Fluorine detection system

Abstract

A fluorine gas detection system comprises a monitoring device and a plurality of detection devices arranged at different detection positions. And each detection device is provided with a gas detector on the outer side of the shell, and a controller is arranged in the shell. The gas detector comprises a potential type detection rod and a detection head located at the front end of the potential type detection rod, and after gas is introduced into the detection head, the potential type detection rod can detect the fluorine concentration in the gas and send out a detection signal. The controller comprises a main control module and a signal transmission module, the main control module receives a detection signal from the potential type detection rod so as to analyze whether the fluorine concentration exceeds a preset trigger value or not according to the detection signal, if yes, an alarm signal is sent out through the signal transmission module, and the monitoring device sends out an alarm signal after receiving the alarm signal. And if yes, the detection position corresponding to the detection device is warned that the fluorine leakage risk exists.

Description

Technical Field

[0001] This utility model relates to the field of gas detection technology, and in particular to a fluorine gas detection system. Background Technology

[0002] Fluorine-containing coolants are frequently used in semiconductor or liquid crystal manufacturing processes, such as as etching heat dissipation gases. However, in liquid supply equipment, various machines, piping, and valves may leak fluorine due to aging, malfunction, or damage to their seals. To prevent leakage from these machine parts, piping, and valves, shape-conforming resin sealants are typically used. However, these sealants can deform, melt, or burn due to the high pressure or temperature generated during manufacturing, also posing a risk of fluorine leakage. Since fluorine is a Class III controlled toxic gas, leaks pose a significant risk, including fatal hazards to humans, environmental pollution, equipment damage and malfunctions, and even fires and explosions.

[0003] Therefore, the industry urgently needs a fluorine gas detection system that can provide real-time monitoring, recording, and alarm functions for fluorine gas leaks, as an effective countermeasure to address the problem of fluorine gas leaks and resolve the various difficulties and shortcomings encountered in the existing technologies. Utility Model Content

[0004] Based on the above problems, the purpose of this utility model is to provide a fluorine gas detection system that uses multiple detection devices at different detection locations to monitor and detect fluorine gas leaks in real time. When the fluorine gas concentration exceeds the trigger value, the monitoring device can provide an alert to the fluorine gas leak point, thereby achieving the prevention and notification of fluorine gas leaks, effectively controlling hazards and reducing risks.

[0005] To achieve the above objectives, this utility model provides a fluorine gas detection system, comprising a monitoring device and multiple detection devices. These detection devices are respectively installed at multiple detection locations. Each detection device includes a housing, a gas detector, and a controller. The gas detector includes a potentiometric detection rod and a detection head. The potentiometric detection rod is located on the outside of the housing, and the detection head is fitted onto the front end of the potentiometric detection rod for introducing gas. The potentiometric detection rod detects the fluorine gas concentration in the gas and generates and transmits a detection signal. The controller is located inside the housing and includes a main control module and a signal transmission module. The main control module is electrically connected to both the signal transmission module and the potentiometric detection rod. The main control module receives the detection signal from the potentiometric detection rod and analyzes whether the fluorine gas concentration exceeds a preset trigger value. If so, it issues an alarm signal through the signal transmission module. The monitoring device is communicatively connected to the signal transmission module to receive the alarm signal and warn of a fluorine gas leakage risk at the detection location corresponding to the detection device.

[0006] In an embodiment of this utility model, the controller further includes a power supply module, which is electrically connected to the main control module and the potential detection rod to provide power.

[0007] In an embodiment of this utility model, the controller includes an automatic reset module, which is electrically connected to the main control module. When the fluorine concentration is lower than a preset reset value, the main control module controls the automatic reset module to generate a reset signal and controls the signal transmission module to transmit the reset signal to the monitoring device, so that the monitoring device can warn that the fluorine leak has been resolved based on the reset signal.

[0008] In an embodiment of this utility model, the main control module further processes the detection signal into working data and sends the working data to the monitoring device for storage via the signal transmission module.

[0009] In an embodiment of this utility model, the monitoring device includes a monitoring light to issue an alert when the monitoring device receives an alarm signal.

