Bearing device and detection equipment

Abstract

The utility model relates to the technical field of automatic detection, in particular to a bearing device and detection equipment, the bearing device comprises a bearing main body, a first edge pressing mechanism and a position switching assembly, the position switching assembly comprises a second edge pressing mechanism and a driving mechanism, and the driving mechanism and the first edge pressing mechanism are both arranged on the bearing main body; the first edge pressing mechanism and the second edge pressing mechanism can press and release a tested product, the first edge pressing mechanism and the second edge pressing mechanism are oppositely arranged, and the driving mechanism can drive the second edge pressing mechanism to be close to or away from the first edge pressing mechanism so that the first edge pressing mechanism and the second edge pressing mechanism can be matched. According to the bearing device and the detection equipment, the tested products of different sizes are fixed, the universality of the bearing device and the detection equipment on the tested products of different sizes is improved, the bearing device does not need to be disassembled and replaced in the automatic batch detection process of the tested products of different sizes, and the detection efficiency of the detection equipment can be improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of automatic detection, in particular to a bearing device and a detection equipment. BACKGROUND

[0002] In the production process of products, it is usually necessary to detect workpieces by automatic detection equipment. For example, in the production process of semiconductors, it is necessary to detect the substrate of a semiconductor by a detection equipment. In the specific detection process, the bearing device of the detection equipment supports and fixes the substrate, and drives the substrate to move by the bearing device, so as to realize the detection of the substrate by the detection equipment.

[0003] In order to improve the fixing and mounting stability of the substrate, the current bearing device can only support and fix a single specification and size of substrate. Therefore, in the automatic detection process of substrates of multiple specifications and sizes, the bearing device suitable for different sizes of substrates needs to be disassembled and replaced, which will result in low detection efficiency of the detection equipment. CONTENT OF THE INVENTION

[0004] The present application provides a bearing device and a detection equipment to solve the technical problem of low detection efficiency of the detection equipment.

[0005] According to a first aspect, a bearing device is provided in an embodiment, comprising:

[0006] a bearing body for bearing a first edge pressing mechanism;

[0007] a position switching assembly comprising a driving mechanism and a second edge pressing mechanism, the driving mechanism is arranged on the bearing body, and the second edge pressing mechanism is arranged on the driving mechanism, and the second edge pressing mechanism is arranged opposite to the first edge pressing mechanism;

[0008] The first edge pressing mechanism and the second edge pressing mechanism each comprise a supporting part and an edge pressing part, the supporting part is used for supporting a measured product, and the edge pressing part is used for cooperating with the supporting part to press or release the measured product; the driving mechanism is used for driving the second edge pressing mechanism to switch between a first station and a second station, so that the second edge pressing mechanism in the first station cooperates with the first edge pressing mechanism to complete the fixing of a first size measured product, and the second edge pressing mechanism in the second station cooperates with the first edge pressing mechanism to complete the fixing of a second size measured product.

[0009] In an optional embodiment, the first edge pressing mechanism and the second edge pressing mechanism each further comprise a first driving member, the power end of the first driving member is coupled to the edge pressing part, and the first driving member is used for driving the edge pressing part to move relative to the supporting part to press or release the measured product.

[0010] In an alternative embodiment, the first and second edge pressing mechanisms each further comprise a linkage assembly, one end of the linkage assembly is connected to the edge pressing part, and the other end of the linkage assembly is connected to the power end of the first driving member, the first driving member is capable of driving the linkage assembly to turn the edge pressing part relative to the support part to press or release the product under test.

[0011] In an alternative embodiment, the driving mechanism comprises a second driving member and a carrier, the second driving member is arranged on the carrier body, the second edge pressing mechanism is arranged on the carrier, and the power end of the second driving member is coupled to the carrier to drive the carrier to switch the second edge pressing mechanism between the first and second workstations.

[0012] In an alternative embodiment, the position switching assembly further comprises a centering mechanism, the centering mechanism is arranged on the carrier in parallel with the second edge pressing mechanism, and the centering mechanism is capable of elastically abutting the product under test when the carrier drives the centering mechanism and the second edge pressing mechanism to approach the first edge pressing mechanism.

[0013] In an alternative embodiment, the centering mechanism comprises a third driving member, an elastic member, and an abutting member, the third driving member is arranged on the carrier, and the power end of the third driving member is coupled to the elastic member to drive the abutting member connected to the elastic member to elastically abut the product under test.

[0014] In an alternative embodiment, the carrier device further comprises a plurality of first detection members, the first detection members are arranged on the carrier body in intervals along the moving direction of the carrier, and the first detection members are used to detect the position information of the carrier.

[0015] In an alternative embodiment, the carrier device comprises two sets of oppositely arranged first edge pressing mechanisms and position switching assemblies, and the arrangement direction of one set of oppositely arranged first edge pressing mechanisms and position switching assemblies is perpendicular to the arrangement direction of the other set of oppositely arranged first edge pressing mechanisms and position switching assemblies.

