Wafer grinding and polishing machine facilitating replacement of grinding and polishing consumables

Abstract

The utility model provides a wafer grinding and polishing machine convenient to replace grinding and polishing consumables, which belongs to the technical field of wafer grinding and polishing machines, and comprises a grinding and polishing mechanism, a machine body, a main shaft fixedly mounted at the output end of the machine body, a mounting disc fixedly mounted at the end part of the main shaft, and a grinding disc clamped on the surface of the mounting disc, and the replacement mechanism comprises a replacement assembly used for clamping the grinding disc and a limiting assembly used for improving the clamping effect of the replacement assembly, and the replacement assembly comprises two clamping plates and two mounting blocks fixedly mounted at the top of the grinding disc and matched with the clamping plates for use. The replacement assembly is matched with the limiting assembly, the grinding disc can be conveniently replaced, the replacement efficiency of the grinding disc is improved, the problems that when the grinding disc on a traditional wafer grinding and polishing machine is replaced, corresponding bolts or nuts need to be disassembled and assembled, the process is tedious, and the replacement efficiency is low are solved, and therefore the replacement efficiency of the grinding disc is improved, and the replacement cost is reduced. And the overall use efficiency of the wafer grinding and polishing machine is also improved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to wafer polishing machine technical field, concretely relates to a wafer polishing machine convenient to replace polishing consumables. BACKGROUND

[0002] Wafer polishing machine is the key equipment in the field of semiconductor manufacturing. It is mainly used for precise machining of wafers, removing the damage layer and unevenness on the surface of the wafer after cutting through the grinding disc and grinding liquid, realizing flattening; further reducing the surface roughness by using polishing pad and polishing liquid, so that the wafer reaches the atomic level flatness, meeting the stringent requirements of chip manufacturing on wafer surface quality, and ensuring the smooth progress of subsequent chip manufacturing process.

[0003] In the use process of wafer polishing machine, the grinding disc will be worn out due to continuous work, so it needs to be replaced regularly. At present, the grinding disc is mostly installed on the spindle of the wafer polishing machine through bolts or nuts. This installation method makes it necessary to disassemble and reinstall the corresponding bolts and nuts when replacing the grinding disc. This process is relatively cumbersome, not only consuming time and effort, but also greatly reducing the replacement efficiency of the grinding disc and affecting the overall production progress. UTILITY MODEL CONTENTS

[0004] The utility model aims at providing a wafer polishing machine convenient to replace polishing consumables, aiming at solving the problems raised in the above background technology.

[0005] To achieve the above purpose, the utility model provides the following technical scheme:

[0006] A wafer polishing machine convenient to replace polishing consumables, comprising,

[0007] The polishing mechanism comprises a machine body, a spindle fixedly installed at the output end of the machine body, an installation disc fixedly installed at the end of the spindle, and a grinding disc clamped on the surface of the installation disc.

[0008] The replacement mechanism comprises a replacement assembly for clamping the grinding disc, and a limiting assembly for improving the clamping effect of the replacement assembly.

[0009] As a preferred scheme of the utility model, the replacement assembly comprises two clamping plates, two installation blocks fixedly installed on the top of the grinding disc and cooperating with the clamping plates, a plurality of transmission rods hingedly connected to the top of the clamping plates, two movable hinges for movably connecting the transmission rods, two threaded sleeves fixedly installed on the surface of the movable hinges, and a screw rod rotatably installed on the top of the installation disc through a vertical plate and threadedly connected with the two threaded sleeves.

[0010] As a preferred scheme of the utility model, the top of the mounting disc is provided with two air slots for matching the use of clamping plates, and the inner cavity of the air slot is fixedly installed with a positioning rod.

[0011] As a preferred scheme of the utility model, the bottom of the mounting disc is provided with two installation grooves for matching the use of installation blocks, and the surface of the installation block is provided with a clamping groove for matching the use of the clamping plate.

[0012] As a preferred scheme of the utility model, the top of the mounting disc is fixedly installed with two sliding rails, the bottom of the movable hinge is fixedly installed with a sliding block, and the sliding block is located in the sliding groove of the sliding rail, and the surface of the main shaft is provided with a hole for matching the use of the screw rod.

[0013] As a preferred scheme of the utility model, the limiting assembly comprises a gear fixedly installed at the end of the screw rod, an operation handle fixedly installed on the surface of the gear, a box fixedly installed on the surface of the vertical plate, two springs fixedly installed in the inner cavity of the box, and a fan-shaped internal tooth ring fixedly installed at the end face of the spring and engaged with the gear.

[0014] As a preferred scheme of the utility model, the surface of the fan-shaped internal tooth ring is fixedly installed with a convex rod, and the end of the convex rod extends to the outside of the box.

