Measuring machine sliding device and three-coordinate measuring machine

Abstract

The utility model relates to the technical field of measuring equipment, and provides a measuring machine sliding device and a three-coordinate measuring machine. The measuring machine sliding device comprises a sliding support which is provided with an assembling cavity penetrating in the X-axis direction and used for being connected with a Z-axis movement mechanism; the X-axis sliding rail mechanism is partially arranged in the assembling cavity in a penetrating mode, and the size of the X-axis sliding rail mechanism in the Z-axis direction is larger than the size of the X-axis sliding rail mechanism in the Y-axis direction. The air floating assembly comprises a plurality of air floating pieces arranged on the inner wall face of the assembling cavity and is in air floating sliding fit with the X-axis sliding rail mechanism; wherein the multiple air floating pieces are connected to the top wall, the bottom wall, the front side wall and the rear side wall of the assembly cavity correspondingly, and at least two air floating pieces are symmetrically arranged on each of the front side wall and the rear side wall in the Z-axis direction. According to the technical scheme, when the Z-axis movement mechanism is applied to the three-coordinate measuring machine, the distance between the connecting points of the Z-axis movement mechanism and the sliding support in the Z-axis direction can be increased, the stress condition of the Z-axis movement mechanism is improved, the assembly stability is enhanced, and the movement precision and the measurement accuracy are improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of measuring equipment, in particular to a measuring machine sliding device and a three-coordinate measuring machine. BACKGROUND

[0002] At present, in common three-coordinate measuring machines, the sliding between the X-axis slide and the beam is usually realized by using air floating devices, and the Z-axis movement mechanism is carried by the Z-axis slide, and the measurement operation is realized by using the measurer on the Z-axis. Among them, the Z-axis usually has a certain length, and the sliding in the Z-axis direction is realized by two sliding matching structures (such as Z-axis air floating guide rails) arranged on the top and bottom of the X-axis slide. However, the existing setting mode of the X-axis slide and the beam has defects, and the layout of the air floating device is unreasonable, which causes the distance between the sliding matching connection points in the Z-axis direction to be short, and the stress of the X-axis slide is unbalanced, which is not conducive to ensuring the stability and movement precision of the Z-axis movement mechanism, and affects the accuracy of the measurement result. CONTENT OF THE UTILITY MODEL

[0003] In order to solve the problems of unreasonable layout of the air floating device and the setting mode of the X-axis slide and the beam in the existing three-coordinate measuring machine, which is not conducive to ensuring the stability and movement precision of the Z-axis movement mechanism and affects the accuracy of the measurement result, the present application provides a measuring machine sliding device and a three-coordinate measuring machine.

[0004] In the embodiment of the first aspect of the present application, a measuring machine sliding device is provided, which comprises: a sliding support, the sliding support has an assembly cavity penetrating along the X-axis direction, and the sliding support is used for connecting a Z-axis movement mechanism; an X-axis slide rail mechanism, the X-axis slide rail mechanism is partially arranged in the assembly cavity, and the size of the X-axis slide rail mechanism in the Z-axis direction is greater than the size in the Y-axis direction; an air floating assembly, the air floating assembly comprises a plurality of air floating pieces arranged on the inner wall surface of the assembly cavity, the air floating assembly can be connected with a gas supply system, so that the plurality of air floating pieces and the X-axis slide rail mechanism form air floating sliding matching, and the sliding support can slide along the X-axis direction; wherein, the plurality of air floating pieces are respectively connected to the top wall, the bottom wall, the front side wall and the rear side wall of the assembly cavity, the front side wall and the rear side wall are oppositely arranged along the Y-axis direction, the top wall and the bottom wall are oppositely arranged along the Z-axis direction, and at least two air floating pieces are symmetrically arranged on the front side wall and the rear side wall in the Z-axis direction respectively; the at least two air floating pieces arranged on the top wall are all third air floating pieces, and the at least two third air floating pieces are symmetrically arranged along the X-axis direction; one air floating piece arranged on the bottom wall is a fourth air floating piece, and the fourth air floating piece is located at the symmetric center position of the two third air floating pieces in the X-axis direction.

[0005] In a further embodiment of the present application, the at least two groups of air floats arranged on the front side wall are all first air floats, the number of air floats in each group is at least two, and the at least two groups of first air floats are located in the assembly cavity as a whole; wherein the at least two groups of first air floats are symmetrically arranged along the X-axis direction, and each group of first air floats is symmetrically arranged along the Z-axis direction.

[0006] In a further embodiment of the present application, the at least two groups of first air floats are symmetrically arranged on the front side wall near the two ends along the X-axis direction, and the spacing between the at least two groups of first air floats along the X-axis direction is in the range of 180mm to 210mm; and / or, the at least two first air floats in each group are respectively arranged corresponding to the two ends of the X-axis sliding rail mechanism along the Z-axis direction.

[0007] In a further embodiment of the present application, the at least two groups of air floats arranged on the rear side wall are all second air floats, the number of air floats in each group is at least two, and the at least two groups of second air floats are symmetrically arranged along the Z-axis direction; along the X-axis direction, the spacing between the at least two groups of second air floats is greater than the spacing between the at least two groups of first air floats; wherein along the X-axis direction, the at least two groups of second air floats are symmetrically arranged at the two ends of the rear side wall, and the spacing between the at least two second air floats along the X-axis direction is in the range of 240mm to 280mm; and / or, along the X-axis direction, part of the second air floats protrude outward from the corresponding end of the assembly cavity; and / or, along the Z-axis direction, the at least two second air floats in each group are respectively arranged corresponding to the two ends of the X-axis sliding rail mechanism along the Z-axis direction.

[0008] In a further embodiment of the present application, along the X-axis direction, the two ends of the top wall have protruding portions, and each protruding portion protrudes outward relative to the assembly cavity; the at least two third air floats are respectively connected to the protruding portions corresponding to the one end of the assembly cavity.

[0009] In a further embodiment of the present application, along the Y-axis direction, the third air float and the fourth air float are located on the side of the symmetry axis of the assembly cavity close to the front side wall.

[0010] In a further embodiment of the present application, the sliding support comprises: a support body having a front side wall, a top wall and a bottom wall; a rear cover plate arranged at the end of the support body opposite to the front side wall along the Y-axis direction and connected to the top wall and the bottom wall, the rear cover plate and the support body jointly form an assembly cavity, and the side of the rear cover plate facing the front side wall forms a rear side wall; wherein the ratio of the size of the X-axis sliding rail mechanism along the Z-axis direction to the size along the Y-axis direction is in the range of 1.6 to 2.4, and the size ratio of the assembly cavity is matched with the X-axis sliding rail mechanism.

[0011] In further embodiments of the present application, the air float is a hollow block structure, the air float has oppositely arranged assembly surfaces and sliding surfaces; the assembly surface has a connecting structure, the connecting structure is detachably connected with the sliding support; the sliding surface has a plurality of air outlets and air passages, the plurality of air outlets are symmetrically arranged in the length direction and the width direction of the sliding surface, and the ports of adjacent air outlets are communicated through the air passages; the side wall of the air float connecting the assembly surface and the sliding surface is provided with an air inlet, and the air inlet is used for connecting the air path system.

