Lissajous optical fiber scanner with double driving parts
By adjusting the natural frequency difference by setting the overlap portion in the Lissajous scanner, the vibration coupling problem was solved, the processing efficiency and yield were improved, and a uniform and dense scanning effect was achieved.
Patent Information
- Application Number
- CN202423313389.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-30
- Publication Date
- 2025-12-30
- Estimated Expiration
- 2034-12-30
AI Technical Summary
When existing Lissajous scanners utilize natural frequencies close to each other in two directions, they are prone to vibration coupling effects, which can lead to scanning trajectory distortion and make it difficult to guarantee processing accuracy and yield.
A dual-drive Lissajous fiber optic scanner is designed. By setting an overlapping part between the piezoelectric cylindrical body and the sheet-like piezoelectric actuator, the natural frequency difference between them is adjusted so that vibrations in two directions do not generate coupling, while reducing the processing difficulty and accuracy requirements.
It achieves uniformity and density of the scanning mesh, avoids vibration coupling, and improves processing efficiency and yield.
Smart Images
Figure CN223742865U_ABST
Abstract
Description
[0001] This application is a divisional application of the Chinese patent application No. 2024232650125, filed on December 30, 2024, with the State Intellectual Property Office of China, and entitled "Dual-drive Lissajous Fiber Scanner", the whole content of which is incorporated herein by reference. TECHNICAL FIELD
[0002] The present application relates to the technical field of fiber scanner structure, in particular to a dual-drive Lissajous fiber scanner. BACKGROUND
[0003] The fiber scanner is a display technology that uses a scanning driver to control the swing of a fiber while the fiber emits light. It is mainly used in the technical fields of fiber scanning display technology, fiber scanning endoscope technology, fiber scanning radar, etc. When the fiber scanner is applied to image display, the color of the pattern illuminated by this technology is sharp and saturated, the contrast is high, the brightness is high, and the structure is very small.
[0004] The fiber scanner uses the principle of mechanical resonance to make the fiber cantilever achieve a large scanning range. The scanning mode of the scanning driver can be divided into spiral scanning, grid scanning and Lissajous scanning. The miniature piezoelectric scanning device of Lissajous scanning generally has two driving parts, which drive the scanning device to vibrate in two directions at the same time. The closer the driving frequencies of the two directions in Lissajous scanning, the closer the uniformity (density) of the scanning grid in the two directions, and theoretically the closer the driving frequencies of the two directions, the better. However, the closer the inherent frequencies used in the two directions of the scanner, the more obvious the vibration coupling effect will be, which will worsen the scanning trajectory, cause uncontrollable components in the scanning trajectory and result in distortion of the scanning image, which is difficult to completely eliminate through post-processing. Therefore, the inherent frequencies used in the two directions of the Lissajous scanner should have a precise difference range, neither too small to cause coupling effect, nor too large to cause non-uniformity.
[0005] However, the Lissajous scanner that processes and manufactures inherent frequencies with a precise difference in the two directions requires extremely high processing precision, and neither the cost of processing equipment nor the yield can be guaranteed. Practical new type content
[0006] The present application provides a dual-drive Lissajous fiber scanner to reduce the processing difficulty and improve the processing yield.
[0007] In order to achieve the above application purpose, the present application provides a dual-drive Lissajous fiber scanner, which comprises a cylindrical piezoelectric actuating part, a sheet-shaped piezoelectric actuating part fixedly connected with the cylindrical piezoelectric actuating part, and a fiber fixedly arranged on the sheet-shaped piezoelectric actuating part in a cantilever support manner,
[0008] The barrel-shaped piezoelectric actuating part comprises a piezoelectric material barrel-shaped body, the axis extension direction of the piezoelectric material barrel-shaped body is the front-back direction, the rear end of the piezoelectric material barrel-shaped body is fixedly connected with the base, and the piezoelectric material barrel-shaped body is supported by the base,
[0009] The inner surface and the outer surface of at least one side of the left and right sides of the piezoelectric material barrel-shaped body are respectively provided with a corresponding first inner electrode and a first outer electrode, the part of the piezoelectric material barrel-shaped body between the first inner electrode and the corresponding first outer electrode is polarized along the thickness direction, the piezoelectric material between the first inner electrode and the corresponding first outer electrode is driven to stretch and contract along the front-back direction by the first inner electrode and the corresponding first outer electrode, and the front end of the barrel-shaped body is driven to vibrate left and right along the horizontal direction,
[0010] The sheet-shaped piezoelectric actuating part is arranged along the direction parallel to the horizontal plane, is located at the front side of the piezoelectric material barrel-shaped body, and has a rear end fixedly connected with the piezoelectric material barrel-shaped body; the front end of the sheet-shaped piezoelectric actuating part vibrates along the vertical direction; the optical fiber is fixedly arranged at the front end of the sheet-shaped piezoelectric actuating part in a cantilever support manner; the sheet-shaped piezoelectric actuating part and the piezoelectric material barrel-shaped body have a coincident part in the front-back direction; the sheet-shaped piezoelectric actuating part and the coincident part make the natural frequency of the combination part of the piezoelectric material barrel-shaped body, the sheet-shaped piezoelectric actuating part and the optical fiber in the horizontal direction greater than the same order natural frequency of the combination part in the vertical direction, and make the combination part in the vertical direction have a difference between a certain order natural frequency closest to the V order natural frequency in the horizontal direction and the V order natural frequency in the horizontal direction, and V is an integer greater than or equal to 1.