[0016] In an alternative embodiment, the carrier device further comprises second detection members arranged on the carrier body, the second detection members are used to detect the position information of the product under test on the carrier body; the second detection members each comprise a signal emitting part and a signal receiving part opposite to each other; the connection line of the signal emitting part and the signal receiving part of one of the second detection members intersects with the connection line of the signal emitting part and the signal receiving part of the other of the second detection members at the geometric center of the carrier body; and / or,

[0017] The bearing device further comprises a third detection member; the third detection member is arranged on the bearing body, and is used for detecting the size of the product under test.

[0018] According to a second aspect, in an embodiment, a detection device is provided, comprising a bearing device according to any one of the above embodiments and a detection apparatus; the detection apparatus comprises a bright field light source, a dark field light source and an image acquisition device; the image acquisition device cooperates with the bright field light source to realize bright field imaging of the product under test; and the image acquisition device cooperates with the dark field light source to realize dark field imaging of the product under test.

[0019] In an optional embodiment, the detection device further comprises a lifting device; the lifting device comprises a fourth driving member and a support member; the support member is used for supporting the product under test; and the fourth driving member drives the support member to move along the thickness direction of the bearing body, so as to realize loading and unloading of the product under test.

[0020] According to the bearing device and the detection device in the above embodiments, the first edge pressing mechanism and the second edge pressing mechanism can press the product under test through cooperation of the support part and the edge pressing part; the first edge pressing mechanism and the second edge pressing mechanism are arranged oppositely; and the driving mechanism can drive the second edge pressing mechanism to switch between the first working position and the second working position, so as to make the second edge pressing mechanism in the first working position cooperate with the first edge pressing mechanism to fix the product under test of the first size, and make the second edge pressing mechanism in the second working position cooperate with the first edge pressing mechanism to fix the product under test of the second size. Thus, the bearing device can drive the second edge pressing mechanism to reciprocate through the driving mechanism, so as to cooperate with the first edge pressing mechanism to fix the product under test of different sizes, which helps to improve the compatibility of the bearing device and the detection device for products under test of different sizes, and in the process of automatic batch detection of products under test of different sizes, the bearing device does not need to be disassembled and replaced, and the detection efficiency of the detection device can be improved. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 FIG. 1 is a structural schematic view of a bearing device according to an embodiment;

[0022] Figure 2 FIG. 2 is a structural schematic view of a first edge pressing mechanism according to an embodiment;

[0023] Figure 3 FIG. 3 is a structural schematic view of a centering mechanism according to an embodiment;

[0024] Figure 4 FIG. 4 is a structural schematic view of a driving mechanism according to an embodiment;

[0025] Figure 5 FIG. 5 is a structural schematic view of a first detection member and a position switching assembly according to an embodiment;

[0026] Figure 6 Fig. 1 is a schematic view of the relative position structure of the detection device and the bearing device in an embodiment.

[0027] Fig. 1 is a schematic view of the relative position structure of the detection device and the bearing device in an embodiment. Fig. 1 is a schematic view of the relative position structure of the detection device and the bearing device in an embodiment. Fig. 1 is a schematic view of the relative position structure of the detection device and the bearing device in an embodiment. Fig. 1 is a schematic view of the relative position structure of the detection device and the bearing device in an embodiment. Fig. 1 is a schematic view of the relative position structure of the detection device and the bearing device in an embodiment. Fig. 1 is a schematic view of the relative position structure of the detection device and the bearing device in an embodiment. Fig. 1 is a schematic view of the relative position structure of the detection device and the bearing device in an embodiment. Fig. 1 is a schematic view of the relative position structure of the detection device and the bearing device in an embodiment.

[0028] Explanation of the bracketed reference numerals in the drawings: In the bracketed reference numerals in the drawings, the feature referred to by the reference numeral in the bracket is both the feature represented by the numeral in the bracket and the feature represented by the numeral outside the bracket. DETAILED DESCRIPTION

[0029] The application will be further described in details below with specific embodiments and with reference to the drawings. Similar elements in different embodiments are denoted by similar reference numerals. In the following embodiments, many details are described in order to make the application better understood. However, one skilled in the art can easily recognize that some features can be omitted in different cases, or can be replaced by other elements, materials, methods. In some cases, some operations related to the application are not shown or described in the specification in order to avoid the core of the application being overwhelmed by too much description, and it is not necessary to describe these related operations in details for one skilled in the art according to the description in the specification and the general technical knowledge in the art.

[0030] In addition, features described in the specification, operations or characteristics can be combined in any appropriate manner to form various embodiments, and the steps involved in each embodiment can be sequentially adjusted or adjusted in a manner that can be apparent to those skilled in the art. Therefore, the description and drawings are only for the purpose of clearly describing one embodiment, and do not mean the necessary composition and / or order.

[0031] The serial numbers of the components described herein, such as "first", "second", etc., are only used to distinguish the described objects, and do not have any sequential or technical meaning. The "connection" and "coupling" in the present application include direct and indirect connections (couplings) unless otherwise specified.

