Installation and adjustment device and detection equipment

Abstract

The embodiment of the utility model provides a mounting and adjusting device and detection equipment, which are used for mounting and adjusting a linear array camera and a linear laser lens of the detection equipment, and comprise a bottom plate, a translation sliding table, a linear array camera adapter, a linear laser lens adapter and a linear laser lens adjusting piece, the line-scan digital camera collects an image below the line-scan digital camera through a lens opening; the translation sliding table is provided with a translation sliding block capable of translating along the length direction of the lens opening; the line-scan digital camera adapter is used for mounting a line-scan digital camera and is fixedly connected with the translation sliding block, so that the line-scan digital camera can translate along with the translation sliding block; the line laser lens adapter is arranged at the bottom of the bottom plate and is used for mounting the line laser lens adjusting part; and the line laser lens adjusting part is obliquely mounted at the bottom of the line laser lens adapter and is used for rotatably mounting the line laser lens, so that the line laser emitted by the line laser lens is irradiated towards the visual field of the line-scan digital camera, and the emergent angle of the line laser emitted by the line laser lens is adjusted.

Description

Technical Field

[0001] This utility model relates to the field of machine vision technology, and in particular to an assembly and adjustment device and a testing equipment. Background Technology

[0002] In industrial production, inspection equipment is commonly used to detect defects in workpieces to ensure their quality. For example, defect detection devices for silicon wafers. Currently, line scan cameras and line laser inspection equipment are generally used for defect detection on silicon wafers. These devices are generally classified as either integrated or separate.

[0003] The integrated line scan camera and line laser inspection equipment are pre-aligned on the production line before shipment as a complete unit. However, this alignment can only be performed at a preset working distance, ensuring the line scan camera's field of view is within the line laser beam and parallel to it. Therefore, it can only be used at a fixed working distance. If the actual working distance in the application scenario exceeds the preset range, the line laser beam and the line scan camera's field of view will shift, affecting image quality.

[0004] The split-type line scan camera and line laser inspection equipment are shipped separately, and the line laser source and line scan camera need to be installed and debugged on-site according to the actual application scenario. The line scan camera and line laser need to be leveled and aligned at the working distance on site.

[0005] However, different application scenarios have different working distances and other conditions. Therefore, in related technologies, users need to design special tooling fixtures for their actual application scenarios for fixing and adjustment. The adjustment methods are difficult to standardize, the adjustment efficiency is low, and there is a certain degree of difficulty in adjustment. Utility Model Content

[0006] The purpose of this utility model embodiment is to provide an assembly and adjustment device and a testing equipment to improve the assembly and adjustment efficiency of the device and reduce the assembly and adjustment difficulty. The specific technical solution is as follows:

[0007] An assembly and adjustment device, characterized in that it is used for mounting and adjusting a line scan camera and a line laser lens of a detection device, comprising: a base plate, a translation slide, a line scan camera adapter, a line laser lens adapter, and a line laser lens adjustment component;

[0008] The base plate is provided with a lens opening, which is used by the line scan camera to capture images below it through the lens opening;

[0009] The translation slide is disposed on the top of the base plate and arranged side by side with the lens opening; the translation slide has a translation slider that can translate along the length direction of the lens opening;

[0010] The linear array camera adapter is used to install the linear array camera, which is fixedly connected with one end of the translation slide towards the lens opening, so that the linear array camera can be installed above the lens opening and translate along the length direction of the lens opening with the translation slide;

[0011] The linear laser lens adapter is arranged at the bottom of the bottom plate and used to install the linear laser lens adjusting member;

[0012] The linear laser lens adjusting member is obliquely installed at the bottom of the linear laser lens adapter and used to rotatably install the linear laser lens, so that the linear laser emitted by the linear laser lens is irradiated towards the field of view of the linear array camera and the exit angle of the linear laser emitted by the linear laser lens is adjusted.

[0013] In some embodiments, the translation slide further comprises an adjusting screw and two fixed blocks.

[0014] The two fixed blocks are arranged at two sides of the translation slide and fixedly connected with the bottom plate.

[0015] The translation slide is provided with a first inner threaded hole penetrating the translation slide, so that the translation slide is arranged between the two fixed blocks through the adjusting screw.

[0016] At least one of the two fixed blocks is provided with a second inner threaded hole penetrating the fixed block, so that one end of the adjusting screw penetrates the fixed block to adjust the translation distance of the translation slide.

[0017] In some embodiments, the translation slide further comprises two guide rods; the translation slide is further provided with a first guide hole and a second guide hole penetrating the translation slide along the length direction of the adjusting screw.

[0018] Each of the fixed blocks is provided with a first fixed hole and a second fixed hole at positions corresponding to the first guide hole and the second guide hole, and the first fixed hole and the second fixed hole penetrate the fixed block along the length direction of the adjusting screw.

[0019] The two guide rods penetrate the first guide hole and the second guide hole and are in sliding connection with the translation slide and in fixed connection with the first fixed hole and the second fixed hole.

[0020] In some embodiments, the linear array camera adapter is a plate-shaped adapter, comprising a camera mounting portion and a slide connecting portion; the camera mounting portion is used to install the linear array camera; the camera mounting portion is provided with a camera adapter opening, so that the field of view of the linear array camera passes through;

[0021] The slider connecting part is formed by extending from the side of the camera mounting part close to the translation slider, and is located on the top of the translation slider and fixedly connected with the top of the translation slider.

[0022] In some embodiments, the top of the line laser lens adapter is fixedly connected with the bottom of the bottom plate, and the bottom of the line laser lens adapter is provided with a mounting sleeve; the mounting sleeve has an inclination angle relative to the bottom plate, and the bottom of the mounting sleeve is provided with a mounting sleeve opening to allow the line laser emitted by the line laser lens to irradiate towards the field of view of the line array camera.

