Wafer bearing disc lifting carrying mechanism and conveying device

Abstract

The utility model provides a wafer bearing disc lifting and carrying mechanism, and relates to the technical field of semiconductor processing equipment, and the wafer bearing disc lifting and carrying mechanism comprises a material taking arm which is used for bearing a wafer bearing disc; the horizontal adjusting structure is used for driving the material taking arm to adjust the position in the horizontal plane; the connecting seat is arranged above the horizontal adjusting structure and is used for mounting the horizontal adjusting structure; the lifting structure is arranged above the connecting seat and is used for driving the connecting seat to perform lifting adjustment; the fixed bracket is arranged above the connecting seat and is used for mounting the lifting structure; the reinforcing structure comprises at least one reinforcing rod, the reinforcing rod is obliquely arranged between the fixing support and the connecting base, hinge components are arranged at the two ends of the reinforcing rod, one of the two hinge components is a fixed component which cannot move, and the other hinge component is a movable component which can move in the horizontal direction. The utility model aims to share the stress of the lifting mechanism and improve the protection of the lifting mechanism.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor processing equipment, in particular to a wafer carrier plate lifting and carrying mechanism and a conveying device with the same. BACKGROUND

[0002] In the semiconductor industry, a robot is usually used to complete the transfer of a wafer carrier plate between chambers or stations, thereby improving the efficiency of wafer loading and unloading.

[0003] In a wafer carrier plate loading and unloading system, the wafer carrier plate is relatively heavy and has high positioning requirements, so that the carrying mechanism must be strictly controlled during the conveying process. In addition to ensuring smooth operation of the mechanism, the loading and unloading positioning must be accurate, and the mechanism must not cause problems such as misalignment and deviation during loading and unloading, which would cause the processing machine to stop, thereby reducing the wafer production efficiency or directly damaging the wafer.

[0004] In related technologies, a wafer lifting and carrying mechanism usually includes a material taking arm for receiving a wafer carrier plate, a horizontal adjustment structure for driving the material taking arm to adjust in a horizontal plane, and a lifting structure for driving the material taking arm and the horizontal adjustment structure to lift together. However, it is found in actual use that the mechanism may cause an increase in gravity and a shift in the center of gravity during the process of receiving and transporting the wafer carrier plate. The gravity of the wafer carrier plate and the torsion force during the carrying process are all borne by the lifting structure, which may cause damage to the lifting structure. Utility Model Content

[0005] The present application aims to provide a wafer carrier plate lifting and carrying mechanism and a conveying device with the same, which can share the stress of the lifting structure and improve the protection of the lifting structure.

[0006] Additional aspects and advantages of the present application will be set forth in part in the following description, and in part will become apparent to those skilled in the art from the description, or can be learned by practice of the application.

[0007] According to a first aspect of the present application, a wafer carrier plate lifting and carrying mechanism is provided, comprising:

[0008] a material taking arm for receiving a wafer carrier plate;

[0009] a horizontal adjustment structure for driving the material taking arm to adjust in a horizontal plane;

[0010] a connecting seat arranged above the horizontal adjustment structure for mounting the horizontal adjustment structure;

[0011] a lifting structure arranged above the connecting seat for driving the connecting seat to adjust in a lifting manner;

[0012] A fixing support is arranged above the connecting seat and serves to mount the lifting structure;

[0013] The reinforcing structure comprises at least one reinforcing rod, which is arranged obliquely between the fixing support and the connecting seat, and both ends of the reinforcing rod are provided with hinge members for forming a hinge with the fixing support / connecting seat. One of the two hinge members is arranged as a fixed member which cannot be moved in position, and the other is arranged as a moving member which can be moved in the horizontal direction.

[0014] In an exemplary embodiment of the present application, the reinforcing structure comprises two reinforcing rods, which are staggered with each other.

[0015] In an exemplary embodiment of the present application, the two moving members of the reinforcing structure are located on the same side of the two reinforcing rods in the vertical direction, and the two fixed members are located on the other side of the two reinforcing rods in the vertical direction.

