Clamping accessory
By designing the clamping head and clamping seat structure of the clamping fixture and rotating linkage components, the contact area and friction are increased, solving the problems of unstable wafer clamping and inability to clamp two layers at the same time, thus realizing an efficient and stable wafer cleaning process.
Patent Information
- Application Number
- CN202423163456.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-20
- Publication Date
- 2025-12-30
- Estimated Expiration
- 2034-12-20
AI Technical Summary
Existing wafer clamping accessories cause wafer instability and easy detachment when friction is insufficient, and cannot clamp double-layer wafers at the same time, affecting cleaning efficiency and stability.
A clamping accessory was designed, including a clamp and a rotation linkage component. The clamp consists of a clamp base and a clamp head. The clamp head has an arc-shaped groove and a slope structure. It is made of PFA or ETFE to increase the contact area and friction. The clamp head fits seamlessly with the edge of the wafer, and can clamp two layers of wafers at the same time.
This improves the stability and balanced stress distribution of wafers during the rotary cleaning process, reduces the risk of wafer detachment, and increases production efficiency.
Smart Images
Figure CN223743640U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to wafer processing auxiliary tool field especially relates to a clamping accessory. BACKGROUND
[0002] With the miniaturization of transistors, wafer manufacturing processes are increasingly complex, and the requirements for semiconductor wet cleaning technology are also increasingly high. Almost every process before and after chip manufacturing needs to be cleaned to remove surface contaminants and ensure the cleanliness of the wafer surface. Therefore, the stability of wafer clamping and the performance of friction resistance are relatively high, and the uneven clamping stress may cause damage to the wafer. Insufficient friction during clamping may also cause the wafer to fall off due to unstable clamping. In the wafer cleaning process, liquid splashing from the clamping end may also cause incomplete cleaning of the wafer. In addition, the stress on the clamping mold during high-speed rotation in the cleaning process also seriously affects the stress on the outer edge of the wafer.
[0003] In addition, the current clamping accessory for wafers is often designed for a single wafer thickness. In actual production processes, double-layer wafers need to be clamped simultaneously to improve efficiency or meet technical requirements. The current clamping accessory cannot be applied in such scenarios. SUMMARY
[0004] In view of the insufficient friction of the current wafer clamping process and the insufficient overall stability caused by the rotary linkage during operation, the utility model provides a clamping device that can ensure balanced stress on the wafer during rotary linkage and has high stability.
[0005] To achieve the above-mentioned purpose, the embodiments of the utility model adopt the following technical solutions:
[0006] A clamping accessory includes a clamp and a rotary linkage component. The clamp includes a clamp seat and a clamp head, and the clamp head includes three parts: an upper end with a slope, a middle part with a circular arc slot, and a lower end with a downward slope. The clamp seat is connected to the rotary linkage component along the central axis. The rotary linkage component includes a connecting column, and the central axis of the connecting column is aligned with the central axis of the clamp seat. A gear rotating piece is fitted on the connecting column, and a rotary handle is provided on the gear rotating piece offset from the axis.
[0007] According to one aspect of the utility model, the circular arc slot in the middle part is seamlessly fitted with the edge of the wafer.
[0008] According to one aspect of the utility model, the top part of the upper end is horizontal, the circular side of the top part of the upper end is downwardly tapered, and the slope extends to the bottom part of the upper end along the central axis.
[0009] According to one aspect of the utility model, the slope, namely the included angle with the bottom horizontal line is alpha, the range of alpha is 30-70 degrees.
[0010] According to one aspect of the utility model, the upper end bottom part and the middle part top part are connected.
[0011] According to one aspect of the utility model, the clamping seat is connected with the clamping head, and the clamping seat top part and the clamping head lower end bottom part are connected.
[0012] According to one aspect of the utility model, the middle part height with the circular arc clamping groove is 1.4-1.6mm.
[0013] According to one aspect of the utility model, the clamping seat is cylindrical, the clamping head cross section is circular, and the clamping head is located on one side of the clamping seat upper end, deviating from the central axis.
[0014] According to one aspect of the utility model, the clamping head lower end bottom part one side and the clamping seat outer edge side are connected, and the clamping head lower end bottom part other side extends to the clamping seat other side outer edge, and the shape is inclined and slides down.
[0015] According to one aspect of the utility model, the clamping head and the clamping seat material are one of PFA or ETFE.
[0016] The utility model discloses the advantages of implementation: through the clamping head with greater contact area and friction, make rotary linkage in the rotation operation can keep stability, operation is more smooth, also guarantee that wafer is not easy to fall off, and stress balance, can clamp double -layer wafer simultaneously, improve the efficiency in the production process. DRAWINGS
[0017] In order to more clearly illustrate the technical scheme in the embodiment of the utility model, the following will briefly introduce the drawing needed to be used in the embodiment, and obviously, the drawing in the following description is only some embodiments of the utility model, and for those skilled in the art, other drawings can also be obtained according to these drawings without creating creative labor.