[0023] In some embodiments, the line laser lens adapter further comprises a base, a vertical connecting plate and an inclined mounting seat.

[0024] The base is fixedly connected with the bottom of the bottom plate, the vertical connecting plate is arranged at the bottom of the base, the bottom of the vertical connecting plate is fixedly connected with the inclined mounting seat, and the mounting sleeve is arranged at the bottom of the inclined mounting seat; the inclined mounting seat has an inclination angle relative to the bottom plate.

[0025] A sleeve platform is arranged around the top opening of the mounting sleeve, and the plane of the sleeve platform is parallel to the inclined mounting seat; the line laser lens adjusting member is mounted in the mounting sleeve through the top opening of the mounting sleeve.

[0026] In some embodiments, the line laser lens adjusting member is rotatably arranged in the mounting sleeve and has a cylindrical shape, comprising a cylinder and an adjusting ring at the top.

[0027] A cylinder annular groove is arranged on the cylinder, the mounting sleeve is connected with the line laser lens adjusting member through a locking screw, and the locking screw cooperates with the cylinder annular groove on the line laser lens adjusting member.

[0028] The adjusting ring comprises a ring body and a leveling screw, the leveling screw is arranged on the leveling blocks protruding from both ends of the ring body, the adjusting ring protrudes from the top of the mounting sleeve and is located on the sleeve platform, the inclined mounting seat extends upwardly at both ends along the width direction of the inclined mounting seat to form mounting seat side plates, the leveling side surface of the mounting seat side plates is opposite to the leveling blocks, and the leveling screw penetrates through the leveling blocks and abuts against the leveling side surface; by loosening or tightening the leveling screw, the length of the leveling screw between the leveling blocks and the leveling side surface is adjusted to adjust the rotation of the line laser lens adjusting member, and the line laser lens adjusting member is connected with the line laser lens through a fixed top screw.

[0029] In some embodiments, the bottom plate is provided with a bottom plate mounting hole, and the adjusting device is fixedly arranged on the factory production line body through the bottom plate mounting hole.

[0030] In some embodiments, opposite ends of the top of the bottom plate are fixed with side ears protruding from the bottom plate, and a plurality of side ear mounting holes are arranged on the side ears, and the plurality of side ear mounting holes are arranged side by side along the height direction of the side ears, and the mounting and adjusting device is mounted on the factory production line body through the side ear mounting holes.

[0031] In some embodiments, the mounting and adjusting device further comprises a U-shaped mounting bracket.

[0032] The U-shaped mounting bracket comprises two vertical mounting plates and a horizontal mounting plate connected between the two vertical mounting plates.

[0033] The two vertical mounting plates are provided with pitch adjustment mounting holes, and the two vertical mounting plates are connected through the side ear mounting holes and the pitch adjustment mounting holes, and the bottom plate is pitch rotated relative to the mounting bracket.

[0034] The top of the horizontal mounting plate is provided with a bracket waist-shaped hole and a bracket screw hole located at the center of the bracket waist-shaped hole, and the mounting bracket is mounted on the factory line body through the bracket waist-shaped hole and the bracket screw hole.

[0035] A detection device, characterized in that it comprises the mounting and adjusting device, the line array camera and the line laser lens of any one of the above.

[0036] The line array camera is fixed on the line array camera adapter of the mounting and adjusting device, and the line laser lens is fixed in the line laser lens adjusting part.

[0037] In some embodiments, it further comprises a line laser lens controller and a camera controller.

[0038] The line laser lens is connected with the line laser lens controller through an optical fiber, and the line laser lens controller controls the opening or closing of the line laser lens.

[0039] The line array camera is electrically connected with the camera controller, and the camera controller controls the opening or closing of the line array camera.

[0040] The embodiment of the utility model provides a kind of installation and adjustment device, translation slide can drive linear array camera adapter and linear array camera along the length direction of bottom plate opening slide;The top of linear laser lens adapter is fixed to bottom plate, and linear laser lens adjusting part is arranged at the bottom of linear laser lens adapter, and linear laser lens adjusting part can drive linear laser lens to rotate around the optical axis of linear laser lens relative to linear laser lens adjusting part;And linear laser lens adjusting part is obliquely installed at the bottom of linear laser lens adapter, so that linear laser lens and linear array camera are installed at a certain angle, and linear laser emitted by linear laser lens can be irradiated towards the field of view of linear array camera.In this way, linear laser lens can be rotated and adjusted by linear laser lens adjusting part, to ensure that laser line and linear array camera field of view are horizontal;Meanwhile, linear array camera is adjusted in horizontal direction by translation slide, so that linear array camera field of view and laser line are coincided.

[0041] It can be seen that the installation and adjustment device provided by the embodiment of the application can complete the installation and adjustment of the linear array camera and the linear laser lens by moving the translation slide and rotating the linear laser lens adjusting part, thereby improving the installation and adjustment efficiency of the detection equipment and reducing the installation and adjustment difficulty.

[0042] Of course, implementing any product of the utility model does not necessarily need to achieve all the advantages described above. ACCURACY OF DRAWINGS

[0043] In order to more clearly illustrate the technical scheme in the embodiments of the utility model or the prior art, the drawings needed to be used in the embodiment or the prior art description will be briefly introduced below, and obviously, the drawings in the following description are only some embodiments of the utility model, and other drawings can also be obtained by those skilled in the art according to these drawings.