[0012] In embodiments of the second aspect of the present application, a three-coordinate measuring machine is provided, comprising: a base platform, the base platform having a Y-axis slide rail arranged along the Y-axis direction; a Y-axis slide carriage device arranged on the base platform and slidably connected with the Y-axis slide rail, the Y-axis slide carriage device being capable of sliding along the Y-axis relative to the base platform; and a measuring machine sliding device according to any one of claims 1 to 8, the X-axis slide rail mechanism of the measuring machine sliding device being connected with the Y-axis slide carriage device and located above the base platform; and a Z-axis movement mechanism connected with the sliding support of the measuring machine sliding device, the Z-axis movement mechanism having a measuring device capable of moving along the Z-axis under the drive of the Z-axis movement mechanism to measure an object to be measured arranged on the base platform.

[0013] In further embodiments of the present application, the three-coordinate measuring machine further comprises an air path system, the air path system comprising: an air source module; a gas supply mechanism, the gas supply mechanism being in communication with the air source module through a first air path, the first air path being provided with a first sensing unit; the gas supply mechanism being in communication with the air float assembly through a second air path to supply air to the air float assembly, and the second air path being provided with an electronic switch and a second pressure reducing unit; the Z-axis movement mechanism being a pneumatic mechanism, the gas supply mechanism being in communication with the Z-axis movement mechanism through a third air path to supply air to the Z-axis movement mechanism, the third air path being provided with a one-way valve, a first pressure reducing unit and a second sensing unit, the one-way valve being located in the third air path close to the gas supply mechanism; wherein the first sensing unit and the second sensing unit are electrically connected with the electronic switch.

[0014] The beneficial effects of the above technical solutions of the present application are:

[0015] According to the measuring machine sliding device in the present application, through the improvement and optimization of the structure, the size of the X-axis slide rail mechanism in the Z-axis direction is greater than that in the Y-axis direction, so that when applied to the three-coordinate measuring machine, the distance between the connection point of the Z-axis movement mechanism and the sliding support in the Z-axis direction can be increased, and at the same time, the air float arranged symmetrically on the front side wall and the rear side wall of the assembly cavity, and the air float arranged symmetrically on the top wall and the air float arranged at the center position on the bottom wall can effectively improve the stress condition of the Z-axis movement mechanism and enhance the assembly stability of the Z-axis movement mechanism, which is beneficial to improve the movement precision and measurement accuracy. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 A schematic diagram of a measuring machine sliding device in an embodiment of the present application;

[0017] Figure 2 A schematic diagram of a partial structure of a measuring machine sliding device in an embodiment of the present application (the rear cover plate of the sliding support is not shown);

[0018] Figure 3 A schematic diagram of a three-coordinate measuring machine in an embodiment of the present application;

[0019] Figure 4 A schematic diagram of a sliding support and an air floating assembly in an embodiment of the present application;

[0020] Figure 5 A schematic diagram of an air floating member in an embodiment of the present application;

[0021] Figure 6 A schematic diagram of an air path system in an embodiment of the present application;

[0022] Figure 7 A schematic diagram of a measuring machine sliding device in an embodiment of the present application;

[0023] Figure 8 A schematic diagram of an air path system in another embodiment of the present application.

[0024] Wherein, Figure 6 And Figure 8 The dashed line in indicates an electrical connection.

[0025] Explanation of reference signs:

[0026] 100 measuring machine sliding device; 1 sliding support, 10 assembly cavity, 11 support body, 111 front side wall, 112 top wall, 1121 protruding part, 113 bottom wall, 12 rear cover plate, 121 rear side wall, 2 X-axis sliding rail mechanism, 3 air floating assembly, 31 air floating member, 311 first air floating member, 312 second air floating member, 313 third air floating member, 314 fourth air floating member, 322 assembly surface, 3221 connecting structure, 323 sliding surface, 3231 air outlet hole, 3232 air passage, 324 air inlet hole;

[0027] 400 Coordinate measuring machine; 41 base platform, 411 marble platform, 412 Y-axis sliding rail, 42 Y-axis carriage device, 421 Y-axis column, 422 Y-axis air floating mechanism, 43 Z-axis movement mechanism, 432 Z-axis main body, 433 balancing mechanism, 434 Z-axis air floating mechanism; 45 air path system, 451 air source module, 452 air supply mechanism, 4521 pneumatic three-way joint, 4541 first sensing unit, 4542 second sensing unit, 4543 first pressure reducing unit, 4544 second pressure reducing unit, 4551 electronic switch, 4552 one-way valve, 461 first air path, 462 second air path, 463 third air path. DETAILED DESCRIPTION

[0028] The application will be described in further detail below with reference to the drawings. Like elements in different embodiments are denoted by like reference numerals. In the following embodiments, many details are described in order to provide a better understanding of the application. However, it will be readily apparent to those skilled in the art that some features in different embodiments can be omitted, or replaced by other elements, materials, methods, etc. In some cases, some operations related to the application are not shown or described in the specification, in order to avoid the core of the application being overwhelmed by too much description, and it is not necessary for those skilled in the art to describe these related operations in detail according to the description in the specification and general technical knowledge in the art.

[0029] In addition, the features, operations or characteristics described in the specification can be combined in any appropriate manner to form various embodiments, and the operation steps involved in each embodiment can also be sequentially adjusted or adjusted in a manner that is obvious to those skilled in the art. Therefore, the specification and drawings are only intended to clearly describe one embodiment, and do not mean that the composition and / or order is necessary.

[0030] In this paper, the serial numbers of components, such as "first", "second", etc., are only used to distinguish the described objects, and do not have any order or technical meaning. Unless otherwise specified, "connection" and "coupling" in this application include direct and indirect connections (couplings).

[0031] In common measuring equipment such as coordinate measuring machines, air floating devices are usually used to achieve air floating sliding. The sliding device of the measuring machine provided by the application can be applied to measuring equipment such as coordinate measuring machines, used as the X-axis movement mechanism of the coordinate measuring machine, and can carry the Z-axis movement mechanism with the measurer.

[0032] In the measuring machine sliding device provided by the application, the sliding support is used for connecting the Z-axis movement mechanism of the three-coordinate measuring machine; the X-axis sliding rail mechanism is arranged in the assembly cavity and can be connected with the Y-axis sliding frame device of the three-coordinate measuring machine. The X-axis sliding rail mechanism is in sliding fit with the assembly cavity through the air floating assembly arranged on the inner wall surface of the assembly cavity of the sliding support, so that the sliding support can slide relative to the X-axis sliding rail mechanism, thereby driving the Z-axis movement mechanism to move along the X-axis direction. The air floating assembly includes a plurality of air floating members. The X-axis sliding rail mechanism is designed to have a size in the Z-axis direction larger than a size in the Y-axis direction, so that when the sliding support is connected and assembled with the Z-axis movement mechanism, the distance between the connecting point of the Z-axis movement mechanism and the sliding support in the Z-axis direction can be increased, and at least two air floating members are symmetrically arranged on the front side wall and the rear side wall of the assembly cavity along the Z-axis direction, respectively, to match the size of the X-axis sliding rail mechanism, so as to ensure that the air floating force of the X-axis sliding rail mechanism in the Z-axis direction is balanced, thereby reducing the influence of the size design of the X-axis sliding rail on the assembly stability, and facilitating to ensure the measurement accuracy of the Z-axis movement mechanism and the accuracy of the measurement result.

[0033] It should be noted that the X-axis direction, the Y-axis direction and the Z-axis direction described in the application are three directions perpendicular to each other in a three-dimensional space, wherein the X-axis direction and the Y-axis direction are directions in a horizontal plane, and the Z-axis direction is a vertical direction perpendicular to the horizontal plane. The direction description in the following embodiments is the same as this.

