Pipeline angle measuring device

Abstract

The utility model provides a pipeline angle measuring device. The device comprises a fixing assembly, an abutting assembly, a display assembly and an adjusting piece. The display assembly comprises a dial and a pointer, the pointer is rotatably connected with the dial, the abutting assembly comprises a first abutting piece and a second abutting piece, the first abutting piece is rotatably connected with the adjusting piece, the first abutting piece is fixedly connected with the pointer, the adjusting piece is slidably connected with one end of the fixing assembly, and the dial is fixedly connected with the adjusting piece. The second abutting piece is slidably connected with the other end of the fixing assembly, and the first abutting piece and the second abutting piece are used for jointly abutting against the two ends of the to-be-measured pipeline so that the pointer can rotate on the dial to measure the angle of the to-be-measured pipeline. The device is easy to operate, facilitates the improvement of the measurement efficiency, is reasonable in layout of all parts, is stable and reliable in structure, can achieve the quick angle measurement of to-be-measured pipelines at various angles, is wide in application range, is high in adaptability, and can guarantee the precision of the measured angle.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of pipeline measurement, in particular to a pipeline angle measurement device. BACKGROUND

[0002] In the semiconductor production process, a variety of special substances are needed for the manufacture of chips. Among them, key substances such as ultra-pure gas (for example, gas used in etching, doping, etc. Process) and corrosive chemical reagents (such as chemical liquids used for cleaning and etching the surface of the chip) need to be transported through various pipelines to ensure the smooth progress of the production process. The accuracy of the installation angle of the pipeline has a crucial influence on the medium transportation and the quality and performance consistency of the final semiconductor chip production.

[0003] Due to the complexity and diversity of the pipeline layout in the semiconductor production environment and the stringent requirements for high-precision measurement, conventional angle measurement tools, such as ordinary protractors and general angle measurement instruments, are difficult to accurately measure the angle of the semiconductor pipeline. For example, when measuring the angle of the pipeline with an ordinary protractor, it needs to be attached to the pipeline for measurement. Since the ordinary protractor cannot closely fit the outer contour of the pipeline with a certain angle, it is easy to result in low measurement accuracy. Furthermore, the existing measurement methods generally have poor measurement accuracy, are cumbersome to operate, and cannot adapt to pipelines of various diameters, which seriously restricts the fine development of semiconductor production processes and the improvement of production efficiency.

[0004] Therefore, there is an urgent need for a pipeline angle measurement device to solve the above technical problems. Content of the utility model

[0005] Therefore, in order to overcome the defects of the prior art, the present application provides a pipeline angle measurement device, which can solve the problem that conventional angle measurement tools cannot accurately measure the angle of the semiconductor pipeline.

[0006] The embodiment of the present application provides a pipeline angle measurement device, which comprises a fixing assembly, an abutting assembly, a display assembly and an adjusting piece; the display assembly comprises a scale disc and a pointer, the pointer is rotatably connected with the scale disc, the abutting assembly comprises a first abutting piece and a second abutting piece, the first abutting piece is rotatably connected with the adjusting piece, the first abutting piece is fixedly connected with the pointer, the adjusting piece is slidably connected with one end of the fixing assembly, the scale disc is fixedly connected with the adjusting piece, the second abutting piece is slidably connected with the other end of the fixing assembly, and the first abutting piece and the second abutting piece are used to abut the two ends of the pipeline to be measured, so that the pointer rotates on the scale disc to measure the angle of the pipeline to be measured.

[0007] Optionally, the fixing assembly comprises a support and a guide, the guide is vertically arranged at the center of the support, the guide is slidably connected with the adjusting member, and the support is slidably connected with the second abutting member.

[0008] Optionally, a first guide groove is arranged on one side surface of the support, the first guide groove is used for accommodating one end of the second abutting member, so that the second abutting member can slide along the guide groove.

[0009] Optionally, a second guide groove is arranged along the length direction of the guide, and the second guide groove is in a hollow state.

[0010] Optionally, a through hole groove is arranged at the center of the adjusting member, the cross-sectional shape of the through hole groove is the same as the cross-sectional shape of the guide, and the cross-sectional area of the through hole groove is the same as the cross-sectional area of the guide, so that the adjusting member can be sleeved on the guide and can slide along the guide.

[0011] Optionally, the pipeline angle measuring device further comprises a first connecting member;

[0012] A first connecting hole is arranged on the side of the first abutting member connected with the adjusting member, a second connecting hole is arranged on the side of the adjusting member perpendicular to the direction of the slot of the through hole groove, a third connecting hole is arranged at the center of the dial, and a fourth connecting hole is arranged on the side of the indicating needle away from the needle end, the first connecting member is arranged through the first connecting hole, the second connecting hole, the through hole groove, the third connecting hole and the fourth connecting hole to connect the first abutting member, the adjusting member, the dial and the indicating needle into one body.