[0044] Figure 1 It is the first angle overall structure schematic view of installation and adjustment device provided by the embodiment of the application;

[0045] Figure 2 It is the second angle overall structure schematic view of installation and adjustment device provided by the embodiment of the application;

[0046] Figure 3 It is Figure 1 The plan view of installation and adjustment device shown in the drawing (U-shaped mounting bracket is not shown);

[0047] Figure 4 It is Figure 1 The bottom view of installation and adjustment device shown in the drawing;

[0048] Figure 5 It is Figure 1 The explosion view of installation and adjustment device shown in the drawing;

[0049] Figure 6 It is Figure 1Structure diagram of line laser lens adapter of the shown adjusting device

[0050] Figure 7 For Figure 1 Mounting method diagram of the shown adjusting device

[0051] Figure 8 For the overall structure diagram of the detection equipment provided by the embodiment of the application

[0052] Figure 9a For Figure 8 Adjustment principle diagram of the shown detection equipment Figure 1 ;

[0053] Figure 9b For Figure 8 Adjustment principle diagram of the shown detection equipment Figure 2 ;

[0054] Figure 9c For Figure 8 Adjustment principle diagram of the shown detection equipment Figure 3 .

[0055] Explanation of reference signs:

[0056] Adjusting device 1; bottom plate 100; lens opening 110; bottom plate mounting hole 130; side ear 140; side ear mounting hole 141; first side ear mounting hole 1411; second side ear mounting hole 1412; third side ear mounting hole 1413; U-shaped mounting bracket 150; pitch adjustment mounting hole 151; pitch adjustment waist-shaped hole 1511; pitch adjustment screw hole 1512; horizontal mounting plate 152; vertical mounting plate 153; bracket waist-shaped hole 154; bracket mounting fixed hole 155; bracket screw hole 156; first screw 160; second screw 170;

[0057] Translation slide 200; translation slide block 210; first internal thread hole 211; first guide hole 213; second guide hole 214; adjustment screw 220; fixed block 230; second internal thread hole 231; first fixed hole 232; second fixed hole 233; knob 240; guide rod 250;

[0058] Linear array camera adapter 300; camera mounting part 310; camera adapter opening 311; slide block connecting part 320;

[0059] Line laser lens adapter 400; mounting sleeve 410; mounting sleeve opening 411; top opening 412; sleeve platform 413; locking screw hole 414; locking screw 415; base 420; vertical connecting plate 430; inclined mounting seat 440; mounting seat side plate 441; leveling side 442;

[0060] Linear laser lens adjusting piece 500; barrel 510; barrel annular groove 511; adjusting ring 520; ring body 521; leveling screw 522; leveling block 523; fixed jackscrew hole 530; fixed jackscrew 540;

[0061] Linear array camera 2; linear array camera field of view 21; linear laser lens 3; light ray field of view 31; detection equipment 10. DETAILED DESCRIPTION

[0062] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art based on the present application belong to the scope of protection of the present application.

[0063] In order to solve the problems of low assembly and adjustment efficiency and certain assembly and adjustment difficulty in the related art, the present application provides an assembly and adjustment device and a detection equipment. The following will be described respectively.

[0064] Referring to Figures 1 to 2 , wherein, Figure 1 is a first angle overall structure schematic diagram of the assembly and adjustment device provided by the present application; Figure 2 is a second angle overall structure schematic diagram of the assembly and adjustment device provided by the present application.

[0065] As Figure 1 and Figure 2 shown, the assembly and adjustment device 1 provided by the present application is used for installing and adjusting the linear array camera and the linear laser lens of the detection equipment, and includes a base plate 100, a translation slide 200, a linear array camera adapter 300, a linear laser lens adapter 400 and a linear laser lens adjusting piece 500; the base plate 100 is provided with a lens opening 110, which is used for the linear array camera to collect the image below through the lens opening 110;

[0066] The translation slide 200 is arranged on the top of the base plate 100 and is arranged in parallel with the lens opening 110; the translation slide 200 has a translation slide block 210 which can translate along the length direction of the lens opening 110;

[0067] The linear array camera adapter 300 is used for installing the linear array camera, and is fixedly connected with one end of the translation slide block 210 which faces the lens opening 110, so that the linear array camera can be installed above the lens opening 110 and translate along the length direction of the lens opening 110 with the translation slide block 210;

[0068] The linear laser lens adapter 400 is arranged on the bottom of the base plate 100 and is used for installing the linear laser lens adjusting piece 500;

[0069] The line laser lens adjusting piece 500 is obliquely installed at the bottom of the line laser lens adapter 400, and is used to rotatably install the line laser lens, so that the line laser emitted by the line laser lens is irradiated towards the field of view of the line array camera, and the emission angle of the line laser emitted by the line laser lens is adjusted.

[0070] The translation slide of the assembly and adjustment device can drive the line array camera adapter and the line array camera to slide along the length direction of the opening of the bottom plate. The top of the line laser lens adapter is fixed to the bottom plate, and is used to install the line laser lens adjusting piece. The line laser lens adjusting piece can drive the line laser lens to rotate relative to the line laser lens adapter around the optical axis of the line laser lens. Moreover, the line laser lens adjusting piece is obliquely installed at the bottom of the line laser lens adapter, so that the line laser lens and the line array camera are installed at a certain angle, and the line laser emitted by the line laser lens can be irradiated towards the field of view of the line array camera. In this way, the line laser lens can be adjusted in the rotation direction through the line laser lens adjusting piece, so as to ensure that the laser line and the field of view of the line array camera are horizontal. Meanwhile, the line array camera is adjusted in the horizontal direction through the translation slide, so as to ensure that the field of view of the line array camera and the laser line are coincident.

[0071] It can be seen that the assembly and adjustment device provided by the embodiment of the present application can complete the assembly and adjustment of the line array camera and the line laser lens only by moving the translation slide and rotating the line laser lens adjusting piece, thereby improving the assembly and adjustment efficiency of the detection equipment and reducing the assembly and adjustment difficulty.

[0072] The assembly and adjustment device 1 provided by the embodiment can support adjustment under different working distances, can detect the workpiece to be detected under different working distances, and can move the line array camera through the translation slide 200 and rotate the line laser lens to adjust and coincide the field of view of the line array camera and the light of the line laser lens, thereby improving the flexibility of use and the detection accuracy. The user no longer needs to design a special tooling fixture for fixing and assembly and adjustment according to the actual application scene, thereby reducing the development time, development cost and development cycle, ensuring the standardization of assembly and adjustment, and improving the use rate of the detection equipment. Specifically, the working distance of the assembly and adjustment device 1 is 250mm-350mm.

