Photomask fixing device
By designing a photomask fixing device and using a slot to fix the photomask, the problems of shaking and damage to the photomask during the adhesive removal process were solved, achieving stable adhesive removal operation and improving the yield of the photomask.
Patent Information
- Application Number
- CN202520110680.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-16
- Publication Date
- 2026-01-02
- Estimated Expiration
- 2035-01-16
AI Technical Summary
During the photomask removal process, the photomask is prone to shaking and accidental contact with the chromium layer, resulting in damage. Furthermore, the rotation operation is unstable, affecting the yield of the photomask.
A photomask fixing device is designed, including a rotating table and a fixing box. There are support members at the four corners inside the fixing box, and the support members are provided with slots. The photomask is fixed in the fixing box through the slots. The rotating table drives the photomask to rotate smoothly to avoid shaking and accidental contact.
This effectively avoids shaking of the photomask and damage to the chromium layer during the adhesive removal process, improves operational stability, and ensures the yield of the photomask.
Smart Images
Figure CN223757020U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model belongs to the technical field of semiconductor manufacturing, specifically, relate to a mask fixing device. BACKGROUND
[0002] The mask is a core tool in integrated circuit manufacturing, which is used to transfer the designed circuit pattern to the wafer surface in the photoetch process. The mask is usually a high-precision quartz flat plate, and its manufacturing and preservation are very strict to ensure that a perfect pattern is formed on the silicon wafer surface after exposure and development. Moreover, with the development of semiconductor manufacturing technology, the size of semiconductor devices is becoming smaller and smaller, and accordingly, the critical dimension of the mask is also becoming smaller and smaller, which means that the cost of manufacturing the mask will be increasingly expensive, so the mask should be carefully protected. Therefore, a protective film is usually provided on the mask to prevent the mask from being contaminated. Specifically, the edges of the protective film can be adhered to the edges of the mask by solid adhesive to protect the effective pattern area on the mask.
[0003] However, when the protective film is subsequently removed, a certain amount of residual adhesive will inevitably remain on the edges of the mask, which will contaminate the mask, and therefore, the residual adhesive on the surface of the mask needs to be removed using a dispensing stick. However, during the adhesive removal process, the dispensing stick will stick to the mask, causing the mask to shake. In order to avoid this situation, a dust-free cloth needs to be used to press against the side edges of the mask during operation to fix it, but this operation may accidentally touch the metal chromium layer on the surface of the mask, causing damage to the mask. In addition, the mask needs to be rotated during operation, and the vibration caused by the rotating action may also cause damage to the mask. SUMMARY
[0004] In view of the above-mentioned shortcomings of the prior art, the utility model provides a mask fixing device, which comprises a rotating table and a fixing box. The fixing box is fixed to the surface of the rotating table and has a hollow rectangular frame structure. Support members are provided at the four corners of the inner side of the fixing box, and a clamping groove for fixing the mask is provided on each support member. The mask fixing device provided by the utility model is used to remove the adhesive from the mask. The mask is fixed in the fixing box through the clamping grooves, which can prevent the mask from shaking during the adhesive removal process. In addition, the contact area between the clamping grooves and the edges of the mask is small, which can prevent accidental contact with the metal chromium layer on the surface of the mask and avoid damage to the mask. Furthermore, during the adhesive removal process, the rotating table can drive the mask to rotate smoothly on the horizontal plane, improving the stability of the operation and ensuring the yield of the mask.
[0005] To achieve the above-mentioned purposes and other related purposes, the utility model provides a mask fixing device, which comprises a rotating table and a fixing box. The fixing box is fixed to the surface of the rotating table and has a hollow rectangular frame structure. Support members are provided at the four corners of the inner side of the fixing box, and a clamping groove for fixing the mask is provided on each support member. The mask fixing device provided by the utility model is used to remove the adhesive from the mask. The mask is fixed in the fixing box through the clamping grooves, which can prevent the mask from shaking during the adhesive removal process. In addition, the contact area between the clamping grooves and the edges of the mask is small, which can prevent accidental contact with the metal chromium layer on the surface of the mask and avoid damage to the mask. Furthermore, during the adhesive removal process, the rotating table can drive the mask to rotate smoothly on the horizontal plane, improving the stability of the operation and ensuring the yield of the mask.