[0013] Optionally, an abutting recess is arranged on the side of the first abutting member opposite to the support, the abutting recess comprises a plurality of abutting surfaces connected with each other, and each abutting surface can abut against the pipeline to be measured.

[0014] An abutting recess is arranged on the side of the second abutting member away from the support, the abutting recess comprises a plurality of abutting surfaces connected with each other, and each abutting surface can abut against the pipeline to be measured.

[0015] Optionally, a straight line determined by the lowest points of the abutting recesses of the first abutting member and the second abutting member is parallel to the plane where the dial is located.

[0016] Optionally, the pipeline angle measuring device further comprises a second connecting member;

[0017] The dial is provided with at least one fifth connecting hole, and the adjusting member is provided with a sixth connecting hole at a corresponding position of the at least one fifth connecting hole, and the second connecting piece is arranged through the fifth connecting hole and the sixth connecting hole to fixedly connect the dial and the adjusting member.

[0018] Optionally, the outer circumferential edge of the dial is provided with a scale ranging from 0° to 360°.

[0019] The pipe angle measuring device can be switched between a static state and a use state, the indicating needle points to 90° when the pipe angle measuring device is in the static state, and the scale pointed to by the indicating needle is the angle of the pipe to be measured when the pipe angle measuring device is in the use state.

[0020] The pipe angle measuring device provided in the application has at least the following beneficial technical effects:

[0021] The pipe angle measuring device provided in the application has at least the following beneficial technical effects:

[0022] In order to make the above-mentioned purposes, features and advantages of the application more obvious and easy to understand, the following preferred embodiments are described in detail below, and the accompanying drawings are described as follows. BRIEF DESCRIPTION OF DRAWINGS

[0023] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed to be used in the embodiments will be briefly introduced as follows. It should be understood that the following drawings only show some of the embodiments of the present application, and therefore should not be regarded as a limitation on the scope, and for those of ordinary skill in the art, other related drawings can also be obtained without creative labor on the basis of these drawings

[0024] Figure 1 Structure schematic view of a pipeline angle measuring device provided by an embodiment of the present application;

[0025] Figure 2 Structure schematic view of a pipeline angle measuring device provided by an embodiment of the present application;

[0026] Figure 3 Structure schematic view of a fixing member provided by an embodiment of the present application;

[0027] Figure 4 Structure schematic view of a supporting member provided by an embodiment of the present application;

[0028] Figure 5 Structure schematic view of an adjusting member provided by an embodiment of the present application;

[0029] Figure 6 Connection schematic view of a first connecting member provided by an embodiment of the present application;

[0030] Figure 7 Structure schematic view of a first abutting member provided by an embodiment of the present application;

[0031] Figure 8 Structure schematic view of a second abutting member provided by an embodiment of the present application;

[0032] Figure 9 Structure schematic view of a scale dial provided by an embodiment of the present application;

[0033] Figure 10 Structure schematic view of a pipeline angle measuring device provided by an embodiment of the present application;

[0034] Figure 11 Structure schematic view of a pipeline angle measuring device provided by an embodiment of the present application.

[0035] 101- dial; 1011- third connecting hole; 1012- fifth connecting hole; 102- indicating needle; 103- first abutting piece; 1031- first connecting hole; 104- second abutting piece; 1041- convex block; 105- adjusting piece; 1051- second connecting hole; 1052- through hole groove; 1053- sixth connecting hole; 106- supporting piece; 1061- first guide groove; 1062- through hole; 107- guide piece; 1071- second guide groove; 108- first connecting piece; 109- second connecting piece; 110- nut; 201- pipeline to be measured. DETAILED DESCRIPTION

[0036] In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments of the present application. The components of the embodiments of the present application described and shown in the drawings can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.

[0037] In the description of the embodiments of the present application, it should be noted that the terms "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the product of the application is usually placed, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", "third" and the like are only used for differentiation in description and cannot be understood as indicating or implying relative importance.

[0038] In addition, the terms "horizontal", "vertical" and the like do not mean that the components must be absolutely horizontal or vertical, but can be slightly inclined. For example, "horizontal" only means that it is more horizontal relative to "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.

[0039] In the description of the embodiments of the present application, it should also be noted that unless specifically defined and limited, the terms "set", "install", "communicate", "connect" should be broadly understood, for example, can be fixedly connected, can also be detachably connected, or integrally connected; can be mechanically connected, can also be electrically connected; can be directly connected, can also be indirectly connected through an intermediate medium, can be the internal communication of two elements. For those skilled in the art, the specific meanings of the above terms in the present application can be understood according to the specific circumstances.

