Nonlinear test tool for MEMS capacitive accelerometer

Abstract

The utility model discloses a non-linear test tool for an MEMS capacitive accelerometer, relates to the technical field of accelerometer test, and aims to provide a non-linear test tool which is simple in structure, low in cost and capable of measuring triaxial acceleration of an accelerometer, and comprises a rotary table and a bearing piece, the bearing piece comprises a transverse bearing table and a longitudinal bearing table, the accelerometers can be installed on the transverse bearing table and the longitudinal bearing table, the surface normal of the surface, used for installing the accelerometers, of the longitudinal bearing table is in the same direction as the radial direction of the rotary table, when the rotary table rotates, the accelerometers can measure the centripetal acceleration at the moment, and the accelerometers are installed on the transverse bearing table and the longitudinal bearing table respectively. And the acceleration values of the accelerometer in three axial directions are measured respectively.

Description

TECHNICAL FIELD

[0001] The utility model relates to accelerometer test technical field more specifically, it relates to a kind of MEMS electric capacity accelerometer nonlinear test tool. BACKGROUND

[0002] General accelerometer nonlinear test method: the accelerometer to be measured is fixedly installed on index head or multi-axis rotary table, and the index head or multi-axis rotary table is kept zero input state, the linear model of the relationship between the input value and the output value of accelerometer is established by the rotation of rotary table corresponding to the rotation speed, the input acceleration value and the corresponding output value are processed by linear regression method;Find out the best straight line, and the calibration factor of accelerometer is obtained by using least square method;The deviation value of each output value of accelerometer and the best straight line is calculated respectively, and the maximum output value of accelerometer, so as to calculate the nonlinearity of each input accelerometer, and select the maximum nonlinearity as the nonlinearity of accelerometer scale factor.

[0003] But because multi-axis rotary table equipment purchase cost is high, single-axis index head can only rotate in one direction Test, so it cannot test the nonlinearity of multi-axis accelerometer. UTILITY MODEL CONTENT

[0004] In view of the problems in the prior art, the utility model provides a kind of MEMS electric capacity accelerometer nonlinear test tool to solve the technical problems mentioned in the background art.

[0005] To achieve the above object, the utility model provides the following technical scheme: a kind of MEMS electric capacity accelerometer nonlinear test tool, including rotary table and bearing piece, bearing piece includes horizontal bearing table and longitudinal bearing table, accelerometer can be installed on horizontal bearing table and longitudinal bearing table, and the face normal of the face for installing accelerometer on longitudinal bearing table is with the radial direction of rotary table same direction.

[0006] The utility model is further provided as, nonlinear test tool further includes receiving plate, receiving plate is installed on rotary table, and is used to install bearing piece.

[0007] The utility model is further provided as, bearing piece is detachably installed on receiving plate by screw.

[0008] The utility model is further provided as, horizontal bearing table and longitudinal bearing table are integrally formed, and horizontal bearing table and longitudinal bearing table are perpendicular to each other.

[0009] The utility model is further provided as, accelerometer is detachably installed on horizontal bearing table or longitudinal bearing table by screw.

[0010] The utility model further sets up, the horizontal bearing platform and longitudinal bearing platform all have a plurality of first threaded hole for screwing in, the accelerometer has a plurality of first through hole for screwing through.

[0011] The utility model further sets up, the receiving plate has a plurality of second threaded hole for screwing in, the horizontal bearing platform has a plurality of second through hole for screwing through.

[0012] The utility model further sets up, the bearing and receiving plate all set up as least two groups, all install on the rotary table.

[0013] Compared with the prior art, the utility model provides a kind of MEMS electric capacity accelerometer nonlinear testing tool, with following beneficial effects:

[0014] 1, when rotary table rotates, accelerometer can measure centripetal acceleration at this time, accelerometer is installed on horizontal bearing platform and longitudinal bearing platform respectively, to measure acceleration value of three axial directions of accelerometer respectively.

[0015] 2, the acceleration value of three directions of accelerometer can be measured by simple structure horizontal bearing platform and longitudinal bearing platform, and cost is saved.

[0016] 3, can be tested to multiple groups of accelerometer by increasing the group number of bearing and receiving plate. DRAWINGS

[0017] Figure 1 It is the overall structure schematic view of X axial test of accelerometer for nonlinear testing tool in the application;

[0018] Figure 2 It is the structure schematic view of bearing, accelerometer and receiving plate not connected state in the utility model;

[0019] Figure 3 It is the overall structure schematic view of Y axial test of accelerometer for nonlinear testing tool in the application;

[0020] Figure 4 It is the overall structure schematic view of Z axial test of accelerometer for nonlinear testing tool in the application.

[0021] In the drawing: 1, rotary table;2, bearing;201, horizontal bearing platform;202, longitudinal bearing platform;203, first threaded hole;204, second through hole;3, accelerometer;301, first through hole;4, receiving plate;401, second threaded hole. DETAILED DESCRIPTION

[0022] It should be noted that the embodiments and features in the embodiments of the present application can be combined with each other without conflict. The present application will be described in detail below with reference to the drawings and in combination with the embodiments.

[0023] It should be noted that, unless otherwise specified, all technical and scientific terms used in the present application have the same meaning as commonly understood by those skilled in the art to which the present application belongs.