[0032] Embodiments of the present application disclose a bearing device 1 which can be applied to a detection device for detecting defects on a wafer or substrate surface, and the bearing device 1 is used to fix the measured product in the detection device.

[0033] The bearing device 1 of the embodiments of the present application, please refer to Figures 1 to 6 , comprising a bearing body 11 and a position switching assembly 14, the bearing body 11 is used to bear a first edge pressing mechanism 13, the position switching assembly 14 includes a driving mechanism 15 and a second edge pressing mechanism 16, the driving mechanism 15 is arranged on the bearing body 11, the second edge pressing mechanism 16 is arranged on the driving mechanism 15, and the second edge pressing mechanism 16 is arranged opposite to the first edge pressing mechanism 13.

[0034] The first edge pressing mechanism 13 and the second edge pressing mechanism 16 each include a support part and an edge pressing part. For the convenience of description, the support part in the first edge pressing mechanism 13 is a first support part 131, the edge pressing part in the first edge pressing mechanism 13 is a first edge pressing part 132, the support part in the second edge pressing mechanism 16 is a second support part 161, and the edge pressing part in the second edge pressing mechanism 16 is a second edge pressing part 162. The first support part 131 and the second support part 161 are used to support the measured product, the first edge pressing part 132 is used to press or release the measured product in cooperation with the first support part 131, and the second edge pressing part 162 is used to press or release the measured product in cooperation with the second support part 161; the driving mechanism 15 is used to drive the second edge pressing mechanism 16 to switch between the first station and the second station, so that the second edge pressing mechanism 16 in the first station cooperates with the first edge pressing mechanism 13 to complete the fixation of the first size measured product, and the second edge pressing mechanism 16 in the second station cooperates with the first edge pressing mechanism 13 to complete the fixation of the second size measured product.

[0035] In some embodiments, please refer to Figure 1The bearing body 11 is generally in a plate structure, the bearing body 11 has a hollow part 111 at the center of the plate structure, the measured product is located in the hollow part 111, the hollow part 111 exposes the measured surface of the measured product, the bearing body 11 has an inner edge close to the hollow part 111, the first edge pressing mechanism 13 is fixed on the bearing body 11, and the first edge pressing mechanism 13 and the second edge pressing mechanism 16 are arranged close to the inner edge, so as to facilitate the first edge pressing mechanism 13 and the second edge pressing mechanism 16 to press the edge of the measured product.

[0036] The driving mechanism 15 is installed on the bearing body 11, and the second edge pressing mechanism 16 is arranged on the driving mechanism 15. The second edge pressing mechanism 16 can be driven by the driving mechanism 15 to move towards and away from the opposite first edge pressing mechanism 13 relative to the bearing body 11, so as to switch the second edge pressing mechanism 16 between the first position and the second position. When the second edge pressing mechanism 16 is arranged in the first position, the distance between the second edge pressing mechanism 16 and the first edge pressing mechanism 13 is smaller than the distance between the second edge pressing mechanism 16 and the first edge pressing mechanism 13 when the second edge pressing mechanism 16 is arranged in the second position, and the first size is smaller than the second size. In this way, when the second edge pressing mechanism 16 is arranged in the first position, the second edge pressing mechanism 16 and the first edge pressing mechanism 13 can cooperate to press and fix the measured product with a smaller first size. When the second edge pressing mechanism 16 is arranged in the second position, the second edge pressing mechanism 16 and the first edge pressing mechanism 13 can cooperate to press and fix the measured product with a larger second size. In this way, the bearing device 1 can drive the second edge pressing mechanism 16 to move back and forth by the driving mechanism 15, so that the second edge pressing mechanism 16 and the first edge pressing mechanism 13 cooperate to press and fix the measured products with different sizes. This helps to improve the compatibility of the bearing device 1 and the detection equipment for measured products with different sizes, and in the process of automatic batch detection of measured products with different sizes, the bearing device 1 does not need to be disassembled and replaced, which can improve the detection efficiency of the detection equipment.

[0037] In some embodiments, please refer to Figure 1 , Figure 4 and Figure 5The driving mechanism 15 comprises a second driving member 151 and a bearing member 154, the second driving member 151 is arranged on the bearing body 11, the second edge pressing mechanism 16 is arranged on the bearing member 154, the power end of the second driving member 151 is coupled to the bearing member 154 to drive the bearing member 154 to drive the second edge pressing mechanism 16 to switch between the first station and the second station. The second driving member 151 comprises a driving cylinder, or can also comprise a driving motor, the fixed end of the second driving member 151 is fixedly installed on the bearing body 11, the second driving member 151 further comprises a first sliding rail 152, the first sliding rail 152 is installed on the bearing body 11, the first sliding rail 152 extends in the arrangement direction of the first edge pressing mechanism 13 and the second edge pressing mechanism 16, the bearing member 154 is fixedly installed on the power end of the second driving member 151 and can be in sliding fit with the first sliding rail 152, the bearing member 154 is used for supporting and fixing the second edge pressing mechanism 16, so that the power end of the second driving member 151 can drive the bearing member 154 and the second edge pressing mechanism 16 to move close to and away from the first edge pressing mechanism 13, so as to realize the switching of the second edge pressing mechanism 16 between the first station and the second station, and under the guidance of the first sliding rail 152, the resistance in the movement of the second edge pressing mechanism 16 is reduced.