[0018] Figure 1 It is the appearance schematic view of a kind of clamping accessory described in the utility model;
[0019] Figure 2 It is the left side view of a kind of clamping accessory described in the utility model;
[0020] Figure 3 It is the appearance schematic view of the clamping head described in the utility model;
[0021] Figure 4 It is the appearance schematic view of the clamping fixture described in the utility model;
[0022] Figure 5 This is a top view of the clamp described in this utility model;
[0023] Figure 6 This is a schematic diagram of the middle part structure with an arc-shaped slot as described in this utility model.
[0024] Reference numerals: 1. Card holder; 21. Upper end; 22. Middle part; 23. Lower end; 3. Wafer; 41. Connecting post; 42. Gear rotating component; 43. Rotating handle. Detailed Implementation
[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0026] Example 1
[0027] like Figures 1-3 As shown, a clamping accessory includes a clamp and a rotary linkage component. The clamp includes a clamp base 1 and a clamp head, with the clamp base 1 connected to the clamp head. The clamp head comprises three parts: an upper end 21 with a slope, a middle part 22 with an arc-shaped groove, and a lower end 23 with a downward slope. The clamp base 1 is aligned with the central axis of the rotary linkage component and connected at one point. The rotary linkage component includes a connecting post 41. Figure 5 As shown, the central axis of the connecting column 41 is aligned with the central axis of the card holder 1. A gear rotating part 42 is sleeved on the connecting column 41, and a rotating handle 43 is provided on the gear rotating part 42 at a position off the axis.
[0028] Example 2
[0029] like Figures 1-3 As shown, a clamping accessory includes a clamp and a rotary linkage component. The clamp includes a clamp base 1 and a clamp head, with the clamp base 1 connected to the clamp head. The clamp head comprises three parts: an upper end 21 with a slope, a middle part 22 with an arc-shaped groove, and a lower end 23 with a downward slope. The clamp base 1 is aligned with the central axis of the rotary linkage component and connected at one point. The rotary linkage component includes a connecting post 41. Figure 5 As shown, the central axis of the connecting column 41 is aligned with the central axis of the card holder 1. A gear rotating part 42 is sleeved on the connecting column 41, and a rotating handle 43 is provided on the gear rotating part 42 at a position off the axis.
[0030] In the chuck, the top portion of the upper end 21 is horizontal, and the circular side of the top portion of the upper end 21 is chamfered downwards and extends with a slope towards the central axis to the bottom portion of the upper end 21; the slope, i.e., the angle between the slope and the bottom horizontal line, is α, where α is 60 degrees. The chuck has a certain slope and a downward chamfer, which allows the liquid splashed during the cleaning process of the wafer 3 to reduce its splash height and flow back, thus achieving the cleaning purpose.
[0031] In some other implementations, α ranges from 30 to 70 degrees.
[0032] like Figure 4 As shown, the middle part 22 has an arc-shaped slot, and the slot fits seamlessly with the edge of the wafer 3. The slot has an arc-shaped structure and fits seamlessly with the edge of the wafer 3. Compared with the V-shaped structure, it greatly increases the contact area with the surface of the wafer 3. During the clamping of the wafer 3, whether it is the high-speed operation of the rotary linkage device or the clamping operation in various postures, there is a large friction force, making the wafer 3 less likely to fall off.
[0033] The bottom part of the lower end 23 is connected to the outer edge of the card holder 1 on one side, and the other side of the bottom part of the lower end 23 extends to the outer edge of the card holder 1 on the other side, forming a sloping downward shape; and the bottom part of the upper end 21 is connected to the top part of the middle part 22, and the bottom part of the middle part 22 is connected to the top part of the lower end 23.
[0034] The card holder 1 is cylindrical in shape, the card head has a circular cross-section, and the card head is located on one side of the upper end of the card holder 1, off the central axis.
[0035] The lower end 23 of the card head is connected to the outer edge of the card seat 1 on one side, and the lower end 23 of the card head extends to the outer edge of the card seat 1 on the other side, forming a sloping shape.
[0036] Example 3
[0037] like Figures 1-3 As shown, a clamping accessory includes a clamp and a rotary linkage component. The clamp includes a clamp base 1 and a clamp head, with the clamp base 1 connected to the clamp head. The clamp head comprises three parts: an upper end 21 with a slope, a middle part 22 with an arc-shaped groove, and a lower end 23 with a downward slope. The clamp base 1 is aligned with the central axis of the rotary linkage component and connected at one point. The rotary linkage component includes a connecting post 41. Figure 5 As shown, the central axis of the connecting column 41 is aligned with the central axis of the card holder 1. A gear rotating part 42 is sleeved on the connecting column 41, and a rotating handle 43 is provided on the gear rotating part 42 at a position off the axis.
