaps between the adjacent layers to allow the MO source and electronic specialty gas to diffuse outward. The quartz diffuser plate needs to be removed for cleaning during each maintenance. Therefore, the height gap of the quartz diffuser plate needs to be measured each time it is installed to avoid excessive gap error that could have a significant impact on the gas flow rate in the cavity.

[0003] In existing technologies, most measurements are taken manually using measuring tools. This often leads to measurement errors and inaccuracies due to different measuring methods and varying senses. Additionally, the measurement efficiency is low. Utility Model Content

[0004] This application provides a quartz diffuser gap measuring tool, which avoids the shaking and tilting that can occur when manually measuring with a ruler. At the same time, the measurement method is standardized, the measurement is simple, and the measurement data is more accurate. It can intuitively confirm whether the height around the diffuser is consistent, thereby ensuring that the airflow can diffuse evenly.

[0005] This application provides a quartz diffuser plate gap measurement tool, including a fixing frame and a measurement mechanism. The fixing frame includes a base, an adapter rod and a measurement connecting plate. The base is provided with an arc-shaped structure and an arc-shaped slot that match the edge of the MOCVD cavity base. The adapter rod extends vertically and is vertically connected to the top of the base. The measurement connecting plate is horizontally connected to the upper part of the adapter rod.

[0006] The measuring mechanism includes a carrier plate, a standard ruler, and a measuring tongue. The carrier plate extends vertically and is connected to the measuring connecting plate at its upper part in a manner that allows it to be relatively close to or away from the adapter rod. The standard ruler extends vertically and is fixedly connected to the inner side of the carrier plate. The measuring tongue is disposed on the outer side of the carrier plate in a height-adjustable manner and faces the standard ruler.

[0007] In one possible implementation, the adapter rod is a cuboid rod or a cylindrical rod, the measuring connecting plate is sleeved on the upper part of the adapter rod with a clearance fit, and a first set screw for fixing the adapter rod is installed on the outer side of the measuring connecting plate.

[0008] In one possible implementation, the measuring connecting plate has a hollow structure at one end away from the adapter rod. The carrier plate is located within the hollow structure and can be relatively close to or away from the adapter rod within the hollow structure. A strip groove is formed on the side wall of the hollow structure. The strip groove extends along the moving direction of the carrier plate. A second set screw is installed in the strip groove to fix the carrier plate when it moves into place within the hollow structure.

[0009] In one possible implementation, the measuring tongue is connected to the carrier plate via a measuring housing, the measuring tongue is connected to an adjusting rod that protrudes to the outside of the measuring housing, the carrier plate has a through groove that mates with the measuring tongue, allowing the measuring tongue to penetrate the carrier plate and extend to the inside of the carrier plate, and the standard ruler is located on one side of the through groove.

[0010] In one possible implementation, the outer side of the carrier plate is provided with a trapezoidal groove, the measuring housing is provided with a trapezoidal structure that mates with the trapezoidal groove, and the inner side of the carrier plate is provided with connecting screws for connecting the carrier plate and the trapezoidal structure.

[0011] In one possible implementation, the adjusting rod extends horizontally or vertically, wherein when the adjusting rod extends vertically, it protrudes upward or downward to the outside of the measuring housing.

[0012] In one possible implementation, the measuring housing is provided with a pressure plate and a bottom plate, the pressure plate and the bottom plate being respectively connected to the top and bottom surfaces of the measuring tongue.

[0013] In one possible implementation, the adjusting rod protrudes upward from the measuring housing, and an elastic element connects the substrate and the bottom wall of the inner cavity of the measuring housing.

[0014] In one possible implementation, a fine-tuning block is connected to the top of the tablet, and a fine-tuning screw is provided on the top of the measuring housing, with the fine-tuning screw facing the top of the fine-tuning block.