[0038] In some embodiments, the bearing member 154 extends in a direction perpendicular to the arrangement direction of the first edge pressing mechanism 13 and the second edge pressing mechanism 16, the bearing body 11 is provided with a guide structure, the guide structure comprises two second sliding rails 153 extending in the arrangement direction of the first edge pressing mechanism 13 and the second edge pressing mechanism 16, the two second sliding rails 153 are arranged on both sides of the first sliding rail 152, the bearing member 154 is in sliding fit with the two second sliding rails 153, so that the stability of the bearing member 154 and the second edge pressing mechanism 16 in the movement process is improved.

[0039] In some embodiments, please refer to Figure 1 and Figure 5 The bearing device 1 comprises a plurality of first detection members 18, the first detection members 18 are installed on the bearing body 11, the first detection members 18 can be position sensors, the plurality of first detection members 18 are arranged in the movement direction of the bearing member 154, the number of the first detection members 18 corresponds to the number of stations of the second edge pressing mechanism 16 one by one, the second edge pressing mechanism 16 can have a first station and a second station, the first detection members 18 are two, or can have a first station, a second station and a third station, the first detection members 18 are three, wherein the first detection members 18 are used for detecting the position information of the bearing member 154.

[0040] For example, the first detection piece 18 has two, the first detection piece 18 corresponding to the first station is used to detect whether the second edge pressing mechanism 16 moves to the first station, and the first detection piece 18 corresponding to the second station is used to detect whether the second edge pressing mechanism 16 moves to the second station. The carrier 154 has a protruding portion 1541, and each first detection piece 18 can detect the position of the protruding portion 1541 to determine whether the second edge pressing mechanism 16 moves to the corresponding station, so that the driving mechanism 15 can be controlled to start and stop according to the position information of the second edge pressing mechanism 16.

[0041] In other embodiments, the number of stations of the second edge pressing mechanism 16 is set according to the number of sizes of the measured product that the carrying device 1 can adapt to, so that the number of stations of the second edge pressing mechanism 16 corresponds to the number of sizes of the measured product one by one. In some embodiments, the second edge pressing mechanism 16 can have more than three stations, such as a third station and a fourth station, and the corresponding first detection piece 18 is provided with four, each first detection piece 18 can detect the position of the protruding portion 1541 to determine whether the second edge pressing mechanism 16 moves to the corresponding station.

[0042] In some embodiments, the measured product is a square plate structure, and the measured product has a length direction and a width direction. Please continue to refer to Figure 1 In order to adapt the carrying device 1 to the measured product with different sizes in the length direction and the width direction, the carrying device 1 is provided with two groups of oppositely arranged first edge pressing mechanisms 13 and position switching assemblies 14, and the arrangement direction of one group of oppositely arranged first edge pressing mechanisms 13 and position switching assemblies 14 is perpendicular to the arrangement direction of the other group of oppositely arranged first edge pressing mechanisms 13 and position switching assemblies 14, which can be understood as that the line connecting one group of oppositely arranged first edge pressing mechanisms 13 and position switching assemblies 14 is perpendicular to the line connecting the other group of oppositely arranged first edge pressing mechanisms 13 and position switching assemblies 14. Thus, one of the position switching assemblies 14 can move the position of the second edge pressing mechanism 16 to cooperate with the corresponding first edge pressing mechanism 13 to fix the measured product with different length sizes, and the other position switching assembly 14 can change the position of the second edge pressing mechanism 16 to cooperate with the corresponding first edge pressing mechanism 13 to fix the measured product with different width sizes, so as to satisfy that the carrying device 1 can simultaneously adapt to the measured product with different width sizes and length sizes, improve the universality of the carrying device 1 for different sizes of measured products, and in the process of automatic batch detection, without disassembling and replacing the carrying device 1, which helps to improve the detection efficiency of the detection equipment.

[0043] For the first edge pressing mechanism 13 and the second edge pressing mechanism 16, in some embodiments, please refer to Figure 1 and Figure 2The first edge pressing mechanism 13 and the second edge pressing mechanism 16 are the same in structure, the support part is used for supporting the edge of the measured product, the first support part 131 of the first edge pressing mechanism 13 is fixed on the bearing main body 11, and the second support part 161 of the second edge pressing mechanism 16 is fixed on the bearing 154; the edge pressing part is movable relative to the support part, the edge pressing part can be close to and away from the support part, the edge pressing part can avoid the measured product when the edge pressing part is away from the support part, and the measured product is conveniently supported on the support part, and the edge pressing part can be matched with the support part to press and fix the edge of the measured product when the edge pressing part is close to the support part.