[0040] The embodiments of the present application provide a pipeline angle measuring device, as shown in the drawings, the pipeline angle measuring device is used for angle measurement of a to-be-measured pipeline arranged at an angle, the pipeline angle measuring device comprises a fixing assembly, an abutting assembly, a display assembly and an adjusting piece, and the angle measurement of the to-be-measured pipeline is completed through the close cooperation and reasonable layout among the fixing assembly, the abutting assembly, the display assembly and the adjusting piece, which is simple to operate, convenient and fast, and can ensure the accuracy of the measurement result. Figures 1 to 11

[0041] The pipeline angle measuring device provided by the embodiments of the present application will be exemplarily described as follows: Figures 1 to 11 The pipeline angle measuring device provided by the embodiments of the present application will be exemplarily described as follows:

[0042] As shown in the drawings, the display assembly comprises a scale disc 101 and a pointer 102, the pointer 102 is rotatably connected with the scale disc 101, the abutting assembly comprises a first abutting piece 103 and a second abutting piece 104, the first abutting piece 103 is rotatably connected with an adjusting piece 105, the first abutting piece 103 is fixedly connected with the pointer 102, the adjusting piece 105 is slidably connected with one end of the fixing assembly, the scale disc 101 is fixedly connected with the adjusting piece 105, the second abutting piece 104 is slidably connected with the other end of the fixing assembly, and the first abutting piece 103 and the second abutting piece 104 are used for abutting the two ends of the to-be-measured pipeline together, so that the pointer rotates on the scale disc 101 to measure the angle of the to-be-measured pipeline. Figure 1 Figure 2 As shown in the drawings, the display assembly comprises a scale disc 101 and a pointer 102, the pointer 102 is rotatably connected with the scale disc 101, the abutting assembly comprises a first abutting piece 103 and a second abutting piece 104, the first abutting piece 103 is rotatably connected with an adjusting piece 105, the first abutting piece 103 is fixedly connected with the pointer 102, the adjusting piece 105 is slidably connected with one end of the fixing assembly, the scale disc 101 is fixedly connected with the adjusting piece 105, the second abutting piece 104 is slidably connected with the other end of the fixing assembly, and the first abutting piece 103 and the second abutting piece 104 are used for abutting the two ends of the to-be-measured pipeline together, so that the pointer rotates on the scale disc 101 to measure the angle of the to-be-measured pipeline.

[0043] ​​Specifically, one end of the fixed assembly is provided with an adjusting member 105 which is slidably connected with the fixed assembly, one side of the adjusting member 105 is drivingly connected with the first abutting member 103, the other side of the adjusting member 105 is fixedly connected with the dial 101, the dial 101 is rotatably connected with the indicating needle 102, and the indicating needle 102 is fixedly connected with the first abutting member 103, so that the first abutting member 103, the adjusting member 105, the dial 101 and the indicating needle 102 can form an integral whole, so that the first abutting member 103 can drive the indicating needle 102 to rotate when rotating; the other end of the fixed assembly is provided with the second abutting member 104 which is slidably connected with the fixed assembly, but the second abutting member 104 is not rotatable, so that when the first abutting member 103 and the second abutting member 104 abut the angle-shaped pipeline to be measured, the rotation of the first abutting member 103 can drive the indicating needle 102 to rotate on the dial 101 to measure the angle of the pipeline to be measured.

[0044] For the fixed assembly, as shown in Figure 3 and Figure 4 , the fixed assembly comprises a support member 106 and a guide member 107, the guide member 107 is vertically arranged at the center position of the support member 106, the guide member 107 is slidably connected with the adjusting member 105, and the support member 106 is slidably connected with the second abutting member 104.

[0045] Specifically, the support member 106 is provided with a through hole 1062 in the middle, and the guide member 107 is stably fixed on the support member 106 by means of a countersunk screw. The bottom of the through hole 1062 is chamfered, and the chamfer size is slightly larger than the size of the screw head of the countersunk screw, which can ensure that the countersunk screw does not protrude from the support member 106 after being tightened, thereby avoiding interference with the measurement process. In this way, after the countersunk screw is installed, its surface is just sunken into the lower surface of the support member 106, ensuring that the support member 106 can be placed stably on any platform, eliminating shaking or instability caused by the protrusion of the screw, and laying a stable foundation for the entire measuring device. Moreover, the guide member 107 is vertically arranged at the center position of the support member 106, which can also ensure the stability of the guide member 107 arranged on the support member 106.

[0046] Optionally, as shown in Figures 1 to 4 , one side surface of the support member 106 is provided with a first guide groove 1061, the first guide groove 1061 is used to accommodate one end of the second abutting member 104, so that the second abutting member 104 can slide along the guide groove.

[0047] Specifically, the first guide groove 1061 is used to limit the movement trajectory of the second abutting piece 104. For example, the first guide groove 1061 can be provided as a convex guide groove, that is, the cross section of the first guide groove 1061 presents an outward convex shape. The profile and size of the convex guide groove are precisely calculated and processed, which are specially designed for the second abutting piece 104 to provide a smooth and accurate sliding track for the second abutting piece 104, so that the second abutting piece 104 can be stably and accurately moved to the specified position. The length of the first guide groove 1061 can be the same as the length of the support 106.