[0010] In an embodiment of this utility model, the potentiometric detection rod is provided with a through hole so that the introduced gas can be discharged through the through hole.

[0011] In an embodiment of this utility model, the detection head is equipped with a fan to draw in gas to power the position-type detection rod for detection.

[0012] In an embodiment of this utility model, the communication method between the monitoring device and the signal transmission module is wired communication.

[0013] In an embodiment of this utility model, a connection port is provided on one side of the housing, the connection port is connected to a signal output line, and the signal output line is electrically connected to the signal transmission module.

[0014] In summary, compared with existing technologies, the fluorine gas detection system provided by this invention monitors and detects fluorine gas leaks in real time using multiple detection devices at different locations. When the fluorine gas concentration exceeds a trigger value, the monitoring device can alert the system to the location where a fluorine gas leak has occurred. When the fluorine gas concentration falls below a release value, the monitoring device will alert the system that the leak has been resolved. Furthermore, this invention is applicable to fluorine-related industries, enabling fluorine gas detection in confined spaces, allowing for early leak prevention and notification, effectively controlling hazards and reducing risks.

[0015] The following detailed description, using specific embodiments and accompanying drawings, aims to provide a clearer understanding of the purpose, technical content, features, and desired effects of this invention. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the appearance of the fluorine gas detection system provided in an embodiment of this utility model.

[0017] Figure 2 This is a cross-sectional schematic diagram of the fluorine gas detection system provided in an embodiment of this utility model.

[0018] Figure 3 This is a block diagram of the circuit structure of the fluorine gas detection system provided in an embodiment of this utility model.

[0019] Figure 4 This is a schematic diagram of the fluorine gas concentration and its trigger value detected by the potentiometric detection rod of the fluorine gas detection system provided in the embodiment of this utility model.

[0020] Explanation of reference numerals in the attached figures:

[0021] Fluorine gas detection system 1

[0022] Detection device 10

[0023] Casing 11

[0024] Connector 113

[0025] Signal output line 114

[0026] Gas Detector 12

[0027] Potentiometric detection rod 121

[0028] Detector Head 122

[0029] Fan 123

[0030] Through hole 124

[0031] Controller 13

[0032] Main control module 131

[0033] Signal transmission module 132

[0034] Power module 133

[0035] Automatic Reset Module 134

[0036] Monitoring device 20

[0037] Monitoring light number 21

[0038] Power connection 22 Detailed Implementation

[0039] Embodiments of this utility model will be further described below with reference to the accompanying drawings. Wherever possible, the same reference numerals represent the same or similar elements in the drawings and description. In the drawings, shapes and thicknesses may be exaggerated for simplicity and convenience. It is understood that elements not specifically shown in the drawings or described in the description are forms known to those skilled in the art. Those skilled in the art can make various changes and modifications based on the content of this utility model.

[0040] The technical solutions adopted in the embodiments of this utility model are used to more clearly illustrate the technical solutions of this utility model, and are therefore only examples. Unless otherwise specified, they should not be used to limit the scope of protection of this utility model. In the description of the specification, many specific details are provided to give the reader a more complete understanding of this utility model; however, this utility model may still be implemented even if some or all of the specific details are omitted. Furthermore, well-known steps or elements are not described in the details to avoid unnecessary limitations on this utility model. Unless otherwise specified, the embodiments and features in the embodiments of this utility model can be arbitrarily combined with each other. Unless otherwise specified, all technical and scientific terms used in this utility model have the same meaning as commonly understood by one of ordinary skill in the art to which this utility model pertains.

[0041] like Figures 1 to 3 . Figure 1 This is a schematic diagram of the appearance of the fluorine gas detection system provided in an embodiment of this utility model; Figure 2 This is a cross-sectional schematic diagram of the fluorine gas detection system provided in an embodiment of this utility model;

[0042] Figure 3 This is a circuit block diagram of the fluorine gas detection system provided in an embodiment of the present invention. The fluorine gas detection system 1 in this embodiment mainly consists of multiple sets of detection devices 10 and a monitoring device 20.

