Chip thickness detection device

Abstract

The utility model relates to the technical field of chip thickness detection equipment, in particular to a chip thickness detection device which comprises a bearing seat, a chip up-down moving device, a correlation type photoelectric switch and a control device, and side beams are fixedly arranged above the two sides of the bearing seat; the chip up-and-down moving device is used for bearing the chip and controlling the chip to move up and down; the correlation type photoelectric switches are symmetrically arranged on the side beams on the two sides of the chip up-and-down moving device; and the control device is electrically connected with the correlation type photoelectric switch and the chip up-and-down moving device and is used for calculating the thickness of the chip according to the moving distance of the chip up-and-down moving device. According to the chip thickness detection device, a thickness gauge is not needed, and the high-precision linear motor is matched with the high-resolution correlation type photoelectric switch or the laser correlation type sensor to complete chip thickness detection.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of chip thickness detection equipment, and particularly relates to a chip thickness detection device. BACKGROUND

[0002] The statements in this section merely provide background information related to the present application and do not necessarily constitute the prior art.

[0003] At present, the detection of chip thickness is mostly performed by using a thickness gauge, for example, a Chinese utility model patent with the patent number CN220288580U and the name of "chip thickness detection tool", and a Chinese utility model patent with the patent number CN212179859U and the name of "high-precision chip thickness detection tool", both of which use a thickness gauge to detect the thickness of a chip. Since the thickness gauge needs specific conditions during detection, for example, the detection direction of the thickness gauge needs to be perpendicular to the chip, and the detection site needs to be free of vibration, otherwise the measurement result is easily affected, for example, the above two Chinese utility model patents both mention the shock absorption problem of the thickness gauge during use. In addition, when using the thickness gauge, factors such as the placement of the chip, vibration and assembly precision of the thickness detection device during use need to be considered, and there are many factors to be considered. When one of the factors is problematic, the thickness detection of the chip will be affected.

[0004] Therefore, it is necessary to provide a chip thickness detection device to solve the above technical problems. CONTENT OF THE UTILITY MODEL

[0005] Therefore, in view of the above technical problems, the present application provides a chip thickness detection device.

[0006] The technical scheme adopted by the present application to solve the problems existing in the prior art is:

[0007] The present application provides a chip thickness detection device, which comprises:

[0008] A bearing seat, side beams are fixedly arranged above both sides of the bearing seat;

[0009] A chip up-down moving device is arranged on the bearing seat and used for bearing the chip and controlling the up-down movement of the chip;

[0010] A pair of light barriers are symmetrically arranged on the side beams on both sides of the chip up-down moving device;

[0011] A control device is electrically connected with the light barriers and the chip up-down moving device and used for calculating the thickness of the chip according to the moving distance of the chip up-down moving device.

[0012] Preferably,

[0013] The bearing seat comprises an upper bottom plate and a lower bottom plate, and the left and right sides of the upper bottom plate and the lower bottom plate are fixedly connected with the side beams;

[0014] The upper bottom plate and the lower bottom plate are fixedly provided with side cover plates at front and back, and the upper bottom plate, the lower bottom plate and the side cover plates are formed into a flow guide cavity, and a suction fan is fixedly arranged on one side of the flow guide cavity;

[0015] A plurality of support frames are fixedly arranged below the lower bottom plate.

[0016] Preferably,

[0017] The chip up-and-down moving device comprises a sliding cylinder fixedly arranged above the bearing seat, and the sliding cylinder is hollow and communicates with the flow guide cavity;

[0018] A sliding body is slidably arranged in the sliding cylinder, the sliding body is provided with a screw rod at the bottom, the top of the screw rod is threadedly connected with the sliding body through a threaded hole in the middle of the bottom of the sliding body, and the bottom of the screw rod is fixedly connected with the motor shaft of the linear motor in an axial direction;

[0019] The linear motor is electrically connected with the control device;

[0020] The top of the sliding body is used for bearing the chip.

[0021] Preferably,

[0022] The sliding body is provided with a suction hole above;

[0023] A flow guide channel is vertically and longitudinally arranged in the sliding body, the top of the flow guide channel communicates with the suction hole above the sliding body, and the bottom of the flow guide channel communicates with the flow guide cavity.

[0024] Preferably,

[0025] A plurality of guide sliding rods are fixedly arranged at the bottom of the sliding body, and the guide sliding rods are slidably connected with the lower bottom plate through corresponding through holes in the lower bottom plate.

[0026] Preferably,

[0027] Sliding sealing rings are arranged between the two ends of the sliding cylinder and the sliding body.

[0028] Preferably,

[0029] The control device is fixedly arranged on the side beams.

[0030] Preferably,

[0031] The linear motor has a positioning accuracy within ±1 μm.

[0032] Preferably,

[0033] The resolution of the light-receiving photoelectric switch is ≤0.1 mm.

[0034] Preferably,

[0035] The pair of light photoelectric switch is a laser pair of light photoelectric sensor.

[0036] Compared with the prior art, the application has the following advantages:

[0037] 1. No need of thickness gauge, the high-precision linear motor is used to cooperate with the high-resolution pair of light photoelectric switch or laser pair of light photoelectric sensor to complete the thickness detection of the chip.