[0015] Beneficial effects: Compared with the prior art, the quartz diffuser plate gap measuring tool provided in this application uses a carrier plate to drive the measuring tongue to be inserted into the gap of the diffuser plate. Then, the measuring tongue is adjusted so that its upper surface is in contact with the upper surface of the gap, and then the scale value is read by a standard ruler. Then, the measuring tongue is adjusted again so that its lower surface is in contact with the lower surface of the gap, and then the scale value is read by a standard ruler. Thus, the actual height of the gap can be directly determined by the thickness of the measuring tongue and the scale values ​​read twice. The measurement method is standard and can solve the problem of inaccurate measurement due to shaking, tilting, and other issues caused by hand-held rulers. The measurement data is more accurate and can be intuitively confirmed whether the height of the diffuser plate is consistent around the perimeter, thereby ensuring that the airflow can diffuse evenly and the measurement efficiency is high.

[0016] These and other objects, features and advantages of this utility model will be fully realized through the following detailed description. Attached Figure Description

[0017] Figure 1 A schematic diagram of the quartz diffuser plate gap measuring tool of this application is shown.

[0018] Figure 2 An enlarged structural schematic diagram of the measuring housing in this application is shown.

[0019] Figure 3 An enlarged schematic diagram of the internal structure of the measurement housing in this application is shown. Detailed Implementation

[0020] The following description is intended to disclose the present invention so that those skilled in the art can implement it. The preferred embodiments described below are merely examples, and other obvious variations will occur to those skilled in the art. The basic principles of the present invention defined in the following description can be applied to other embodiments, modifications, improvements, equivalents, and other technical solutions that do not depart from the spirit and scope of the present invention.

[0021] Those skilled in the art should understand that, in the disclosure of this specification, the terms "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, the above terms should not be construed as limitations on this utility model.

[0022] It is understood that the term "a" should be understood as "at least one" or "one or more", that is, in one embodiment, the number of an element can be one, while in another embodiment, the number of the element can be multiple, and the term "a" should not be understood as a limitation on the number.

[0023] refer to Figures 1 to 3 This application provides a quartz diffuser plate gap measurement tool, including a fixing frame 10 and a measurement mechanism 20. The fixing frame 10 includes a base 11, an adapter rod 12, and a measurement connecting plate 13. The base 11 has an arc-shaped structure 111 and an arc-shaped slot 101 that match the edge of the MOCVD cavity base. In one embodiment, the arc-shaped structure 111 on the base 11 has an inner arc length of 70.13 mm, an outer arc length of 80.1 mm, and a width of 50 mm. The arc-shaped slot 101 has a width of 5 mm. The adapter rod 12 extends vertically and is vertically connected to the top of the base 11. The measurement connecting plate 13 is horizontally connected to the upper part of the adapter rod 12.

[0024] The measuring mechanism 20 includes a carrier plate 21, a standard ruler 22, and a measuring tongue 23. The carrier plate 21 extends vertically and is connected to the measuring connecting plate 13 at its upper part in a manner that allows it to be relatively close to or away from the adapter rod 12. The standard ruler 22 extends vertically and is fixedly connected to the inner side of the carrier plate 21. Meanwhile, the measuring tongue 23 is disposed on the outer side of the carrier plate 21 in a height-adjustable manner and faces the standard ruler 22.

[0025] After the measuring tool is assembled, it is placed in position with the arc-shaped structure 111 and the arc-shaped slot 101 as the reference. The height of the measuring tongue 23 is roughly adjusted first, and then the measuring tongue 23 is moved inward by the carrier plate 21 so that the measuring tongue 23 is inserted into the gap of the diffuser plate. Then, the height of the measuring tongue 23 is adjusted so that its upper surface is in contact with the upper surface of the gap. At this time, the reading of the standard ruler 22 is read. Then, the measuring tongue is adjusted so that its lower surface is in contact with the lower surface of the gap. The reading of the standard ruler 22 is read again. The actual height of the diffuser plate gap can be directly calculated and determined. The measurement is convenient and the method is standard. It can solve the problem of inaccurate measurement due to shaking, tilting and other hand techniques when using a ruler. The measurement data is more accurate and can be directly confirmed to see whether the height of the diffuser plate is consistent, thus ensuring that the airflow can diffuse evenly. The measurement efficiency is high.