[0048] In addition, the material of the support 106 can be a special alloy material with high strength and corrosion resistance, which ensures long-term stable use in a complex semiconductor production workshop environment.

[0049] Optionally, the guide 107 is provided with a second guide groove 1071 along the length direction of the guide 107, and the second guide groove 1071 is in a hollow state. Here, the second guide groove 1071 can precisely constrain the movement range of the adjusting piece 105, so that the adjusting piece 105 drives the first abutting piece 103 to move on the guide 107 flexibly and stably, and effectively guarantees the high precision and reliability of the measurement process.

[0050] For example, the guide 107 is a cylindrical structure, and high-quality alloy steel material with high rigidity and wear resistance is selected. In order to closely cooperate with the adjusting piece 105, the front and back surfaces of the guide 107 are cut flat to better fit the adjusting piece 105, realize close cooperation, and avoid loose or displacement. The guide 107 is vertically installed on the support 106, and the lower surface hole is closely connected with the support 106 through high-strength bolts. This connection mode can provide sufficient strength and stability to ensure that the guide 107 will not loosen or fall off during work. For example, the orthographic projection shape of the second guide groove is U-shaped, and the length of the second guide groove can be 60% to 80% of the length of the guide, for example, if the length of the guide is 200mm, the length of the second guide groove can be set to 130mm.

[0051] In this way, the adjusting piece and the guide are slidably connected, and the adjusting piece and the first abutting piece are rotatably connected, so that the first abutting piece can move on the guide through the adjusting piece, and at the same time, rotation can be realized. The movement distance of the first abutting piece is the distance that the adjusting piece can slide on the guide, specifically, the movement distance of the first abutting piece is the length of the second guide groove; one end of the second abutting piece is arranged in the first guide groove on the support, and can slide along the first guide groove, but due to the limitation of the first guide groove, the second abutting piece can only move but cannot rotate. The movement distance of the second abutting piece is the length of the first guide groove.

[0052] For example, Figure 1 ,Figure 5 and Figure 6 As shown in the figure, for the adjusting member 105, a through-hole slot 1052 is formed at the center position of the adjusting member 105, and the cross-sectional shape of the through-hole slot 1052 is the same as that of the guide member 107 and the cross-sectional area of the through-hole slot 1052 is the same as that of the guide member 107, so that the adjusting member 105 can be sleeved on the guide member 107 and can slide along the guide member 107.

[0053] For example, the adjusting member can adopt a slider which is in the shape of a square block and is made of the same material as the guide member, so as to ensure good wear resistance and matching precision. The upper and lower surfaces of the slider are provided with through-hole slots, and the through-hole slots are matched with the outer shape of the guide member with high precision, so as to ensure that the slider can smoothly slide on the guide member and remain stable without obvious shaking or deviation.

[0054] As shown in the figure, Figures 1 to 6 and Figure 9 As shown in the figure, the pipeline angle measuring device provided by the embodiment of the present application further comprises a first connecting member. A first connecting hole 1031 is formed at the side of the first abutting member 103 which is connected to the adjusting member 105, a second connecting hole 1051 is formed at the side of the adjusting member 105 which is perpendicular to the slot direction of the through-hole slot 1052, a third connecting hole 1011 is formed at the center position of the dial 101, and a fourth connecting hole (not shown in the figure) is formed at the side of the indicating needle 102 which is away from the needle end. The first connecting member 108 is inserted into the first connecting hole 1031, the second connecting hole 1051, the through-hole slot 1052, the third connecting hole 1011 and the fourth connecting hole to connect the first abutting member 103, the adjusting member 105, the dial 101 and the indicating needle 102 into one body.

[0055] For example, the first connecting member can be a pin which is made of high-strength alloy steel and has excellent strength and toughness after special heat treatment process. The first connecting member is used to connect the first abutting member, the adjusting member, the dial and the indicating needle into one body. By virtue of the connection of the first connecting member, the first abutting member can be flexibly rotated with the change of the angle of the pipeline to be measured, thereby driving the indicating needle to accurately indicate the corresponding angle value on the dial, so as to realize the accurate conversion from the change of the pipeline angle to the display of the angle value.

[0056] Here, the size of the second connecting hole 1051 on the adjusting member 105 is consistent with the diameter of the first connecting member 108, so as to be tightly connected with the first connecting member 108, thereby providing key structural support for the subsequent connection of the first abutting member 103, the dial 101 and the indicating needle 102 and the realization of the angle measuring function.

[0057] For the first abutting member and the second abutting member, as shown in the figure, Figure 2 , Figure 7 and Figure 8As shown, the side of the first abutting piece 103 opposite to the support piece 106 is provided with an abutting recess, and the abutting recess comprises a plurality of abutting surfaces connected to each other, and each abutting surface can abut against the pipeline to be measured. The side of the second abutting piece 104 away from the support piece 106 is provided with an abutting recess, and the abutting recess comprises a plurality of abutting surfaces connected to each other, and each abutting surface can abut against the pipeline to be measured.