[0038] 2. When the chip is placed on the slide body, the suction fan is used to provide suction force to make the chip firmly adsorbed above the slide body, so as to reduce the influence of vibration on the thickness detection of the chip.

[0039] 3. Simple structure and high measurement accuracy. BRIEF DESCRIPTION OF DRAWINGS

[0040] The drawings constituting a part of the specification of the application are used to provide further understanding of the application, the illustrative embodiments of the application and the description thereof are used to explain the application, and do not constitute improper limitation on the application.

[0041] Figure 1 It is a schematic diagram of the overall structure of a chip thickness detection device of the application;

[0042] Figure 2 It is Figure 1 It is a schematic diagram of the overall structure of a chip thickness detection device of the application after removing the side cover plate;

[0043] Figure 3 It is Figure 1 It is a schematic diagram of the internal cross-sectional structure of a chip thickness detection device of the application.

[0044] In the drawings:

[0045] 1. Bearing seat, 10, upper bottom plate, 11, lower bottom plate, 12, flow guide cavity,

[0046] 2. Side beam, 3, pair of light photoelectric switch, 4, slide cylinder,

[0047] 5. Slide body, 50, guide slide rod, 51, linear motor, 52, screw rod, 53, flow guide channel, 54, threaded hole,

[0048] 6. Suction hole, 7, control device, 8, suction fan, 9, support frame. DETAILED DESCRIPTION

[0049] The application will be further described below in combination with the drawings and embodiments.

[0050] It is to be understood that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments in accordance with the present disclosure. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and / or "comprising," when used in this specification, specify the presence of stated features, steps, operations, elements, components, and / or groups thereof, but do not preclude the presence or addition of one or more other features, steps, operations, elements, components, and / or groups thereof.

[0051] In the present disclosure, the terms such as "upper", "lower", "left", "right", "front", "back", "vertical", "horizontal", "side", "bottom" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, which is only a relationship word determined for the convenience of describing the structural relationship of the components or elements of the present disclosure, and cannot be understood as a limitation of the present disclosure.

[0052] The present application provides a chip thickness detection device, referring to Figure 1 The chip thickness detection device of the present application comprises: a bearing seat 1, side beams 2 are fixedly arranged on the upper sides of the bearing seat 1; a chip up-down moving device arranged on the bearing seat 1 for bearing the chip and controlling the chip to move up and down; a pair of light barriers 3 symmetrically arranged on the side beams 2 on both sides of the chip up-down moving device; and a control device 7 electrically connected with the pair of light barriers 3 and the chip up-down moving device for calculating the thickness of the chip according to the moving distance of the chip up-down moving device.

[0053] Referring to Figure 2 The bearing seat 1 comprises an upper bottom plate 10 and a lower bottom plate 11, the left and right sides of the upper bottom plate 10 and the lower bottom plate 11 are fixedly connected with the side beams 2; side cover plates are fixedly arranged on the front and back of the upper bottom plate 10 and the lower bottom plate 11; the inside of the upper bottom plate 10, the lower bottom plate 11 and the side cover plates forms a flow guide cavity 12, one side of the flow guide cavity 12 is fixedly provided with a suction fan 8 on the side cover plate; the suction fan 8 is electrically connected with the control device 7; a plurality of support frames 9 are fixedly arranged below the lower bottom plate 11; and the control device 7 is fixedly arranged on the side beams 2.

[0054] Referring to Figure 3 The chip up-down moving device comprises a sliding cylinder 4 fixedly arranged above the bearing seat 1, the inside of the sliding cylinder 4 is hollow and communicates with the flow guide cavity 12; a sliding body 5 is slidably arranged in the sliding cylinder 4, the bottom of the sliding body 5 is provided with a screw rod 52, the top of the screw rod 52 is threadedly connected with the sliding body 5 through a threaded hole 54 in the middle of the bottom of the sliding body 5; the bottom of the screw rod 52 is fixedly connected with the motor shaft of a linear motor 51 in an axial direction; the linear motor 51 is electrically connected with the control device 7; and the top of the sliding body 5 is used for bearing the chip.

[0055] In some embodiments, the sliding body 5 is provided with suction holes 6; the sliding body 5 is provided with a flow guide channel 53 vertically therethrough, the top of the flow guide channel 53 is communicated with the suction holes 6 above the sliding body 5, and the bottom of the flow guide channel 53 is communicated with the flow guide cavity 12. When the chip to be detected is placed above the sliding body 5, the chip is adsorbed above the sliding body 5 by the suction of the suction fan 8, so as to keep the chip stable.

[0056] In some embodiments, the sliding body 5 is fixedly provided with a plurality of guide sliding rods 50, the guide sliding rods 50 are slidably connected with the lower bottom plate 11 through corresponding through holes of the lower bottom plate 11, and the sliding cylinder 4 is provided with a sliding sealing ring between both ends and the sliding body 5.

[0057] Working principle:

[0058] Before using the chip thickness detection device of the present application, calibration is performed:

[0059] The linear motor 51 is controlled to rotate, and the sliding body 5 moves from top to bottom until the object signal detected by the reflective photoelectric switch 3 disappears; the stroke M0 of the linear motor 51 at this time is recorded.