[0034] Some embodiments of the measuring machine sliding device and the three-coordinate measuring machine provided by the application will be described below with reference to the accompanying drawings.

[0035] In the embodiments of the first aspect of the application, a measuring machine sliding device 100 is provided, as shown in Figure 1 、 Figure 2As shown, the measuring machine sliding device 100 comprises a sliding support 1, an X-axis sliding rail mechanism 2 and an air floating assembly 3. The sliding support 1 is capable of forming a sliding fit with the X-axis sliding rail mechanism 2, and when applied in a three-coordinate measuring machine, the sliding support 1 can be used to assemble a Z-axis movement mechanism 43, so that the Z-axis movement mechanism 43 can slide with the sliding support 1 relative to the X-axis sliding rail mechanism 2, and the X-axis sliding rail mechanism 2 can be connected with a Y-axis sliding carriage device 42 to be capable of sliding along the Y-axis direction with the Y-axis sliding carriage device 42. The sliding support 1 has an assembly cavity 10 extending along the X-axis direction, and the assembly cavity 10 has a front side wall 111 and a rear side wall 121 oppositely arranged in the Y-axis direction, and a top wall 112 and a bottom wall 113 oppositely arranged in the Z-axis direction; Correspondingly, the air floating assembly 3 comprises a plurality of air floating members 31 arranged on the inner wall surface of the assembly cavity 10, and the plurality of air floating members 31 are respectively connected to the front side wall 111, the rear side wall 121, the top wall 112 and the bottom wall 113 of the assembly cavity 10, and the air floating members 31 are capable of being connected with an air path system to form a gas output component. The X-axis sliding rail mechanism 2 is arranged along the X-axis direction and partially penetrates the assembly cavity 10 to form an air floating sliding fit with the plurality of air floating members 31 in the assembly cavity 10, so that the sliding support 1 can slide along the extension direction of the X-axis sliding rail mechanism 2. Among them, the size of the X-axis sliding rail mechanism 2 in the Z-axis direction is greater than that in the Y-axis direction, the size of the sliding support 1 and the assembly cavity 10 is matched with the X-axis sliding rail mechanism 2, and in the Z-axis direction, at least two air floating members 31 are arranged on the front side wall 111 and the rear side wall 121 of the assembly cavity 10, and the at least two air floating members 31 on the front side wall 111 are symmetrically arranged, and the at least two air floating members 31 on the rear side wall 121 are also symmetrically arranged.

[0036] It should be noted that the at least two air floating members 31 on the front side wall 111 of the assembly cavity 10 can be symmetrically arranged in the X-axis direction and / or the Z-axis direction, and similarly, the at least two air floating members 31 on the rear side wall 121 can also be symmetrically arranged in the X-axis direction and / or the Z-axis direction.

[0037] It can be understood that in common three-coordinate measuring equipment, the measuring device is arranged on the Z-axis movement mechanism, and a Z-axis air floating structure (such as an air floating rail) is usually assembled with an X-axis sliding carriage, for example, one Z-axis air floating structure is arranged on the top and the bottom of the X-axis sliding carriage respectively. Since the Z-axis movement mechanism has a certain length and weight, the installation distance of the upper and lower two Z-axis air floating structures has a certain influence on the assembly stability of the Z-axis movement mechanism and the measurement accuracy and precision, if the installation distance is too small, the connection point of the Z-axis movement mechanism and the X-axis sliding carriage is easy to appear the phenomenon of unbalanced stress, which is easy to cause the Z-axis movement mechanism unstable, and is not conducive to ensuring the movement precision of the measuring device and the measurement accuracy.

[0038] The sliding device 100 of the measuring machine in the embodiment, through the improvement and optimization of the structure, sets the size of the X-axis sliding rail mechanism 2 in the Z-axis direction to be greater than the size in the Y-axis direction, so that when applied to the three-coordinate measuring machine, the distance between the connecting point of the Z-axis movement mechanism 43 and the sliding support 1 in the Z-axis direction can be increased, and the air floating piece 31 symmetrically arranged on the front side wall 111 and the rear side wall 121 of the assembly cavity 10, the third air floating piece symmetrically arranged on the top wall 112, and the fourth air floating piece located at the symmetric center position on the bottom wall 113 can effectively improve the stress condition of the Z-axis movement mechanism 43, enhance the assembly stability of the Z-axis movement mechanism 43, and be beneficial to improve the movement precision and measurement accuracy.

[0039] In further embodiments of the application, as in the example of Figure 2 , the air floating assembly 3 includes at least two groups of first air floating pieces 311, which are arranged on the front side wall 111 of the assembly cavity 10 and located inside the assembly cavity 10 as a whole, so as to set the shell of the sliding support 1 in actual application, avoiding the first air floating piece 311 exceeding the assembly cavity 10 in the X-axis direction and interfering with the shell; wherein the at least two groups of first air floating pieces 311 are symmetrically arranged along the X-axis direction; the number of each group of first air floating pieces 311 is at least two, and the first air floating pieces 311 of each group are symmetrically arranged along the Z-axis. Through the above symmetric arrangement, the stress of the X-axis sliding rail mechanism 2 on the front side wall 111 of the assembly cavity 10 can be relatively balanced, which is beneficial to keep the X-axis sliding rail mechanism 2 and the Z-axis movement mechanism 43 thereon balanced.

[0040] Further, in a specific example, as in the example of Figure 2 , in the X-axis direction, the at least two groups of first air floating pieces 311 are symmetrically arranged on the front side wall 111 near the two ends to increase the distance between the at least two groups of first air floating pieces 311. Wherein, the distance between the at least two groups of first air floating pieces 311 in the X-axis direction is in the range of 180mm to 210mm (including both end point values), for example, 180mm, 185mm, 190mm, 195mm, 200mm, 205mm, 210mm, so that the at least two groups of first air floating pieces 311 can increase the distance in the X-axis direction as much as possible within the limited assembly space, which is beneficial to make the stress of the X-axis sliding rail mechanism 2 in the X-axis direction more balanced, and further improve the movement stability.

[0041] Further, in a specific example, as in the example of Figure 1 , Figure 2In the example, on the front sidewall 111 of the assembly cavity 10, at least two first air floats 311 of each group are respectively arranged corresponding to the two ends of the X-axis slide rail mechanism 2 in the Z-axis direction. Under the premise of satisfying the sliding cooperation with the X-axis slide rail, the spacing of the first air floats 311 in the Z-axis direction is increased as much as possible. This is beneficial to make the force on the X-axis slide rail mechanism 2 and the front sidewall 111 in the Z-axis direction more balanced, so as to further improve the motion stability.

[0042] In further embodiments of this application, such as Figure 1 , Figure 2 In the example, the air flotation assembly 3 further includes at least two sets of second air flotation elements 312, with each set containing at least two second air flotation elements 312. The at least two sets of second air flotation elements 312 are spaced apart in the X-axis direction, and the distance between the at least two sets of second air flotation elements 312 in the X-axis direction is greater than the distance between the at least two sets of first air flotation elements 311 in the X-axis direction. That is, on the projection plane perpendicular to the Y-axis direction, the at least two sets of second air flotation elements 312 are located on both sides of the first air flotation element 311 in the X-axis direction. It can be understood that in practical applications, the outer shell of the sliding support 1 is usually connected near the front sidewall 111 of the assembly cavity 10, so that the space at both ends of the front sidewall 111 in the X-axis direction is restricted by the outer shell of the sliding support 1, while the space at both ends of the rear sidewall 121 in the X-axis direction is unrestricted. Therefore, the above arrangement can further increase the spacing of the force-bearing points of the X-axis slide rail mechanism 2 on the rear sidewall 121 of the assembly cavity 10, thereby improving motion stability.