[0044] In some embodiments, referring to Figure 2 The first edge pressing mechanism 13 and the second edge pressing mechanism 16 each include a first driving part, the first driving part of the first edge pressing mechanism 13 can be a first driving cylinder 133, and the first driving part of the second edge pressing mechanism 16 can be a second driving cylinder 163; the power end of the first driving part is coupled to the edge pressing part, and is used for driving the edge pressing part to move relative to the support part, so as to press and fix the measured product together with the support part or release the measured product; the first driving part of the first edge pressing mechanism 13 is installed on the bearing main body 11, and the first driving part of the second edge pressing mechanism 16 is fixed on the bearing 154. For the first edge pressing mechanism 13 and the second edge pressing mechanism 16, the edge pressing part moves relative to the support part under the driving action of the first driving part, or can also rotate relative to the support part.

[0045] In some embodiments, the first driving part can also be cancelled, and the edge pressing part can be manually operated to move or rotate, so that the edge pressing part is matched with the corresponding support part to press and fix or release the measured product.

[0046] In some embodiments, referring to Figure 2 The edge pressing part is rotatably connected to the support part, the first driving part can drive the edge pressing part to rotate relative to the support part to press and fix or release the measured product, and under the driving action of the first driving part, the power end of the first driving part can reciprocate in the arrangement direction of the first edge pressing mechanism 13 and the second edge pressing mechanism 16.

[0047] The first edge pressing mechanism 13 and the second edge pressing mechanism 16 each comprise a connecting rod assembly, the connecting rod assembly of the first edge pressing mechanism 13 is a first connecting rod assembly 134, and the connecting rod assembly of the second edge pressing mechanism 16 is a second connecting rod assembly 164; the connecting rod assembly is connected between the power end of the first driving member and the edge pressing part, and the edge pressing part has a connecting end connected with the connecting rod assembly; the connecting rod assembly comprises a connecting block and a connecting rod, the connecting block in the first edge pressing mechanism 13 is a first connecting block 1341, the connecting rod is a first connecting rod 1343, the connecting block in the second edge pressing mechanism 16 is a second connecting block 1641, and the connecting rod is a second connecting rod 1643; the connecting block is fixedly connected with the power end of the first driving member, and the connecting rod is rotatably connected with the connecting block and the connecting end of the edge pressing part at both ends, so that the power end of the first driving member can drive the edge pressing part to overturn relative to the support part through the connecting rod assembly; in the process of overturning of the edge pressing part relative to the support part, the edge pressing part can be close to the support part to press the measured product, and can also be away from the support part to release the measured product, so that the measured product is conveniently placed on the support part or separated from the support part.

[0048] In an embodiment, please refer to Figure 2 The first edge pressing mechanism 13 and the second edge pressing mechanism 16 further comprise guide rails, the guide rail in the first edge pressing mechanism 13 is a first guide rail 135, and the guide rail in the second edge pressing mechanism 16 is a second guide rail 165; the guide rails extend in the reciprocating movement direction of the power end of the first driving member; the connecting block has a guide part, the guide part in the first edge pressing mechanism 13 is a first guide part 1342, and the guide part in the second edge pressing mechanism 16 is a second guide part 1642; the guide part can move along the guide rail, so as to improve the stability of the process of driving the edge pressing part to overturn relative to the support part by the first driving member.

[0049] In some embodiments, the connecting rod assembly can be cancelled, and the edge pressing part is arranged to be reciprocally movable relative to the support part to approach or move away from the support part; under the driving of the power end of the first driving member, the edge pressing part can move towards and away from the support part in the arrangement direction of the first edge pressing mechanism 13 and the second edge pressing mechanism 16; an inclined surface is arranged on the edge pressing part, and in the process of moving the edge pressing part towards the support part, the wedge action of the inclined surface on the edge pressing part can be used to make the edge pressing part cooperate with the support part to press and fix the measured product.

[0050] In some embodiments, the connecting rod assembly is cancelled, the first driving member in the first edge pressing mechanism 13 is a first driving motor, and the first driving member in the second edge pressing mechanism 16 is a second driving motor; the power end of the first driving member can drive the edge pressing part to overturn relative to the support part to press and release the measured product in cooperation with the support part.

[0051] In some embodiments, in order to improve the position accuracy of the measured product in the bearing device 1, please refer to Figure 1 and Figure 3The position switching assembly 14 further comprises a centering mechanism 17, which is arranged on the carrier 154 in parallel with the second edge pressing mechanism 16, and the carrier 154 drives the centering mechanism 17 and the second edge pressing mechanism 16 to approach the first edge pressing mechanism 13, and the centering mechanism 17 can elastically abut against the measured product.

