Submicron displacement measuring device

Abstract

The utility model discloses a submicron displacement measuring device which comprises a measuring head, a fixing seat, a photoelectric displacement measuring assembly, a transmission assembly and a limiting block, the fixing seat is erected on the limiting block, the transmission assembly sequentially penetrates through the fixing seat and the limiting block, and the fixing seat and the limiting block are both fixedly connected with the transmission assembly; the photoelectric displacement measuring assembly is arranged between the limiting block and the fixed seat, the testing head is fixedly connected to the first end of the transmission assembly, and the testing head is used for abutting against a tested part; when the measured part displaces, the transmission assembly drives the photoelectric displacement measurement assembly to move and measure the displacement according to the pressure applied by the measured part. The fixing seat is erected on the limiting block, the transmission assembly penetrates through the fixing seat and the limiting block, the photoelectric displacement measurement assembly is arranged between the limiting block and the fixing seat, the size of the displacement measurement device is reduced, the measurement precision is improved through the photoelectric displacement measurement assembly, and the displacement measurement device is made to be suitable for specific measurement scenes.

Description

Technical Field

[0001] This utility model relates to the field of displacement measurement technology, and in particular to a submicron displacement measurement device. Background Technology

[0002] Micro-displacement measuring devices are widely used in high-end equipment and intelligent devices such as precision machining, intelligent manufacturing, and instrumentation. By testing the displacement of relevant parts of a structure, precise comparisons of the height and straightness of parts, as well as high-precision displacement measurements, facilitate the assembly and adjustment of mechanical components.

[0003] When comparing the height and straightness of parts, as well as measuring displacement with high precision, displacement measurement tools with sub-micron accuracy are required. Currently, the most common displacement measurement accuracy is 0.1 microns. However, these tools are relatively large, which limits their use in specific measurement scenarios and makes it difficult to maintain measurement accuracy, thus failing to meet the requirements for lower resolution measurements.

[0004] In the process of realizing this utility model, the inventors discovered that the prior art has at least the following problems:

[0005] Existing displacement measurement tools are bulky, have low measurement accuracy, and are easily limited in specific measurement scenarios, failing to adequately meet user needs. Utility Model Content

[0006] The purpose of this invention is to provide a submicron displacement measuring device to solve the technical problems of existing displacement measuring tools being large in size, having low measurement accuracy, and being easily limited in specific measurement scenarios, thus failing to meet user needs. The various technical effects of the preferred solutions among the many technical solutions provided by this invention are detailed below.

[0007] To achieve the above objectives, the present invention provides the following technical solution:

[0008] This utility model provides a submicron displacement measuring device, comprising a test head, a fixed base, a photoelectric displacement measuring component, a transmission component, and a limiting block. The fixed base is mounted on the limiting block, and the transmission component passes through the fixed base and the limiting block sequentially, with both the fixed base and the limiting block fixedly connected to the transmission component. The photoelectric displacement measuring component is disposed between the limiting block and the fixed base, and the test head is fixedly connected to the first end of the transmission component, the test head being used to abut against the part being measured. When the part being measured undergoes displacement, the transmission component moves the photoelectric displacement measuring component according to the pressure applied by the part being measured and measures the displacement.

[0009] Preferably, the fixing base includes a recess, a first mounting groove, and two support feet. The two support feet are respectively disposed at both ends of the fixing base. The recess is formed in the lower middle part of the fixing base. The support feet are used to fix both ends of the transmission assembly. The recess is used to accommodate the limiting block. The first mounting groove is disposed on the recess and is matched with the reading head of the photoelectric displacement measuring assembly.

[0010] Preferably, the photoelectric displacement measuring component further includes a grating ruler, and the reading head is correspondingly disposed above the grating ruler. The reading head is fixedly connected in the first mounting groove and is used to read the value corresponding to the grating ruler. The grating ruler is fixedly connected in the second mounting groove at the middle of the upper end of the limiting block.

[0011] Preferably, the transmission assembly includes at least one set of transmission structures, each set of transmission structures including a ball bearing and two bushings. The two bushings are respectively sleeved on both ends of the ball bearing and are movably connected to the ball bearing. The two bushings are respectively disposed through the two support feet and are fixedly connected to the support feet. The middle section of the ball bearing passes through the through hole structure of the limiting block and is fixedly connected to the limiting block.

[0012] Preferably, when the transmission assembly includes two sets of the transmission structures, the two sets of transmission structures are arranged in parallel to each other, and the two sets of transmission structures are respectively arranged on both sides of the fixed base and the limiting block.