[0024] In the present application, unless otherwise specified, the directions used such as "up, down" are generally with respect to the directions shown in the drawings, or with respect to the vertical, perpendicular or gravity directions; similarly, for the convenience of understanding and description, "left, right" are generally with respect to the left and right shown in the drawings; "inner, outer" refer to the inner and outer with respect to the contour of each component itself, but the above directional words are not used to limit the present application.

[0025] A kind of MEMS electric capacity accelerometer nonlinear test tool, including rotary table 1, bearing 2 and receiving plate 4, bearing 2 includes transverse bearing table 201 and longitudinal bearing table 202, accelerometer 3 can be installed on transverse bearing table 201 and longitudinal bearing table 202, and the face normal of the face for installing accelerometer 3 on longitudinal bearing table 202 is with the radial direction of rotary table 1, receiving plate 4 is installed on rotary table 1, and is used to install bearing 2, bearing 2 is detachably installed on receiving plate 4 by screw, transverse bearing table 201 and longitudinal bearing table 202 are integrally formed, and transverse bearing table 201 and longitudinal bearing table 202 are perpendicular to each other, accelerometer 3 is detachably installed on transverse bearing table 201 or longitudinal bearing table 202 by screw, transverse bearing table 201 and longitudinal bearing table 202 all have a plurality of first threaded holes 203 for screwing, accelerometer 3 has a plurality of first through holes 301 for screwing, receiving plate 4 has a plurality of second threaded holes 401 for screwing, transverse bearing table 201 has a plurality of second through holes 204 for screwing, bearing 2 and receiving plate 4 are all provided as at least two groups, and are all installed on rotary table 1.

[0026] In specific application, accelerometer 3 is divided into X axis, Y axis and Z axis measurement value, first, as shown in Figure 1 , accelerometer 3 is installed on longitudinal bearing table 202, the X axis direction of accelerometer 3 is consistent with the radial direction of rotary table 1, at this time, rotary table 1 is rotated by external motor drive, and accelerometer 3 can measure the centripetal acceleration at this time, i.e. X axis acceleration, second, as shown in Figure 3 , accelerometer 3 is installed on transverse bearing table 201, the Y axis direction of accelerometer 3 is consistent with the radial direction of rotary table 1, at this time, rotary table 1 is rotated by external motor drive, and accelerometer 3 can measure the centripetal acceleration at this time, i.e. Y axis acceleration, finally, as shown in Figure 4As shown, the accelerometer 3 is installed on the transverse bearing table 201 by rotating 90°, at this time, the Z-axis direction of the accelerometer 3 is consistent with the radial direction of the rotary table 1, and the rotary table 1 is driven to rotate by an external motor, so that the centripetal acceleration at this time, i.e., the Z-axis direction acceleration, can be measured.

[0027] In a specific application, by adjusting the different rotating speeds of the rotary table 1, the acceleration values under different rotating speeds are measured, the measured values are analyzed and processed by an external data processing device, and are compared with the calibration values, and then the measurement deviation of the accelerometer is calculated, and the quality of the accelerometer is judged.

[0028] In a specific application, the number of the bearing members 2 and the receiving plates 4 can be increased, so that multiple accelerometers 3 can be tested at the same time, and the testing efficiency is improved.

[0029] In all the above-mentioned schemes, the connection between two components can be selected according to the actual situation, such as welding, bolt and nut cooperation connection, bolt or screw connection or other known connection mode, which will not be described one by one, although the embodiments of the utility model have been shown and described, those skilled in the art can understand that the embodiments can be changed, modified, replaced and changed in many ways without departing from the principles and spirits of the utility model, the scope of the utility model is defined by the appended claims and their equivalents.

Claims

1. A MEMS capacitive accelerometer non-linearity test fixture, characterized by, The application relates to a turntable (1) and a bearing (2), the bearing (2) comprising a transverse bearing platform (201) and a longitudinal bearing platform (202), an accelerometer (3) being mounted on the transverse bearing platform (201) and the longitudinal bearing platform (202), and the normal line of the surface for mounting the accelerometer (3) on the longitudinal bearing platform (202) being in the same direction as the radial direction of the turntable (1).

2. The nonlinear test tool for a MEMS capacitive accelerometer according to claim 1, wherein, The application further comprises a receiving plate (4) mounted on the turntable (1) and used for mounting the bearing (2).

3. The nonlinear test tool for a MEMS capacitive accelerometer according to claim 2, wherein, The bearing (2) is detachably mounted on the receiving plate (4) through screws.

4. The nonlinearity test tool for a MEMS capacitive accelerometer of claim 1, wherein, The transverse bearing platform (201) and the longitudinal bearing platform (202) are integrally formed, and the transverse bearing platform (201) and the longitudinal bearing platform (202) are perpendicular to each other.

5. The nonlinearity test tool for a MEMS capacitive accelerometer of claim 1, wherein, The accelerometer (3) is detachably mounted on the transverse bearing platform (201) or the longitudinal bearing platform (202) through screws.

6. The nonlinearity test fixture for a MEMS capacitive accelerometer of claim 2, wherein, The bearing (2) and the receiving plate (4) are provided as at least two groups and are mounted on the turntable (1).

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