[0073] Of course, the working distance of the assembly and adjustment device 1 provided by the embodiment of the present application is not limited to 250mm-350mm. Under the condition of adjusting the stroke of the translation slide 200 and the angle and height of the laser lens adapter 400, the assembly and adjustment device 1 can meet more working distances.

[0074] In the embodiment of the present application, the linear array camera adapter 300 is installed above the lens opening 110 of the bottom plate 100 through the translation stage 200 arranged on the bottom plate 100, and the linear laser lens adapter 400 is installed at the bottom of the bottom plate 100; the bottom plate 100 provides support for the translation stage 200 and the linear laser lens adapter 400. Among them, the linear array camera adapter 300 can be fixedly connected with the translation sliding block 210 of the translation stage 200 through a screw, and the top of the linear laser lens adapter 400 can also be fixedly connected with the bottom of the bottom plate 100 through a screw.

[0075] As shown in Figure 1 , the linear array camera adapter 300 is a plate-shaped connector, which includes a camera mounting part 310 and a sliding block connecting part 320; the camera mounting part 310 is used for mounting a linear array camera; the camera adapter opening 311 is arranged on the camera mounting part 310 to pass the field of view of the linear array camera; the sliding block connecting part 320 is formed by extending from the side of the camera mounting part 310 close to the translation sliding block 210, and is located on and fixedly connected with the top of the translation sliding block 210.

[0076] In the embodiment, the linear array camera adapter 300 can be a flat mounting plate, and the camera adapter opening 311 is arranged at a position corresponding to the lens of the linear array camera to pass the field of view of the linear array camera through the camera adapter opening 311 and the lens opening 110, and collect the image of the workpiece (such as a silicon wafer) to be detected below.

[0077] In the embodiment, the translation stage 200 can be a high-precision translation stage. Referring to Figure 3 , Figure 3 , as shown in Figure 1 , the plan view of the adjusting device; as shown in Figure 2 and Figure 3 , the translation stage 200 further includes an adjusting screw 220 and two fixed blocks 230; the two fixed blocks 230 are separately arranged on the two sides of the translation sliding block 210 and are fixedly connected with the bottom plate 100; the translation sliding block 210 is provided with a first internal threaded hole 211 penetrating through the translation sliding block 210, so that the translation sliding block 210 is arranged between the two fixed blocks 230 through the adjusting screw 220; at least one of the two fixed blocks 230 is provided with a second internal threaded hole 231 penetrating through the fixed block 230, so that one end of the adjusting screw 220 penetrates out of the fixed block 230 to adjust the translation distance of the translation sliding block 210.

[0078] Specifically, the fixed block 230 can be fixedly connected with the bottom plate 100 by screws, the moving range of the translation sliding block 210 along the length direction of the lens opening 110 is ±30mm, so that the moving range of the line array camera adapter 300 along the length direction of the lens opening 110 is also ±30mm, that is, the adjustment stroke of the line array camera is ±30mm; the length size of the lens opening 110 is at least greater than 70mm to ensure that the field of view of the line array camera is not blocked.

[0079] In the embodiment, the rotation adjustment screw 220 penetrates one end of the fixed block 230, since the adjustment screw 220 and the fixed block 230 are threadedly connected, the fixed block 230 is not moved when the adjustment screw 220 rotates, the adjustment screw 220 drives the translation sliding block 210 to move relative to the fixed block 230, thereby driving the line array camera on the line array camera adapter 300 to move along the length direction of the lens opening 110.

[0080] The end of the adjustment screw 220 penetrating the fixed block 230 can be provided with a knob 240, rotating the knob 240 can rotate the adjustment screw 220, the adjustment screw 220 drives the translation sliding block 210 to move relative to the fixed block 230, thereby driving the line array camera on the line array camera adapter 300 to move along the length direction of the lens opening 110, and the knob 240 is more convenient for users to rotate and operate.

[0081] Specifically, when the knob 240 is rotated clockwise, the translation sliding block 210 of the translation sliding table 200 can drive the line array camera adapter 300 and the line array camera to move along the length direction of the lens opening 110 to approach the line laser lens adjusting piece 500; when the knob 240 is rotated counterclockwise, the translation sliding block 210 of the translation sliding table 200 can drive the line array camera adapter 300 and the line array camera to move along the length direction of the lens opening 110 to move away from the line laser lens adjusting piece 500.

[0082] Of course, when the knob 240 is rotated clockwise, the translation sliding block 210 of the translation sliding table 200 can drive the line array camera adapter 300 and the line array camera to move along the length direction of the lens opening 110 to move away from the line laser lens adjusting piece 500; when the knob 240 is rotated counterclockwise, the translation sliding block 210 of the translation sliding table 200 can drive the line array camera adapter 300 and the line array camera to move along the length direction of the lens opening 110 to approach the line laser lens adjusting piece 500.

[0083] As shown in Figure 2 and Figure 3 The translation sliding table 200 further comprises two guide rods 250, and the translation sliding block 210 is further provided with a first guide hole 213 and a second guide hole 214, the first guide hole 213 and the second guide hole 214 penetrate the translation sliding block along the length direction of the adjustment screw 220;

[0084] The first fixing hole 232 and the second fixing hole 233 are arranged on each fixing block 230 at positions corresponding to the first guide hole 213 and the second guide hole 214, and penetrate the fixing block 230 along the length direction of the adjusting screw 220;

[0085] The two guide rods 250 penetrate the first guide hole 213 and the second guide hole 214, and are in sliding connection with the translation slide 210, and are in fixed connection with the first fixing hole 232 and the second fixing hole 233.