[0015] Compared with the prior art, the beneficial effects of the utility model are that the replacement assembly and the limiting assembly are matched with each other, the grinding disc can be conveniently replaced, the replacement efficiency of the grinding disc is improved, the problem that the corresponding bolt or nut needs to be disassembled and assembled when the grinding disc on the traditional wafer polishing machine is replaced, the process is complicated, and the replacement efficiency is low is solved, thereby the replacement efficiency of the grinding disc is improved, and the overall use efficiency of the wafer polishing machine is also improved. BRIEF DESCRIPTION OF DRAWINGS

[0016] In order to more clearly illustrate the technical scheme of the embodiments of the utility model, the drawings needed to be used in the embodiment description will be briefly introduced below, and obviously, the drawings in the following description are only some embodiments of the utility model, and those skilled in the art can also obtain other drawings according to these drawings without paying creative labor. Among them:

[0017] Figure 1 It is the overall structure schematic view of the utility model;

[0018] Figure 2 It is the replacement mechanism structure schematic view of the utility model;

[0019] Figure 3 It is the cross-section structure schematic view of the utility model;

[0020] Figure 4The utility model discloses a replacement component structure schematic view.

[0021] Figure 5 The utility model discloses a limiting component structure schematic view.

[0022] In the drawing: 100, polishing mechanism;101, machine body;102, main shaft;103, mounting disc;104, grinding disc;200, replacement mechanism;201, replacement component;201a, clamping plate;201b, mounting block;201c, transmission rod;201d, threaded sleeve;201e, screw;202, limiting component;202a, gear;202b, operating handle;202c, box;202d, spring;202e, fan-shaped inner tooth ring. DETAILED DESCRIPTION

[0023] In order to make the above-mentioned purpose, features and advantages of the utility model more apparent, easy to understand, the specific implementation of the utility model is explained in detail below with the drawings of the specification.

[0024] In the following description, a lot of specific details are set forth in order to fully understand the utility model, but the utility model can also be implemented in other ways different from the description, and those skilled in the art can make similar generalization without departing from the connotation of the utility model, therefore the utility model is not limited by the specific embodiments disclosed below.

[0025] Secondly, the "one embodiment" or "embodiment" referred to here means that specific features, structures or characteristics can be included in at least one implementation of the utility model. In this specification, "in one embodiment" does not mean the same embodiment, nor is it an independent or alternative embodiment that excludes other embodiments.

[0026] EMBODIMENT

[0027] REFERENCE Figures 1-5 For the embodiment of the utility model, the embodiment provides a wafer polishing machine convenient for replacing polishing consumables, which comprises,

[0028] The polishing mechanism 100 comprises a machine body 101, a main shaft 102 fixedly installed at the output end of the machine body 101, a mounting disc 103 fixedly installed at the end of the main shaft 102 and a grinding disc 104 clamped on the surface of the mounting disc 103.

[0029] The replacement mechanism 200 comprises a replacement component 201 for clamping the grinding disc 104 and a limiting component 202 for improving the clamping effect of the replacement component 201.

[0030] The replacement assembly 201 cooperates with the limiting assembly 202, so that the grinding disc 104 can be conveniently replaced, the replacement efficiency of the grinding disc 104 is improved, the problem that the traditional wafer polishing machine needs to disassemble and assemble corresponding bolts or nuts during replacement of the grinding disc is solved, the process is complicated, the replacement efficiency is low, and thus the replacement efficiency of the grinding disc is improved, and the overall use efficiency of the wafer polishing machine is improved.

[0031] Specifically, the replacement assembly 201 comprises two clamping plates 201a, two mounting blocks 201b fixedly installed on the top of the grinding disc 104 and used in cooperation with the clamping plates 201a, a plurality of transmission rods 201c hingedly installed on the top of the clamping plates 201a, two movable hinges used for movably connecting the transmission rods 201c, two threaded sleeves 201d fixedly installed on the surface of the movable hinges, and a screw rod 201e rotatably installed on the top of the mounting disc 103 and threadedly connected with the two threaded sleeves 201d.

[0032] The screw rod 201e is a bidirectional screw rod, which can drive the two threaded sleeves 201d to move towards or away from each other. When the two threaded sleeves 201d move towards each other, the grinding disc 104 can be installed and clamped. When the two threaded sleeves 201d move away from each other, the grinding disc 104 can be disassembled, thereby facilitating replacement of the grinding disc 104 and ensuring the use performance.

[0033] Further, the top of the mounting disc 103 is provided with two air slots for cooperation with the clamping plates 201a, and the inner cavities of the air slots are fixedly installed with positioning rods. The surface of the clamping plate 201a is provided with positioning holes for cooperation with the positioning rods.