[0043] In this embodiment, the detection device 10 is set in two groups, but in practice, the number of detection devices 10 is not limited and can be expanded to three or more groups. These detection devices 10 are set in different detection locations, generally as close as possible to potential leak points, such as near gas pipelines and valve joints. Factors such as gas density and any airflow within the room must also be considered, and the detection devices 10 are preferably placed in easily accessible locations for maintenance. The monitoring device 20 can be set in any location with an internet connection, allowing administrators to access, monitor, and manage it remotely.

[0044] To further explain, each detection device 10 includes a housing 11, a gas detector 12, and a controller 13. The housing 11 serves as a support structure and is typically in the form of a box. In this embodiment, the housing 11 has at least one connection port 113 on its back. While this embodiment uses one connection port 113, it is not a limitation. This connection port 113 connects to a signal output line 114. The gas detector 12 is located on one side of the housing 11, and the controller 13 is located inside the housing 11.

[0045] The gas detector 12 includes a potentiometric detection rod 121 and a detection head 122. The potentiometric detection rod 121 is disposed on the outside of the housing 11, and the detection head 122 is fitted onto the front end of the potentiometric detection rod 121 for introducing gas. The potentiometric detection rod 121 can detect the concentration of fluorine gas in the gas after contact and reaction. In this embodiment, the potentiometric detection rod 121 heats and decomposes the gas it contacts through inductance. The fluorine concentration is then estimated by the change in inductance and potential caused by the reaction after contact. The fluorine concentration is then converted into a detection signal and sent out. Additionally, this embodiment includes a fan 123 installed inside the detection head 122, which can draw nearby gas into the potentiometric detection rod 121 for detection using additional airflow, increasing the gas flow rate that the potentiometric detection rod 121 can detect and improving detection efficiency. In this embodiment, the potential detection rod 121 is also provided with a through hole 124. The size of the through hole 124 is approximately less than 0.2 mm. This is mainly to allow the gas drawn in to be partially discharged through the through hole 124, so that the gas can be recirculated.

[0046] like Figure 3As shown, the controller 13 includes a main control module 131, a signal transmission module 132, a power supply module 133, and an automatic reset module 134. The power supply module 133 is electrically connected to the main control module 131 and the potentiometer probe 121 to provide power. The main control module 131 is electrically connected to the signal transmission module 132, the power supply module 133, the automatic reset module 134, and the potentiometer probe 121 to perform various operations. The main control module 131 receives the detection signal from the potentiometer probe 121. The main control module 131 can calculate and process working data based on the detection signal and send the working data to the monitoring device 20 through the signal transmission module 132. The main control module 131 can also analyze whether the fluorine concentration exceeds a preset trigger value based on the detection signal. If so, it sends an alarm signal to the monitoring device 20 through the signal transmission module 132. In addition, the main control module 131 of this embodiment can analyze whether the fluorine concentration has fallen below the preset release value based on the detection signal. If so, it controls the automatic reset module 134 to generate a reset signal and controls the signal transmission module 132 to transmit the reset signal to the monitoring device 20, while the potentiometric detection rod 121 continues to detect.

[0047] The monitoring device 20 is communicatively connected to the signal transmission module 132 via the signal output line 114 to receive and store the aforementioned work data, alarm signals, and reset signals. It alerts the detection device 10 of a potential refrigerant leak based on the alarm signal and alerts the detection device 10 that the refrigerant leak has been resolved based on the reset signal. In this embodiment, the monitoring device 20 includes a monitoring light 21 to display the warning images generated by the work data, corresponding alarm signals, and reset signals. Furthermore, the monitoring device 20 is also equipped with a power connection 22 that can receive external power (such as AC power). Figure 1 , Figure 2 In this embodiment, the monitoring device 20 and the signal transmission module 132 communicate via wired communication, using the signal output line 114 for signal transmission. However, in practical applications, the monitoring device 20 and the signal transmission module 132 can also communicate using a wired communication protocol.