[0086] In the embodiment, when the translation slide 210 moves, it can slide along the length direction of the two guide rods 250 fixed on the fixing block 230, thereby playing a guiding role, preventing the translation slide 210 from deviating during movement, and improving the stability of the translation stage 200 driving the line array camera adapter 300 to move.

[0087] The line laser adapter 400 in the embodiment, as shown in Figure 1 and Figure 4 , Figure 4 is shown as a bottom view of the adjusting device; as shown in Figure 1 and Figure 1 and Figure 4 , the top of the line laser lens adapter 400 is fixedly connected with the bottom of the bottom plate 100, and the bottom of the line laser lens adapter 400 is provided with a mounting sleeve 410; the mounting sleeve 410 has an inclination angle relative to the bottom plate 100, and the bottom of the mounting sleeve 410 is provided with a mounting sleeve opening 411, so that the line laser emitted by the line laser lens is irradiated towards the field of view of the line array camera.

[0088] As shown in Figure 1 and Figure 4 , the line laser lens adapter 400 further comprises a base 420, a vertical connecting plate 430 and an inclined mounting seat 440; the base 420 is fixedly connected with the bottom of the bottom plate 100, the vertical connecting plate 430 is arranged at the bottom of the base 420, the bottom of the vertical connecting plate 430 is fixedly connected with the inclined mounting seat 440, and the mounting sleeve 410 is arranged at the bottom of the inclined mounting seat 440; the inclined mounting seat 440 has an inclination angle relative to the bottom plate 100; a sleeve platform 413 is arranged around the top opening 412 of the mounting sleeve 410, and the plane of the sleeve platform 413 is parallel to the inclined mounting seat 440; a line laser lens adjusting member is mounted in the mounting sleeve 410 through the top opening 412 of the mounting sleeve 410. So that the line laser lens and the line array camera are installed at a certain angle.

[0089] Specifically, the base 420 can be fixedly connected to the bottom of the base plate 100 by screws; the vertical connecting plate 430 and the inclined mounting base 440 are connected at an angle t, and the angle t1 between the inclined mounting base 440 and the vertical connecting plate 430 is in the range of 90° < t1 < 180°; the plane of the sleeve platform 413 is parallel to the inclined mounting base 440, and when the line laser lens is installed in the mounting sleeve 410 through the line laser lens adjusting component 500, the angle t2 between the light emitted by the line laser lens and the field of view of the line scan camera is in the range of 0° < t2 < 90°; thus, the line laser emitted by the line laser lens illuminates the field of view of the line scan camera, and the line laser emitted by the line laser lens can intersect with the field of view of the line scan camera.

[0090] In this embodiment, the line laser lens and the line scan camera are installed at a certain angle, so that the line laser emitted by the line laser lens illuminates the field of view of the line scan camera, and the line laser emitted by the line laser lens can intersect with the field of view of the line scan camera.

[0091] The line laser lens adapter 400 can be integrally molded to increase its stability and reliability.

[0092] See Figure 5 and Figure 6 , Figure 5 for Figure 1 Exploded view of the assembly and adjustment device shown; Figure 6 for Figure 1 A schematic diagram of the structure of the line laser lens adapter of the assembly and adjustment device shown.

[0093] like Figure 5 and Figure 6 As shown, the line laser lens adjusting component 500 is rotatably disposed in the mounting sleeve 410. It is cylindrical in shape and includes a cylindrical body 510 and an adjusting ring 520 at the top. The cylindrical body 510 has an annular groove 511. The mounting sleeve 410 and the line laser lens adjusting component 500 are connected by a locking screw 415, which engages with the annular groove 511 on the line laser lens adjusting component 500. The adjusting ring 520 includes a ring body 521 and a leveling screw 522. The leveling screw 522 is disposed on leveling blocks 523 protruding from both ends of the ring body 521. The adjusting ring 520 protrudes from the mounting sleeve. At the top of 410, located on the sleeve platform 413, the inclined mounting base 440 extends upward from both ends of the inclined mounting base 440 in the width direction, with mounting base side plates 441. The leveling side 442 of the mounting base side plate 441 is opposite to the leveling block 523, and the leveling screw 522 passes through the leveling block 523 and abuts against the leveling side 442. By loosening or tightening the leveling screw 522, the length of the leveling screw 522 between the leveling block 523 and the leveling side 442 is adjusted to adjust the rotation of the line laser lens adjusting component 500. The line laser lens adjusting component 500 is connected to the line laser lens through the fixing set screw 540.

[0094] In the embodiment, the outer wall of the cylinder 510 of the line laser lens adjusting member 500 has a smaller diameter than the inner wall of the mounting sleeve 410, so that the line laser lens adjusting member 500 can be mounted in the mounting sleeve 410 and can rotate relative to the mounting sleeve 410.

[0095] Specifically, the line laser lens adjusting member 500 and the line laser lens adapter 400 are mounted through hole shaft cooperation, the mounting sleeve 410 is provided with a locking screw hole 414 which is communicated with the outer wall and the inner wall of the mounting sleeve 410, when the line laser lens adjusting member 500 is mounted in the mounting sleeve 410, the line laser lens adjusting member 500 can be fixed by the locking screw 415 passing through the locking screw hole 414, and glue is added in the locking screw hole 414 through which the locking screw 415 passes.

[0096] In the embodiment, the locking screw 415 passes through the locking screw hole 414 to fix the line laser lens adjusting member 500, and glue is added in the locking screw hole 414 through which the locking screw 415 passes, which reinforces and prevents the locking screw 415 from loosening, so that the connection between the line laser lens adjusting member 500 and the line laser lens adapter 400 is more stable.

