Quartz tube cleaning machine

Abstract

The utility model relates to a quartz tube cleaning machine which comprises a machine frame, a protective bin body arranged at the top of the machine frame, a protective cover connected with the top of the protective bin body and capable of being opened and closed, a heating chamber arranged in the protective bin body, a cover plate arranged at the top of the heating chamber, and a fixing seat arranged in the heating chamber and used for placing a quartz tube. The fixed seat is provided with an arc-shaped groove matched with the corresponding position of the quartz tube; heating pipes are arranged in the heating chamber and surround the periphery of the fixed seat; an exhaust fan is fixed to the outer side of the protection bin body, and an air inlet of the exhaust fan is connected to the interior of the heating chamber through a pipeline. According to the utility model, the quartz tube is heated at high temperature, so that coating powder deposited on the inner wall of the quartz tube is gasified, and gas volatilized by heating is exhausted outdoors through the exhaust fan, so that the aim of cleaning the inner wall of the quartz tube is fulfilled, the coating process can be smoothly carried out, and the production quality of coated products is ensured.

Description

TECHNICAL FIELD

[0001] The utility model relates to vacuum coating machine quartz tube cleaning technical field, specifically relates to quartz tube cleaning machine. BACKGROUND

[0002] The electronic paper display (EPD) production process needs to use the vacuum coating machine to carry out the coating treatment to the EPD, and the vacuum coating machine heating chamber and the deposition chamber are connected by the quartz tube, after using the coating machine for many times, the quartz tube inner wall will deposit the coating powder (poly-p-xylylene), and the coating powder deposited on the inner wall can cause the product film thickness to be uneven after coating, influence the coating quality, and the deposit can also reduce the quartz tube inner diameter, thereby reducing the gas flow, and influence the production efficiency.If the deposition layer peels off, it can cause pollution and affect the product quality.Therefore, the quartz tube of the vacuum coating machine needs to be cleaned regularly. SUMMARY

[0003] The utility model discloses a quartz tube cleaning machine which overcomes the shortcomings of the prior art.

[0004] To achieve the above object, the utility model adopts the following technical scheme:

[0005] The quartz tube cleaning machine comprises a rack, a protective bin body is arranged at the top of the rack, an openable protective cover is connected to the top of the protective bin body, a heating chamber is arranged in the protective bin body, a cover plate is arranged at the top of the heating chamber, a fixing seat for placing the quartz tube is arranged in the heating chamber, the fixing seat is provided with an arc-shaped groove matched with the corresponding position of the quartz tube, heating pipes are arranged around the four sides of the fixing seat in the heating chamber, a ventilating fan is fixed to the outside of the protective bin body, and the air inlet of the ventilating fan is connected to the inside of the heating chamber through a pipeline.

[0006] Further, rubber antiskid foot cups are arranged at the four corners of the bottom of the rack.

[0007] Further, the utility model further comprises a display controller which is electrically connected with the heating pipes and the ventilating fan.

[0008] Further, the fixing seat is more than two, and each fixing seat is arranged along a straight line.

[0009] The utility model adopts the above technical scheme, and has the beneficial effects that the quartz tube is heated at high temperature, the coating powder deposited on the inner wall of the quartz tube is gasified, the heated and volatilized gas is discharged to the outdoor through the ventilating fan, the purpose of cleaning the inner wall of the quartz tube is achieved, the coating process can be smoothly carried out, and the production quality of the coating product is ensured. BRIEF DESCRIPTION OF DRAWINGS

[0010] The utility model will be further explained in detail in connection with the drawings and specific embodiments:

[0011] Fig. 1 The structure schematic diagram of the utility model for removing the protective cover and the cover plate is shown in the figure;

[0012] Fig. 2 The structure schematic diagram of the utility model for removing the protective cover is shown in the figure;

[0013] Fig. 3 The overall structure schematic diagram of the utility model is shown in the figure. DETAILED DESCRIPTION

[0014] As Figs. 1-3 shown, the utility model quartz tube cleaning machine, including frame 1, frame 1's four around has the protective plate. Frame 1's top is equipped with the protective bin 2, and the protective bin 2's top is connected with the protective cover 3 that can open and close, and the protective cover 3 adopts the flip type opening structure.