[0013] Preferably, the test head includes a ruby ​​contact and a connecting block. The ruby ​​contact is fixed on the protrusion of the connecting block, the connecting block is fixedly connected to the first end of the ball bearing, and there is a certain distance between the connecting block and the fixed seat.

[0014] Preferably, the device further includes a spring-back assembly disposed between the test head and the fixed base, the spring-back assembly being used to spring the test head back to its initial position after the measurement is completed.

[0015] Preferably, each set of rebound components includes a first magnetic block and a second magnetic block, the first magnetic block and the second magnetic block are arranged correspondingly to each other, and the first magnetic block and the second magnetic block can generate a mutual repulsive force; the first magnetic block is fixed on the connecting block, and the second magnetic block is fixed on the fixing base.

[0016] Preferably, the number of the rebound components is at least two sets.

[0017] Implementing one of the above-described technical solutions of this utility model has the following advantages or beneficial effects:

[0018] This invention reduces the size of the displacement measuring device by mounting a fixed base on a limiting block, having a transmission component pass through the fixed base and the limiting block, and placing a photoelectric displacement measuring component between the limiting block and the fixed base. It also improves the measurement accuracy through the photoelectric displacement measuring component, making the displacement measuring device suitable for specific measurement scenarios. Attached Figure Description

[0019] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. In the drawings:

[0020] Figure 1 This is a structural schematic diagram of an embodiment of the present utility model;

[0021] Figure 2 This is a first exploded view of an embodiment of the present utility model;

[0022] Figure 3 This is a second exploded view of an embodiment of this utility model.

[0023] In the diagram: 1. Test head; 11. Ruby contact; 12. Connecting block; 2. Fixing base; 21. Recess; 22. First mounting slot; 23. Support foot; 3. Photoelectric displacement measuring component; 31. Reading head; 32. Grating ruler; 4. Transmission component; 41. Transmission structure; 411. Ball bearing; 412. Bushing; 5. Limiting block; 51. Second mounting slot; 6. Spring-loaded component; 61. First magnetic block; 62. Second magnetic block. Detailed Implementation

[0024] To make the objectives, technical solutions, and advantages of this utility model clearer, various exemplary embodiments described below will be referenced to the accompanying drawings, which form part of the exemplary embodiments, illustrating various exemplary embodiments that may be adopted to implement this utility model. Unless otherwise indicated, the same numbers in different drawings represent the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with this disclosure. It should be understood that they are merely examples of processes, methods, and apparatuses consistent with some aspects of this utility model disclosed as detailed in the appended claims, and other embodiments may be used, or structural and functional modifications may be made to the embodiments listed herein without departing from the scope and spirit of this utility model.

[0025] In the description of this utility model, it should be understood that the terms "center," "longitudinal," "lateral," etc., indicate the orientation or positional relationship based on the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the referred element must have a specific orientation, or be constructed and operated in a specific orientation. The terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. The term "multiple" means two or more. The terms "connected" and "linked" should be interpreted broadly, for example, they can be fixed connections, detachable connections, integral connections, mechanical connections, electrical connections, communication connections, direct connections, indirect connections through an intermediate medium, and can be the internal connection of two elements or the interaction relationship between two elements. The term "and / or" includes any and all combinations of one or more of the related listed items. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0026] To illustrate the technical solution described in this utility model, specific embodiments are described below, showing only the parts related to the embodiments of this utility model.

[0027] Example 1:

[0028] like Figure 1As shown, this utility model provides a submicron displacement measuring device, including a test head 1, a fixed base 2, a photoelectric displacement measuring component 3, a transmission component 4, and a limiting block 5. The fixed base 2 is mounted on the limiting block 5, and the transmission component 4 passes through the fixed base 2 and the limiting block 5 sequentially, with both the fixed base 2 and the limiting block 5 fixedly connected to the transmission component 4. The photoelectric displacement measuring component 3 is disposed between the limiting block 5 and the fixed base 2. The test head 1 is fixedly connected to the first end of the transmission component 4 and is used to contact the part being measured. When the part being measured is displaced, the transmission component 4 drives the photoelectric displacement measuring component 3 to move according to the pressure applied by the part being measured and measures the displacement. Specifically, the fixed base 2 is mounted on the limiting block 5, which reduces the volume of the displacement measuring device. The test head 1 is disposed at the first end of the driven component, facilitating contact between the test head 1 and the part being measured, and the test head 1 can transmit the pressure received from the part being measured to the transmission component 4. The transmission component 4 is fixedly connected to the limiting block 5, and when the transmission component 4 moves, it can drive the limiting block 5 to move synchronously. The transmission assembly 4 passes through the fixed base 2 and the limiting block 5, and the test head 1 is fixed on the first end of the transmission assembly 4. When the test head 1 comes into contact with the part under test and the part under test moves, the part under test can apply pressure to the test head 1. The test head 1 transmits the pressure to the transmission assembly 4, which drives the photoelectric displacement measuring assembly 3 on the driven assembly to move, thereby reading the amount of displacement and completing the displacement measurement. After the displacement measurement is completed, the pressure applied by the part under test is released, the transmission assembly 4 returns to its initial position, and the first side of the limiting block 5 abuts against surface A of the fixed base 2, limiting and fixing the transmission assembly 4 to prevent it from detaching from the fixed base 2. The measurement resolution of the photoelectric displacement measuring assembly 3 reaches 0.02 micrometers.