[0043] Furthermore, in a specific example, such as Figure 2 As shown, in the X-axis direction, at least two sets of second air-bearing components 312 are symmetrically arranged at both ends of the rear sidewall 121 of the assembly cavity 10, and the spacing between the at least two sets of second air-bearing components 312 in the X-axis direction is in the range of 240mm to 280mm (including the values ​​of the two endpoints), such as 245mm, 250mm, 255mm, 260mm, 265mm, 270mm, and 275mm. This is to maximize the spacing between the second air-bearing components 312 in the X-axis direction while satisfying the connection and assembly requirements. This is beneficial to make the force on the X-axis slide rail mechanism 2 and the rear sidewall 121 more balanced in the X-axis direction, thereby further improving the motion stability.

[0044] Furthermore, in a specific example, such as Figure 2 and Figure 4In the example, the portion of the second air-bearing component 312 in the X-axis direction extends outward from one end of the assembly cavity 10. That is, a portion of the second air-bearing component 312 is located inside the assembly cavity 10 to be connected and fixed to the rear side wall 121 of the assembly cavity 10, while the other portion is located outside the assembly cavity 10. This maximizes the spacing of the second air-bearing component 312 in the X-axis direction by utilizing the limited assembly space. It also increases the spacing of the force-bearing points of the X-axis slide rail mechanism 2 on the rear side wall 121 of the assembly cavity 10, thereby improving motion stability.

[0045] Furthermore, in yet another specific example, such as Figure 1 , Figure 2 and Figure 4 In the example, at least two second air-bearing components 312 in each group are symmetrically arranged along the Z-axis direction and are respectively arranged at both ends of the X-axis slide rail mechanism 2 in the Z-axis direction. In order to maximize the spacing of the second air-bearing components 312 in the Z-axis direction while maintaining a sliding fit with the X-axis slide rail mechanism 2, so as to match the size of the X-axis slide rail mechanism 2 in the Z-axis direction and make the force on the X-axis slide rail mechanism 2 and the rear side wall 121 in the Z-axis direction more balanced, thereby improving the motion stability.

[0046] In further embodiments of this application, such as Figure 1 and Figure 4 As shown, the top wall 112 of the sliding support 1 has protrusions 1121 at both ends in the X-axis direction, and the protrusions 1121 protrude outward relative to the assembly cavity 10 in the X-axis direction for fixing the air flotation component 31. Correspondingly, the air flotation assembly 3 includes at least two third air flotation components 313, which are symmetrically arranged in the X-axis direction and connected to the protrusions 1121 at one end of the assembly cavity 10 respectively, so as to realize the assembly and fixing of the third air flotation components 313; at the same time, since the protrusions 1121 are located outside the assembly cavity 10, by setting the third air flotation components 313 to be connected to the protrusions 1121, at least a part of the third air flotation components 313 can be located outside the assembly cavity 10, for example... Figure 4 In the example, the third air float 313 is connected to the bottom of the protrusion 1121, and in the X-axis direction, one end of the third air float 313 extends into the assembly cavity 10, and the other end is located outside the assembly cavity 10, thereby further increasing the spacing of the third air float 313 in the X-axis direction, so that the force on the connection point between the X-axis slide rail mechanism 2 and the top wall 112 of the assembly cavity 10 in the X-axis direction is more balanced, thereby improving the motion stability.

[0047] Correspondingly, the air floating assembly 3 further comprises a fourth air floating piece 314 connected to the bottom wall 113 of the assembly cavity 10, and in the X-axis direction, the fourth air floating piece 314 is located at the symmetrical center position of the at least two third air floating pieces 313 in the X-axis direction, that is, the at least two third air floating pieces 313 are symmetrically arranged on both sides of the fourth air floating piece 314 in the X-axis direction, so that the stress of the X-axis sliding rail mechanism 2 on both sides of the fourth air floating piece 314 is relatively balanced.

[0048] It should be noted that in actual application, as an example in Figure 4 , two third air floating pieces 313 can be arranged on the top wall 112 of the assembly cavity 10, and one fourth air floating piece 314 can be arranged on the bottom wall 113 of the assembly cavity 10, so as to reduce the number of air floating pieces 31, reduce the cost, and at the same time meet the stability requirements of the X-axis sliding rail mechanism 2 through the symmetrical arrangement.

[0049] Further, as an example in Figure 2 and Figure 4 , the spacing of the third air floating piece 313 in the X-axis direction is not less than 250mm, for example, it can be 250mm, 260mm, 270mm, 280mm, 290mm, 300mm, 310mm, 320mm, and can be selected according to the specific size of the sliding support 1, so as to increase the spacing of the X-axis sliding rail top stress point in the X-axis direction as much as possible under the premise of meeting the assembly requirements, which is beneficial to further improve the stress balance and assembly stability.

[0050] Further, as shown in Figure 1 , Figure 2 and Figure 4 , in the Y-axis direction, the third air floating piece 313 and the fourth air floating piece 314 are located on one side of the symmetrical axis of the assembly cavity 10 in the Y-axis direction close to the front side wall 111, forming a Y-axis direction bias design, so that the stress point of the X-axis sliding rail mechanism 2 in the Z-axis direction is closer to the front side wall 111 of the assembly cavity 10 and the Z-axis movement mechanism 43 when the sliding rail support is assembled with the Z-axis movement mechanism 43, so as to shorten the force arm generated by the gravity of the Z-axis movement mechanism 43 on the X-axis sliding rail mechanism 2, which is beneficial to improve the stress balance of the overall structure, so as to improve the movement stability of the X-axis sliding rail mechanism 2 in the state of assembling the Z-axis movement mechanism 43.

[0051] It can be understood that in the three-coordinate measuring machine of the present application, the Z-axis movement mechanism is connected to the front side wall of the sliding support, and the force point is located on the front side wall, so that the center of gravity of the sliding support is close to the front side wall, and the force points of the sliding support and the X-axis sliding rail mechanism on the Z-axis are located in the assembly cavity, so that the overall force point forms a certain spacing in the Y-axis direction. If the spacing is too large, a torque will be formed, which will affect the assembly stability of the sliding support. In the present embodiment, by adopting the offset design of the third air float and the fourth air float, the spacing of the force points in the Y-axis direction can be effectively shortened, so that the torque of the sliding support is reduced to a bearable range, so as to ensure the movement stability and measurement accuracy of the sliding support and the Z-axis movement mechanism.

[0052] It should be noted that the above is only a preferred example of the present application, and more third air floats 313 and fourth air floats 314 can be provided according to actual assembly needs. For example, two groups of third air floats 313 and two groups of fourth air floats 314 are provided, each group of third air floats 313 has at least two, each group of fourth air floats 314 has at least one, and the two groups of third air floats 313 and the two groups of fourth air floats 314 are arranged in the Y-axis direction respectively, so as to further increase the number of force points of the X-axis sliding rail mechanism 2 in the Y-axis direction, which is beneficial to further improve the stability of the X-axis sliding rail mechanism 2. The example of providing two third air floats 313 and one fourth air float 314 can also reduce the space occupied by the air float 31 in the assembly cavity 10 while ensuring the stability of the X-axis sliding rail mechanism 2.

