Sample table and electron microscope testing device

Abstract

The utility model provides a sample table and an electron microscope testing device, and relates to the technical field of testing tools, the sample table comprises a base used for being connected with a base table, at least one supporting stand column is arranged on the base, a sample clamp is arranged on the supporting stand column in an inserted mode, and the sample clamp is used for clamping at least one sample. The sample clamp comprises a sample plate inserted into the supporting stand column and a clamping plate rotationally connected with the sample plate, and the sample is clamped between the clamping plate and the sample plate. The sample clamp clamping a sample is inserted into the supporting stand column, the sample clamp is pulled out from the supporting stand column after testing is completed, another sample clamp with a sample is replaced and inserted into the supporting stand column for testing, the process is repeated, different sample clamps are replaced in an inserting mode to test different samples, operation is easy and convenient, and the testing efficiency is improved. The problem of repeated cleaning of the sample table in the prior art is avoided, and the cost and test time are saved; the stability of a sample during testing can be improved, and the imaging quality and the testing precision of a picture are improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of test tooling, in particular to a sample table and an electron microscope testing device. BACKGROUND

[0002] A scanning electron microscope is composed of an electron optical system, a vacuum system, a signal testing and amplification system, an image display and recording system, a sample chamber and a sample table, and a computer control system, and is a means for observing the microcosmic morphology of a substance between an optical microscope and a transmission electron microscope. The scanning electron microscope uses an electron gun to emit a high-energy controllable electron beam to bombard the surface of a sample. The electrons interact with the atoms on the surface of the sample to generate various signals containing information about the morphology and composition of the sample. A secondary electron tester, a backscattered electron tester, and an energy spectrometer (EDS or EDXRF) collect the signals, amplify and convert them, and then form an image, so as to characterize the microcosmic morphology of the target sample. The scanning electron microscope has a wide range of applications, especially in the field of material research, and is used for observing the surface morphology of various materials, studying the interface state, researching the damage mechanism of materials, and predicting the performance of materials.

[0003] Among them, the sample table is an important part of the scanning electron microscope, and a suitable sample table is needed for the scanning electron microscope to test the sample. Most of the existing sample tables use conductive glue to fix the sample, so that the sample is not easy to replace; and before replacing the sample, the sample table also needs to be cleaned, which causes the problems of frequent cleaning of the sample table, difficulty in cleaning the sample table, and contamination of the sample table. Moreover, there is no corresponding sample table on the market for use in the rapid and high-throughput cross-sectional morphology observation of the laminated perovskite solar cell component which is a thin sheet, has poor conductivity, is sensitive to electrons, and has unstable sample properties. CONTENT OF THE INVENTION

[0004] The purpose of the embodiments of the present application is to provide a sample table and an electron microscope testing device, which can meet the testing of high-throughput thin sheet samples and have high testing efficiency and testing accuracy.

[0005] In one aspect of the embodiments of the present application, a sample table is provided, which comprises a base for connecting with a base table, at least one supporting column is arranged on the base, a sample clamp is inserted and connected on the supporting column, the sample clamp is used for clamping at least one sample, the sample clamp comprises a sample plate inserted and connected with the supporting column, and a clamping plate rotationally connected with the sample plate, the clamping plate is a curved plate, and the sample is clamped between the clamping plate and the sample plate.

[0006] Optionally, the clamping plate is convex to the sample plate, and the clamping plate is hingedly arranged with the sample plate through a fixed shaft, two ends of the fixed shaft are respectively a handle end and a clamping end, and the clamping plate is rotated along the fixed shaft by operating the handle end, so that the clamping end is close to or away from the sample plate.

[0007] Optionally, an included angle between the clamping plate and the sample plate is 0-45°.

[0008] Optionally, a first positioning part is arranged on the sample plate, a second positioning part is arranged on the support column, and the first positioning part is matched with the second positioning part, so that the sample plate is inserted on the support column.

[0009] Optionally, the first positioning part includes a protrusion, the second positioning part includes a groove, and a bent fixed plate is arranged on the support column, and the groove is formed at the bent part of the fixed plate.

[0010] Optionally, a clamping groove is arranged on the base, a clamping seat matched with the clamping groove is arranged on the support column, and the support column is clamped in the base by matching the clamping groove with the clamping seat.