[0034] The positioning rods and the positioning holes are used to limit the clamping plate 201a, improve the stability of the clamping plate 201a during movement, and avoid deviation.

[0035] Preferably, the bottom of the mounting disc 103 is provided with two mounting grooves for cooperation with the mounting blocks 201b, and the surface of the mounting block 201b is provided with a clamping groove for cooperation with the clamping plate 201a.

[0036] The mounting grooves are used for inserting the mounting blocks 201b to position and install the grinding disc 104, and the clamping groove is used for clamping the end of the clamping plate 201a to limit the mounting block 201b, thereby clamping and installing the grinding disc 104.

[0037] Further, the top of the mounting disc 103 is fixed with two sliding rails, the bottom of the movable hinge is fixedly installed with a sliding block, the sliding block is located in the sliding groove of the sliding rail, and the surface of the main shaft 102 is provided with a hole for cooperation with the screw rod 201e.

[0038] The cooperation between the sliding rail and the sliding block is used for limiting the movement of the threaded sleeve 201d, improving the movement stability of the clamping plate 201a pushed by the transmission rod 201c, and enabling the clamping plate 201a to be accurately clamped in the clamping groove on the mounting block 201b.

[0039] Specifically, the limiting assembly 202 comprises a gear 202a fixedly installed at the end of the screw rod 201e, an operation handle 202b fixedly installed on the surface of the gear 202a, a box 202c fixedly installed on the surface of the vertical plate, two springs 202d fixedly installed in the inner cavity of the box 202c, and a fan-shaped inner tooth ring 202e fixedly installed at the end surface of the spring 202d and engaged with the gear 202a.

[0040] The fan-shaped inner tooth ring 202e is located in the interior of the box 202c and is moved upward under the elastic force of the spring 202d, so that the fan-shaped inner tooth ring 202e is clamped and limited to the gear 202a, the stability of the gear 202a is improved, the rotation of the screw rod 201e is further prevented, and the clamping stability of the grinding disc 104 is improved.

[0041] Further, the surface of the fan-shaped inner tooth ring 202e is fixedly installed with a protruding rod, and the end of the protruding rod extends to the outside of the box 202c.

[0042] The surface of the box 202c is provided with a vertical groove matched with the upward and downward movement of the protruding rod, and the protruding rod is used for moving the fan-shaped inner tooth ring 202e downward, so that the fan-shaped inner tooth ring 202e is separated from the surface of the gear 202a, the screw rod 201e is conveniently rotated, and the grinding disc 104 is further conveniently replaced.

[0043] In use, when the grinding disc 104 needs to be replaced, the fan-shaped inner tooth ring 202e is first moved downward by the protruding rod, so that the fan-shaped inner tooth ring 202e is separated from the surface of the gear 202a, the gear 202a is rotated by the operation handle 202b, the gear 202a drives the screw rod 201e to rotate, the screw rod 201e drives the two threaded sleeves 201d to move away from each other, the transmission rod 201c is driven to rotate by the movable hinge, the threaded sleeve 201d pulls the clamping plate 201a, so that the end of the clamping plate 201a is separated from the interior of the clamping groove on the mounting block 201b, and the grinding disc 104 is disassembled at this time.

[0044] The new grinding disc 104 is installed at the bottom of the mounting disc 103, so that the mounting block 201b on the grinding disc 104 is inserted into the mounting groove at the bottom of the mounting disc 103, after the mounting block 201b is inserted into place, the clamping groove on the mounting block 201b is located at the end of the clamping plate 201a, ensuring that the fan-shaped inner tooth ring 202e is disengaged from the surface of the gear 202a, by operating the handle 202b to drive the gear 202a, the gear 202a drives the screw rod 201e to rotate, the screw rod 201e drives the two threaded sleeves 201d to move towards each other, and then drives the transmission rod 201c to push the clamping plate 201a, so that the end of the clamping plate 201a is clamped inside the clamping groove on the mounting block 201b, finally the protruding rod is loosened, the fan-shaped inner tooth ring 202e is opened under the elastic force of the spring 202d, and is clamped with the surface of the gear 202a, completing the replacement of the grinding disc 104.

[0045] In summary, the replacement assembly 201 and the limiting assembly 202 cooperate with each other to conveniently replace the grinding disc 104, improve the replacement efficiency of the grinding disc 104, solve the problem that in the traditional wafer grinding and polishing machine, the corresponding bolts or nuts need to be disassembled and assembled when the grinding disc is replaced, the process is complicated, and the replacement efficiency is low, thereby improving the replacement efficiency of the grinding disc, and improving the overall use efficiency of the wafer grinding and polishing machine.