[0052] The number of the centering mechanisms 17 can be multiple, and the centering mechanisms 17 can be arranged on both sides of the second edge pressing mechanism 16; the carrier 1 further comprises positioning blocks 12, which are fixed on the carrier body 11, and the positioning blocks 12 are arranged in parallel with the first edge pressing mechanism 13, and the positioning blocks 12 are arranged opposite to the centering mechanisms 17 in the arrangement direction of the first edge pressing mechanism 13 and the second edge pressing mechanism 16, and the number of the positioning blocks 12 corresponds to the number of the centering mechanisms 17 one by one, and the positioning blocks 12 have positioning surfaces 121 for abutting against the side surface of the measured product, and when the carrier 154 drives the centering mechanisms 17 to approach the first edge pressing mechanism 13, the centering mechanisms 17 can elastically abut against the measured product, so as to press the measured product on the positioning blocks 12, and make the side surface of the measured product keep abutting against the positioning surfaces 121, thereby improving the position accuracy of the measured product.

[0053] In some embodiments, please continue to refer to Figure 1 and Figure 3 The centering mechanism 17 comprises a third driving member 171, an elastic member 172 and an abutting member 173, the third driving member 171 is arranged on the carrier 154, the power end of the third driving member 171 is coupled to the elastic member 172, and the abutting member 173 is connected to the side of the elastic member 172 away from the power end of the third driving member 171, and the power end of the third driving member 171 can drive the elastic member 172 and the abutting member 173 to move towards the first edge pressing mechanism 13, so that the abutting member 173 elastically abuts against the measured product under the elastic action of the elastic member 172, thereby avoiding the abutting member 173 to hard contact with the measured product and crush the measured product.

[0054] The third driving member 171 comprises a driving cylinder, a limiting member 1711 is arranged at the power end of the third driving member 171, the limiting member 1711 is provided with a guide column extending in the arrangement direction of the first edge pressing mechanism 13 and the second edge pressing mechanism 16, the abutting member 173 is sleeved on the guide column, the abutting member 173 is slidable along the guide column, the elastic member 172 can be a spring, the elastic member 172 is sleeved on the guide column, and the elastic member 172 is located between the limiting member 1711 and the abutting member 173; the limiting member 1711 has a limiting portion 1712 extending towards the abutting member 173, the limiting portion 1712 can abut against the abutting member 173, so as to limit the movement stroke of the limiting member 1711 in the extension direction of the guide column; the abutting member 173 has an abutting surface 1731 arranged away from the power end of the third driving member 171, the abutting surface 1731 can be attached to the side surface of the measured product, and the abutting surface 1731 can cooperate with the positioning surface 121 on the positioning block 12 to clamp the two opposite side surfaces of the measured product, so as to ensure the position accuracy of the measured product on the bearing device 1.

[0055] In some embodiments, the third driving member 171 can be cancelled, the limiting member 1711 is fixedly installed on the bearing member 154, and in the process that the second driving member 151 drives the centering mechanism 17 to move towards the first edge pressing mechanism 13 through the bearing member 154, the abutting member 173 elastically abuts against the measured product under the action of the elastic member 172, so as to cooperate with the positioning block 12, and ensure the position accuracy of the measured product on the bearing device 1.

[0056] In some embodiments, please continue to refer to Figure 1 The bearing device 1 further comprises a second detection member 19 arranged on the bearing main body 11, the second detection member 19 is used for detecting the position information of the measured product on the bearing main body 11, the position information comprises whether the measured product is warped and whether the measured surface of the measured product is flat. The second detection member 19 comprises a signal emitting portion 191 and a signal receiving portion 192 arranged opposite to each other, Figure 1 The dashed line connecting the signal emitting portion 191 and the signal receiving portion 192 in the figure represents a signal transmission path, two second detection members 19 can be arranged, the connecting lines of the signal emitting portion 191 and the signal receiving portion 192 of one second detection member 19 and the connecting lines of the signal emitting portion 191 and the signal receiving portion 192 of the other second detection member 19 intersect at the geometric center of the bearing main body 11, that is, intersect at the center of the hollow portion 111 on the bearing main body 11, so that the flatness of multiple positions on the measured surface of the measured product can be detected through the two second detection members 19, the position accuracy of the measured product is improved, and the accuracy of the detection result of the measured product is improved.

[0057] Of course, in other embodiments, the second detection member 19 can also be provided in multiple numbers, such as three, and the three second detection members 19 are arranged in a direction perpendicular to the arrangement direction of the first edge pressing mechanism 13 and the second edge pressing mechanism 16, so that the detection range of the measured surface of the measured product can be improved by the three second detection members 19, thereby improving the position accuracy of the measured product.

[0058] In some embodiments, please continue to refer to Figure 1 The bearing device 1 further comprises a third detection member 20 arranged on the bearing body 11, and the third detection member 20 is arranged close to the centering mechanism 17. The third detection member 20 is used to detect the size of the measured product. For example, in the embodiment where the second edge pressing mechanism 16 has a first station and a second station, and the measured product has a first size and a second size, and the second size is larger than the first size, the third detection member 20 can be used to detect whether the measured product placed on the bearing device 1 has the second size.

