Sheet surface detection equipment

Abstract

The utility model discloses sheet surface detection equipment, which belongs to the technical field of sheet detection and is characterized in that a supporting plate is mounted at the top end of a workbench, a feeding plate is fixed at the top end of the supporting plate, a first conveying belt and a second conveying belt are mounted at the top end of the supporting plate sequentially from top to bottom, the feeding plate is arranged at one end of the first conveying belt, and the second conveying belt is arranged at the other end of the first conveying belt. A first air cylinder is installed at one end of the top face of the base, second air cylinders are installed on the two sides of the base, a piston rod of the first air cylinder is connected with a push plate, piston rods of the two second air cylinders are connected with moving plates, and push rods are fixed to the top ends of the moving plates. An arc-shaped sliding plate is further arranged between the other end of the first conveying belt and one end of the second conveying belt, a first camera and a second camera are arranged above the first conveying belt, and a third camera and a fourth camera are arranged above the second conveying belt. By using the sheet surface detection equipment, the sheet is detected through photographing, and can be automatically overturned, so that manpower is saved, and detection errors are avoided.

Description

TECHNICAL FIELD

[0001] The utility model relates to wafer detection technical field, especially a wafer surface detection equipment. BACKGROUND

[0002] At present, the surface flaw detection of wafer products is all through artificial visual sorting, and due to the great demand for product detection, high vision requirement and great labor intensity, it is easy to cause detection error and further cause the outflow of defective products, and the wafer cannot be automatically turned over, and manual turning over also occupies a large amount of manpower, therefore, it is urgent to design a wafer surface detection equipment to solve the above problems. UTILITY MODEL CONTENTS

[0003] The utility model discloses a wafer surface detection equipment, which solves the problems of great demand for artificial, high vision requirement, great labor intensity, easy to cause detection error and further cause the outflow of defective products, and the wafer cannot be automatically turned over, and manual turning over also occupies a large amount of manpower.

[0004] To solve the above technical problems, the utility model provides a wafer surface detection equipment, which comprises a workbench, a supporting plate is installed at the top end of the workbench, an upper plate is fixed at the top end of the supporting plate and a first conveying belt and a second conveying belt are sequentially arranged from top to bottom, the upper plate is arranged at one end of the first conveying belt, a first cylinder is installed at one end of the top surface of the upper plate, second cylinders are installed on both sides, a push plate is connected to the piston rod of the first cylinder, a moving plate is connected to the piston rod of each second cylinder, and a push rod is fixed at the top end of the moving plate.

[0005] An arc-shaped sliding plate is arranged between the other end of the first conveying belt and one end of the second conveying belt, a first camera and a second camera are arranged above the first conveying belt, and a third camera and a fourth camera are arranged above the second conveying belt.

[0006] Optionally, a third cylinder is fixed on the first conveying belt and the second conveying belt through a connecting plate, a first barrel and a second barrel are arranged on the side surface respectively, a stop rod is connected to the piston rod of each third cylinder, and the stop rods correspond to the first barrel and the second barrel respectively.

[0007] Optionally, a barrel is rotatably connected to the other end of the second conveying belt, a bearing plate is arranged on the side surface of the other end, a fourth cylinder is slidably connected to the side surface of the bearing plate, and an electromagnetic chuck is connected to the piston rod of the fourth cylinder.

[0008] A fifth cylinder is rotatably connected to the top end of the workbench, and a material collecting disc is installed, and the piston rod of the fifth cylinder is rotatably connected to the barrel.

[0009] Optionally, the first camera and the second camera are fixed with a first connecting plate on the side, the first connecting plate is fixed with the top end of the workbench through a first stand, the third camera and the fourth camera are fixed with a second connecting plate on the side, and the second connecting plate is fixed with the top end of the workbench through a second stand.