[0053] In a further embodiment of the present application, as shown in Figure 2 and Figure 4 , the sliding support 1 specifically includes a support body 11 and a rear cover plate 12. The support body 11 has a slot structure through in the X-axis direction, for example, as shown in the example of Figure 4 , the rear side of the support body 11 in the Y-axis direction is an open side, the rear cover plate 12 is capped on the open side of the sliding support 1 in the Y-axis direction and connected with the sliding support 1, and the rear cover plate 12 and the slot structure of the support body 11 form the assembly cavity 10. The support body 11 has a front side wall 111, a top wall 112 and a bottom wall 113 of the assembly cavity 10, and the side of the rear cover plate 12 facing the front side wall 111 forms a rear side wall 121 of the assembly cavity 10. By setting the separate connection between the support body 11 and the rear cover plate 12 to assemble the sliding support 1, it is convenient for assembly with the X-axis sliding rail mechanism 2.

[0054] It should be noted that the rear cover plate 12 can be directly abutted and connected with the end face of the open side of the support body 11 in the Y-axis direction, or the rear cover plate 12 can be set to extend into the slot structure of the support body 11 and be connected with the top wall 112 and the bottom wall 113; wherein the rear cover plate 12 and the support body 11 can be connected and fixed by bolt connection, welding or other methods.

[0055] Further, as shown in the examples of Figure 2 and Figure 4 , the ratio of the size of the X-axis slide rail mechanism 2 in the Z-axis direction to the size in the Y-axis direction is in the range of 1.6 to 2.4 (including both end values), for example, it can be 1.8, 2, 2.2, when the above size ratio setting can take into account the structural strength and assembly stability, in order to increase the distance between the connecting point of the Z-axis movement mechanism 43 and the slide support 1 in the Z-axis direction when the slide support 1 and the Z-axis movement mechanism 43 are connected and assembled, to improve the assembly stability and movement precision under the premise of meeting the bearing requirement.

[0056] In further embodiments of the present application, as shown in Figure 4 and Figure 5 , the air float 31 can specifically adopt a hollow block structure, and the internal cavity can be used to accommodate gas. The air float 31 has oppositely arranged assembly surface 322 and sliding surface 323; the assembly surface 322 has a connecting structure 3221 for connecting and fixing with the slide support 1, for example Figure 5 , the connecting structure 3221 can adopt a bolt structure, a bolt hole corresponding to the bolt structure can be formed on the slide support 1 at a corresponding position, so that the air float 31 and the slide support 1 are detachably connected through the bolt structure. The sliding surface 323 of the air float 31 has a plurality of gas outlets 3231 and a plurality of air passages 3232, the gas outlets 3231 pass through the sliding surface 323, so that the gas inside the air float 31 can be discharged outward through the gas outlets 3231, to form a gas floating sliding fit with the X-axis slide rail mechanism 2 by using the gas action; a plurality of gas outlets 3231 are symmetrically arranged on the sliding surface 323 along the length direction and the width direction, so as to form a multi-point force with the X-axis slide rail mechanism 2, which is beneficial to improve the stability. Correspondingly, the side wall of the air float 31 connecting the assembly surface 322 and the sliding surface 323 is provided with an air inlet hole 324 for connecting the gas circuit system, so as to supply gas to the air float 31 through the gas circuit system. Among them, the air passage 3232 is recessed inward from the sliding surface 323, and the air passage 3232 connects the ports of adjacent gas outlets 3231, so that part of the gas discharged by adjacent gas outlets 3231 can flow along the extension direction of the air passage 3232 when cooperating with the X-axis slide rail mechanism 2, to connect and form a gas layer, thereby increasing the force bearing area of the X-axis slide rail mechanism 2, reducing the friction between the slide support 1 and the X-axis slide rail mechanism 2, making the sliding more smooth and stable, and making the force bearing of the X-axis slide rail mechanism 2 more balanced, to further improve the stability.

[0057] Further, as shown in Figure 5In the example, the sliding surface 323 is a rectangular plane, and the multiple vents 3231 are arranged in two groups. One group of vents 3231 is symmetrically arranged along the length direction of the sliding surface 323, and the other group of vents 3231 is symmetrically arranged along the width direction of the sliding surface 323, located at the axis of symmetry of the sliding surface 323 along its length. Correspondingly, multiple vent grooves 3232 are arranged along the length and width directions of the sliding surface 323, and each vent groove 3232 passes through one of the vents 3231, for example... Figure 5 The four ventilation slots 3232 shown in the figure are connected to form a closed rectangular frame structure.

[0058] In practical applications, the number of vents 3231 in each group can be as follows: Figure 5 The two shown can be replaced with more than two. When there are two vents 3231 in each group, the two vents 3231 symmetrically arranged along the length of the sliding surface 323 can be located at the axis of symmetry of the sliding surface 323 in the width direction. Similarly, the two vents 3231 symmetrically arranged along the width of the sliding surface 323 can be located at the axis of symmetry of the sliding surface 323 in the length direction, so that the force on both sides of the X-axis slide rail mechanism 2 in the length direction and both sides in the width direction of the sliding surface 323 is the same. Of course, the above is only a preferred example. In actual applications, more vents 3231 can be set as needed, and they can be symmetrically arranged in the length and width directions of the sliding surface 323, or arranged in a matrix form with the center point of the sliding surface 323 as the center point.

[0059] In addition, such as Figure 5 In the example, air inlets 324 can be provided on one or more side walls of the air flotation component 31, and the number of air inlets 324 can be one or more; preferably, multiple air inlets 324 are provided on each side wall at equal intervals, so as to realize simultaneous air intake from multiple directions and multiple points, which can improve the air intake efficiency, and can avoid large differences in exhaust pressure of multiple air outlets 3231 when the gas is discharged through the air outlet 3231, which is conducive to further maintaining the stability of the X-axis slide rail mechanism 2.

[0060] An embodiment of the second aspect of this application provides a coordinate measuring machine 400, such as... Figure 1 and Figure 3As shown, the three-coordinate measuring machine 400 comprises a base platform 41, a Y-axis slide device 42, the measuring machine sliding device 100 in any of the embodiments of the first aspect, and a Z-axis movement mechanism 43. The base platform 41 serves as a mounting base and a bearing platform for the object to be measured, and the base platform 41 is provided with a Y-axis slide rail 412 arranged along the Y-axis. The Y-axis slide device 42 is arranged on the base platform 41 and is in sliding connection with the Y-axis slide rail 412 on the base platform 41, so that the Y-axis slide device 42 can slide along the Y-axis relative to the base platform 41. The measuring machine sliding device 100 is arranged above the base platform 41, and the X-axis slide rail mechanism 2 is connected to the Y-axis slide device 42 and arranged along the X-axis direction. The Z-axis movement mechanism 43 is arranged above the base platform 41 along the Z-axis direction and is connected with the sliding support 1; the Z-axis movement mechanism 43 is provided with a measuring device (not shown in the figure) for performing a measurement operation on the object to be measured on the base platform 41; wherein the measuring device can move along the Z-axis direction under the drive of the Z-axis movement mechanism 43 to adjust the height of the measuring device through lifting movement; the Z-axis movement mechanism 43 can slide along the X-axis direction as a whole with the sliding support 1 to adjust the position of the measuring device in the X-axis direction, and meanwhile, the Z-axis movement mechanism 43 and the measuring machine sliding device 100 can slide along the Y-axis under the action of the Y-axis slide device 42 to adjust the position of the measuring device in the Y-axis direction.