[0006] The fixed box is a rectangular frame structure with hollow inside, and has support pieces at four corners of the inside, which are perpendicular to the surface of the rotating table; a clamping groove is arranged at the middle position of the support piece in the height direction of the support piece, and the opening of the clamping groove faces the inside of the fixed box, and the photomask is fixed in the fixed box through the plurality of clamping grooves.
[0007] Optionally, the clamping groove has a top surface, a side surface and a bottom surface connected in sequence, the top surface is parallel to the bottom surface, and the included angle between the side surface and the bottom surface is between 105° and 115°.
[0008] Optionally, the length of the clamping groove in the opening direction is between 6mm and 8mm.
[0009] Optionally, the height of the clamping groove is between 4mm and 6mm.
[0010] Optionally, the rotating table comprises a fixed disc and a rotating disc arranged coaxially, the rotating disc is located above the fixed disc, and the two are connected through a bearing.
[0011] Optionally, the fixed box comprises a carrier and a cover, the cover is located above the carrier and is connected with the carrier through a hinge piece.
[0012] Optionally, in the horizontal direction, the fixed box has opposite first and second outer sides, wherein the hinge piece is located on the first outer side, and the cover rotates about the hinge piece; the second outer side is provided with a buckle for fixing the carrier and the cover.
[0013] Optionally, the carrier is fixed on the surface of the rotating table through a fixing piece.
[0014] Optionally, the support piece comprises an upper support piece and a lower support piece, the upper support piece is located on the cover, and the lower support piece is located on the carrier.
[0015] Optionally, the bottom of the upper support piece has a first groove, the top of the lower support piece has a second groove, and the first groove and the second groove are oppositely arranged to form the clamping groove.
[0016] The photomask fixing device provided by the utility model has at least the following beneficial effects:
[0017] The photomask fixing device provided by the utility model is used for removing glue from the photomask, the photomask is fixed in the fixed box through the plurality of clamping grooves, and the photomask can be prevented from shaking during the glue removal process; in addition, the contact area between the clamping groove and the edge of the photomask is small, the metal chromium layer on the surface of the photomask can be prevented from being touched by mistake, and the photomask can be prevented from being damaged; furthermore, the rotating table can drive the photomask to rotate stably on the horizontal plane during the glue removal process, the stability of operation is improved, and the yield of the photomask is ensured. Attached Figure Description
[0018] Figure 1 The diagram shown is a structural schematic of the photomask fixing device provided in the embodiment.
[0019] Figure 2 The image shown is a top view of the photomask fixing device provided in the embodiment.
[0020] Figure 3 Displayed as Figure 1 A partial schematic diagram of circle A in the middle.
[0021] Component designation explanation
[0022] 1. Fixed plate
[0023] 101 First outer surface
[0024] 102 Second outer surface
[0025] 2. Rotating disk
[0026] 3. Carrier
[0027] 4. Cover
[0028] 5. Fasteners
[0029] 6. Hinges
[0030] 7. Buckle
[0031] 8 Support components
[0032] 80 card slots
[0033] 81 Upper support component
[0034] 82 Lower support component
[0035] 801 Card slot top surface
[0036] 802 Card slot side
[0037] 803 Card slot bottom surface Detailed Implementation
[0038] To make the technical objectives, technical solutions, and technical effects of this application clearer, the technical solutions in this application will be clearly and completely described below in conjunction with embodiments. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.
[0039] Therefore, the following detailed description of embodiments of the present application is not intended to limit the scope of the present application as claimed, but merely represent selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present application. In addition, the terms "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.
[0040] In the description of the present application, it should be noted that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.
[0041] In the description of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connection" should be understood broadly, for example, it can be fixed connection, or detachable connection. In addition, the description of the terms "one embodiment", "some embodiments", "illustrative embodiment", "example", "specific example" or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiments or examples are included in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the described specific features, structures, materials or characteristics can be combined in any one or more embodiments or examples in a suitable manner.