[0010] In the sheet surface detection equipment, the top end of the workbench is provided with a supporting plate, the top end of the supporting plate is fixed with a feeding plate and is provided with a first conveying belt and a second conveying belt arranged from top to bottom, the feeding plate is arranged at one end of the first conveying belt, a first air cylinder is arranged at one end of the top surface of the feeding plate, second air cylinders are arranged on both sides of the feeding plate, a push plate is connected to the piston rod of the first air cylinder, moving plates are connected to the piston rods of the two second air cylinders, a push rod is fixed to the top end of the moving plate, an arc-shaped sliding plate is arranged between the other end of the first conveying belt and one end of the second conveying belt, a first camera and a second camera are arranged above the first conveying belt, and a third camera and a fourth camera are arranged above the second conveying belt. BRIEF DESCRIPTION OF DRAWINGS

[0011] Figure 1 is a structural schematic view of the sheet surface detection equipment provided by the utility model;

[0012] Figure 2 is a right view of the sheet surface detection equipment provided by the utility model. DETAILED DESCRIPTION

[0013] The technical solutions in the embodiments of the utility model will be clearly and completely described in connection with the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.

[0014] It should be noted that when a component is referred to as being "fixed" to another component, it can be directly on the other component or there can be intervening components. When a component is referred to as being "connected" to another component, it can be directly connected to the other component or there can be intervening components. When a component is referred to as being "disposed" on another component, it can be directly on the other component or there can be intervening components. The terms "vertical", "horizontal", "left", "right", and similar terms as used herein are for purposes of illustration only.

[0015] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in the description herein is for describing particular embodiments only and is not intended to be limiting of the application. The use herein of the terms "including", "comprising", "having" and the like are specifically intended to be construed in an inclusive sense and not to the exclusion of any other items.

[0016] The utility model provides a kind of sheet surface detection equipment, its structure as shown in Figure 1 、 Figure 2 As shown in the drawings, it includes workbench 1, workbench 1 top end is equipped with support plate 2, support plate 2 top end is fixed with feeding plate 3 and is equipped with first conveying belt 4 and second conveying belt 5 which are sequentially arranged from top to bottom, feeding plate 3 is arranged at first conveying belt 4 one end, its top surface one end is equipped with first cylinder 10, both sides are equipped with second cylinder 7, first cylinder 10 piston rod is connected with push plate 22, two second cylinder 7 piston rods are all connected with moving plate 8, moving plate 8 top end is fixed with push rod 9, first conveying belt 4 other end and second conveying belt 5 one end are also equipped with arc slide 6 and first camera 23 and second camera 24 are equipped above first conveying belt 4, third camera 27 and fourth camera 28 are equipped above second conveying belt 5.Using sheet surface detection equipment, the two sides of sheet are conveyed by first conveying belt 4 and second conveying belt 5, and then the two sides of sheet are detected by photographing through first camera 23, second camera 24, third camera 27 and fourth camera 28, which not only saves manpower, but also avoids detection error.

[0017] Further, third cylinder 12 is fixed with third cylinder 12 above first conveying belt 4 and second conveying belt 5 through connecting plate 11, first barrel 14 and second barrel 15 are respectively arranged on side, two third cylinder 12 piston rods are all connected with stop rod 13, two stop rods 13 are respectively corresponding with first barrel 14 and second barrel 15, two stop rods 13 are driven to move downward by two third cylinder 12 piston rods respectively, and the sheet with flaw is blocked and is respectively conveyed into first barrel 14 and second barrel 15.

[0018] Further, material box 16 is rotatably connected to the other end of second conveying belt 5, and a bearing plate 18 is arranged on the side of the other end thereof, the fourth cylinder 19 is slidably connected to the side of the bearing plate 18, the piston rod of the fourth cylinder 19 is connected to the electromagnetic suction disc 20, the fifth cylinder 17 is also rotatably connected to the top end of the workbench 1 and is provided with a material collecting disc 21, the piston rod of the fifth cylinder 17 is rotatably connected to the material box 16, the electromagnetic suction disc 20 is driven to move downward by the piston rod of the fourth cylinder 19, and then the fourth cylinder 19 is moved to drive the sheet to move above the material collecting disc 21, at this time, the electromagnetic suction disc 20 is closed, the sheet falls into the material collecting disc 21, and the collection is completed.