[0058] The straight line determined by the lowest point of the abutting recess of the first abutting piece 103 and the lowest point of the abutting recess of the second abutting piece 104 is parallel to the plane in which the scale disc 101 is located.

[0059] As shown in the examples, Figure 7 and Figure 8 The abutting surfaces can be arc surfaces, and the sizes of the plurality of abutting surfaces connected to each other can be different. Each abutting surface is provided with another abutting surface opposite to it, such as the abutting surfaces of the first abutting piece corresponding to the abutting surfaces of the second abutting piece. Through the two abutting surfaces, the side wall of the pipeline can be clamped and abutted to abut against pipelines of different specifications, such as the commonly used 1 / 8 inch PFA pipe, 1 / 4 inch PFA pipe, 3 / 8 inch PFA pipe and 1 / 2 inch PFA pipe in the semiconductor industry. Specifically, each abutting surface can be preset according to the standard specification of the pipeline, but is not limited thereto, that is, the abutting recesses of the first abutting piece and the second abutting piece can also be specially made according to the pipe diameter of the pipeline.

[0060] For example, when the pipe diameter of the pipeline to be measured is small, a smaller abutting surface can be used for abutment, and when the pipe diameter of the pipeline to be measured is large, a larger abutting surface can be used for abutment.

[0061] In this way, by placing the pipeline to be measured in the abutting recesses of the first abutting piece and the second abutting piece for measurement, it is not necessary to abut against the pipeline as in the conventional angle gauge, and therefore it is not limited by the bend radius and the welded elbow, and can measure the angle of semiconductor pipelines of various shapes and specifications, and the measurement range is wide. In addition, the pipeline to be measured is fixed in the abutting recesses of the first abutting piece and the second abutting piece, compared with the abutment type measurement of the conventional angle gauge, the contact area with the pipeline to be measured is increased, and the position of the pipeline is stable during the measurement, and displacement is not easy to occur, thereby effectively improving the measurement accuracy, and providing more accurate data support for the installation and connection of semiconductor pipelines; wherein the abutting recesses of the first abutting piece and the second abutting piece can adapt to the commonly used pipe diameters in the semiconductor industry, and it is not necessary to replace the measurement tools for different pipe diameters, thereby improving the universality and use efficiency of the angle measuring device.

[0062] Optionally, the material of the second abutting piece is the same as that of the support piece, and both are high-strength special alloy.

[0063] Furthermore, the other side of the first abutment 103 is a flat surface, which is relatively smooth and can fit against the surface of the adjusting member 105, thereby achieving a tight fit and stable connection between the components. Specifically, a hole is made in this flat surface to obtain the first connecting hole 1031, which is used to connect with the first connecting member 108. Through the connection of the first connecting member 108, the first abutment 103 can rotate flexibly according to the angle change of the pipe to be measured.

[0064] Furthermore, such as Figures 1 to 4 ,as well as Figure 8 As shown, a convex block 1041 is provided on the other side of the second abutment 104. The convex block 1041 is engaged with the first guide groove 1061, allowing the second abutment 104 to slide along the first guide groove 1061. Before or during pipe angle measurement, the second abutment 104 can be adjusted to the middle position of the first guide groove 1061 through the engagement between the second abutment 104 and the first guide groove 1061. Here, the outline and size of the convex block 1041 are adapted to the slotted portion of the first guide groove 1061. This adaptation allows the second abutment 104 to move smoothly within the first guide groove 1061, achieving precise guidance and stable connection. Here, due to the convex structure of the convex block 1041, the second abutment 104 cannot rotate, effectively ensuring the stability of the pipe and the measurement accuracy during the measurement process. It is worth emphasizing that the straight line determined by the lowest point of the abutment recess of the first abutment member 103 and the lowest point of the abutment recess of the second abutment member 104 is parallel to the plane where the scale 101 is located. This design can optimize the stability of the pipe to be measured and the accuracy of the measurement.

[0065] Regarding the dial and pointer used together, such as Figure 1 and Figure 9 As shown, the outer periphery of the dial 101 is provided with graduations, the graduation range being 0°-360°. That is to say, the angle range of the pipe to be measured that can be detected in this embodiment is 0°-360°. The pipe angle measuring device can switch between a static state and a working state. When the pipe angle measuring device is in a static state, the indicator needle points to 90°. When the pipe angle measuring device is in a working state, the graduation indicated by the indicator needle is the angle of the pipe to be measured.