[0042] Embodiments
[0043] The present embodiment provides a mask fixing device, as shown in Figure 1 , comprising a rotating table and a fixing box, the fixing box is fixed on the surface of the rotating table, and the rotating table drives the fixing box to rotate in the horizontal plane.
[0044] As shown in Figure 1 , the rotating table comprises a fixed disc 1 and a rotating disc 2 arranged coaxially, the rotating disc 2 is located above the fixed disc 1, and the two are connected through a bearing (not shown in the figure). The fixed disc 1 is used to support the rotating disc 2, since the two are connected through a bearing, the rotating disc 2 can rotate relative to the fixed disc 1, thereby driving the fixing box located on its surface to rotate in the horizontal plane.
[0045] In combination with Figure 1 and Figure 2As shown, the fixing box includes a carrier 3 and a cover 4. The carrier 3 is fixed to the surface of the rotating disk 2 by a fixing member 5, and the cover 4 is located above the carrier 3 and is connected to the carrier 3 by a hinge member 6.
[0046] like Figure 2 As shown, in the horizontal direction ( Figure 2 In the Y-axis direction shown, the fixing box has a first outer side 101 and a second outer side 102, wherein the hinge 6 is located on the first outer side 101, and the cover 4 can rotate about the hinge 6 as an axis, thereby realizing the opening and closing of the fixing box; a buckle 7 is provided on the second outer side 102, as shown in the figure. Figure 1 As shown, when the fixing box is in the closed state, the buckle 7 is used to fix the carrier 3 and the cover 4 to ensure the stability of the photomask placed in the fixing box.
[0047] like Figure 1 As shown, when the fixed box is in the closed state, the fixed box is a hollow rectangular frame structure with support members 8 at its four inner corners. The support members 8 are arranged perpendicular to the surface of the rotary table. As an example, each corner of the fixed box is provided with two support members 8, which are located on two adjacent surfaces of the fixed box and are arranged perpendicular to the side wall of the fixed box.
[0048] like Figure 1 As shown, in the height direction of support member 8 ( Figure 1 On the Z-axis direction shown, a slot 80 is provided in the middle of the support member 8. The opening of the slot 80 faces the inside of the fixing box. When the photomask is de-adhesive, the photomask is fixed in the fixing box through multiple slots 80.
[0049] As an example, the size of the card slot 80 is designed to be sufficient to fix the photomask. In this embodiment, for example... Figure 3 As shown, the length L of the slot 80 along its opening direction is between 6mm and 8mm, preferably 7mm; the height H of the slot 80 is between 4mm and 6mm, preferably 5mm. In other optional embodiments, the size of the slot 80 can be designed according to the photomask that needs to be fixed, and is not limited here.
[0050] like Figure 3 As shown, the card slot 80 has a top surface 801, a side surface 802 and a bottom surface 803 connected in sequence. The top surface 801 and the bottom surface 803 are parallel. The angle formed by the side surface 802 and the bottom surface 803 is between 105° and 115°, preferably 110°. This arrangement can reduce the contact area between the side surface 802 of the card slot and the edge of the photomask, thereby avoiding contact with the chromium layer on the surface of the photomask and avoiding damage to the photomask.
[0051] like Figure 3As shown, the support 8 comprises an upper support 81 and a lower support 82, wherein the upper support 81 is located on the cover 4 and the lower support 82 is located on the carrier 3. As an example, the upper support 81 has a first groove at the bottom and the lower support 82 has a second groove at the top, and when the fixing box is in the closed state, the first groove and the second groove are oppositely arranged to jointly form the clamping groove 80.
[0052] As an example, the fixing box is made of a light-transmitting material to ensure that light can smoothly penetrate during the degumming process, so that the photomask is not blocked in the fixing box, providing a clear view for the operator, making the degumming operation more convenient and accurate. In this embodiment, the fixing box is made of a soluble Perfluoroalkoxy (PFA) material.