[0011] The combination part has a first order natural frequency, a second order natural frequency, a third order natural frequency, …, and an N order natural frequency in the vertical direction, and a certain order (for example, a U order, U is an integer greater than or equal to two) of the natural frequencies is closest to the V order natural frequency in the horizontal direction (V is less than U); the closer the driving frequencies in the two directions in the Lissajous scanning are, the closer the uniformity (density) of the scanning grid in the two directions is, and the more the number of points is; in theory, the closer the driving frequencies in the two directions are, the better; however, the closer the natural frequencies of the combination part used in the two directions are, the more obvious the coupling effect is; therefore, the shape structure and / or the size parameter of the sheet-shaped piezoelectric actuating part and the coincident part are adjusted, so that the natural frequencies of the combination part used in the two directions are close enough to ensure good scanning effect and have a uniform and dense scanning grid; meanwhile, there is a sufficient difference, so that the vibration of the combination part in the two directions will not be coupled.
[0012] The difference satisfies that the vibration of the combination part in the horizontal direction and the vibration of the combination part in the vertical direction do not generate coupling when the combination part performs Lissajous scanning under the driving of the driving signal. Generally, the difference ranges from 10 Hz to 12 KHz. Further preferably, the difference ranges from 1 KHz to 10 KHz. The difference is selected according to the value of the V-order natural frequency of the scanner cantilever in the horizontal direction, as long as the difference satisfies that the scanner cantilever has sufficient amplitude when the piezoelectric actuating part performs Lissajous scanning under the driving, and the vibration of the scanner cantilever in the horizontal direction and the vibration of the scanner cantilever in the vertical direction do not generate coupling. For those skilled in the art, numerical selection according to the above description is a routine technical means in the art.
[0013] Preferably, the piezoelectric material cylinder body has the same or similar natural frequency in the horizontal direction and the same order natural frequency in the vertical direction. The piezoelectric material cylinder body satisfying such requirements has a regular shape and a rotationally symmetric structure, so that the piezoelectric material cylinder body has low processing difficulty, easy processing error control, and high yield.
[0014] Optionally, the inner surface and the outer surface of any one side of the left and right sides of the piezoelectric material cylinder body are respectively provided with a corresponding first inner electrode and a first outer electrode, and the part of the piezoelectric material cylinder body between the first inner electrode and the corresponding first outer electrode is polarized in the thickness direction, and the piezoelectric material between the first inner electrode and the corresponding first outer electrode is driven to stretch and contract in the front-back direction by the first inner electrode and the corresponding first outer electrode, and the front end of the cylinder body is driven to vibrate left and right in the horizontal direction. The number of first inner electrodes or first outer electrodes can be one, two or more.
[0015] Optionally, the inner surface and the outer surface of the left and right sides of the piezoelectric material cylinder body are respectively provided with a corresponding first inner electrode and a first outer electrode, and the part of the piezoelectric material cylinder body between the first inner electrode and the corresponding first outer electrode is polarized in the thickness direction, and the piezoelectric material between the first inner electrode and the corresponding first outer electrode is driven to stretch and contract in the front-back direction by the first inner electrode and the corresponding first outer electrode, and the piezoelectric material on the left and right sides synchronously and reversely stretches and contracts by the same length, and the front end of the cylinder body is driven to vibrate left and right in the horizontal direction. The number of first inner electrodes or first outer electrodes can be one, two or more.