[0046] Importantly, it should be noted that the constructions and arrangements of the present application shown in the various exemplary embodiments are merely illustrative. Although only a few embodiments have been described in detail in this disclosure, those skilled in the art who review this disclosure will readily appreciate that many modifications are possible (e.g., variations in sizes, dimensions, structures, shapes and proportions of the various elements, values of parameters (e.g., temperatures, pressures, etc.), mounting arrangements, use of materials, colors, orientations, etc.) using no more than the common general knowledge of the art to which this application pertains. For example, elements shown as integrally formed can be constructed of multiple parts or elements, the position of elements can be inverted or otherwise changed, and the nature or number of discrete elements or positions can be varied or changed. Accordingly, all such modifications are intended to be included within the scope of the present application. The order or sequence of any process or method steps can be changed or re-sequenced without departing from the scope of the application. In the claims, any "means plus function" clause is intended to cover the structures described herein as performing the recited function and not only structural equivalents but also equivalent structures. Other substitutions, modifications, changes, and omissions can be made in the design, operating conditions, and arrangement of the exemplary embodiments without departing from the scope of the present application. Accordingly, the present application is not limited to particular embodiments, but extends to various modifications that nevertheless fall within the scope of the appended claims.

[0047] Furthermore, in the interest of providing a concise description of illustrative embodiments, not all features of an actual implementation can be described (i.e., those pertaining to the

[0048] It will be appreciated that in the development of any actual implementation, as in any engineering or design project, numerous implementation-specific decisions can be made. Such development efforts might be complex and time-consuming, but would nevertheless be a routine undertaking for those of ordinary skill in the art having the benefit of this disclosure.

[0049] It should be noted that the above-mentioned embodiments are only used to illustrate the technical solutions of the present application, not limit the present application. Although the present application has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solutions of the present application can be modified or equivalently replaced without departing from the spirit and scope of the present application, and they should be covered in the scope of the claims of the present application.

Claims

1. A wafer polishing machine with convenient replacement of polishing consumables, characterized in that: Including, The polishing mechanism (100) comprises a body (101), a main shaft (102) fixedly installed at the output end of the body (101), a mounting disc (103) fixedly installed at the end of the main shaft (102), and a grinding disc (104) clamped on the surface of the mounting disc (103); The replacement mechanism (200) comprises a replacement assembly (201) for clamping the grinding disc (104), and a limiting assembly (202) for improving the clamping effect of the replacement assembly (201).

2. The wafer polishing machine with easily replaceable polishing consumables of claim 1, wherein: The replacement assembly (201) comprises two clamping plates (201a), two mounting blocks (201b) fixedly installed on the top of the grinding disc (104) and matched with the clamping plates (201a), a plurality of transmission rods (201c) hingedly connected to the top of the clamping plates (201a), two movable hinges for movably connecting the connecting portions of the transmission rods (201c), two threaded sleeves (201d) fixedly installed on the surface of the movable hinges, and a screw rod (201e) rotatably installed on the top of the mounting disc (103) through a vertical plate and threadedly connected with the two threaded sleeves (201d).

3. The wafer polishing machine with easily replaceable polishing consumables of claim 2, wherein: The top of the mounting disc (103) is provided with two air slots matched with the clamping plates (201a), and a positioning rod is fixedly installed in the inner cavity of the air slot.

4. The wafer polishing machine with easily replaceable polishing consumables of claim 3, wherein: The bottom of the mounting disc (103) is provided with two installation grooves matched with the mounting blocks (201b), and the surface of the mounting block (201b) is provided with a clamping groove matched with the clamping plate (201a).

5. The wafer polishing machine with easily replaceable polishing consumables of claim 4, wherein: The top of the mounting disc (103) is fixedly provided with two sliding rails, the bottom of the movable hinge is fixedly installed with a sliding block, the sliding block is located in the sliding groove of the sliding rail, and the surface of the main shaft (102) is provided with a hole matched with the screw rod (201e).

6. The wafer polishing machine with easily replaceable polishing consumables of claim 5, wherein: The limiting assembly (202) comprises a gear (202a) fixedly installed at the end of the screw rod (201e), an operation handle (202b) fixedly installed on the surface of the gear (202a), a box body (202c) fixedly installed on the surface of the vertical plate, two springs (202d) fixedly installed in the inner cavity of the box body (202c), and a fan-shaped internal tooth ring (202e) fixedly installed at the end face of the spring (202d) and engaged with the gear (202a).

7. The wafer polishing machine with easily replaceable polishing consumables of claim 6, wherein: The surface of the fan-shaped internal tooth ring (202e) is fixedly installed with a convex rod, and the end portion of the convex rod extends to the outside of the box body (202c).

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