[0016] In an exemplary embodiment of the present application, the two reinforcing rods are provided with a pin shaft at the position where they are staggered with each other, so as to hinge the two reinforcing rods with each other.

[0017] In an exemplary embodiment of the present application, the fixed member is arranged as a fixed foot seat, and the fixed foot seats corresponding to the two reinforcing rods are fixedly connected with the fixing support and the connecting seat respectively; the moving member is arranged as a sliding foot seat, and the lower surface of the fixing support and the upper edge of the connecting seat are both fixedly provided with a sliding rail which is slidingly adapted to the sliding foot seat.

[0018] In an exemplary embodiment of the present application, the end of the sliding rail is fixedly provided with a buffer baffle.

[0019] In an exemplary embodiment of the present application, the horizontal adjusting structure comprises a translation member for driving the material taking arm to move horizontally, and a rotating member for driving the translation member to rotate.

[0020] In an exemplary embodiment of the present application, the translation member comprises:

[0021] A guide cover is internally provided with a guide channel along the horizontal direction, and the guide channel penetrates through the bottom of the guide cover;

[0022] A lead screw is rotatably connected to the inside of the guide cover along the length direction of the guide cover;

[0023] A driving portion is arranged at the end of the lead screw and can output a rotating power to drive the lead screw to rotate;

[0024] The connecting flange is threadedly connected with the lead screw and fixedly connected with the material taking arm, and is capable of moving along the length direction of the guide channel.

[0025] In an exemplary embodiment of the present application, the rotating member is a rotating motor, the body of the rotating motor is fixedly connected with the connecting seat, and the output end of the rotating motor is fixedly connected with the top of the guide cover.

[0026] According to a second aspect of the present application, a conveying device having the lifting and carrying mechanism is provided, and the lifting and carrying mechanism of the wafer carrier is any one of the above.

[0027] The exemplary embodiments of the present application can have the following partial or all beneficial effects:

[0028] In the wafer carrier lifting and carrying mechanism provided in the exemplary embodiment of the present application, when the lifting structure is adjusted, the two ends of the reinforcing rod are rotated through the hinged members, and one end of the reinforcing rod with the translation member can slide in the horizontal direction, so as to adjust the inclination angle of the reinforcing rod. Therefore, the reinforcing structure does not affect the adjustment of the lifting structure. During the process of receiving the wafer carrier by the material taking arm, the reinforcing structure can share the stress of the lifting structure, so that the stress is more uniform during the use of the mechanism. Meanwhile, during the carrying process of the wafer carrier, the torque and bending moment are generated, and the reinforcing structure can balance the torque and bending moment, so as to avoid the concentration of the torque and bending moment on the lifting structure. Therefore, the reinforcing structure can effectively share the stress of the lifting structure, improve the protection of the lifting structure, and prolong the service life of the lifting structure.

[0029] It should be understood that the above general description and the following detailed description are only exemplary and explanatory, and cannot limit the present application. BRIEF DESCRIPTION OF DRAWINGS

[0030] The drawings incorporated into the specification and forming a part of the specification, show embodiments consistent with the present application, and together with the specification, serve to explain the principles of the present application. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.

[0031] Figure 1 A schematic diagram of a wafer carrier lifting and carrying mechanism in an embodiment of the present application is shown;

[0032] Figure 2 A schematic diagram of a reinforcing structure in an embodiment of the present application is shown;

[0033] Figure 3A structure diagram of the translation member in the embodiment of the present application is shown.

[0034] Figure 4 A structure diagram of the rotation member in the embodiment of the present application is shown.