[0016] Further preferably, when the inner surface and the outer surface of the left and right sides of the piezoelectric material cylinder body are respectively provided with a first inner electrode and a corresponding first outer electrode, the first inner electrodes on the left and right sides of the piezoelectric material cylinder body are symmetrically arranged to drive the piezoelectric material cylinder body to accurately vibrate left and right in the horizontal direction without generating a vertical displacement component.
[0017] Optionally, the sheet-shaped piezoelectric actuating part is a single piezoelectric sheet actuator or a double piezoelectric sheet actuator.
[0018] The one or more technical solutions in the application have at least the following technical effects or advantages:
[0019] The application makes the piezoelectric actuating part of the Lissajous scanner itself not necessarily have a specific difference in the inherent frequencies in the two driving directions, and also avoids the coupling of the vibrations in the two driving directions, thereby reducing the processing difficulty and the requirement for processing precision; further preferably, the application allows the piezoelectric material cylinder body to have the same or close inherent frequencies in the two driving directions, and allows the piezoelectric material cylinder body itself to be a rotationally symmetrical structure, which further reduces the processing difficulty of the piezoelectric actuating part of the Lissajous scanner, and significantly improves the processing efficiency and the yield. BRIEF DESCRIPTION OF DRAWINGS
[0020] Figure 1 is a structural schematic view of the application;
[0021] Figure 2 is a structural schematic view of the coincident part in the front-back direction. DETAILED DESCRIPTION
[0022] The technical solutions in the embodiments of the application will be described clearly and completely below with reference to the drawings in the embodiments of the application. Obviously, the described embodiments are only part of the embodiments of the application, rather than all the embodiments. Based on the embodiments in the application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the application.
[0023] Embodiment:
[0024] In combination with Figure 1 , Figure 2 As shown in FIG. 1, a double-driving Lissajous fiber scanner includes a cylinder piezoelectric actuating part, a sheet piezoelectric actuating part 103 fixedly connected with the cylinder piezoelectric actuating part, and a fiber 104 fixedly arranged on the sheet piezoelectric actuating part 103 in a cantilever support manner,
[0025] The cylinder piezoelectric actuating part includes a piezoelectric material cylinder body 100, the axis extension direction of the piezoelectric material cylinder body 100 is the front-back direction, the rear end of the piezoelectric material cylinder body 100 is fixedly connected with a base 200, and the piezoelectric material cylinder body 100 is supported by the base 200,
[0026] The inner surface and the outer surface of at least one side of the piezoelectric material cylinder body 100 are respectively provided with a corresponding first inner electrode 1011 and a first outer electrode 1012, the part of the piezoelectric material cylinder body 100 between the first inner electrode 1011 and the corresponding first outer electrode 1012 is polarized along the thickness direction, and the piezoelectric material between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to stretch and contract in the front-back direction by the first inner electrode 1011 and the corresponding first outer electrode 1012, so that the front end of the cylinder body 100 vibrates left and right along the horizontal direction,
[0027] The sheet-shaped piezoelectric actuating part 103 is arranged along the direction parallel to the horizontal plane, and is located at the front side of the piezoelectric material cylinder body 100, and the rear end thereof is fixedly connected with the piezoelectric material cylinder body 100. The front end of the sheet-shaped piezoelectric actuating part 103 vibrates along the vertical direction, the optical fiber 104 is fixedly arranged at the front end of the sheet-shaped piezoelectric actuating part 103 in a cantilever support manner, the sheet-shaped piezoelectric actuating part 103 and the piezoelectric material cylinder body 100 have a coincident part 105 in the front-back direction, and the sheet-shaped piezoelectric actuating part 103 and the coincident part 105 make the combination part composed of the piezoelectric material cylinder body 100, the sheet-shaped piezoelectric actuating part 103 and the optical fiber 104 have a natural frequency in the horizontal direction which is greater than the same order natural frequency of the combination part in the vertical direction, and make the combination part have a difference between the certain order natural frequency closest to the V order natural frequency in the horizontal direction and the V order natural frequency in the vertical direction, and V is an integer greater than or equal to 1.