[0038] like Figure 6As shown, the height of the middle part 22 with the arc-shaped slot is 1.4-1.6mm. This height allows the fixture for fixing wafer 3 to fix two wafers 3 at once, which can improve the cleaning efficiency of wafer 3 or meet special technical needs in production.
[0039] Example 4
[0040] like Figures 1-3 As shown, a clamping accessory includes a clamp and a rotary linkage component. The clamp includes a clamp base 1 and a clamp head, with the clamp base 1 connected to the clamp head. The clamp head comprises three parts: an upper end 21 with a slope, a middle part 22 with an arc-shaped groove, and a lower end 23 with a downward slope. The clamp base 1 is aligned with the central axis of the rotary linkage component and connected at one point. The rotary linkage component includes a connecting post 41. Figure 5 As shown, the central axis of the connecting column 41 is aligned with the central axis of the card holder 1. A gear rotating part 42 is sleeved on the connecting column 41, and a rotating handle 43 is provided on the gear rotating part 42 at a position off the axis.
[0041] Both the card head and the card holder 1 are made of PFA carbon fiber. The clamping device is also made of PFA carbon fiber, with the following properties: elongation at break (%): 280-400; tensile strength (MPa): 28-31; flexural modulus (MPa): 648-682; tensile modulus (Young's value) (MPa): 500-600; hardness (Shore D): D55-60; coefficient of friction: 0.2. ETFE properties are: elongation at break (%): 420-460; tensile strength (MPa): 42-47; flexural modulus (MPa): 883-1179; tensile modulus (Young's value) (MPa): 586-655; hardness (Shore D): D75; coefficient of friction: 0.06. PFA carbon fiber has a higher coefficient of friction than ETFE, meaning higher frictional force, making it less likely for the wafer 3 held in the clamp to fall off during the cleaning process.
[0042] In some other embodiments, the card head and the card holder 1 can also be made of ETFE, which has higher flexibility, higher strength and hardness than PFA, and is also cheaper.
[0043] The advantages of this utility model are: the clamping head with a larger contact area and friction with the wafer 3 enables the rotary linkage device to maintain stability during rotation and make the operation smoother; it also ensures that the wafer 3 is not easy to fall off and that the force is balanced; it can clamp two layers of wafer 3 at the same time, improving the efficiency of the production process.
[0044] The above merely describes a specific implementation of the present application, but the protection scope of the present application is not limited thereto, any person skilled in the art can easily think of changes or replacements within the technical range disclosed by the present application, which should be covered in the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.
Claims
1. A clamping fitting, characterized in that, The clamping accessory comprises a clamp and a rotating linkage component; the clamp comprises a clamp seat and a clamp head, the clamp seat is connected with the clamp head, the clamp head comprises three parts: an upper end head with a slope, an intermediate part with a circular-arc-shaped clamp slot, and a lower end part with a lower sliding slope; the clamp seat is connected with the rotating linkage component in alignment with the central axis; the rotating linkage component comprises a connecting column, the central axis of the connecting column is connected with the central axis of the clamp seat in alignment, a gear rotating piece is sleeved on the connecting column, and a rotating handle is arranged on the gear rotating piece in deviation from the axis.
2. The clamp fitting according to claim 1, characterized in that In the intermediate part with the circular-arc-shaped clamp slot, the clamp slot is seamlessly fitted with the wafer edge.
3. The clamp fitting of claim 1, wherein, The top part of the upper end head is horizontal, the circular side of the top part of the upper end head is downwardly chamfered and extends to the bottom part of the upper end head in a slope towards the central axis.
4. The clamp fitting of claim 1, wherein, The slope is an angle α with the horizontal line of the bottom part, and the range of α is 30 to 70 degrees.
5. The clamp fitting of claim 1, wherein, The bottom part of the upper end head is connected with the top part of the intermediate part in one place.
6. The clamp fitting of claim 1, wherein, The clamp seat is connected with the clamp head, that is, the top part of the clamp seat is connected with the bottom part of the lower end part of the clamp head in one place.
7. The clamp fitting of claim 1, wherein The height of the intermediate part with the circular-arc-shaped clamp slot is 1.4-1.6 mm.
8. The clamp fitting of claim 7, wherein, The clamp seat is in a cylindrical shape, the clamp head is in a circular shape in a transverse section, and the clamp head is located on one side of the upper end of the clamp seat in deviation from the central axis.
9. The clamp fitting of claim 7, wherein, One side of the bottom part of the lower end part of the clamp head is connected with the outer edge side of the clamp seat in one place, and the other side of the bottom part of the lower end part of the clamp head extends to the other outer edge of the clamp seat in a slope sliding shape.
10. The clamp fitting according to any one of claims 1 to 7, characterized in that The clamp head and the clamp seat are made of one of PFA and ETFE.