[0053] The use method of the photomask fixing device provided in the embodiment is as follows:
[0054] First, open the buckle 7 to rotate the cover 4 around the hinge 6 to open the fixing box; then, place the photomask on the lower support 82, specifically, in the second groove at the top of the lower support 82, so that the clamping groove side 802 is in contact with the edge of the photomask; finally, close the fixing box and fix the carrier 3 and the cover 4 through the buckle 7 to ensure that the photomask is fixed in the fixing box through the clamping groove 80, and the photomask can be degummed. In addition, during the degumming process, the photomask can be stably rotated on the horizontal plane by rotating the rotating disc 2.
[0055] The photomask fixing device provided in the embodiment comprises a rotating table and a fixing box, the fixing box is fixed on the surface of the rotating table, the fixing box is a hollow rectangular frame structure, and support pieces are arranged at the four corners of the inner side of the fixing box. The clamping grooves for fixing the photomask are arranged on the support pieces. The photomask is degummed by using the photomask fixing device provided in the embodiment, and the photomask is fixed in the fixing box through the clamping grooves, so that the photomask can be prevented from shaking during the degumming process. In addition, the contact area between the clamping groove and the edge of the photomask is small, so that the metal chromium layer on the surface of the photomask can be prevented from being touched by mistake, and the photomask can be prevented from being damaged. In addition, during the degumming process, the rotating table can stably rotate the photomask on the horizontal plane, the stability of the operation is improved, and the yield of the photomask is ensured.
[0056] The above embodiments only exemplarily illustrate the principle and effects of the photomask fixing device, and are not used to limit the photomask fixing device. Any person skilled in the art can modify or change the above embodiments without departing from the spirit and scope of the photomask fixing device. Therefore, all equivalent modifications or changes completed by those skilled in the art without departing from the spirit and technical thought disclosed by the photomask fixing device should be covered by the claims of the photomask fixing device.
Claims
1. A reticle fixture, comprising: The rotating table and the fixed box are included, the fixed box is fixed on the surface of the rotating table, and the rotating table drives the fixed box to rotate in the horizontal plane. The fixed box is a hollow rectangular frame structure, four corners of the inner side of the fixed box are provided with support pieces, and the support pieces are perpendicular to the surface of the rotating table; in the height direction of the support pieces, the middle positions of the support pieces are provided with clamping grooves, the clamping grooves are open towards the inner side of the fixed box, and the photomask is fixed in the fixed box through a plurality of clamping grooves.
2. The reticle fixture of claim 1, wherein, The clamping groove has a top surface, a side surface and a bottom surface connected in sequence, the top surface is parallel to the bottom surface, and the included angle between the side surface and the bottom surface is 105°-115°.
3. The reticle fixture of claim 1, wherein, The length of the clamping groove along the opening direction is 6mm-8mm.
4. The reticle fixture of claim 1, wherein, The height of the clamping groove is 4mm-6mm.
5. The reticle fixture of claim 1, wherein, The rotating table includes a fixed disc and a rotating disc coaxially arranged, the rotating disc is located above the fixed disc, and the two are connected through a bearing.
6. The reticle fixture of claim 1, wherein, The fixed box includes a carrier and a cover, the cover is located above the carrier and is connected with the carrier through a hinge piece.
7. The reticle fixture of claim 6, wherein, In the horizontal direction, the fixed box has opposite first and second outer sides, wherein the hinge piece is located on the first outer side and used to rotate the cover about the hinge piece; the second outer side is provided with a buckle for fixing the carrier and the cover.
8. The reticle fixture of claim 6, wherein, The carrier is fixed on the surface of the rotating table through a fixing piece.
9. The reticle fixture of claim 6, wherein, The support piece includes an upper support piece and a lower support piece, the upper support piece is located on the cover, and the lower support piece is located on the carrier.
10. The reticle fixture of claim 9, wherein, The bottom of the upper support piece is provided with a first recess, the top of the lower support piece is provided with a second recess, and the first recess and the second recess are oppositely arranged to form the clamping groove.