[0097] When the line laser lens adjusting member 500 needs to be rotated, the locking screw 415 is loosened, so that the line laser lens adjusting member 500 can rotate relative to the mounting sleeve 410, then the leveling screw 522 is loosened or tightened, the length of the leveling screw 522 between the leveling side 442 and the leveling block 523 is changed, so that the distance between the leveling side 442 and the leveling block 523 is changed, the line laser lens adjusting member 500 rotates a certain angle relative to the mounting sleeve 410, then the locking screw 415 is tightened, so as to fix the line laser lens adjusting member 500.

[0098] As shown in Figure 5 The line laser lens is mounted in the line laser lens adjusting member 500 through hole shaft cooperation, the ring body 521 of the adjusting ring 520 of the line laser lens adjusting member 500 is provided with a fixed top screw hole 530, when the line laser lens is mounted in the line laser lens adjusting member 500, the line laser lens is fixed by the fixed top screw 540 passing through the fixed top screw hole 530, and glue is added in the fixed top screw hole 530 through which the fixed top screw 540 passes.

[0099] In the embodiment, the fixed top screw 540 passes through the fixed top screw hole 530 to fix the line laser lens, and glue is added in the fixed top screw hole 530 through which the fixed top screw 540 passes, which reinforces and prevents the fixed top screw 540 from loosening, so that the installation of the line laser lens and the line laser lens adjusting member 500 is more stable.

[0100] In another embodiment, the vertical connecting plate 430 of the line laser lens adapter 400 can be a telescopic plate, and the distance between the line laser lens and the line scan camera in the height direction can be adjusted by telescoping the vertical connecting plate 430.

[0101] The installation method of the assembly and adjustment device 1 will be described below.

[0102] One installation method involves mounting the assembly and adjustment device 1 onto the factory production line using a U-shaped mounting bracket 150.

[0103] See Figure 5 and Figure 7 , Figure 7 for Figure 1 The diagram shows the installation method of the assembly and adjustment device; as shown. Figure 5 and Figure 7 As shown, the mounting device 1 includes: a U-shaped mounting bracket 150; the U-shaped mounting bracket 150 includes: two vertical mounting plates 153 and a horizontal mounting plate 152 connecting the two vertical mounting plates 153; the two vertical mounting plates 153 are provided with pitch adjustment mounting holes 151, and the two vertical mounting plates 153 are respectively connected to the side ears 140 through the side ear mounting holes 141 and the pitch adjustment mounting holes 151, and the base plate 100 can be tilted relative to the mounting bracket 150; the top of the horizontal mounting plate 152 is provided with a bracket waist-shaped hole 154 and a bracket screw hole 156 located at the center of the bracket waist-shaped hole 154, and the mounting bracket 150 is installed on the factory production line through the bracket waist-shaped hole 154 and the bracket screw hole 156.

[0104] The pitch adjustment mounting hole 151 is located at one end of the two vertical mounting plates 153 away from the horizontal mounting plate 152. The pitch adjustment mounting hole 151 includes three pitch adjustment waist-shaped holes 1511 and a pitch adjustment screw hole 1512 at the center of the three pitch adjustment waist-shaped holes 1511. The distance from the pitch adjustment screw hole 1512 to the pitch adjustment waist-shaped hole 1511 is equal to the distance between two adjacent side ear mounting holes 141.

[0105] Specifically, there can be three side ear mounting holes 141, namely a first side ear mounting hole 1411, a second side ear mounting hole 1412, and a third side ear mounting hole 1413. The pitch adjustment screw hole 1512 of the pitch adjustment mounting hole 151 is connected to the second side ear mounting hole 1412 by a first screw 160, and the pitch adjustment waist-shaped hole 1511 of the pitch adjustment mounting hole 151 is connected to the first side ear mounting hole 1411 or the third side ear mounting hole 1413 by a second screw 170. Rotating the U-shaped mounting bracket 150 causes the second screw 170 to rotate along the pitch adjustment waist-shaped hole 1511, thereby realizing the pitch rotation of the base plate 100 relative to the U-shaped mounting bracket 150.

[0106] The first screw 160 and the second screw 170 can connect the pitch adjustment screw hole 1512 and the pitch adjustment waist-shaped hole 1511 with any two adjacent side ear mounting holes 141.

[0107] In the embodiment, the bottom plate 100 can be pitch-rotated relative to the U-shaped mounting bracket 150, so that the line array camera and the line laser lens can be pitch-rotated relative to the U-shaped mounting bracket 150, which meets the situation that the installation space is limited on site. Through the pitch rotation, the detection of the workpiece in different motion directions can also be realized.

[0108] In the embodiment, the installation and adjustment device 1 is installed on the factory production line body through the bracket waist-shaped hole 154 and the bracket screw hole 156 located at the center of the bracket waist-shaped hole 154, and can be fixed after rotating a certain angle.

[0109] As shown in Figure 7 The top of the U-shaped mounting bracket 150 is also provided with a bracket mounting and fixing hole 155, which can be arranged at both ends of the length direction of the horizontal mounting plate 152. The U-shaped mounting bracket 150 can be directly fixed on the factory line body through the bracket mounting and fixing hole 155.

[0110] Another installation method can also remove the U-shaped mounting bracket 150 and directly fix the installation and adjustment device on the factory production line body through the side ear mounting hole 141.

[0111] As shown in Figure 7 The opposite ends of the top of the bottom plate 100 are fixed with side ears 140 protruding from the bottom plate 100. The side ears 140 are provided with a plurality of side ear mounting holes 141 arranged side by side along the height direction of the side ears 140, which are used to install the installation and adjustment device 1 on the factory production line body.

[0112] In the embodiment, the installation and adjustment device 1 can be fixed on the factory line body through the side ear mounting hole 141. Since there are a plurality of side ear mounting holes 141 arranged side by side along the height direction of the side ears, when the installation and adjustment device 1 is fixed on the factory line body through different side ear mounting holes 141, the height of the installation and adjustment device 1 on the factory line body can be different, so that the distance of the installation and adjustment device 1 relative to the workpiece to be detected can be adjusted, and the volume of the installation and adjustment device can also be reduced to reduce the occupied space.