[0011] Optionally, a fixing column is arranged on the opposite side of the base to the clamping groove, and the fixing column is used for inserting and fixing with the base.

[0012] Optionally, a positioning table is arranged on the opposite side of the base to the clamping groove, and the positioning table is positioned and connected with the base, so as to position the relative position of the base and the tester.

[0013] In another aspect of the embodiments of the present application, an electron microscope testing device is provided, which comprises a sample bin, and a base and the above-mentioned sample table arranged in the sample bin respectively.

[0014] Optionally, an electron gun is further included, and the electron gun is sequentially arranged with a condenser coil, an acceleration coil, a stigmator coil, a scanning coil and an objective lens coil between the electron gun and the sample, so that the electrons emitted by the electron gun pass through the condenser coil, the acceleration coil, the stigmator coil, the scanning coil and the objective lens coil in sequence, and then reach the sample.

[0015] The sample stage and electron microscope testing device provided by the embodiment of the application inserts the sample clamp clamping the sample into the support column, draws out the sample clamp from the support column after the test is completed, inserts another sample clamp with a sample into the support column for testing, and thus circulates and reciprocates, different sample clamps are replaced in a plug-in manner to test different samples, the operation is simple and convenient, the test efficiency is improved, the problem of repeated cleaning of the sample stage in the prior art is avoided, cost is saved, and test time is saved; the electron microscope supporting sample stage and the existing sample stage in the market cannot meet the test needs of large-flux flaky samples, especially the cross-sectional morphology of the crystalline silicon and perovskite laminated solar cell samples; the problem of low efficiency in large-flux sample testing is solved; through the clamping of the sample, the stability of the sample during testing is improved, the imaging quality of the photo is improved, and the test accuracy is improved. BRIEF DESCRIPTION OF DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the application, the following will briefly introduce the drawings needed to be used in the embodiments of the application. It should be understood that the following drawings only show some of the embodiments of the application, and therefore should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can also be obtained without creative labor on the basis of these drawings.

[0017] Figure 1 is a schematic diagram of the sample stage sample clamp structure provided by the embodiment of the application;

[0018] Figure 2 is a schematic diagram of the sample stage support column structure provided by the embodiment of the application;

[0019] Figure 3 is a schematic diagram of the sample stage base structure provided by the embodiment of the application.

[0020] Figure: 10-Base; 101-Fixed column; 102-Positioning table; 103-Slot; 11-Support column; 110-Support plate; 111-Cartridge; 112-Groove; 113-Fixed plate; 12-Sample clamp; 120-Sample plate; 121-Clamp plate; 121a-Handle end; 121b-Clamping end; 122-Fixed shaft; 123-Protrusion; 13-Screw; θ-Angle. DETAILED DESCRIPTION

[0021] The technical solutions in the embodiments of the application will be described clearly and completely below with reference to the drawings in the embodiments of the application.

[0022] In the description of the present application, it should be noted that the terms "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship commonly used when the product of the present application is used, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second" and the like are only used to distinguish the description and cannot be understood as indicating or implying relative importance.

[0023] It should also be noted that unless otherwise explicitly specified and limited, the terms "provided", "connected" should be broadly understood, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be directly connected, or indirectly connected through an intermediate medium, or it can be connected inside two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0024] The embodiments of the present application provide a sample stage which can be applied to a sample in the form of a sheet, especially a cross-sectional morphology test of a sample of a crystalline silicon and perovskite laminated solar cell. Please refer to Figure 1 、 Figure 2 and Figure 3 which comprises a base 10 for connecting with a base table, at least one support column 11 is provided on the base 10, a sample holder 12 is inserted and connected on the support column 11, and the sample holder 12 is used to hold at least one sample.

[0025] The base 10 is connected with the base table, the support column 11 is provided on the base 10, the sample holder 12 is inserted on the support column 11, and the sample holder 12 holds the sample for testing.

[0026] Among them, the number of support columns 11 on the base 10 is at least one, and there can be multiple, one support column 11 corresponds to the insertion of one sample holder 12, and one sample holder 12 can hold at least one sample according to the size of the sample. In this way, one sample stage can test at least one sample or multiple samples, so as to improve the test efficiency.