[0035] Legend of reference signs:

[0036] 1, material taking arm; 2, horizontal adjusting structure; 21, translation member; 211, guide cover; 212, screw rod; 213, driving part; 214, connecting flange; 22, rotation member; 221, rotation motor; 222, first transmission wheel; 223, second transmission wheel; 224, transmission belt; 225, transmission flange; 3, connecting seat; 4, lifting structure; 5, fixed support; 6, reinforcing structure; 61, reinforcing rod; 62, fixed member; 63, moving member; 7, pin shaft; 8, slide rail; 81, buffer baffle; 9, box. DETAILED DESCRIPTION

[0037] Example implementations will now be described more fully with reference to the accompanying drawings. Example implementations may, however, be implemented in many different forms and should not be construed as limited to the implementations set forth herein; rather, these implementations are provided so that this disclosure will be thorough and complete, and will fully convey the concept of example implementations to those skilled in the art. Like reference numerals refer to like elements throughout the figures, and descriptions of the same elements will be omitted from descriptions of subsequent figures. In addition, the drawings are only schematic and are not necessarily drawn to scale.

[0038] Although relative terms such as "upper", "lower", etc. are used herein to describe one component's relationship to another component in the drawings, these terms are used herein for convenience only and are not necessarily limiting. It is to be understood that if a device were turned over so that its "upper" part were now its "lower" part, the described elements would then be oriented "upside down", but would function in the same way. When a structure is "on" another structure, it can be directly on the other structure or "indirectly" on the other structure by way of another structure.

[0039] The terms "a", "an", and "the" are used to mean one or more than one, unless specified otherwise. The term "includes" and "including" means, but is not limited to, "comprising". The terms "first", "second", and the like, do not mean any order, quantity, or importance, but rather are used to nomenclature different components.

[0040] Reference Figure 1 and Figure 2In the embodiment of the present application, a wafer carrier lifting and carrying mechanism is provided, comprising:

[0041] A material taking arm 1 is arranged above the horizontal adjusting structure 2 and used to carry the wafer carrier.

[0042] A horizontal adjusting structure 2 is arranged above the material taking arm 1 and used to drive the material taking arm 1 to adjust the position in the horizontal plane.

[0043] A connecting seat 3 is arranged above the horizontal adjusting structure 2 and used to mount the horizontal adjusting structure 2.

[0044] A lifting structure 4 is arranged above the connecting seat 3 and used to drive the connecting seat 3 to adjust the lifting.

[0045] A fixing support 5 is arranged above the connecting seat 3 and used to mount the lifting structure 4.

[0046] A reinforcing structure 6 comprises at least one reinforcing rod 61, which is arranged between the fixing support 5 and the connecting seat 3 in an inclined manner. The reinforcing rod 61 is provided with a hinged member at both ends, which is hinged with the fixing support 5 / connecting seat 3. One of the two hinged members is arranged as a fixed member 62 which cannot move in position, and the other is arranged as a moving member 63 which can move in the horizontal direction.

[0047] In the embodiment of the present application, when the lifting structure 4 adjusts the position of the material taking arm 1, the reinforcing rod 61 realizes the relative rotation with the fixing support 5 and the connecting seat 3 through the hinged members at the top and bottom of the reinforcing rod 61. In the process of rotating the reinforcing rod 61, the end of the reinforcing rod 61 with the moving member 63 can adjust the position, so as to realize the adjustment of the inclination angle of the reinforcing rod 61, thus avoiding any interference of the reinforcing rod 61 to the lifting adjustment of the lifting structure 4. When the material taking arm 1 carries the wafer carrier, the reinforcing rod 61 plays a role of force sharing for the lifting structure 4, so as to avoid the stress concentration at the connecting position of the lifting structure 4 and the connecting seat 3. In addition, when the horizontal adjusting structure 2 adjusts the horizontal position of the material taking arm 1, the reinforcing rod 61 can also effectively disperse the torque and bending moment, so as to prevent the concentration of the torque and bending moment at the lifting structure 4. Thus, in the whole conveying process of the wafer carrier, the stress of the lifting structure 4 is continuously shared, so as to effectively protect the lifting structure 4 from being damaged, improve the stability and durability of the whole structure.

[0048] In the embodiments of the present application, the lifting structure 4 can be provided as a pneumatic cylinder, a hydraulic cylinder, a lifting electric cylinder, etc. In order to achieve more precise position adjustment of the material taking arm 1 in the vertical direction, the present application preferably adopts a lifting electric cylinder which can provide four or more position adjustment capabilities. Specifically, the driving part of the lifting electric cylinder is firmly installed on the fixed support 5, and the output shaft thereof is tightly connected with the top of the connecting seat 3, thereby ensuring the stability of the structure and the accuracy of the operation. Of course, the above description is only an example, and the implementation mode of the lifting structure 4 is not limited thereto.