[0028] The combination part has a first order natural frequency, a second order natural frequency, a third order natural frequency, …, and an N order natural frequency in the vertical direction, and there is a certain order (for example, U order, U is an integer greater than or equal to two) of the natural frequency closest to the V order natural frequency in the horizontal direction (V is less than U), the closer the driving frequencies in the two directions in the Lissajous scanning, the closer the uniformity (density) of the scanning grid in the two directions, and the more the number of points, and theoretically the closer the driving frequencies in the two directions, the better, but the closer the natural frequencies used by the combination part in the two directions, the more obvious the coupling effect, so that the shape structure and / or size parameter of the sheet-shaped piezoelectric actuating part 103 and the coincident part 105 are adjusted, so that the natural frequencies of the combination part used in the two directions at the same time meet the requirements of being close enough to ensure good scanning effect and have uniform and dense scanning grid, and at the same time have enough difference to make the vibration of the combination part in the two directions not coupled.
[0029] The difference satisfies that the vibration of the combination part in the horizontal direction and the vibration of the combination part in the vertical direction do not generate coupling when the combination part performs Lissajous scanning under the driving of the driving signal. Generally, the difference ranges from 10 Hz to 12 KHz. Further preferably, the difference ranges from 1 KHz to 10 KHz. The difference is selected according to the value of the V-order natural frequency of the scanner cantilever in the horizontal direction, as long as the difference satisfies that the scanner cantilever has sufficient amplitude when the piezoelectric actuating part performs Lissajous scanning under the driving, and the vibration of the scanner cantilever in the horizontal direction and the vibration of the scanner cantilever in the vertical direction do not generate coupling. For those skilled in the art, numerical selection according to the above description is a conventional technical means in the art.
[0030] Preferably, the piezoelectric material cylinder body 100 has the same or similar natural frequency in the horizontal direction and the same-order natural frequency in the vertical direction. The piezoelectric material cylinder body 100 satisfying such requirements has a regular shape and a rotationally symmetric structure, so that the piezoelectric material cylinder body 100 has low processing difficulty, easy processing error control, and high yield, such as a cylindrical main body or a square cylindrical main body.
[0031] Optionally, the inner surface and the outer surface of any one of the left side and the right side of the piezoelectric material cylinder body 100 are respectively provided with a corresponding first inner electrode 1011 and a first outer electrode 1012, and the part of the piezoelectric material cylinder body 100 between the first inner electrode 1011 and the corresponding first outer electrode 1012 is polarized in the thickness direction, and the piezoelectric material between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to stretch and contract in the front-rear direction by the first inner electrode 1011 and the corresponding first outer electrode 1012, and the front end of the cylinder body 100 is driven to vibrate left and right in the horizontal direction. The number of first inner electrodes 1011 or first outer electrodes 1012 can be one, two or more.
[0032] Optionally, the inner surface and the outer surface of the left side and the right side of the piezoelectric material cylinder body 100 are respectively provided with a corresponding first inner electrode 1011 and a first outer electrode 1012, and the part of the piezoelectric material cylinder body 100 between the first inner electrode 1011 and the corresponding first outer electrode 1012 is polarized in the thickness direction, and the piezoelectric material between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to stretch and contract in the front-rear direction by the first inner electrode 1011 and the corresponding first outer electrode 1012, and the piezoelectric material on the left side and the right side synchronously and reversely stretches and contracts by the same length, and the front end of the cylinder body 100 is driven to vibrate left and right in the horizontal direction. The number of first inner electrodes 1011 or first outer electrodes 1012 can be one, two or more.
[0033] Further preferably, when the inner surface and the outer surface of the piezoelectric material cylinder body 100 on the left and right sides are respectively provided with the first inner electrode 1011 and the first outer electrode 1012 corresponding thereto, the first inner electrodes 1011 on the left and right sides of the piezoelectric material cylinder body 100 are symmetrically arranged to drive the piezoelectric material cylinder body 100 to accurately vibrate in the horizontal direction left and right, without generating a displacement component in the vertical direction.
[0034] It should be noted that the above-mentioned embodiments illustrate rather than limit the application, and that one skilled in the art will be able to design many alternative embodiments without departing from the scope of the appended claims. In the claims, any reference signs placed between parentheses shall not be construed as limiting the claim. The word 'comprising' or 'including' does not exclude the presence of elements or steps other than those listed in a claim. The word 'a' or 'an' preceding an element does not exclude the presence of a plurality of such elements. The use of the word 'about' followed by a value and / or a range of values, indicates the value and / or range of values plus or minus 10% of the stated value and / or range of values.