[0029] This invention reduces the size of the displacement measuring device by mounting the fixed base 2 on the limiting block 5, having the transmission component 4 pass through the fixed base 2 and the limiting block 5, and setting the photoelectric displacement measuring component 3 between the limiting block 5 and the fixed base 2. It also improves the measurement accuracy by using the photoelectric displacement measuring component 3, making the displacement measuring device suitable for specific measurement scenarios.

[0030] As an optional implementation method, such as Figure 2 and Figure 3As shown, the mounting base 2 includes a recess 21, a first mounting groove 22, and two support feet 23. The two support feet 23 are respectively disposed at both ends of the mounting base 2. The recess 21 is formed in the lower middle part of the mounting base 2. The support feet 23 are used to fix both ends of the transmission assembly 4, and the recess 21 is used to accommodate the limiting block 5. The first mounting groove 22 is disposed on the recess 21, and the first mounting groove 22 matches the reading head 31 of the photoelectric displacement measuring assembly 3. Specifically, the recess 21 formed in the lower middle part of the mounting base 2 facilitates the mounting base 2 on the limiting block 5. By accommodating the limiting block 5 through the recess 21, the volume of the displacement measuring device can be reduced, making it suitable for measurement scenarios requiring small-volume measuring tools. The first mounting groove 22 is disposed on the recess 21 and matches the reading head 31, facilitating the fixing of the reading head 31 on the mounting base 2. The photoelectric displacement measuring assembly 3 is disposed between the mounting base 2 and the limiting block 5, which reduces the volume of the displacement measuring device. Support feet 23 are located at both ends of the fixed base 2, which facilitates the installation and fixing of both ends of the transmission assembly 4 and ensures the stability of the structure.

[0031] As an optional implementation method, such as Figure 3 As shown, the photoelectric displacement measuring component 3 also includes a grating ruler 32, with a reading head 31 correspondingly positioned above it. The reading head 31 is fixedly connected within the first mounting groove 22 and is used to read the corresponding value of the grating ruler 32. The grating ruler 32 is fixedly connected within the second mounting groove 51 at the upper center of the limiting block 5. Specifically, the grating ruler 32 is fixed within the second mounting groove 51 at the upper center of the limiting block 5, so that when the transmission component 4 moves the limiting block 5, it can synchronously move the grating ruler 32, facilitating the measurement of the displacement of the part under test based on the displacement of the grating ruler 32. The grating ruler 32 and the reading head 31 are correspondingly positioned to facilitate the reading head 31 reading the displacement of the grating ruler 32. Alternatively, a mechanical displacement measuring component assembly can be used to replace the photoelectric displacement measuring component 3, depending on actual needs.

[0032] As an optional implementation method, such as Figure 2As shown, the transmission assembly 4 includes at least one set of transmission structures 41. Each set of transmission structures 41 includes a ball bearing 411 and two bushings 412. The two bushings 412 are respectively sleeved on both ends of the ball bearing 411, and the bushings 412 are movably connected to the ball bearing 411. The two bushings 412 are respectively installed through two support feet 23, and the bushings 412 are fixedly connected to the support feet 23. The middle section of the ball bearing 411 passes through the through hole structure of the limiting block 5, and the ball bearing 411 is fixedly connected to the limiting block 5. Specifically, the number of transmission assemblies 4 can be adaptively set according to actual needs, and can be selected as one, two, or three sets. In each set, the ball bearing 411 passes through the limiting block 5 and is fixedly connected to the limiting block 5. Bushings 412 are sleeved on both ends of the ball bearing 411. The two ends of the ball bearing 411 respectively pass through two support feet 23, and the bushings 412 on the ball bearing 411 are fixed inside the support feet 23. Because the ball bearing 411 is movably connected to the bushing 412, the ball bearing 411 moves linearly under the drive of the bushing 412, thereby causing the limit block 5 and the grating ruler 32 to undergo the same displacement as the connection to be measured.