[0066] Here, the static state refers to the state of the pipe angle measuring device when it is not performing any measurement operations; in this state, the device is idle or ready to go. The usage state refers to the working state that the device enters when it needs to measure the angle of the pipe to be measured. This switchability allows the device to flexibly perform measurements or remain in a non-working state according to actual needs, making it convenient to use and store. Specifically, when the device is in the static state, its indicator needle will point to the 90° position on the scale. When the device enters the usage state, that is, when it is used to actually measure the angle of the pipe to be measured, the indicator needle will rotate as the pipe angle changes and eventually stop at the corresponding scale position on the scale. The angle value represented by this scale is the actual angle of the pipe to be measured.

[0067] Alternatively, the dial 101 and the pointer 102 may be made of aluminum alloy material by precision milling, and the surface of the dial should be guaranteed to meet the requirements of flat and smooth use.

[0068] For example, the dial 101 can be circular, designed with 360° graduations and an accuracy of 1°, which can fully meet the stringent requirements for pipe angle measurement accuracy in semiconductor manufacturing. A third connecting hole 1011 is provided in the center of the dial for connection and fixation with the first connecting member 108, ensuring the coaxiality of the dial 101 and the first connecting member 108, and guaranteeing the accuracy of angle measurement.

[0069] For example, the indicator needle 102 can be designed as a needle, with a length smaller than the diameter of the dial 101, to ensure clear angle indication on the dial 101 while avoiding interference with other components of the dial 101. For example, Figure 6 As shown, the indicator needle 102 can be fixed to the first connector 108 by the nut 110, so that the indicator needle 102 closely follows the rotation of the first connector 108 and rotates accordingly. As the pipe angle changes, the corresponding angle value is accurately indicated on the scale 101, providing the operator with intuitive and accurate measurement results.

[0070] Optionally, such as Figure 1 and Figure 9 As shown, the pipe angle measuring device also includes a second connector 109. At least one fifth connecting hole 1012 is provided on the dial 101, and a sixth connecting hole 1053 is provided on the adjusting member 105 at a position corresponding to the at least one fifth connecting hole 1012. The second connector 109 passes through the fifth connecting hole 1012 and the sixth connecting hole 1053, fixing the dial 101 and the adjusting member 105 together.

[0071] For example, the dial 101 has two fifth connecting holes 1012. The second connector 109 can be a countersunk screw, making the fifth connecting holes 1012 countersunk holes. When a countersunk screw is installed in the countersunk hole, the screw head is flush with or slightly below the mounting surface, ensuring the entire surface of the dial 101 remains flat and preventing the screw head from protruding, thus avoiding interference with the movement of the indicator needle 102. In this way, by installing a countersunk screw in the countersunk hole, the dial 101 can be fixed to the adjusting member 105, ensuring the dial 101 remains stable throughout the measurement process. This provides a stable scale reference for the indicator needle 102, facilitating accurate angle readings by the operator.

[0072] In addition, the pipe angle measuring device provided in this application embodiment also has the following features: the fitting accuracy between the first guide groove of the support member and the convex block of the second abutment member is controlled within ±0.05mm; the groove width and depth tolerance of the second guide groove of the guide member is controlled within ±0.03mm; the fitting clearance between the adjusting member and the guide member is controlled between 0.05-0.1mm; the connection parts between the first connecting member and the adjusting member, the first abutment member, and the dial adopt high-precision thread fitting, and the thread accuracy grade is not less than 6g; the scale lines of the dial are made by laser etching process, and the scale line width error is controlled within ±0.1mm; the center of gravity of the indicator needle is precisely calibrated, and no obvious shaking or offset will occur during rotation.

[0073] For example, such as Figure 10 and Figure 11As shown, in a semiconductor manufacturing workshop, when it is necessary to perform angle testing on the welded semiconductor pipes, the preparatory work before measurement includes accurately selecting the corresponding abutment surfaces on the first abutment member 103 and the second abutment member 104 according to the pipe diameter of the pipe 201 to be tested. Then, the pipe angle measuring device is placed on a stable and solid platform, and the connection of each component is fully checked to ensure that there is no looseness or damage. Then the measurement is carried out: the operator can first place one side of the pipe 201 to be tested in the corresponding abutment recess of the second abutment member 104 to ensure that the pipe 201 to be tested is tightly fitted with the corresponding abutment surface and the position is stable. Subsequently, the other side of the pipe to be tested 201 is placed in the corresponding abutment recess of the first abutment member 103. With the synergistic action of the first abutment member 103 and the second abutment member 104, the pipe to be tested 201 is fixed to the pipe angle measuring device. After the pipe to be tested 201 is fixed, due to the angle difference of the pipe to be tested 201, the first abutment member 103 will rotate around the first connector as the angle of the pipe to be tested 201 changes. The rotation of the first abutment member 103 drives the first connector connected to it to rotate, thereby causing the indicator needle 102 fixed to the first connector to rotate on the scale 101. At this time, the operator only needs to observe the angle scale where the indicator needle 102 stops on the scale 101 to directly obtain the angle value of the pipe to be tested 201. Based on the measurement results, it can be determined whether the welding angle meets the process requirements. If not, adjustments and corrections can be made in a timely manner to ensure the installation quality of the semiconductor pipe system. At the semiconductor piping installation site, for pipes that need to be bent, this device is used to measure the bending angle after the bending operation is completed to ensure that the angle is accurate so that subsequent pipe connection work can proceed smoothly.