[0019] Further, the first camera 23 and the second camera 24 are fixed with the first connecting plate 25 on the side, the first connecting plate 25 is fixed with the first stand column 26 on the top of the workbench 1, the third camera 27 and the fourth camera 28 are fixed with the second connecting plate 29 on the side, the second connecting plate 29 is fixed with the second stand column 30 on the top of the workbench 1.

[0020] The working principle of the utility model is as follows: firstly, starting the second cylinder 7, the piston rod drives the moving plate 8 and the push rod 9 to move and push the sheet to the push plate 22, then starting the first cylinder 10, the piston rod drives the push plate 22 to place the sheet on the first conveying belt 4 for conveying, the first camera 23 and the second camera 24 detect by photographing, then the sheet is turned over by the arc slide plate 6 and falls into the second conveying belt 5, at this time, the third camera 27 and the fourth camera 28 detect by photographing on the other side, finally, starting the fourth cylinder 19, the piston rod drives the electromagnetic chuck 20 to move downwards and suck the sheet and drive it to move to the above of the material collecting disc 21, at this time, the electromagnetic chuck 20 is closed and the sheet falls into the material collecting disc 21, thereby completing the collection.

[0021] The above description is only the description of the preferred embodiment of the utility model, and does not limit the scope of the utility model, any change and modification of the ordinary skill in the art according to the above disclosure are within the protection scope of the claims.

Claims

1. A sheet surface inspection apparatus characterized by comprising: Including workbench (1), the workbench (1) top end is installed with support plate (2), the support plate (2) top end is fixed with feeding plate (3) and is installed with first conveyor belt (4) and second conveyor belt (5) sequentially from top to bottom, the feeding plate (3) is arranged in the first conveyor belt (4) one end, its top surface one end is installed with first cylinder (10), both sides are installed with second cylinder (7), the first cylinder (10) piston rod is connected with push plate (22), two second cylinder (7) piston rods are connected with moving plate (8), the moving plate (8) top end is fixed with push rod (9); Between the other end of the first conveyor belt (4) and the one end of the second conveyor belt (5) is also provided with arc-shaped slide plate (6) and the first camera (23) and the second camera (24) are arranged above the first conveyor belt (4), the third camera (27) and the fourth camera (28) are arranged above the second conveyor belt (5).

2. The sheet surface inspecting apparatus of claim 1, wherein The third cylinder (12) is fixed above the first conveyor belt (4) and the second conveyor belt (5) through the connecting plate (11), and the first barrel (14) and the second barrel (15) are arranged on the side, respectively, the piston rod of the two third cylinders (12) is connected with the stop rod (13), and the two stop rods (13) correspond to the first barrel (14) and the second barrel (15), respectively.

3. The sheet surface inspecting apparatus of claim 1, wherein The second end of the second conveyor belt (5) is rotatably connected with a material box (16), and the other end side of the second conveyor belt (5) is provided with a bearing plate (18), the bearing plate (18) is slidably connected with a fourth cylinder (19) on the side, and the piston rod of the fourth cylinder (19) is connected with an electromagnetic suction disc (20); The workbench (1) top end is also rotatably connected with a fifth cylinder (17) and is installed with a material receiving disc (21), and the piston rod of the fifth cylinder (17) is rotatably connected with the material box (16).

4. The sheet surface inspecting apparatus of claim 1, wherein The first camera (23) and the second camera (24) are fixed with a first connecting plate (25) on the side, the first connecting plate (25) is fixed with the workbench (1) top end through a first stand column (26), the third camera (27) and the fourth camera (28) are fixed with a second connecting plate (29) on the side, and the second connecting plate (29) is fixed with the workbench (1) top end through a second stand column (30).

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