[0027] In addition, the sample holder 12 is inserted and connected with the support column 11. During testing, the sample holder 12 holding the sample is inserted into the support column 11, and after the test is completed, the sample holder 12 is pulled out of the support column 11, another sample holder 12 with a sample is inserted into the support column 11 for testing, and the cycle is repeated in this way. Different sample holders 12 are replaced to test different samples through the insertion method, which is simple and convenient to operate, improves the test efficiency, and also avoids the problem of repeatedly cleaning the sample stage in the prior art.

[0028] The sample stage provided by the embodiment of the application solves the problem that the existing sample stage in the market cannot meet the testing needs of large-flux flaky samples, especially the cross-sectional morphology of the samples of crystalline silicon and perovskite laminated solar cells, and solves the problem of low efficiency in large-flux sample testing. The sample is clamped to increase the stability of the sample during testing and improve the imaging quality of the photos. The conductive adhesive is not used or used less, the cost is saved, the step of cleaning the sample stage is saved, and the testing time is saved.

[0029] Specifically, in some embodiments, as shown in Figure 3 The sample clamp 12 includes a sample plate 120 inserted with the support column 11, and a clamping plate 121 hingedly arranged with the sample plate 120 through a fixing shaft 122. The clamping plate 121 is curved, and the curved surface is convex to the sample plate 120. The clamping plate 121 is provided with a handle end 121a and a clamping end 121b at two ends of the fixing shaft 122, respectively. By operating the handle end 121a, the clamping plate 121 rotates along the fixing shaft 122, so that the clamping end 121b approaches or moves away from the sample plate 120.

[0030] The sample plate 120 is a flat plate structure, and the fixing shaft 122 is arranged on the sample plate 120. The clamping plate 121 is fixed on the fixing shaft 122 through a hinge and a screw 13. The clamping plate 121 is a curved plate and is convex to the sample plate 120. In this way, the clamping plate 121 is provided with a handle end 121a and a clamping end 121b at two ends of the fixing shaft 122, respectively. The handle end 121a is used for operation, and the clamping end 121b is used for clamping the sample. By operating the handle end 121a, the clamping plate 121 rotates along the fixing shaft 122, so that the clamping end 121b approaches the sample plate 120 to clamp the sample, or moves away from the sample plate 120 to form a gap between the sample plate 120 and the clamping plate 121. In this way, the clamped sample can be removed after testing.

[0031] The included angle θ between the sample clamp 12 and the sample plate 120 is 0-45°. That is, the limit angle of the clamping plate 121 moving away from the sample plate 120 by operating the handle end 121a is 45°. Such an included angle θ meets the needs of the sample clamp 12 to stably clamp the sample, and does not damage the clamping ability of the sample clamp 12 due to an excessively large included angle θ.

[0032] A first positioning part is further arranged on the sample plate 120, and a second positioning part is arranged on the support column 11. The first positioning part and the second positioning part are matched to insert the sample plate 120 on the support column 11.

[0033] For example, as shown in Figure 1 and Figure 2As shown, the first positioning part is a protrusion 123, and the second positioning part is a groove 112. The sample plate 120 is inserted into the support column 11, and the protrusion 123 of the sample plate 120 is matched with the groove 112 of the support column 11, thereby completing the insertion of the sample plate 120 and the support column 11. The insertion mode facilitates the replacement of different sample clamps 12, and the efficiency of different sample tests is high.

[0034] In the present application, the support column 11 is provided with a bent fixing plate 113, the fixing plate 113 is connected and fixed with the support plate 110 of the support column 11 through a screw 13, and the groove 112 is formed at the bent part of the fixing plate 113. For example, one end of the fixing plate 113 is fixed with the support column 11, and the other end is bent. After the bending, the groove 112 is formed on the fixing plate 113, and the slot of the groove 112 faces the support column 11.

[0035] When the sample clamp 12 is inserted into the groove 112 of the support column 11 through the protrusion 123, the two are clamped together. The clamping plate 121 is a curved plate, so that the clamping plate 121 is partially in contact with the sample plate 120, and the sample plate 120 is fixed. The clamping plate 121 is fixed on the fixing shaft 122 through a hinge, and the clamping plate 121 can rotate along the fixing shaft 122. Here, the clamping plate 121 and the fixing shaft 122 are rotatably connected, so that when the sample clamp 12 is held on the sample clamp 12, the sample clamp 12 is in an open state. A downward force is applied to the handle end 121a of the clamping plate 121, and a gap is formed between the clamping end 121b on the upper part of the clamping plate 121 and the sample plate 120, so as to put in a sample, such as Figure 1 For example, the angle θ between the clamping plate 121 and the sample plate 120 is 0-45°.