[0074] Specifically, the pipe angle measuring device provided in this application embodiment is installed mainly through the following steps: Place the support member on a clean, flat workbench, carefully inspect the first guide groove and the intermediate through hole of the support member to ensure there are no debris or damage, insert the countersunk screw into the intermediate through hole, then align the fixing hole on the lower surface of the guide member with the countersunk screw, and tighten the countersunk screw with a wrench to ensure the guide member is perpendicular to the support member and firmly connected. During tightening, use a level and a right-angle ruler to monitor the perpendicularity of the guide member in real time, strictly controlling the error within a very small range; then align the through hole groove of the adjusting member with the guide member, slowly place the adjusting member onto the guide member, and check the smoothness of the sliding of the adjusting member on the guide member. If jamming occurs, use sandpaper to lightly grind and polish the through hole groove of the adjusting member or the contact surface of the guide member until the adjusting member can slide freely without significant shaking; then align the convex block of the second abutment member with... Place the second abutment into the second guide groove of the support member, check the sliding flexibility and anti-rotation effect of the second abutment in the second guide groove. If there is any abnormality, carefully check the fit between the convex block and the second guide groove and make necessary adjustments. Finally, pass one end of the first connector through the second connecting hole of the adjusting member and the first connecting hole of the first abutment in sequence, and use a nut to fasten the first connector and the first abutment together to ensure that the first connector and the first abutment are firmly connected and that the first connector can rotate flexibly. Align the center opening of the dial with the first connector, and fix the dial and the first connector with a nut to ensure that the dial and the first connector are coaxial. Then, use a countersunk screw to fix the dial and the adjusting member through the two countersunk holes on the dial to ensure that the dial cannot rotate. Fix the indicator needle to the first connector with a nut to ensure that the indicator needle can closely follow the rotation of the first connector.

[0075] Therefore, the embodiment of this application performs the measurement through the following steps: Before measurement, thoroughly check the connection firmness of each component of the pipe angle measuring device, the smooth sliding of the adjusting component and guide component, as well as the second abutment component and the second guide groove, and whether the working status of the dial and indicator needle is normal; according to the pipe diameter to be measured, accurately select the abutment surface corresponding to the pipe to be measured on the first abutment component and the second abutment component, slowly place one end of the pipe to be measured into the abutment recess of the second abutment component, ensuring that the pipe to be measured is tightly fitted with the abutment surface and is centered, then place the other end of the pipe to be measured into the abutment recess of the first abutment component, adjust the position of the pipe to be measured so that the pipe to be measured is stably placed and in a naturally extended state, avoiding the pipe from being damaged due to the angle of the pipe. Pipe twisting or uneven stress can affect measurement results. After the pipe to be measured is fixed, closely observe the position of the indicator needle on the dial. Since the angle change of the pipe to be measured will be transmitted to the indicator needle through the first abutment and the first connecting part, the indicator needle will indicate the corresponding angle on the dial. The operator reads the scale value indicated by the indicator needle, which is the angle of the pipe to be measured. When reading the angle, be sure to ensure that the line of sight is perpendicular to the dial to minimize reading errors. After the measurement is completed, first remove the pipe to be measured from the abutment recess of the second abutment and the first abutment to prevent damage to the pipe to be measured and the pipe angle measuring device. Then, check whether there is any looseness or damage to the various parts of the pipe angle measuring device. If necessary, adjust and maintain it in time.

[0076] In summary, the pipe angle measuring device provided in this application, through its meticulously designed component structure and high-precision manufacturing process, can achieve high-precision measurement of semiconductor pipe angles. The 1° accuracy design of the dial, combined with the precise cooperation of components such as the guide, adjusting, and first connecting parts, effectively reduces measurement errors, meets the high-precision requirements of semiconductor production for pipe installation angles, ensures stable transmission of the medium in the pipeline system, and improves the stability of semiconductor production processes and product quality. The multiple interconnected abutment surfaces on the first and second abutment parts can abut against pipes of various diameters commonly used in semiconductor production, achieving rapid and accurate measurement of pipes of different specifications without the need for additional conversion parts or complex adjustment operations. This greatly improves the versatility and practicality of the pipe angle measuring device. The device boasts several advantages. First, its operation is simple and intuitive. Simply place the pipe to be measured on the corresponding abutment surface of the recess, and the angle value can be directly read from the dial using the indicator needle. Compared to traditional measurement methods, it eliminates the need for complex calculations or auxiliary tools, reducing the skill requirements and workload for operators and significantly improving measurement efficiency. Second, the support component utilizes a special countersunk screw fixing method for the guide component, along with the cooperative design between the second abutment component and the support component, ensuring the stability of the pipe angle measuring device during use. The tight connection and reasonable layout of all components allow the device to withstand certain external impacts without affecting measurement accuracy, making it suitable for the complex working environment of semiconductor manufacturing workshops. Finally, the measuring device has a relatively simple structure, and the materials and processing technology used offer high cost-effectiveness while ensuring performance. Compared to some imported high-precision angle measuring equipment, it has a significant cost advantage while meeting the actual measurement needs in semiconductor production, helping to reduce equipment procurement and operating costs for semiconductor manufacturing companies.