[0113] Another installation method can remove the side ears 140 and directly fix the installation and adjustment device 1 on the factory production line body through the bottom plate mounting hole 130.

[0114] As shown in Figure 7As shown, the bottom plate 100 is provided with a bottom plate mounting hole 130, and the adjusting device 1 is fixed on the factory production line body through the bottom plate mounting hole 130. When the screw is directly fixed on the factory line body through the bottom plate mounting hole 130, the volume of the adjusting device can be further reduced, and the occupied space is further reduced.

[0115] The adjusting device 1 can be fixed on the factory production line body through the bottom plate mounting hole 130 on the bottom plate 100, and can also be fixed on the factory production line body through different side ear mounting holes 141, and can be connected with the factory production line body in pitching rotation, rotary connection or direct fixed connection through the U-shaped mounting bracket 150. Different mounting modes can be selected according to the actual installation environment on site, improving the flexibility of installation and assembly convenience.

[0116] Referring to Figure 8 , Figure 8 The overall structure schematic diagram of the detection equipment provided by the embodiment of the application is shown in FIG. 1. Figure 8 As shown, the embodiment of the application further provides a detection equipment 10, which comprises the adjusting device 1, the line array camera 2 and the line laser lens 3 in any of the above embodiments; the line array camera 2 is fixed on the line array camera adapter 300 of the adjusting device 1, and the line laser lens 3 is fixed in the line laser lens adjusting part 500.

[0117] When the detection equipment 10 is used to detect the workpiece to be detected, such as a silicon wafer, the detection equipment 10 is fixed, the silicon wafer is placed on the conveying line below the detection equipment and moves on the conveying line, the line laser lens 3 on the detection equipment 10 emits light to the surface of the silicon wafer, the field of view of the line array camera 2 on the surface of the silicon wafer coincides with the light emitted by the line laser lens 3, and then the line array camera 2 is imaged, the line array camera 2 continuously scans the moving silicon wafer to detect the defects on the surface of the silicon wafer.

[0118] The detection equipment 10 further comprises a line laser lens controller and a camera controller.

[0119] The line laser lens 3 is connected with the line laser lens controller through an optical fiber, and the line laser lens controller controls the opening or closing of the line laser lens 3.

[0120] The line array camera 2 is electrically connected with the camera controller, and the camera controller controls the opening or closing of the line array camera 2.

[0121] In the embodiment, the line laser lens controller, the line array camera 2 and the line laser lens 3 are assembled separately, which avoids the problem of too large size of the detection equipment, occupies space and has insufficient flexibility.

[0122] Referring to Figures 9a to 9c , Figure 9a for Figure 8 The adjustment principle schematic diagram of the detection equipment is shown in FIG. 2.Figure 1 ; Figure 9b For Figure 8 Adjustment principle diagram of detection equipment shown in Figure 2 ; Figure 9c For Figure 8 Adjustment principle diagram of detection equipment shown in Figure 3 ;

[0123] When the detection equipment 10 is assembled and adjusted, as shown in Figure 9a , the line array camera field of view 21 of the line array camera 2 is not coincident with and not parallel to the light field of view 31 of the line laser lens 3; as shown in Figure 9b , the line array camera adapter 300 and the line array camera 2 are moved along the length direction of the lens opening 110 by the translation stage 200, so that the center of the line array camera field of view 21 is coincident with the center of the light field of view 31 of the line laser lens 3; as shown in Figure 9c , the line laser lens 3 is rotated around the optical axis direction by the line laser lens adjusting part 500, so that the line array camera field of view 21 is located in the light field of view 31 of the line laser lens 3, and the line array camera field of view 21 is parallel to the light field of view 31 of the line laser lens 3, that is, the assembly and adjustment are completed, the assembly and adjustment efficiency of the detection equipment is improved, and the assembly and adjustment difficulty is reduced.

[0124] The above merely describes preferred embodiments of the present application, but is not intended to limit the protection scope of the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. An adjustment device, characterized in that The application discloses a device for installing and adjusting a line array camera and a line laser lens of a detection device. The bottom plate (100) is provided with a lens opening (110) for the line array camera to collect images below the lens opening (110). The translation slide (200) is arranged on the top of the bottom plate (100) and is arranged in parallel with the lens opening (110). The line array camera adapter (300) is used for installing the line array camera and is fixedly connected to one end of the translation slide (210) towards the lens opening (110), so that the line array camera can be installed above the lens opening (110) and can translate along the length direction of the lens opening (110) along with the translation slide (210). The line laser lens adapter (400) is arranged at the bottom of the bottom plate (100) and is used for installing the line laser lens adjusting member (500). The line laser lens adjusting member (500) is obliquely arranged at the bottom of the line laser lens adapter (400) and is used for rotatably installing the line laser lens so that the line laser emitted by the line laser lens is irradiated towards the field of view of the line array camera and the emission angle of the line laser emitted by the line laser lens is adjusted.

2. The device according to claim 1, wherein the translation slide (200) further comprises an adjusting screw (220) and two fixed blocks (230). The two fixed blocks (230) are arranged on the two sides of the translation slide (210) and are fixedly connected to the bottom plate (100). The translation slide (210) is provided with a first internal threaded hole (211) penetrating the translation slide (210), so that the translation slide (210) is arranged between the two fixed blocks (230) through the adjusting screw (220). At least one of the two fixed blocks (230) is provided with a second internal threaded hole (231) penetrating the fixed block (230), so that one end of the adjusting screw (220) penetrates the fixed block (230) to adjust the translation distance of the translation slide (210).