[0026] In one embodiment, the adapter rod 12 is a cuboid rod or a cylindrical rod, and the measuring connecting plate 13 is sleeved on the upper part of the adapter rod 12 with a clearance fit. The outer side of the measuring connecting plate 13 is equipped with a first set screw 131 for fixing the adapter rod 12. This allows the horizontal height position of the measuring connecting plate 13 to be adjusted, thereby increasing the height stroke of the measuring tongue 23. This makes the measuring tool suitable for measuring the diffuser plate gap in different height ranges, and has a wide range of applications.

[0027] In one embodiment, the measuring connecting plate 13 has a hollow structure 102 at one end away from the adapter rod 12, and the carrier plate 21 is located inside the hollow structure 102 and can be relatively close to or away from the adapter rod 12 within the hollow structure 102. That is, the hollow structure 102 extends along the length direction of the measuring connecting plate 13. Meanwhile, the side wall of the hollow structure 102 has a strip groove 103, wherein the strip groove 103 extends along the moving direction of the carrier plate 21, and a second set screw 132 is installed in the strip groove 103 to fix the carrier plate 21 when it moves into place within the hollow structure 102. When the carrier plate 21 moves relatively closer to or away from the adapter rod 12 within the hollow structure 102, the hollow structure 102 can guide the carrier plate 21. On the other hand, the cooperation between the second set screw 132 and the strip groove 103 can also guide the carrier plate 21, so that the carrier plate 21 can drive the measuring tongue 23 to move stably closer to or away from the adapter rod 12 to carry out the measurement operation. When it is necessary to move the carrier plate 21, it is only necessary to loosen the second set screw 132. When it is moved into place, tighten the second set screw 132, and then read the scale of the standard ruler 22.

[0028] In one embodiment, the measuring tongue 23 is connected to the carrier plate 21 via the measuring housing 30. The measuring tongue 23 is connected to an adjusting rod 31. The adjusting rod 31 protrudes to the outside of the measuring housing 30 to facilitate adjustment of the height of the measuring tongue 23. The carrier plate 21 has a through groove that mates with the measuring tongue 23, allowing the measuring tongue 23 to penetrate the carrier plate 21 and extend to its inner side. The standard ruler 22 is located on one side of the through groove.

[0029] In one embodiment, the outer surface of the carrier plate 21 is provided with a trapezoidal groove 201, and the measuring housing 30 is provided with a trapezoidal structure that mates with the trapezoidal groove 201. The inner surface of the carrier plate 21 is provided with connecting screws 24 for connecting the carrier plate 21 and the trapezoidal structure. Thus, the stability of the measuring housing 30 connected to the carrier plate 21 is ensured by the cooperation of the trapezoidal groove 201 and the trapezoidal structure. After the measuring housing 30 is placed in position, it is then fixed in place by the connecting screws 24.

[0030] In one embodiment, the adjusting rod 31 extends horizontally or vertically, wherein when the adjusting rod 31 extends vertically, the adjusting rod 31 protrudes upward or downward to the outside of the measuring housing 30, thereby allowing the height of the measuring tongue 23 to be adjusted above or below the measuring housing 30.

[0031] In one embodiment, the measuring housing 30 is provided with a pressure plate 32 and a bottom plate 33. The pressure plate 32 and the bottom plate 33 are respectively connected to the top and bottom surfaces of the measuring tongue 23, thereby ensuring the measuring stability of the measuring tongue 23 through the cooperation of the pressure plate 32 and the bottom plate 33.

[0032] More preferably, the adjusting rod 31 protrudes upward from the measuring housing 30, and an elastic element 34, such as four miniature springs, is connected between the base plate 33 and the bottom wall of the inner cavity of the measuring housing 30. In this way, the elastic element 34 can provide elastic support for the measuring tongue 23. When adjusting the height of the measuring tongue 23, the adjusting rod 31 can be slowly pressed down or slowly raised, resulting in better adjustment stability.