[0033] As an optional implementation method, such as Figure 2 As shown, when the transmission assembly 4 includes two sets of transmission structures 41, the two sets of transmission structures 41 are arranged parallel to each other, and are respectively disposed on both sides of the fixed base 2 and the limiting block 5. Specifically, when the transmission assembly 4 includes two sets of transmission structures 41, the two sets of transmission structures 41 are arranged parallel to each other, so that the movement directions of the two sets of transmission assemblies 4 are consistent, ensuring the stability of the transmission assembly 4 in driving the test head 1, the limiting block 5, and the grating ruler 32. Distributing the two sets of transmission structures 41 on both sides of the fixed base 2 and the limiting block 5 ensures the stability of the structure.

[0034] As an optional implementation method, such as Figure 2As shown, the test head 1 includes a ruby ​​contact 11 and a connecting block 12. The ruby ​​contact 11 is fixed on the protrusion of the connecting block 12, which is fixedly connected to the first end of the ball bearing 411. There is a certain distance between the connecting block 12 and the fixed seat 2. Specifically, the cross-section of the connecting block 12 is a convex shape, and the protrusion of the connecting block 12 is the end furthest from the fixed seat 2. The ruby ​​contact 11 is positioned on the protrusion of the connecting block 12 to facilitate contact between the ruby ​​contact 11 and the part under test during testing. The connecting block 12 is fixed to the first end of the ball bearing 411, and there is a certain distance between the connecting block 12 and the fixed seat 2. When the part under test moves and pressure is applied to the ruby ​​contact 11, the connecting block transmits power to the ball bearing 411, causing the ball bearing 411 to undergo linear displacement within the bushing 412. This drives the test head 1 to move towards the fixed seat 2. The displacement of the grating ruler 32 is read by the reading head 31, completing the displacement measurement of the part under test. There is a certain gap between the connecting block 12 and the fixed seat 2, which is used to provide a movement range for the test head 1. The gap can be adaptively set according to the length of the ball bearing 411 and the usage requirements.

[0035] As an optional implementation method, such as Figure 1 As shown, the device also includes a spring-loaded assembly 6, which is disposed between the test head 1 and the fixed base 2. The spring-loaded assembly 6 is used to spring the test head 1 back to its initial position after the measurement is completed. Specifically, the spring-loaded assembly 6 is disposed between the test head 1 and the fixed base 2 so that after the displacement measuring device completes the measurement, the test head 1 can be moved back to its initial position by the spring-loaded assembly 6, which is convenient for the next measurement.

[0036] As an optional implementation method, such as Figure 1 As shown, each set of spring-loaded components 6 includes a first magnetic block 61 and a second magnetic block 62. The first magnetic block 61 and the second magnetic block 62 are arranged correspondingly to each other, and a mutual repulsive force is generated between the first magnetic block 61 and the second magnetic block 62. The first magnetic block 61 is fixed on the connecting block 12, and the second magnetic block 62 is fixed on the fixing base 2. Specifically, in each set of spring-loaded components 6, the first magnetic block 61 is fixed on the connecting block 12, and the second magnetic block 62 is fixed on the fixing base 2. The first magnetic block 61 and the second magnetic block 62 are arranged correspondingly to each other, so that the mutual repulsive force generated between the first magnetic block 61 and the second magnetic block 62 corresponds. When the pressure applied to the test head 1 by the connection to be tested is removed, the first magnetic block 61 has a reverse elastic force under the action of the mutual repulsive force generated by the second magnetic block 62, which can drive the test head 1 away from the fixing base 2, so that the test head 1 returns to the initial position before testing.

[0037] As an optional implementation, the number of spring-loaded components 6 is at least two sets. Specifically, the number of spring-loaded components 6 is at least two sets to ensure the stability of the rebound. The number of spring-loaded components 6 can be two sets, respectively arranged on both sides of the position between the test head 1 and the fixed base 2. In this embodiment, the number of spring-loaded components 6 is three sets, respectively arranged on both sides and in the middle of the position between the test head 1 and the fixed base 2. The number of spring-loaded components 6 can be adaptively set according to actual needs.