[0036] The sample clamp 12 exists independently and can be replaced at any time, that is, a plurality of sample clamps 12 can be made according to needs, and a plurality of sample clamps 12 are used according to the number of samples to be measured.

[0037] Further, the support column 11 is clamped and matched with the base 10, as shown in Figure 3 As shown, the base 10 is provided with a clamping groove 103, and the support column 11 is provided with a clamping seat 111 matched with the clamping groove 103. The support column 11 is clamped in the base 10 through the matching of the clamping groove 103 and the clamping seat 111. The clamping seat 111 is moved along the clamping groove 103 to realize the clamping of the support column 11 and the base 10.

[0038] The number and shape of the clamping seat 111 and the clamping groove 103 correspond to each other, and the shape of the clamping groove 103 can be used to well fix the support column 11. The fixing plate 113 can be symmetrically arranged on both sides of the support column 11, so that two sample clamps 12 can be inserted at the same time.

[0039] For example, the card slot 103 and the card seat 111 of the application are dovetail-shaped, and the dovetail-shaped card slot 103 and the card seat 111 can realize stable clamping, avoiding the support column 11 from moving randomly in the base 10 and affecting the test accuracy. Of course, the cross-sectional shape of the card slot 103 and the card seat 111 can also be an equilateral hexagon, a rectangle, a trapezoid, and other shapes that prevent the support column 11 from moving.

[0040] As mentioned earlier, the base 10 is provided with at least one support column 11, and the base 10 is provided with three card slots 103, which can clamp three support columns 11.

[0041] In addition, the base 10 can also be provided with a screw 13 (not shown in the figure), which is used to fix the support column 11 after the support column 11 is clamped into the card slot 103, and can also be used to fix other components on the base 10.

[0042] The opposite side of the base 10 provided with the card slot 103 is also provided with a fixed column 101, which is used to realize plug-in fixing with the base. When the fixed column 101 is plugged with the base, the base 10 is fixed on the base. The fixed column 101 also plays a conductive role, enabling the base to conduct electricity between the sample. Through the setting of the fixed column 101, the conductivity of the sample with poor conductivity can be improved, and the imaging quality and resolution of the photo can be improved.

[0043] The opposite side of the base 10 provided with the card slot 103 is also provided with a positioning table 102, which is connected with the base to position the relative position of the base 10 and the tester. The tester is used to test the sample, ensuring that the relative direction of the base 10 and the detector in the display field is consistent during each test.

[0044] In summary, the sample table provided by the application embodiment is used to first fix the sample on the upper part of the sample clamp 12, and directly use the clamping plate 121 to hold and fix the sample clamp 12 on the sample clamp 12. At this time, the number of sample clamps 12 can be multiple, arranged according to the area of the sample. One sample clamp 12 can hold at least one sample. A large-area sample can be placed on only one sample clamp 12, and a small-area sample can be placed on multiple sample clamps 12. Multiple sample clamps 12 hold multiple samples, and the sample clamp 12 with the sample is vertically inserted into the support column 11. At this time, the protrusion 123 at the lower part of the sample clamp 12 is clamped and fixed with the groove 112 of the support column 11, and the test of the sample can be performed.

[0045] When the sample on one sample clamp 12 is tested, the sample clamp 12 can be quickly pulled out, and another sample clamp 12 with a sample can be replaced. The test is cycled in turn, improving the test efficiency and avoiding repeated cleaning of the sample table.

[0046] In addition, to avoid the magnetic properties of the sample stage and the metal in the test system and the magnetic properties generated by magnetizing the metal in the subsequent test from interfering with the electrons emitted by the electron gun and affecting the imaging quality, the materials of the remaining parts of the sample stage, except the fixed shaft 122, hinges and the screw 13, in the sample holder 12, the support column 11 and the base 10, can be aluminum.