[0049] In the embodiments of the present application, the moving member 63 and the fixed member 62 are respectively installed at the end portions of the two ends of the reinforcing rod 61. Specifically, if the moving member 63 is arranged at the top end portion of the reinforcing rod 61, the fixed member 62 is correspondingly arranged at the bottom end portion of the reinforcing rod 61; conversely, if the fixed member 62 is arranged at the top end portion of the reinforcing rod 61, the moving member 63 is correspondingly arranged at the bottom end portion of the reinforcing rod 61. When the lifting structure 4 adjusts the height of the connecting seat 3, the two ends of the reinforcing rod 61 can rotate with the moving member 63 and the fixed member 62, and the moving member 63 can also move in the horizontal direction, so as to adjust the inclination angle of the reinforcing rod 61. Through the structure, the reinforcing rod 61 does not interfere with the lifting process of the lifting structure 4.

[0050] In the embodiments of the present application, the reinforcing rod 61 can be provided as a single rod or multiple rods. It can be understood that by increasing the number of reinforcing rods 61, the effect of sharing the stress of the lifting structure 4 can be improved, and the stability of the mechanism can be further improved.

[0051] In a preferred embodiment of the embodiments of the present application, the reinforcing rod 61 is provided as two rods and forms an "X-shaped" configuration in a staggered manner. This layout not only saves the space required by the reinforcing structure 6, but also realizes uniform distribution of force, further improving the strength and stability of the overall structure.

[0052] In the reinforcing structure 6 of the present application, the layout of the moving member 63 and the fixed member 62 is further optimized. Specifically, the two moving members 63 in the reinforcing structure 6 are located on the same side of the staggered two reinforcing rods 61 in the vertical direction, and the two fixed members 62 are located on the other side of the staggered two reinforcing rods 61 in the vertical direction. This layout not only balances the stress of the structure, but also effectively reduces the space required by the reinforcing structure 6. When the lifting structure 4 adjusts the height of the connecting seat 3, the same side of the two reinforcing rods 61 can move synchronously in the same direction, which not only ensures the smoothness of the operation, but also further reduces the space requirement of the reinforcing structure 6, realizes the dual optimization of space utilization and structural stability.

[0053] Of course, this is not restrictive, in other embodiments, the two moving members 63 can also be located on the same side of the two reinforcing rods 61 in the horizontal direction. Specifically, when the two moving members 63 are both mounted on the top of the reinforcing rods 61, the two fixed members 62 are respectively mounted on the bottom of the two reinforcing rods 61; when the two moving members 63 are both mounted on the bottom of the reinforcing rods 61, the two fixed members 62 are respectively mounted on the top of the two reinforcing rods 61.

[0054] When the lifting structure 4 drives the connecting seat 3 to rise, the two moving members 63 will move in directions away from each other; when the lifting structure 4 drives the connecting seat 3 to descend, the two moving members 63 will move in directions towards each other, showing the dynamic adaptability of the structure. However, it is worth noting that this structure design will undoubtedly increase the movement stroke required by the two moving members 63 in the reinforcing structure 6, thereby increasing the space required by the reinforcing structure 6 to some extent.

[0055] In the preferred embodiment of the present application, the positions where the two reinforcing rods 61 intersect are provided with a pin shaft 7, which allows the two reinforcing rods 61 to be hinged to each other, thereby improving the stability and reliability of the reinforcing structure 6 as a whole. It ensures that the reinforcing rods 61 can more evenly disperse stress when subjected to external force, thereby effectively avoiding local overload, providing a solid guarantee for the long-term stable operation of the mechanism.