[0015] The protective bin 2 inside is equipped with heating chamber 4, and the heating chamber 4 top is equipped with the cover plate 5, and the cover plate 5 adopts simple lid structure, and the heating chamber 4 inside is equipped with the fixing seat 6 for placing quartz tube 11, and the fixing seat 6 is two or more, and each fixing seat 6 is sequentially spaced along a straight line. Each fixing seat 6 has the arc-shaped groove respectively corresponding with the position of quartz tube 11.

[0016] The heating chamber 4 is closed, and the heating chamber 4 inside is respectively equipped with heating tube 7 around the four around of fixing seat 6, to ensure the uniformity of heating;The protective bin 2's outside is fixed with the exhaust fan 10, and the air inlet of exhaust fan 10 is connected to the inside of heating chamber 4 through pipeline, to discharge the film-coated powder gasification by heat from heating chamber 4.

[0017] The bottom four corners of frame 1 are respectively equipped with rubber antiskid foot cup 8, to ensure the stability of the whole cleaning machine.

[0018] The utility model also includes display controller 9, and display controller 9 is electrically connected with heating tube 7 and exhaust fan 10, and the working of heating tube 7 and exhaust fan 10 is controlled through display controller 9.

[0019] The heating step of the utility model:

[0020] 1, preheating stage: set initial temperature, and the temperature of heating is set as 100 °C. Turn on the heating power supply, and the quartz tube 11 is heated at the temperature increasing rate of not more than 10 °C / min. When the temperature in the heating chamber 4 reaches 100 °C, maintain this temperature for 30 minutes, to ensure that the quartz tube 11 is uniformly preheated, and reduce thermal stress.

[0021] 2. Heating stage: gradually adjust the temperature to the gasification temperature of the parylene, usually between 600°C and 650°C. Continue to increase the temperature at a rate of no more than 10°C / min to avoid rapid heating causing damage to the quartz tube 11. After reaching the gasification temperature, maintain this temperature for 1 to 2 hours to ensure that the parylene is fully gasified and detached from the surface of the quartz tube 11.

[0022] 3. After turning on the heating, the exhaust fan 10 needs to be turned on, the parylene begins to gasify, and is discharged through the exhaust system of the heating chamber 4. Ensure that the exhaust system of the heating furnace is working properly to effectively discharge the gasified parylene and maintain air circulation in the operating area.

[0023] 4. Cooling stage: after the high-temperature cleaning is completed, turn off the heating power, the quartz tube 11 begins to cool naturally, monitor the temperature of the quartz tube 11 until it cools to room temperature, and then take it out for subsequent operation.

[0024] Temperature control:

[0025] 1. Use the thermocouple connected to the heating tube 7 to monitor the temperature change in real time, and the display controller displays the temperature of the heating chamber 4 and the heating time, etc.

[0026] 2. According to the reading of the thermocouple, adjust the heating power through the PID controller to maintain the set temperature.

[0027] 3. Set an upper temperature limit, which will automatically cut off the heating power once exceeded to prevent overheating. Install an alarm system to alert when the temperature is abnormal to ensure the safety of the operator.

[0028] The above describes the specific implementation manner of the present application, but those skilled in the art should understand that this is only an example, and those skilled in the art can make various changes or modifications to this implementation manner without departing from the principles and essence of the present application, but these changes and modifications all fall within the protection scope of the present application.

Claims

1. A quartz tube cleaning machine comprising a frame, characterised in that: The top of the rack is provided with a protective bin body, the top of the protective bin body is connected with an openable protective cover, the inside of the protective bin body is provided with a heating chamber, the top of the heating chamber is provided with a cover plate, the inside of the heating chamber is provided with a fixing seat for placing a quartz tube, the fixing seat is provided with an arc-shaped groove which is matched with the corresponding position of the quartz tube; the inside of the heating chamber is respectively provided with a heating pipe around the four sides of the fixing seat; the outside of the protective bin body is fixedly provided with an exhaust fan, and the air inlet of the exhaust fan is connected to the inside of the heating chamber through a pipeline.

2. The quartz tube cleaning machine according to claim 1, characterized by: The bottom of the rack is respectively provided with rubber antiskid foot cups at four corners.

3. The quartz tube cleaning machine according to claim 1, characterized by: The display controller is further included, and the display controller is electrically connected with the heating pipe and the exhaust fan.

4. The quartz tube cleaning machine according to claim 1, characterized by: The fixing seat is more than two, and each fixing seat is arranged along a straight line.

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