[0047] In another aspect, the embodiments of the present application also disclose an electron microscope test device, which comprises a sample bin, a sample stage according to any one of the above embodiments, a base and a detector arranged in the sample bin respectively, and an electron gun arranged outside the sample bin and in communication with the sample bin, the muzzle of the electron gun facing the sample on the sample stage, the electron gun emitting electrons towards the sample, the sample emitting secondary electrons, and the detector collecting the secondary electrons for testing.

[0048] The electron gun is located outside the sample bin, the muzzle of the electron gun extends into the sample bin, so that the electron gun emits electrons to interact with the atoms of the sample in the sample bin, the sample emits secondary electrons, the secondary electrons are collected by the detector in the sample bin, and the collected signals are amplified and converted to form an image, so as to achieve the purpose of testing the sample.

[0049] In order to make the electrons emitted by the electron gun better interact with the atoms of the sample, the electron gun and the sample are sequentially provided with a condenser coil, an acceleration coil, a stigmator coil, a scanning coil and an objective lens coil, so that the electrons emitted by the electron gun sequentially pass through the condenser coil, the acceleration coil, the stigmator coil, the scanning coil and the objective lens coil, and then reach the surface of the sample.

[0050] The coils are located outside the sample bin, and different coils have different functions, for example, the electrons passing through the condenser coil can be better focused by the electron gun, so as to be emitted to the sample with the maximum density. For another example, the propagation speed of the electrons passing through the acceleration coil is accelerated, so as to improve the test speed. The functions of other coils are not described here, and different coils with different functions can be added according to different needs.

[0051] The electron microscope test device comprises the same structure and beneficial effects as the sample stage in the foregoing embodiments. The structure and beneficial effects of the sample stage have been described in detail in the foregoing embodiments, and will not be described here.

[0052] The above are only embodiments of the present application and are not used to limit the protection scope of the present application. For those skilled in the art, the present application can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A sample stage, characterized by, The utility model relates to a base for connecting with base station, at least one support column is arranged on the base, a sample clamp is inserted and connected on the support column, the sample clamp is used for clamping at least one sample, the sample clamp includes a sample plate inserted and connected with the support column, and a clamp plate rotationally connected with the sample plate, and the sample is clamped between the clamp plate and the sample plate. The clamp plate is a curved plate, the clamp plate is convex to the sample plate, the clamp plate is hingedly arranged with the sample plate through a fixed shaft, the clamp plate is respectively a handle end and a clamping end along two ends of the fixed shaft, by operating the handle end, the clamp plate rotates along the fixed shaft to make the clamping end close to or away from the sample plate.

2. The sample stage of claim 1, wherein, The angle between the clamp plate and the sample plate is 0-45 degrees.

3. The sample stage of claim 1, wherein, The sample plate is provided with a first positioning part, the support column is provided with a second positioning part, the first positioning part matches with the second positioning part to make the sample plate inserted on the support column.

4. Stage according to claim 2 or 3, characterized in that The first positioning part includes a protrusion, the second positioning part includes a groove, the support column is provided with a bent fixed plate, and the groove is formed at the bent part of the fixed plate.

5. The sample stage of claim 4, wherein, The base is provided with a clamping groove, the support column is provided with a clamping seat matched with the clamping groove, and the support column is clamped in the base through the cooperation of the clamping groove and the clamping seat.

6. The sample stage of claim 1, wherein, The opposite side of the base provided with the clamping groove is further provided with a fixing column, and the fixing column is used for inserting and fixing with the base station.

7. The sample stage of claim 6, wherein, The opposite side of the base provided with the clamping groove is further provided with a positioning table, and the positioning table is positioned and connected with the base station to position the relative position of the base and the tester.

8. Stage according to claim 6 or 7, characterized in that The utility model relates to a sample bin, and a base station and a sample station are arranged in the sample bin.

9. An electron microscope testing device, characterized by, Further comprising an electron gun, the electron gun and sample are at least sequentially provided with a condenser coil, an acceleration coil, an image erasing coil, a scanning coil and an objective lens coil, so that the electron emitted by the electron gun sequentially passes through the condenser coil, the acceleration coil, the image erasing coil, the scanning coil and the objective lens coil, and then reaches the sample.

10. The electron microscope testing device of claim 9, wherein, ​

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