[0056] Specifically, in the present application, the fixed member 62 is provided as a fixed foot, specifically, the two fixed feet are respectively and firmly connected with the lower surface of the fixed support 5 and the upper surface of the connecting seat 3, ensuring the stability and reliability of the entire reinforcing structure 6. The fixed connection mode is flexible and diverse, and can adopt various modes such as welding, threaded connection, sticking, clamping, etc., which not only ensures the stability of the structure, but also facilitates maintenance and adjustment. Of course, the above-mentioned connection modes are only exemplary, and the most suitable connection mode can be selected according to the specific requirements and environmental conditions in actual application.

[0057] In the present application, the moving member 63 is provided as a moving foot, in order to realize the sliding fit between the moving foot and the fixed support 5 and the connecting seat 3, the lower surface of the fixed support 5 and the upper surface of the connecting seat 3 are both fixedly provided with a sliding rail 8 matched with the moving foot, ensuring the stability and directivity of the moving foot during movement. In order to prevent the moving foot from accidentally separating from the sliding rail 8 during movement, the sliding rail 8 is provided as a T-shaped sliding rail 8, and the moving foot is correspondingly provided as a sliding block with a T-shaped groove, which not only ensures the close fit between the two, but also effectively avoids lateral deviation during movement, thereby improving the stability and reliability of the overall structure.

[0058] Of course, this is not restrictive, the matching mode of the mobile foot and the slide rail 8 can also adopt dovetail or other special-shaped structures, and these designs can also realize the stable sliding matching between the mobile foot and the slide rail 8.

[0059] In other embodiments, the lower surface of the fixed support 5 and the upper surface of the connecting seat 3 can also be provided with horizontal sliding grooves, and the mobile foot is located in the sliding groove. The sliding groove not only provides a guide path for the mobile foot, but also ensures the stability of the mobile foot during sliding and avoids disengagement.

[0060] In the embodiment of the present application, the two ends of the slide rail 8 are fixedly provided with buffer baffles 81, which are made of flexible materials such as rubber, silicone, polyurethane, etc., so that the buffer baffles 81 not only have good elasticity, but also have good wear resistance and weather resistance. By providing the buffer baffles 81 at both ends of the slide rail 8, on the one hand, the movement range of the mobile member 63 can be effectively limited, and accidental disengagement of the mobile member 63 from the slide rail 8 is avoided, thereby ensuring the safety and stability of the mechanism operation. On the other hand, when the mobile member 63 contacts the buffer baffle 81, the buffer baffle 81 can play its elastic buffering role, effectively absorbing and reducing the impact force of the mobile member 63, significantly reducing the vibration and noise during the operation of the mechanism, and improving the operation stability and service life of the mechanism.

[0061] In the embodiment of the present application, the specific number of the reinforcing structures 6 is not specially limited, however, in order to achieve the best supporting effect and structural balance, the present application preferably sets the reinforcing structures 6 as two groups, and the two groups of reinforcing structures 6 are respectively located on both sides of the lifting structure 4 to form a symmetrical layout. Not only can it ensure the stability and balance of the mechanism during movement, but also can effectively disperse and bear the weight of the wafer carrier plate, improve the bearing capacity and safety of the overall structure. By arranging the reinforcing structures 6 as two groups and respectively arranging them on both sides of the lifting structure 4, the mechanism can meet more support requirements in different working states.

[0062] In the embodiment of the present application, the horizontal adjusting structure 2 includes a mobile member 21 and a rotating member 22. The mobile member 21 can drive the material taking arm 1 to move in a certain direction in the horizontal plane, and the rotating member 22 gives the mobile member 21 the ability to rotate, so that the material taking arm 1 can be flexibly rotated to the required position and then accurately horizontally moved. This combined adjusting mode not only greatly expands the operation range of the material taking arm 1, but also ensures the adaptability and flexibility of operation in complex environments. Through the combination of the above structures, the material taking arm 1 can be adjusted in all directions in the horizontal plane, so that the material taking arm 1 can be freely moved to the required position in the horizontal direction to meet the material taking requirements in different scenes.