[0077] Finally, it should be noted that the above-described embodiments are merely specific implementations of this application, used to illustrate the technical solutions of this application, and not to limit them. The protection scope of this application is not limited thereto. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that any person skilled in the art can still modify or easily conceive of changes to the technical solutions described in the foregoing embodiments, or make equivalent substitutions for some of the technical features, within the technical scope disclosed in this application. Such modifications, changes, or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application, and should all be covered within the protection scope of this application. Therefore, the protection scope of this application should be determined by the protection scope of the claims.

Claims

1. A pipe angle measuring device, characterized by, The pipeline angle measuring device comprises a fixing assembly, an abutting assembly, a display assembly and an adjusting piece; the display assembly comprises a scale disc and a pointer, the pointer is rotatably connected with the scale disc, the abutting assembly comprises a first abutting piece and a second abutting piece, the first abutting piece is rotatably connected with the adjusting piece, the first abutting piece is fixedly connected with the pointer, the adjusting piece is slidably connected with one end of the fixing assembly, the scale disc is fixedly connected with the adjusting piece, the second abutting piece is slidably connected with the other end of the fixing assembly, the first abutting piece and the second abutting piece are used for abutting the two ends of the pipeline to be measured, so that the pointer rotates on the scale disc to measure the angle of the pipeline to be measured.

2. The pipe angle measurement device of claim 1, wherein, The fixing assembly comprises a support and a guide piece, the guide piece is vertically arranged at the center position of the support, the guide piece is slidably connected with the adjusting piece, and the support is slidably connected with the second abutting piece.

3. The pipe angle measuring device of claim 2, wherein, A first guide groove is formed in one side surface of the support, the first guide groove is used for accommodating one end of the second abutting piece, so that the second abutting piece can slide along the guide groove.

4. The pipe angle measurement device of claim 2, wherein, A second guide groove is formed in the length direction of the guide piece, and the second guide groove is in a hollow state.

5. The pipe angle measurement device of claim 4, wherein, A through-hole groove is formed at the center position of the adjusting piece, the cross-sectional shape of the through-hole groove is the same as that of the guide piece, and the cross-sectional area of the through-hole groove is the same as that of the guide piece, so that the adjusting piece can be sleeved on the guide piece and can slide along the guide piece.

6. The pipe angle measurement device of claim 5, wherein, The pipeline angle measuring device further comprises a first connecting piece; A first connecting hole is formed in the side of the first abutting piece connected with the adjusting piece, a second connecting hole is formed in the side of the adjusting piece perpendicular to the slot direction of the through-hole groove, a third connecting hole is formed at the center position of the scale disc, and a fourth connecting hole is formed in the side of the pointer away from the pointer end, the first connecting piece is arranged to pass through the first connecting hole, the second connecting hole, the through-hole groove, the third connecting hole and the fourth connecting hole to connect the first abutting piece, the adjusting piece, the scale disc and the pointer into one body.

7. The pipe angle measurement device of claim 2, wherein, An abutting recess is arranged on the side of the first abutting piece opposite to the support, the abutting recess comprises a plurality of abutting surfaces connected with each other, and each abutting surface can abut the pipeline to be measured; An abutting recess is arranged on the side of the second abutting piece away from the support, the abutting recess comprises a plurality of abutting surfaces connected with each other, and each abutting surface can abut the pipeline to be measured.

8. The pipe angle measurement device of claim 7, wherein, A straight line determined by the lowest points of the abutting recesses of the first abutting piece and the second abutting piece is parallel to the plane where the scale disc is located.

9. The pipe angle measurement device of claim 1, wherein, The pipeline angle measuring device further comprises a second connecting piece; At least one fifth connecting hole is formed on the dial, a sixth connecting hole is formed on the adjusting member at a position corresponding to the at least one fifth connecting hole, and the second connecting member is arranged through the fifth connecting hole and the sixth connecting hole to fixedly connect the dial and the adjusting member.

10. The pipe angle measurement device of claim 1, wherein, An outer periphery of the dial is provided with a scale ranging from 0° to 360°. The pipe angle measuring device can be switched between a static state and a use state, the indicating needle points to 90° when the pipe angle measuring device is in the static state, and the scale pointed to by the indicating needle is the angle of the pipe to be measured when the pipe angle measuring device is in the use state.

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