[0061] Through the three-coordinate measuring machine 400 in the embodiment, the position adjustment of the measuring device in the three-coordinate axis direction can be realized to accurately measure the object to be measured in the three-dimensional space of the three-coordinate axes. By arranging the measuring machine sliding device 100 in any of the embodiments of the first aspect, the distance between the Z-axis movement mechanism 43 and the connecting point of the sliding support 1 in the Z-axis direction can be increased, and the symmetrical layout of the air floating member 31 adapted thereto is adopted, so that the Z-axis movement mechanism 43 is more balanced in force, which is beneficial to enhancing the assembly stability and movement precision and improving the measurement accuracy.

[0062] In further embodiments of the present application, as shown in Figure 3 and Figure 6 The three-coordinate measuring machine 400 further comprises an air path system 45 for supplying air to the air floating assembly 3 and the Z-axis movement mechanism 43. The air path system 45 comprises an air source module 451, an air supply mechanism 452, a one-way valve 4552, an electronic switch 4551, a first sensing unit 4541, a second sensing unit 4542, a first pressure reducing unit 4543, a second pressure reducing unit 4544, a first air path 461, a second air path 462, and a third air path 463. The air supply mechanism 452 is in communication with the air source module 451 through the first air path 461, and the air supply is in communication with the air floating assembly 3 through the second air flow; as Figure 6 and Figure 7In the example of the Z-axis movement mechanism 43, the third gas path 463 is in communication with the Z-axis movement mechanism 43 through the gas supply mechanism 452. When gas supply is needed, the gas supply mechanism 452 supplies the gas from the gas source module 451 to the air float assembly 3 and the Z-axis movement mechanism 43 respectively.

[0063] In the example, the first gas path 461 is provided with a first sensing unit 4541 for detecting the gas pressure between the gas source module 451 and the gas supply mechanism 452. Figure 6 In the example, the first gas path 461 is provided with a first sensing unit 4541 for detecting the gas pressure between the gas source module 451 and the gas supply mechanism 452. In the example, the first gas path 461 is provided with a first sensing unit 4541 for detecting the gas pressure between the gas source module 451 and the gas supply mechanism 452. The second gas path 462 is provided with an electronic switch 4551 and a second pressure reducing unit 4544. The electronic switch 4551 is used to control the gas supply to the air float assembly 3, and the second pressure reducing unit 4544 is used to reduce the pressure so that the output pressure meets the pressure requirement of the air float assembly 3. The second gas path 462 is provided with a one-way valve 4552, a first pressure reducing unit 4543 and a second sensing unit 4542. The one-way valve 4552 is located between the first pressure reducing unit 4543 and the gas supply mechanism 452, so that the gas in the first gas path 461 can only flow in one direction. In the case that the gas pressure in the gas path system 45 drops rapidly after the electronic switch 4551 or the total power supply of the gas path system 45 is turned off, the one-way valve 4552 can keep the gas pressure in the first gas path 461, preventing the Z-axis movement mechanism 43 from falling and colliding with the base platform 41 due to insufficient gas pressure. The first pressure reducing unit 4543 is used to reduce the gas pressure output to the Z-axis movement mechanism 43, so that the gas pressure meets the use requirement. The second sensing unit 4542 is located between the first pressure reducing unit 4543 and the Z-axis movement mechanism 43, and is used to detect the gas pressure in the third gas path 463 after the pressure reduction by the first pressure reducing unit 4543. The first sensing unit 4541 and the second sensing unit 4542 are electrically connected to the electronic switch 4551 for data transmission. The electronic switch 4551 can control the on-off state of the second gas path 462 based on the detection data of the first sensing unit 4541 and the second sensing unit 4542.

[0064] The following further introduces a specific example of the three-coordinate measuring machine 400 of the present application in conjunction with the drawings.

[0065] As Figures 1 to 7As shown, in the coordinate measuring machine 400, the base platform 41 is provided with Y-axis sliding rails 412 extending along the Y-axis on both sides of the X-axis direction, and a marble platform 411 is arranged between the Y-axis sliding rails 412. The Y-axis sliding carriage device 42 specifically includes two Y-axis columns 421 arranged oppositely, which are respectively connected with the Y-axis sliding rails 412 on both sides of the marble platform 411 in a sliding manner, and are connected with the Y-axis sliding rails 412 through Y-axis air floating mechanisms to form air floating sliding cooperation. The X-axis sliding rail mechanism 2 of the measuring machine sliding device 100 is arranged on the top of the two Y-axis columns 421 to be able to slide along the Y-axis together with the Y-axis columns 421. The X-axis sliding rail mechanism 2 is arranged in the assembly cavity 10 of the sliding support 1, and is connected with the X-axis sliding rail mechanism 2 through the air floating assembly 3 on the inner wall of the assembly cavity 10 to form air floating sliding cooperation. The Z-axis movement mechanism 43 is connected to the front side wall 111 of the sliding support 1, and is connected with the sliding support 1 through the Z-axis air floating mechanism 434 to form air floating sliding cooperation. The Z-axis air floating mechanism 434 can specifically adopt the structure of the air floating guide rail as shown in Figures 1 to 4 The Z-axis movement mechanism 43 has a measurer, a Z-axis body 432, a balancing mechanism 433 and a Z-axis air floating mechanism 434. The balancing mechanism 433 is connected with the Z-axis body 432, the Z-axis body 432 is connected with the sliding support 1 through the Z-axis air floating mechanism 434 to form air floating sliding cooperation, and the balancing mechanism 433 is used for balancing the weight of the Z-axis body 432. The balancing mechanism 433 can specifically adopt an air cylinder, which is connected with the Z-axis body 432 through a piston and drives the Z-axis body 432 to slide relative to the sliding support 1. The measurer is arranged at the bottom of the Z-axis body 432 to facilitate measurement of the object to be measured on the marble platform 411.

[0066] As shown in the examples in Figure 4 The sliding support 1 specifically includes a support body 11 and a rear cover plate 12. The support body 11 has a slot structure penetrating along the X-axis direction, and has a front side wall 111, a top wall 112 and a bottom wall 113. The rear side of the support body 11 in the Y-axis direction is an open side. The rear cover plate 12 is connected with the sliding support 1 and covers the open side of the sliding support 1 in the Y-axis direction. The rear cover plate 12 and the slot structure of the support body 11 form the assembly cavity 10, and the side of the rear cover plate 12 facing the front side wall 111 forms the rear side wall 121 of the assembly cavity 10. The ratio of the size of the X-axis sliding rail mechanism 2 in the Z-axis direction to the size in the Y-axis direction is 2, and the size of the assembly cavity 10 is matched with the X-axis sliding rail mechanism 2. The air floating assembly 3 includes a plurality of air floating members 31, and the plurality of air floating members 31 are arranged on the front side wall 111, the rear side wall 121, the top wall 112 and the bottom wall 113 of the assembly cavity 10, respectively. The air floating members 31 can be connected with the air path system 45 to form air floating sliding cooperation with the X-axis sliding rail mechanism 2 through the action of the gas.