[0033] Because the gap between the diffuser plates is small, adjusting the height of the measuring tongue 23 solely by adjusting the rod 31 may still result in a small error. Therefore, a fine-tuning block 35 is connected to the top of the pressure plate 32, and a fine-tuning screw 36 is provided on the top of the measuring housing 30, with the fine-tuning screw 36 facing the top of the fine-tuning block 35. This allows the height of the measuring tongue 23 to be slowly adjusted by rotating the fine-tuning screw 36, thereby further improving the measurement accuracy of the diffuser plate gap.

[0034] Those skilled in the art should understand that the embodiments of the present invention described above and shown in the accompanying drawings are merely examples and do not limit the present invention. The advantages of the present invention have been fully and effectively realized. The functions and structural principles of the present invention have been shown and explained in the embodiments, and any modifications or variations may be made to the implementation of the present invention without departing from the stated principles.

Claims

1. A quartz diffusion plate gap measuring tool characterized by, The utility model relates to a fixed frame and measuring mechanism, the fixed frame includes base, adapter rod and measuring connecting plate, the base is equipped with the arc structure and arc clamping groove which match with MOCVD cavity base edge, the adapter rod extends along the vertical, and is connected in the top of base perpendicularly, the measuring connecting plate is connected in the upper portion of adapter rod horizontally, The measuring mechanism includes carrier plate, standard ruler and measuring tongue, the carrier plate extends along the vertical, and is connected with the measuring connecting plate through the upper portion in the way of being able to be relatively close or far away from the adapter rod, the standard ruler is fixedly connected on the inner side of carrier plate and extends along the vertical, and the measuring tongue is arranged on the outer side of carrier plate in the way of being able to adjust height and faces the standard ruler.

2. The quartz diffuser plate gap metrology tool of claim 1, wherein, The adapter rod is cuboid rod or cylinder rod, the measuring connecting plate is sleeved on the upper portion of adapter rod in the way of clearance fit, and the first locking screw for fixing the adapter rod is installed on the outer side of measuring connecting plate.

3. The quartz diffuser plate gap measurement tool of claim 1, wherein, The end of measuring connecting plate away from the adapter rod is provided with hollow structure, the carrier plate is located in the hollow structure and can be relatively close or far away from the adapter rod in the hollow structure, the side wall of hollow structure is provided with strip-shaped slot, the strip-shaped slot extends along the moving direction of carrier plate, and the second locking screw is installed in the strip-shaped slot to fix the carrier plate when the carrier plate moves in place in the hollow structure.

4. The quartz diffuser plate gap measurement tool of claim 3, wherein, The measuring tongue is connected with the carrier plate through measuring shell, the adjusting rod is connected with the measuring tongue, the adjusting rod protrudes to the outer side of measuring shell, the carrier plate is provided with through slot matched with the measuring tongue, so that the measuring tongue can extend to the inner side of carrier plate through the carrier plate, and the standard ruler is located on one side of through slot.

5. The quartz diffuser plate gap measurement tool of claim 4, wherein, The outer side of carrier plate is provided with trapezoidal slot, the measuring shell is provided with trapezoidal structure matched with the trapezoidal slot, and the inner side of carrier plate is provided with connecting screw for connecting the carrier plate and trapezoidal structure.

6. The quartz diffuser plate gap measurement tool of claim 4, wherein, The adjusting rod extends along the horizontal direction or extends along the vertical direction, wherein when the adjusting rod extends along the vertical direction, the adjusting rod protrudes upward or downward to the outer side of measuring shell.

7. The quartz diffuser plate gap measurement tool of claim 6, wherein, The pressing plate and the bottom plate are arranged in the measuring shell, and the pressing plate and the bottom plate are connected with the top surface and the bottom surface of the measuring tongue respectively.

8. The quartz diffuser plate gap measurement tool of claim 7, wherein, The adjusting rod protrudes upward to the measuring shell, and the elastic member is connected between the bottom plate and the bottom wall of the inner cavity of measuring shell.

9. The quartz diffuser plate gap measurement tool of claim 8, wherein, The top of pressing plate is connected with fine adjustment block, and the top of measuring shell is provided with fine adjustment screw matched with the top of fine adjustment block.

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