[0060] The chip to be detected is placed on the sliding body 5; the suction fan 8 is started to adsorb the chip above the sliding body 5; then the linear motor 51 is controlled to rotate, and the sliding body 5 moves from top to bottom until the object signal detected by the reflective photoelectric switch 3 disappears; the stroke M1 of the linear motor 51 at this time is recorded.

[0061] The thickness d of the chip is calculated as M1-M0, and the thickness value is displayed on the control device, or transmitted to the server background in a communication manner for further processing or control.

[0062] In the present application, since the chip thickness is detected, the precision is required to be relatively high, therefore, in the present application, the repeat positioning precision of the linear motor 51 selected is within ±1μm; in addition, the resolution of the reflective photoelectric switch selected is ≤0.1mm.

[0063] In some embodiments, in order to obtain higher detection precision, the reflective photoelectric switch is selected as a laser reflective sensor with higher precision.

[0064] The chip thickness detection device of the present application has simple structure, does not need a thickness gauge, and utilizes the high-precision linear motor 51 to cooperate with the high-resolution reflective photoelectric switch 3 or laser reflective sensor to complete the thickness detection of the chip; when the chip is placed on the sliding body 5, the suction fan 8 provides suction force to adsorb the chip above the sliding body 5, so as to reduce the influence of vibration on the chip thickness detection.

[0065] The above merely provides preferred embodiments of the present application, but is not intended to limit the present application. Based on the above teachings, one skilled in the art will be able to implement various alternatives and modifications without any inventive work. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall fall into the scope of protection of the present application.

[0066] Although the specific embodiments of the present application have been described in detail above with reference to the accompanying drawings, the present application is not limited to the above examples, and various modifications or changes can be made to the present application by those skilled in the art without departing from the spirit and scope of the present application.

Claims

1. A chip thickness detection device, characterized in that it comprises: a bearing seat (1), both sides of which are fixedly provided with side beams (2); a chip up-down moving device, which is arranged on the bearing seat (1) and is used for bearing the chip and controlling the chip up-down movement; a pair of light barriers (3), which are symmetrically arranged on the side beams (2) on both sides of the chip up-down moving device; and a control device (7), which is electrically connected with the light barriers (3) and the chip up-down moving device and is used for calculating the chip thickness according to the moving distance of the chip up-down moving device.

2. The chip thickness detection device according to claim 1, characterized in that the bearing seat (1) comprises an upper bottom plate (10) and a lower bottom plate (11), the left and right sides of the upper bottom plate (10) and the lower bottom plate (11) are fixedly connected with the side beams (2) respectively; side cover plates are fixedly arranged on the front and back of the upper bottom plate (10) and the lower bottom plate (11), the inside of the upper bottom plate (10), the lower bottom plate (11) and the side cover plates forms a flow guide cavity (12), a suction fan (8) is fixedly arranged on one side of the flow guide cavity (12); the suction fan (8) is electrically connected with the control device (7); and a plurality of support frames (9) are fixedly arranged below the lower bottom plate (11).

3. The chip thickness detection device according to claim 2, characterized in that the chip up-down moving device comprises a sliding cylinder (4) which is fixedly arranged above the bearing seat (1), the inside of the sliding cylinder (4) is hollow and communicates with the flow guide cavity (12); a sliding body (5) is slidably arranged in the sliding cylinder (4), the bottom of the sliding body (5) is provided with a screw rod (52), the top of the screw rod (52) is threadedly connected with the sliding body (5) through a threaded hole (54) in the middle of the bottom of the sliding body (5); the bottom of the screw rod (52) is fixedly connected with the motor shaft of a linear motor (51) in an axial direction; the linear motor (51) is electrically connected with the control device (7); and the top of the sliding body (5) is used for bearing the chip.

4. The chip thickness detection device according to claim 3, characterized in that a suction hole (6) is arranged above the sliding body (5); and a flow guide channel (53) is arranged in the sliding body (5) and penetrates the sliding body (5) from top to bottom, the top of the flow guide channel (53) communicates with the suction hole (6) above the sliding body (5), and the bottom of the flow guide channel (53) communicates with the flow guide cavity (12).

5. The chip thickness detection device according to claim 3 or 4, characterized in that a plurality of guide sliding rods (50) are fixedly arranged on the bottom of the sliding body (5), and the guide sliding rods (50) are slidably connected with the lower bottom plate (11) through corresponding through holes in the lower bottom plate (11).

6. The chip thickness detection device according to claim 5, characterized in that a sliding sealing ring is arranged between the two ends of the sliding cylinder (4) and the sliding body (5).

7. The chip thickness detection device according to claim 5, characterized in that the control device (7) is fixedly arranged on the side beam (2).

8. The chip thickness detection device according to claim 5, characterized in that the repeatability of the linear motor (51) is within ±1 μm. ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ 9. The chip thickness detection device of claim 5, wherein: the resolution of the light barrier is ≤ 0.1 mm.

10. The chip thickness detection device of claim 5, wherein: the light barrier is a laser light barrier.

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