[0038] The embodiment is merely a special case and does not indicate that this utility model is implemented in such a way.

[0039] The above description is merely a preferred embodiment of the present utility model. Those skilled in the art will understand that various changes or equivalent substitutions can be made to these features and embodiments without departing from the spirit and scope of the present utility model. Furthermore, under the teachings of the present utility model, these features and embodiments can be modified to adapt to specific situations and materials without departing from the spirit and scope of the present utility model. Therefore, the present utility model is not limited to the specific embodiments disclosed herein, and all embodiments falling within the scope of the claims of this application are within the protection scope of the present utility model.

Claims

1. A sub-micron displacement measuring device, characterized by, The utility model provides a test head (1), fixed seat (2), photoelectric displacement measurement assembly (3), transmission assembly (4) and limit block (5) are included, fixed seat (2) is erected on limit block (5), transmission assembly (4) is in turn through fixed seat (2) and limit block (5), and fixed seat (2) and limit block (5) are all fixedly connected with transmission assembly (4), photoelectric displacement measurement assembly (3) is arranged between limit block (5) and fixed seat (2), test head (1) is fixedly connected on the first end of transmission assembly (4), and test head (1) is used for abutting the measured part, when the measured part displacement occurs, transmission assembly (4) drives photoelectric displacement measurement assembly (3) to move and measures displacement according to the pressure of measured part.

2. The sub-micron displacement measuring device of claim 1, wherein, The fixed seat (2) includes a recess (21), a first mounting slot (22), and two support feet (23). The two support feet (23) are respectively arranged at both ends of the fixed seat (2), the recess (21) is formed in the middle lower part of the fixed seat (2), the support feet (23) are used to fix both ends of the transmission assembly (4), and the recess (21) is used to accommodate the limit block (5). The first mounting slot (22) is arranged on the recess (21), and the first mounting slot (22) is matched with the reading head (31) of the photoelectric displacement measurement assembly (3).

3. The sub-micron displacement measuring device of claim 2, wherein, The photoelectric displacement measurement assembly (3) further includes a grating ruler (32), and the reading head (31) is correspondingly arranged above the grating ruler (32). The reading head (31) is fixedly connected in the first mounting slot (22), and the reading head (31) is used to read the corresponding value of the grating ruler (32). The grating ruler (32) is fixedly connected in the second mounting slot (51) of the middle part of the upper end of the limit block (5).

4. The sub-micron displacement measuring device of claim 2, wherein, The transmission assembly (4) includes at least one set of transmission structure (41). Each set of transmission structure (41) includes a ball bearing (411) and two shaft sleeves (412). The two shaft sleeves (412) are respectively sleeved on both ends of the ball bearing (411), and the shaft sleeve (412) is movably connected with the ball bearing (411). The two shaft sleeves (412) are respectively arranged through the two support feet (23), and the shaft sleeve (412) is fixedly connected with the support feet (23). The middle segment of the ball bearing (411) passes through the through hole structure of the limit block (5), and the ball bearing (411) is fixedly connected with the limit block (5).

5. The sub-micron displacement measuring device of claim 4, wherein, When the transmission assembly (4) includes two sets of transmission structure (41), the two sets of transmission structure (41) are arranged in parallel with each other, and the two sets of transmission structure (41) are respectively arranged on both sides of the fixed seat (2) and the limit block (5).

6. The sub-micron displacement measuring device of claim 4, wherein, The test head (1) comprises a ruby contact (11) and a connecting block (12), the ruby contact (11) is fixed on the convex part of the connecting block (12), the connecting block (12) is fixedly connected on the first end of the ball bearing (411), and the connecting block (12) has a certain spacing with the fixed seat (2).

7. The sub-micron displacement measuring device of claim 6, wherein, The device further comprises a rebound assembly (6) arranged between the test head (1) and the fixed seat (2), the rebound assembly (6) is used to rebound the test head (1) to the initial position after the measurement is completed.

8. The sub-micron displacement measuring device of claim 7, wherein, Each group of the rebound assembly (6) comprises a first magnetic block (61) and a second magnetic block (62), the first magnetic block (61) and the second magnetic block (62) are arranged correspondingly, and the first magnetic block (61) and the second magnetic block (62) can generate mutual repulsion; the first magnetic block (61) is fixed on the connecting block (12), and the second magnetic block (62) is fixed on the fixed seat (2).

9. The sub-micron displacement measuring device of claim 7, wherein, The number of the rebound assembly (6) is at least two groups.

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