[0059] Of course, a detection member can also be arranged on the detection equipment corresponding to the hollow part 111, which can be used to detect whether the measured product with the first size is placed on the bearing device 1. The third detection member 20 and the detection member arranged on the detection equipment are both sensors.

[0060] In some embodiments, during the use of the bearing device 1, the second driving member 151 is first used to drive the bearing member 154 to move towards the corresponding first edge pressing mechanism 13. When the first detection member 18 detects that the second edge pressing mechanism 16 moves to the corresponding station, the second driving member 151 stops working. The measured product is placed on the support part of the first edge pressing mechanism 13 and the second edge pressing mechanism 16. The third driving member 171 is used to drive the abutting member 173 to elastically abut the measured product between the abutting member 173 and the positioning block 12 to achieve positioning of the measured product. Finally, the first driving member is used to drive the edge pressing part to move close to the support part, so that the edge pressing part cooperates with the corresponding support part to press the measured product, thereby achieving fixation of the measured product with the corresponding size. After the detection of the measured product is completed, the first driving member is used to drive the edge pressing part to move away from the support part to release the measured product, and the measured product can be removed from the bearing device 1.

[0061] The embodiment of the present application also discloses a detection equipment, which comprises the bearing device 1 in any of the above embodiments and a detection device 21. Please refer to Figure 6 The detection device 21 has two detection devices 21 arranged on both sides of the bearing body 11 in the thickness direction, and the two detection devices 21 are used to respectively detect defects on the front surface and the back surface of the measured product.

[0062] The detection device 21 comprises a bright field light source (not shown in the figure), a dark field light source (not shown in the figure) and an image acquisition device (not shown in the figure), the image acquisition device cooperates with the bright field light source to realize bright field imaging of the product to be detected, and the image acquisition device also cooperates with the dark field light source to realize dark field imaging of the product to be detected; specifically, the bright field light source is used to generate a bright field illumination light beam, the image acquisition device is used to acquire a bright field illumination reflection light beam generated by the bright field illumination light beam being reflected by the measured surface of the product to be detected, and a bright field image of the measured surface of the product to be detected is obtained, the dark field light source is used to generate a dark field illumination light beam, and the image acquisition device is used to acquire a dark field illumination reflection light beam generated by the dark field illumination light beam being reflected by the measured surface of the product to be detected, and a dark field image of the measured surface of the product to be detected is obtained, and the type of defects on the measured surface of the product to be detected can be obtained by analyzing the bright field image and the dark field image.

[0063] In some embodiments, the detection equipment comprises an equipment base (not shown in the figure), the fifth driving member (not shown in the figure) is arranged on the equipment base, the carrying body 11 of the carrying device 1 is connected with the power end of the fifth driving member, and the whole carrying device 1 and the product to be detected can be driven by the fifth driving member to move reciprocatingly along a straight line direction relative to the equipment base, and in the process of reciprocating movement of the product to be detected, the detection device 21 can realize line scanning imaging of the product to be detected, so as to improve the detection efficiency of the detection equipment.

[0064] In some embodiments, the detection equipment further comprises a lifting device (not shown in the figure), the lifting device comprises a fourth driving member and a support member, the support member is used to support the product to be detected, and the fourth driving member drives the support member to move along the thickness direction of the carrying body 11, so as to realize loading and unloading of the product to be detected.

[0065] In the process of moving of the carrying device 1 relative to the equipment base, the carrying device 1 has a standby position for loading and unloading of the product to be detected, the lifting device is arranged corresponding to the standby position of the carrying device 1, and the lifting device can support the product to be detected at the standby position to place the product to be detected on the carrying device 1 or separate the product to be detected from the carrying device 1.

[0066] The fourth driving member in the lifting device can be a driving cylinder or also can be a driving motor, the fixed end of the fourth driving member can be installed on the equipment base, the support member is installed at the power end of the fourth driving member, the support member is arranged corresponding to the hollow part 111 of the carrying body 11, there are a plurality of support members, the shape of the hollow part 111 is generally rectangular, and four support members among the plurality of support members are arranged corresponding to four corners of the hollow part 111, so as to improve the support stability of the support member to the product to be detected.

[0067] In the loading process of the measured product, the power end of the fourth driving member drives the support member to move upward along the thickness direction of the bearing main body 11 to the side away from the fixed end of the fourth driving member of the support part, and after the measured product is supported on the support member, the second driving member 151 drives the second edge pressing mechanism 16 to move to the station corresponding to the size of the measured product, the power end of the fourth driving member drives the support member to move downward until the measured product is placed on the support part of the first edge pressing mechanism 13, and finally the third driving member 171 drives the abutting member 173 of the centering mechanism 17 to move to the positioning block 12 to make the abutting member 173 cooperate with the positioning block 12 to elastically clamp the measured product, after the measured product is clamped and positioned in the horizontal direction, the first driving member drives the edge pressing part to move towards the support part to press and fix the edge of the measured product, so as to realize the loading and fixed installation of the measured product on the bearing device 1.