[0063] Referring toFigure 1 and Figure 3 For the driving mode of the moving member 21, the embodiments of the present application provide multiple choices, including but not limited to cylinder, hydraulic cylinder, linear motor and the like. In the embodiments of the present application, the moving member 21 comprises:

[0064] a guide cover 211, which is internally provided with a guide channel penetrating through the bottom of the guide cover 211 along the horizontal direction;

[0065] a lead screw 212, which is rotatably connected to the inside of the guide cover 211 along the length direction of the guide cover 211;

[0066] a driving part 213, which is arranged at the end of the lead screw 212 and can output rotary power to drive the lead screw 212 to rotate;

[0067] a connecting flange 214, which is threadedly connected with the lead screw 212 and protrudes from the bottom of the guide channel to be fixedly connected with the material taking arm 1, and can move along the length direction of the guide channel.

[0068] When it is necessary to adjust the position of the material taking arm 1, the driving part 213 will output rotary power to smoothly drive the lead screw 212 to rotate. The connecting flange 214 is threadedly connected with the lead screw 212 and can smoothly and accurately move along the length direction of the guide cover 211 under the guidance of the guide cover 211.

[0069] Further, the driving part 213 at least comprises a motor which can be used to drive the lead screw 212 to rotate. In order to realize flexible adjustment of the installation position of the motor, the driving part 213 further comprises a synchronous assembly arranged between the motor and the lead screw 212 in the embodiments of the present application. The synchronous assembly not only improves the adaptability and operation flexibility of the motor, but also ensures the efficiency and stability of power transmission. Specifically, the synchronous assembly is composed of a first synchronous wheel, a second synchronous wheel and a synchronous belt.

[0070] In the embodiments of the present application, the motor is installed at the top of the guide cover 211, and the body of the motor is firmly connected with the guide cover 211 to ensure the stability and safety of the motor during operation. The first synchronous wheel is fixedly connected with the output shaft of the motor, the second synchronous wheel is fixedly connected with the end of the lead screw 212, and the synchronous belt is wound between the first synchronous wheel and the second synchronous wheel to form an efficient power transmission chain.

[0071] When it is needed to rotate the lead screw 212 to realize the adjustment of the position of the material taking arm 1, the motor is started only, the motor transmits the output rotating power to the first synchronous wheel to make it rotate. The first synchronous wheel makes the second synchronous wheel rotate synchronously through the transmission of the synchronous belt, and the second synchronous wheel directly drives the lead screw 212 to rotate.

[0072] With reference to Figure 1 、 Figure 3 and Figure 4 In the embodiment of the present application, the rotating member 22 comprises a rotating motor 221, and in order to realize the reasonable layout of space, the rotating member 22 further comprises a first transmission wheel 222, a second transmission wheel 223, a transmission belt 224 and a transmission flange 225. The upper portion of the connecting seat 3 is fixedly provided with a box body 9, the rotating member 22 is installed in the box body 9, the body of the rotating motor 221 is fixedly connected with the box body 9, the output shaft of the rotating motor 221 is fixedly connected with the first transmission wheel 222, the second transmission wheel 223 is located on one side of the first transmission wheel 222, the transmission belt 224 is wound between the first transmission wheel 222 and the second transmission wheel 223, the transmission flange 225 is located below the box body 9, and a transmission shaft is fixedly connected between the second transmission wheel 223 and the transmission flange 225. The transmission shaft penetrates through the box body 9, and the connecting flange 214 is fixedly connected with the top of the guide cover 211. When it is needed to adjust the moving direction of the material taking arm 1, the rotating motor 221 is started only to output the rotating power for driving the guide cover 211 to rotate. The rotating power is transmitted through the first transmission wheel 222, the second transmission wheel 223, the transmission belt 224 and the transmission flange 225, and then drives the guide shaft to rotate, so that the adjustment of the moving direction of the material taking arm 1 is realized.

[0073] In the embodiment of the present application, a conveying device with the lifting carrying mechanism is also provided.

[0074] Other embodiments of the present application will be apparent to those skilled in the art from consideration of the specification and practice of the present application. The present application is intended to cover any variations, uses or adaptive changes of the present application following the general principles of the present application and including general knowledge or custom in the art not specifically recited. The specification and examples are to be construed as merely illustrative of the present application and not limitative of the true scope and spirit of the present application, which is set forth in the accompanying claims.