[0048] like Figure 4 The diagram shows the fluorine concentration and trigger value detected by the potentiometric probe of the fluorine detection system provided in an embodiment of this invention. In this embodiment, the trigger value for the fluorine concentration can be selectively set to 100 ppm, 2000 ppm, or 1000 ppm. For example, the trigger value can be set to 100 ppm, and the deactivation value can also be set to 100 ppm. Figure 4As shown, when the fluorine concentration reaches the trigger value of 100 ppm, the main control module controls the signal transmission module to continuously send alarm signals to the remote monitoring device. The monitoring device will then indicate which detection location has experienced a fluorine leak, allowing managers to directly identify and handle the situation. Next, when the fluorine concentration falls below the release value of 100 ppm, the main control module controls the automatic reset module to send a reset signal, which is transmitted to the monitoring device via the signal transmission module. The monitoring device will then indicate that the fluorine leak has been resolved. This release value can be set according to the cleanliness level of the on-site working environment, and the monitoring device will indicate that the fluorine concentration in the on-site working environment has decreased to the required cleanliness level.

[0049] In summary, the fluorine gas detection system provided by this invention uses multiple detection devices at different locations to monitor and detect fluorine gas leaks in real time. When the fluorine gas concentration exceeds a trigger value, the monitoring device can alert the system to the location where a fluorine gas leak has occurred. When the fluorine gas concentration falls below a release value, the monitoring device will alert the system that the leak has been resolved. This invention is applicable to fluorine-related industries, enabling fluorine gas detection in confined spaces, allowing for early leak prevention and notification, effectively controlling hazards and reducing risks.

[0050] Although the present invention has been described in detail through the preferred embodiments above, it should be understood that the above description should not be considered as a limitation of the present invention. Various modifications and substitutions to the present invention will be apparent to those skilled in the art after reading the above content. Therefore, the scope of protection of the present invention should be defined by the appended claims.

Claims

1. A fluorine gas detection system, comprising: The application relates to a fluorine gas leakage detection device. The device comprises a plurality of detection devices arranged at a plurality of detection positions, each of the detection devices comprising: a shell; a gas detector comprising a potentiometric detection rod arranged outside the shell and a detection head sleeved at the front end of the potentiometric detection rod for passing a gas, the potentiometric detection rod detecting fluorine gas concentration in the gas and generating and sending a detection signal; and a controller arranged inside the shell, the controller comprising a main control module and a signal transmission module, the main control module being electrically connected with the signal transmission module and the potentiometric detection rod, the main control module receiving the detection signal of the potentiometric detection rod to analyze whether the fluorine gas concentration exceeds a preset trigger value according to the detection signal, and if yes, sending an alarm signal through the signal transmission module; and a monitoring device communicatively connected with the signal transmission module to receive the alarm signal and warn that the detection device corresponding to the detection position has a fluorine gas leakage risk according to the alarm signal.

2. The fluorine gas detection system according to claim 1, wherein The controller further comprises a power module electrically connected with the main control module and the potentiometric detection rod to provide power.

3. The fluorine gas detection system of claim 1, wherein The controller comprises an automatic reset module electrically connected with the main control module, the main control module controlling the automatic reset module to generate a reset signal when the fluorine gas concentration is lower than a preset release value, and controlling the signal transmission module to transmit the reset signal to the monitoring device, so that the monitoring device warns that the fluorine gas leakage condition has been released according to the reset signal.

4. The fluorine gas detection system of claim 1, wherein The main control module further processes the detection signal as working data and sends the working data to the monitoring device for storage through the signal transmission module.

5. The fluorine gas detection system according to claim 4, wherein The monitoring device comprises a monitoring light to send a warning when the monitoring device receives the alarm signal.

6. The fluorine gas detection system of claim 1, wherein The potentiometric detection rod is provided with a through hole to discharge the gas passing through the through hole.

7. The fluorine gas detection system of claim 1, wherein The detection head is provided with a fan to suck the gas for detection by the potentiometric detection rod.

8. The fluorine gas detection system of claim 1, wherein The communication mode between the monitoring device and the signal transmission module is wired communication.

9. The fluorine gas detection system of claim 1, wherein One side of the shell is provided with a connection port connected with a signal output line, the signal output line being electrically connected with the signal transmission module.

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