[0068] In the unloading process of the measured product after detection, the first driving member drives the edge pressing part away from the support part to release the measured product, the third driving member 171 drives the abutting member 173 of the centering mechanism 17 to move away from the positioning block 12 to release the clamping of the measured product, and finally the power end of the fourth driving member drives the support member to move upward along the thickness direction of the bearing main body 11, the support member supports the measured product and pushes the measured product to separate the measured product from the support part, and then the measured product is taken off, that is, the unloading of the measured product is completed.

[0069] The above application of specific examples to the utility model is described, which is only used to help understand the utility model, and does not limit the utility model. For the skilled person in the technical field to which the utility model belongs, according to the idea of the utility model, a number of simple deductions, deformations or substitutions can be made.

Claims

1. A load bearing device, characterized by, The application relates to a bearing device for a product testing machine. The bearing device comprises a bearing body for bearing a first edge pressing mechanism, a position switching assembly comprising a driving mechanism arranged on the bearing body and a second edge pressing mechanism arranged on the driving mechanism, the second edge pressing mechanism being arranged opposite to the first edge pressing mechanism. The first edge pressing mechanism and the second edge pressing mechanism each comprise a supporting part for supporting a product to be tested and an edge pressing part for pressing or releasing the product to be tested in cooperation with the supporting part, and the driving mechanism is used to drive the second edge pressing mechanism to switch between a first working position and a second working position, so that the second edge pressing mechanism in the first working position cooperates with the first edge pressing mechanism to fix a first-size product to be tested, and the second edge pressing mechanism in the second working position cooperates with the first edge pressing mechanism to fix a second-size product to be tested. The first edge pressing mechanism and the second edge pressing mechanism each further comprise a first driving member, the power end of the first driving member being coupled to the edge pressing part, and the first driving member is used to drive the edge pressing part to move relative to the supporting part to press or release the product to be tested.

2. The load bearing device of claim 1, wherein, The first edge pressing mechanism and the second edge pressing mechanism each further comprise a connecting rod assembly, one end of the connecting rod assembly being connected to the edge pressing part, and the other end of the connecting rod assembly being connected to the power end of the first driving member, and the first driving member can drive the connecting rod assembly to drive the edge pressing part to overturn relative to the supporting part to press or release the product to be tested.

3. The load bearing device of claim 2, wherein, The driving mechanism comprises a second driving member arranged on the bearing body and a bearing member, the second edge pressing mechanism being arranged on the bearing member, and the power end of the second driving member being coupled to the bearing member to drive the bearing member to drive the second edge pressing mechanism to switch between the first working position and the second working position.

4. The load bearing device of claim 1, wherein, The position switching assembly further comprises a centering mechanism arranged side by side with the second edge pressing mechanism on the bearing member, and when the bearing member drives the centering mechanism and the second edge pressing mechanism to approach the first edge pressing mechanism, the centering mechanism can elastically abut against the product to be tested.

5. The load bearing device of claim 4, wherein, The centering mechanism comprises a third driving member arranged on the bearing member, and the power end of the third driving member is coupled to an elastic member to drive an abutting member connected to the elastic member to elastically abut against the product to be tested.

6. The load bearing device of claim 5, wherein, The bearing device further comprises a plurality of first detection members arranged on the bearing body in a spacing manner along the moving direction of the bearing member, and the first detection members are used to detect the position information of the bearing member.

7. The load bearing device of claim 4, wherein, The bearing device comprises two groups of the first edge pressing mechanism and the position switching assembly arranged oppositely, and the arrangement direction of one group of the first edge pressing mechanism and the position switching assembly is perpendicular to the arrangement direction of the other group of the first edge pressing mechanism and the position switching assembly.

8. The load bearing device of any one of claims 1 to 7, wherein, ​ 9. The load bearing device of any one of claims 1 to 7, wherein, The carrying device further comprises a second detection member arranged on the carrying body, the second detection member being configured to detect position information of the product to be measured on the carrying body; the second detection member comprises a signal emitting part and a signal receiving part opposite to each other; the connection line of the signal emitting part and the signal receiving part of one of the second detection members intersects with the connection line of the signal emitting part and the signal receiving part of the other second detection member at the geometric center of the carrying body; and / or, The carrying device further comprises a third detection member; the third detection member is arranged on the carrying body, and is configured to detect the size of the product to be measured.

10. A detection device, characterized by The detection device comprises the carrying device according to any one of claims 1 to 9 and a detection device; the detection device comprises a bright field light source, a dark field light source and an image acquisition device; the image acquisition device is configured to realize bright field imaging of the product to be measured in cooperation with the bright field light source; and the image acquisition device is configured to realize dark field imaging of the product to be measured in cooperation with the dark field light source.

11. The detection device of claim 10, wherein, The detection device further comprises a lifting device; the lifting device comprises a fourth driving member and a support member; the support member is configured to support the product to be measured; and the fourth driving member is configured to drive the support member to move along the thickness direction of the carrying body, so as to realize loading and unloading of the product to be measured.

Images