Claims

1. A wafer boat lifting and handling mechanism characterized by, The utility model relates to a wafer carrier plate taking arm horizontal adjustment structure and lifting structure, and belongs to the field of wafer carrier plate taking arm horizontal adjustment structure and lifting structure. Including: Material taking arm (1) for receiving wafer carrier plate; Horizontal adjustment structure (2) for driving the material taking arm (1) to carry out position adjustment in horizontal plane; Connecting seat (3) is arranged on the horizontal adjustment structure (2) and is used for installing the horizontal adjustment structure (2); Lifting structure (4) is arranged on the connecting seat (3) and is used for driving the connecting seat (3) to carry out lifting adjustment; Fixed support (5) is arranged on the connecting seat (3) and is used for installing the lifting structure (4); 2. The wafer boat lift handling mechanism according to claim 1, wherein, Reinforcing structure (6) includes at least one reinforcing rod (61), the reinforcing rod (61) is obliquely arranged between the fixed support (5) and the connecting seat (3), and both ends of the reinforcing rod (61) are provided with hinged members for forming hinged connection with the fixed support (5) / the connecting seat (3), one of the two hinged members is arranged as a fixed member (62) that cannot move in position, and the other is arranged as a movable member (63) that can move in horizontal direction.

3. The wafer boat lift handling mechanism according to claim 2, wherein The reinforcing rod (61) in the reinforcing structure (6) is arranged as two, and the two reinforcing rods (61) are staggered with each other.

4. The wafer boat lift handling mechanism according to claim 3, wherein The two movable members (63) in the reinforcing structure (6) are located on the same side of the two reinforcing rods (61) staggered in vertical direction, and the two fixed members (62) are located on the other side of the two reinforcing rods (61) staggered in vertical direction.

5. The wafer boat lift handling mechanism according to claim 4, wherein Two reinforcing rods (61) are provided with a pin shaft (7) at the position staggered with each other, so as to hinge the two reinforcing rods (61) with each other.

6. The wafer boat lift handling mechanism of claim 5, wherein, The fixed member (62) is arranged as a fixed foot seat, and the fixed foot seat corresponding to the two reinforcing rods (61) is fixedly connected with the fixed support (5) and the connecting seat (3) respectively;The movable member (63) is arranged as a sliding foot seat, and the lower surface of the fixed support (5) and the upper edge of the connecting seat (3) are both fixedly provided with a sliding rail (8) slidingly matched with the sliding foot seat.

7. The wafer boat lift handling mechanism of claim 1, wherein, The end of the sliding rail (8) is fixedly provided with a buffer baffle (81).

8. The wafer boat lift handling mechanism according to claim 7, wherein, The horizontal adjustment structure (2) includes a translation member (21) for driving the material taking arm (1) to move horizontally, and a rotating member (22) for driving the translation member (21) to rotate. The translation member (21) includes: A guide cover (211) is provided with a guide channel inside along the horizontal direction, and the guide channel penetrates through the bottom of the guide cover (211); A lead screw (212) is rotatably connected to the inside of the guide cover (211) along the length direction of the guide cover (211); A driving part (213) is arranged at the end of the lead screw (212) and can output rotary power to drive the lead screw (212) to rotate; A connecting flange (214) is threadedly connected with the lead screw (212), and the connecting flange (214) extends out of the bottom of the guide channel and is fixedly connected with the material taking arm (1), and the connecting flange (214) can move along the length direction of the guide channel.

9. The wafer boat lift handling mechanism of claim 8, wherein, The rotating member (22) is arranged as a rotating motor (221), a body of the rotating motor (221) is fixedly connected with the connecting seat (3), and an output end of the rotating motor (221) is fixedly connected with the top of the guide cover (211).

10. A delivery device characterized by: The wafer carrier plate lifting and carrying mechanism has the advantages of simple structure, convenient operation, high efficiency, and the like.

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