[0067] As shown in the examples in Figure 5 and Figure 5As shown, the air float 31 is specifically a hollow cuboid block structure, and the internal cavity can be used to accommodate gas. The two opposite large faces of the air float 31 in the thickness direction are respectively the assembly face 322 and the sliding face 323; the assembly face 322 has a connecting structure 3221, for example Figures 1 to 4 The bolt structure shown in the middle is used to connect and fix with the sliding support 1. The sliding face 323 of the air float 31 has four gas outlet holes 3231 and four air passage grooves 3232, and the gas outlet holes 3231 pass through the sliding face 323; two of the gas outlet holes 3231 are located at the position of the lengthwise symmetry axis of the sliding face 323 and are symmetrically arranged in the width direction of the sliding face 323, and the other two gas outlet holes 3231 are located at the position of the widthwise symmetry axis of the sliding face 323 and are symmetrically arranged in the length direction of the sliding face 323. A plurality of air inlet holes 324 are formed on the side wall of the air float 31 connecting the assembly face 322 and the sliding face 323 (i.e. on the side wall extending in the thickness direction), which are used to connect the gas path system 45 to supply gas to the air float 31 through the gas path system 45. The air passage groove 3232 is a long strip-shaped groove recessed inward from the sliding face 323, two of the air passage grooves 3232 extend along the length direction of the sliding face 323 and pass through the two gas outlet holes 3231 symmetrically arranged in the width direction of the sliding face 323 respectively, and the other two air passage grooves 3232 extend along the width direction of the sliding face 323 and pass through the two gas outlet holes 3231 symmetrically arranged in the length direction of the sliding face 323 respectively; adjacent two air passage grooves 3232 are cross-connected to each other to connect the ports between adjacent gas outlet holes 3231 through the air passage grooves 3232. When cooperating with the X-axis slide rail mechanism 2, the gas layer is connected by the gas outlet holes 3231 and the air passage grooves 3232, and part of the gas discharged from adjacent gas outlet holes 3231 can flow along the extension direction of the air passage grooves 3232, thereby increasing the stress area of the X-axis slide rail mechanism 2, reducing the friction between the sliding support 1 and the X-axis slide rail mechanism 2, and making the sliding more smooth and stable.

[0068] As shown in the example in Figure 2 The air float assembly 3 in the assembly cavity 10 includes two groups of first air floats 311, two groups of second air floats 312, two third air floats 313 and one fourth air float 314.

[0069] The two groups of first air floats 311 are arranged on the front side wall 111 of the assembly cavity 10 and are located inside the assembly cavity 10; the two groups of first air floats 311 are symmetrically arranged along the X-axis direction and correspond to the two ends of the front side wall 111 respectively; the number of each group of first air floats 311 is two, and the two first air floats 311 of each group are symmetrically arranged along the Z-axis and correspond to the two ends of the X-axis slide rail mechanism 2 in the Z-axis direction respectively. The interval between at least two groups of first air floats 311 in the X-axis direction is in the range of 180mm to 210mm (including the two end point values).

[0070] Correspondingly, two groups of second air floats 312 are arranged on the rear side wall 121 of the assembly cavity 10 and are symmetrically arranged in the X-axis direction, and the spacing of the two groups of second air floats 312 in the X-axis direction is greater than the spacing of the two groups of first air floats 311 in the X-axis direction. As shown in Figure 1 In the X-axis direction, the two groups of second air floats 312 are symmetrically arranged at both ends of the rear side wall 121 of the assembly cavity 10; the part of the second air float 312 in the X-axis direction protrudes outward corresponding to one end of the assembly cavity 10, and the spacing of the two groups of second air floats 312 in the X-axis direction is in the range of 240mm to 280mm (including both end point values). Moreover, the two second air floats 312 in each group are symmetrically arranged along the Z-axis direction and are respectively arranged corresponding to both ends of the X-axis sliding rail mechanism 2 in the Z-axis direction.

[0071] As shown in Figure 4 and Figure 8 The top wall 112 of the sliding support 1 has a protruding portion 1121 at both ends in the X-axis direction, and the protruding portion 1121 protrudes outward in the X-axis direction relative to the assembly cavity 10, and a bolt hole for fixing the air float is formed on each protruding portion 1121. Correspondingly, two third air floats 313 are symmetrically arranged on the top wall 112 of the assembly cavity 10 in the X-axis direction, and are respectively connected with the protruding portion 1121 corresponding to one end of the assembly cavity 10, so that part of the third air float 313 is located outside the assembly cavity 10, one end of the third air float 313 in the X-axis direction protrudes into the assembly cavity 10, and the other end is located outside the assembly cavity 10, and the spacing of the third air float 313 in the X-axis direction is not less than 250mm.

[0072] Correspondingly, the fourth air float 314 is connected to the bottom wall 113 of the assembly cavity 10, and in the X-axis direction, the fourth air float 314 is located at the symmetric center position of the two third air floats 313 in the X-axis direction. In the Y-axis direction, the third air float 313 and the fourth air float 314 are located on the side close to the front side wall 111 of the symmetric axis of the assembly cavity 10 in the Y-axis direction, so as to form a bias design in the Y-axis direction, so that the stress point of the X-axis sliding rail mechanism 2 in the Z-axis direction is closer to the front side wall 111 of the assembly cavity 10 and the Z-axis movement mechanism 43 when the sliding rail support is assembled.

[0073] As shown in Figure 8As shown, in the gas path system 45, the gas supply mechanism 452 specifically adopts a pneumatic triplex 4521 for gas supply; the Z-axis air float mechanism 434 of the Z-axis movement mechanism 43 and the Y-axis air float mechanism 422 of the Y-axis slide device 42 are respectively connected to the second gas path 462 of the gas path system 45 through pipelines to form a parallel form with the air float assembly 3, and the pipeline connecting the Z-axis air float mechanism 434 and the Y-axis air float mechanism 422 is provided with a second pressure reducing unit 4544 for reducing the pressure of the gas in the pipeline.

[0074] During the working process, the gas pressure between the gas source module 451 and the pneumatic triplex 4521 is P1, the gas pressure between the pneumatic triplex 4521 and the first pressure reducing unit 4543 and the electronic switch 4551 is P2, the gas pressure between the first pressure reducing unit 4543 and the second sensing unit 4542 is P3, and the gas pressure between the second pressure reducing unit 4544 and the air float assembly 3 and the Z-axis air float mechanism 434 and the Y-axis air float mechanism 422 is P4. J1 is the set value of the first pressure reducing unit 4543 (the gas pressure after passing through the first pressure reducing unit 4543), J2 is the set value of the second pressure reducing unit 4544 (the gas pressure after passing through the second pressure reducing unit 4544), and J3 is the set value of the pneumatic triplex 4521 (the gas pressure after passing through the pneumatic triplex 4521).

[0075] When the air float assembly 3 and the Z-axis air float mechanism 434 and the Y-axis air float mechanism 422 are normally working, P1>J3=P2>J1=P3, P2>J2=P4.

[0076] Y1 is the threshold value of the first sensing unit 4541, when P1Y1, the electronic switch 4551 is closed and the air float cannot be started; when the electronic switch 4551 is opened, P1≥Y1 is satisfied, so that when the air float is started, it can be ensured that the gas pressure of the gas source is large enough to ensure the stability of the gas path system 45.

[0077] Y2 is the low threshold value of the second sensing unit 4542, Y3 is the high threshold value of the second sensing unit 4542, P3 is the measured value of the second sensing unit 4542, and P3 corresponds to the pressure of the balancing mechanism 433; when P3Y2, the electronic switch 4551 is closed and the air float cannot be started; when P3>Y3, the electronic switch 4551 is closed and the air float cannot be started, so that during the starting of the air float, the pressure of the balancing mechanism 433 is approximately the same as the weight of the Z-axis, and the Z-axis is in a stable state.