3. The device according to claim 2, wherein the translation slide (200) further comprises two guide rods (250). The translation slide (210) is further provided with a first guide hole (213) and a second guide hole (214) penetrating the translation slide (210) along the length direction of the adjusting screw (220). ​ A first fixing hole (232) and a second fixing hole (233) are arranged on each fixing block (230) at positions corresponding to the first guide hole (213) and the second guide hole (214), and the first fixing hole (232) and the second fixing hole (233) penetrate the fixing block (230) along the length direction of the adjusting screw (220); The two guide rods (250) penetrate the first guide hole (213) and the second guide hole (214) and are in sliding connection with the translation slide (210) and in fixed connection with the first fixing hole (232) and the second fixing hole (233).

4. The device according to claim 1, wherein The line array camera adapter (300) is a plate-shaped connecting piece, comprising a camera mounting portion (310) and a slide connecting portion (320), the camera mounting portion (310) is used for mounting a line array camera; a camera adapter opening (311) is arranged on the camera mounting portion (310) to pass through the field of view of the line array camera; The slide connecting portion (320) is formed by extending from the side of the camera mounting portion (310) close to the translation slide (210), the slide connecting portion (320) is located on the top of the translation slide (210) and is in fixed connection with the top of the translation slide (210).

5. The device according to claim 1, wherein The top of the line laser lens adapter (400) is in fixed connection with the bottom of the bottom plate (100), and the bottom of the line laser lens adapter (400) is provided with a mounting sleeve (410); the mounting sleeve (410) has an inclination angle relative to the bottom plate (100), and the bottom of the mounting sleeve (410) is provided with a mounting sleeve opening (411) to make the line laser emitted by the line laser lens irradiate towards the field of view of the line array camera.

6. The device according to claim 5, wherein The line laser lens adapter (400) further comprises a base (420), a vertical connecting plate (430) and an inclined mounting seat (440); The base (420) is in fixed connection with the bottom of the bottom plate (100), the vertical connecting plate (430) is arranged on the bottom of the base (420), the bottom of the vertical connecting plate (430) is in fixed connection with the inclined mounting seat (440), and the mounting sleeve (410) is arranged on the bottom of the inclined mounting seat (440); the inclined mounting seat (440) has an inclination angle relative to the bottom plate (100); A sleeve platform (413) is arranged around the top opening (412) of the mounting sleeve (410), the plane of the sleeve platform (413) is parallel to the inclined mounting seat (440); and the line laser lens adjusting piece (500) is mounted on the mounting sleeve (410) through the top opening (412) of the mounting sleeve (410).

7. The device according to claim 6, wherein The line laser lens adjusting part (500) is rotatably arranged in the mounting sleeve (410) and is in a cylindrical shape, comprising a cylinder body (510) and a top adjusting ring (520); The cylinder body (510) is provided with a cylinder body annular groove (511), the mounting sleeve (410) and the line laser lens adjusting part (500) are connected through a locking screw (415), and the locking screw (415) is matched with the cylinder body annular groove (511) on the line laser lens adjusting part (500); The adjusting ring (520) comprises a ring body (521) and a leveling screw (522), the leveling screw (522) is arranged on the leveling blocks (523) protruding from both ends of the ring body (521), the adjusting ring (520) protrudes from the top of the mounting sleeve (410) and is located on the sleeve platform (413), the inclined mounting seat (440) extends upwardly at both ends along the width direction of the inclined mounting seat (440) to form mounting seat side plates (441), the leveling side surfaces (442) of the mounting seat side plates (441) are opposite to the leveling blocks (523), and the leveling screw (522) penetrates through the leveling blocks (523) and abuts against the leveling side surfaces (442); the length of the leveling screw (522) between the leveling blocks (523) and the leveling side surfaces (442) is adjusted by loosening or tightening the leveling screw (522), so that the rotation of the line laser lens adjusting part (500) is adjusted, and the line laser lens adjusting part (500) is connected with the line laser lens through a fixed top screw (540).

8. The device according to claim 1, wherein The bottom plate (100) is provided with a bottom plate mounting hole (130), and the device (1) is fixed on the factory production line body through the bottom plate mounting hole (130).

9. The device according to claim 1, wherein The opposite ends of the top of the bottom plate (100) are fixedly provided with side ears (140) protruding from the bottom plate (100), the side ears (140) are provided with a plurality of side ear mounting holes (141), and the plurality of side ear mounting holes (141) are arranged side by side along the height direction of the side ears and used for mounting the device (1) on the factory production line body.

10. The device according to claim 9, wherein The device (1) further comprises a U-shaped mounting bracket (150); The U-shaped mounting bracket (150) comprises two vertical mounting plates (153) and a horizontal mounting plate (152) connecting the two vertical mounting plates (153); The two vertical mounting plates (153) are provided with pitch adjusting mounting holes (151), the two vertical mounting plates (153) are connected with the side ears (140) through the side ear mounting holes (141) and the pitch adjusting mounting holes (151) respectively, and the bottom plate (100) is pivotally rotated relative to the U-shaped mounting bracket (150). The horizontal mounting plate (152) is provided with a bracket waist-shaped hole (154) and a bracket screw hole (156) at the center of the bracket waist-shaped hole (154), and the U-shaped mounting bracket (150) is mounted on the factory line body through the bracket waist-shaped hole (154) and the bracket screw hole (156).

11. A detection device, characterized by The assembly device (1), the linear array camera (2) and the linear laser lens (3) according to any one of claims 1 to 8 are included. The linear array camera (2) is fixedly arranged on the linear array camera adapter (300) of the assembly device (1), and the linear laser lens (3) is arranged in the linear laser lens adjusting member (500).

12. The detection device according to claim 11, wherein, Further comprising: a linear laser lens controller and a camera controller; The linear laser lens (3) is connected with the linear laser lens controller through an optical fiber, and the linear laser lens controller controls the opening or closing of the linear laser lens (3); The linear array camera (2) is electrically connected with the camera controller, and the camera controller controls the opening or closing of the linear array camera (2).

Images