[0035] All features disclosed in this specification, unless expressly stated to the contrary, are intended to be ascribed independent alternative embodiments. Dependent on the context, a single feature can be a sub-feature of a higher feature. The word "comprising" and variations such as "comprise" or "comprises" when used in relation to a list of items or steps, is to be interpreted as including at least the listed items or steps, but not excluding additional items or steps.
[0036] Any feature in the present specification, unless expressly stated to be otherwise, is intended to be additional to, or not excluding, other features of the application. Any feature of any of the claims may, unless stated to the contrary, be replaced by an alternative feature serving the same, or a similar or equivalent function.
Claims
1. A dual drive Lissajous fiber scanner, characterized in that, The application relates to a piezoelectric actuator, which comprises a cylindrical piezoelectric actuator, a sheet piezoelectric actuator fixedly connected with the cylindrical piezoelectric actuator, and an optical fiber fixedly arranged on the sheet piezoelectric actuator in a cantilever support mode, The cylindrical piezoelectric actuator comprises a piezoelectric material cylindrical body, the axial extension direction of the piezoelectric material cylindrical body is the front-back direction, the rear end of the piezoelectric material cylindrical body is fixedly connected with a base and is supported by the base, The inner surface and the outer surface of at least one side of the left and right sides of the piezoelectric material cylindrical body are respectively provided with corresponding first inner electrodes and first outer electrodes, the part of the piezoelectric material cylindrical body between the first inner electrode and the corresponding first outer electrode is polarized along the thickness direction, the piezoelectric material between the first inner electrode and the corresponding first outer electrode is driven to stretch and contract along the front-back direction by the first inner electrode and the corresponding first outer electrode, and the front end of the cylindrical body is driven to vibrate left and right along the horizontal direction, The sheet piezoelectric actuator is arranged along the direction parallel to the horizontal plane, is located at the front side of the piezoelectric material cylindrical body, and is fixedly connected with the piezoelectric material cylindrical body at the rear end, the front end of the sheet piezoelectric actuator vibrates along the vertical direction, the optical fiber is fixedly arranged on the front end of the sheet piezoelectric actuator in a cantilever support mode, the sheet piezoelectric actuator and the piezoelectric material cylindrical body have a coincident part in the front-back direction, the sheet piezoelectric actuator and the coincident part make the natural frequency of the combination part of the piezoelectric material cylindrical body, the sheet piezoelectric actuator and the optical fiber in the horizontal direction greater than the same order natural frequency of the combination part in the vertical direction, and make the combination part in the vertical direction closest to the difference value between a certain order natural frequency and the V order natural frequency in the horizontal direction, V is an integer greater than or equal to 1.
2. A dual drive Lissajous fiber scanner as claimed in claim 1, characterized in that, The difference value makes the vibration of the combination part in two directions not coupled.
3. A dual drive Lissajous fiber scanner as claimed in claim 1 or 2, characterized in that The difference value ranges from 10 Hz to 12 KHz.
4. A dual drive Lissajous fiber scanner as claimed in claim 3, characterized in that The difference value ranges from 1 KHz to 10 KHz.
5. A dual drive Lissajous fiber scanner as claimed in claim 1 or 2, characterized in that, The natural frequency of the piezoelectric material cylindrical body in the horizontal direction and the same order natural frequency in the vertical direction are the same or similar.
6. A dual drive Lissajous fiber scanner as claimed in claim 1 or 2, characterized in that The inner surface and the outer surface of any one side of the left and right sides of the piezoelectric material cylindrical body are respectively provided with corresponding first inner electrodes and first outer electrodes.
7. A dual drive Lissajous fiber scanner as claimed in claim 1 or 2, characterized in that The inner surface and the outer surface of the left and right sides of the piezoelectric material cylindrical body are respectively provided with corresponding first inner electrodes and first outer electrodes.
8. A dual drive Lissajous fiber scanner as claimed in claim 7, characterized in that The first inner electrodes of the left and right sides of the piezoelectric material cylindrical body are symmetrically arranged.
9. A dual drive Lissajous fiber scanner as claimed in claim 1 or 2, characterized in that, The sheet piezoelectric actuator is a single piezoelectric sheet actuator or a double piezoelectric sheet actuator.