[0078] The three-coordinate measuring machine 400 in the embodiment can effectively improve the force condition of the Z-axis movement mechanism 43, enhance the assembly stability of the Z-axis movement mechanism 43, be beneficial to improving the movement precision and the measurement accuracy, and can reduce the number of air floaters as much as possible under the premise of meeting the air float operation requirement, which is beneficial to controlling the cost; meanwhile, in the state that the air pressure of the air path system 45 rapidly decreases after the electronic switch 4551 or the total power supply of the air path system 45 is turned off, the air pressure in the first air path 461 can be maintained through the one-way valve 4552, so as to prevent the Z-axis movement mechanism 43 from falling and colliding with the base platform 41 due to insufficient air pressure, and the safety is higher.

[0079] In addition, the three-coordinate measuring machine 400 in the application has all the beneficial effects of the measuring machine sliding device 100 in any one of the above embodiments, which will not be repeated here.

[0080] The above application of specific examples to the application is only used to help understand the application and does not limit the application. For those skilled in the art to which the application belongs, according to the idea of the application, a number of simple deductions, deformations or substitutions can be made.

Claims

1. A measuring machine slide apparatus, characterized by, The utility model relates to a kind of measuring machine sliding device, including: Sliding support, the sliding support has assembly cavity through along X axis direction, and the sliding support is used to connect Z axis movement mechanism; X axis slide rail mechanism, the X axis slide rail mechanism is partially set in the assembly cavity, and the size of the X axis slide rail mechanism in Z axis direction is greater than in Y axis direction; Air float assembly, the air float assembly includes multiple air floaters on the inner wall surface of the assembly cavity, the air float assembly can be connected with gas supply system, so that multiple the air floaters and the X axis slide rail mechanism form air float sliding fit, and the sliding support can slide along X axis direction; Wherein, multiple the air floaters are respectively connected to the top wall, bottom wall, front side wall and rear side wall of the assembly cavity, the front side wall and the rear side wall are oppositely arranged along Y axis direction, the top wall and the bottom wall are oppositely arranged along Z axis direction, and the front side wall and the rear side wall are respectively symmetrically provided with at least two air floaters in Z axis direction; At least two air floaters provided on the top wall are all third air floaters, and at least two third air floaters are symmetrically arranged along X axis direction; One air floater provided on the bottom wall is a fourth air floater, and the fourth air floater is located at the symmetric center position of two third air floaters in X axis direction.

2. The measuring machine sliding device according to claim 1, wherein: At least two groups of air floaters provided on the front side wall are all first air floaters, the number of each group of first air floaters is at least two, and at least two groups of first air floaters are located in the assembly cavity as a whole; Wherein, at least two groups of first air floaters are symmetrically arranged along X axis direction, and each group of first air floaters is symmetrically arranged along Z axis direction.

3. The measuring machine sliding device according to claim 2, wherein: At least two groups of first air floaters are symmetrically arranged on the front side wall near both ends along X axis direction, and the spacing between at least two groups of first air floaters in X axis direction is in the range of 180mm to 210mm; and / or, At least two first air floaters in each group are respectively arranged corresponding to both ends of the X axis slide rail mechanism in Z axis direction.

4. The measuring machine sliding device according to claim 2, wherein: At least two groups of air floaters provided on the rear side wall are all second air floaters, the number of each group of second air floaters is at least two, and at least two groups of second air floaters are symmetrically arranged in Z axis direction; in X axis direction, the spacing between at least two groups of second air floaters is greater than the spacing between at least two groups of first air floaters; Wherein, in X axis direction, at least two groups of second air floaters are symmetrically arranged at both ends of the rear side wall, and the spacing between at least two second air floaters in X axis direction is in the range of 240mm to 280mm; and / or, In X axis direction, part of the second air floater is outwardly protruded from a corresponding end of the assembly cavity; and / or, In Z axis direction, at least two second air floaters in each group are respectively arranged corresponding to both ends of the X axis slide rail mechanism in Z axis direction.

5. The measuring machine sliding device according to any one of claims 1 to 4, characterized in that, in the X-axis direction, the top wall has protrusions at both ends, and each of the protrusions protrudes outward relative to the assembly cavity; at least two of the third air floats are connected to the protrusions at the corresponding ends of the assembly cavity.

6. The measuring machine sliding device according to claim 5, characterized in that, in the Y-axis direction, the third air float and the fourth air float are located on the side of the symmetry axis of the assembly cavity close to the front side wall.

7. The measuring machine sliding device according to any one of claims 1 to 4, characterized in that, the sliding support comprises: a support body having the front side wall, the top wall, and the bottom wall; a rear cover plate arranged at the end of the support body opposite to the front side wall in the Y-axis direction and connected to the top wall and the bottom wall, the rear cover plate and the support body together form the assembly cavity, and the side of the rear cover plate facing the front side wall forms the rear side wall; wherein the ratio of the size of the X-axis sliding rail mechanism in the Z-axis direction to the size in the Y-axis direction is in the range of 1.6 to 2.4, and the size ratio of the assembly cavity is adapted to the X-axis sliding rail mechanism.

8. The measuring machine sliding device according to any one of claims 1 to 4, characterized in that, the air float is a hollow block structure, and has an assembly surface and a sliding surface arranged oppositely; the assembly surface has a connecting structure, which is detachably connected to the sliding support; the sliding surface has a plurality of air outlet holes and air passage grooves, the plurality of air outlet holes are symmetrically arranged in the length direction and the width direction of the sliding surface, and the ports of adjacent air outlet holes are connected through the air passage grooves; an air inlet hole is arranged on the side wall of the air float connecting the assembly surface and the sliding surface, and the air inlet hole is used to connect the air path system.

9. A three-coordinate measuring machine, characterized in that comprises: a base platform having a Y-axis sliding rail arranged along the Y-axis direction; a Y-axis sliding carriage device arranged on the base platform and slidably connected to the Y-axis sliding rail, the Y-axis sliding carriage device can slide along the Y-axis relative to the base platform; and the measuring machine sliding device according to any one of claims 1 to 8, the X-axis sliding rail mechanism of the measuring machine sliding device is connected to the Y-axis sliding carriage device and located above the base platform; a Z-axis movement mechanism connected to the sliding support of the measuring machine sliding device, the Z-axis movement mechanism has a measurer, the measurer can move along the Z-axis under the drive of the Z-axis movement mechanism to measure the object to be measured placed on the base platform.

10. The coordinate measuring machine according to claim 9, characterized in that and further comprises an air path system, the air path system comprises: a gas source module; a gas supply mechanism in communication with the gas source module through a first air path, the first air path is provided with a first sensing unit; the gas supply mechanism is in communication with the air float assembly through a second air path to supply gas to the air float assembly, and the second air path is provided with an electronic switch and a second pressure reducing unit. The Z-axis movement mechanism is a pneumatic mechanism, the air supply mechanism is communicated with the Z-axis movement mechanism through a third air path to supply air to the Z-axis movement mechanism, a one-way valve, a first pressure reduction unit and a second sensing unit are arranged in the third air path, and the one-way valve is located at a position close to the air supply mechanism in the third air path. The first sensing unit and the second sensing unit are electrically connected with the electronic switch.

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